DE69028274D1 - Automatische mit hoher Geschwindigkeit arbeitende optische Prüfungsvorrichtung - Google Patents

Automatische mit hoher Geschwindigkeit arbeitende optische Prüfungsvorrichtung

Info

Publication number
DE69028274D1
DE69028274D1 DE69028274T DE69028274T DE69028274D1 DE 69028274 D1 DE69028274 D1 DE 69028274D1 DE 69028274 T DE69028274 T DE 69028274T DE 69028274 T DE69028274 T DE 69028274T DE 69028274 D1 DE69028274 D1 DE 69028274D1
Authority
DE
Germany
Prior art keywords
high speed
inspection device
optical inspection
speed optical
automatic high
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69028274T
Other languages
English (en)
Other versions
DE69028274T2 (de
Inventor
Curt H Chadwick
Robert H Sholes
John D Greene
Francis D Tucker Iii
Michael E Fein
P C Jann
David J Harvey
William Bell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KLA Corp
Original Assignee
KLA Instruments Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KLA Instruments Corp filed Critical KLA Instruments Corp
Application granted granted Critical
Publication of DE69028274D1 publication Critical patent/DE69028274D1/de
Publication of DE69028274T2 publication Critical patent/DE69028274T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/309—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of printed or hybrid circuits or circuit substrates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/311—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of integrated circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G01N2021/8905—Directional selective optics, e.g. slits, spatial filters
    • G01N2021/8907—Cylindrical optics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G01N2021/8908—Strip illuminator, e.g. light tube
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
    • G01N2021/95615—Inspecting patterns on the surface of objects using a comparative method with stored comparision signal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N2021/95638—Inspecting patterns on the surface of objects for PCB's
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06126—Large diffuse sources
DE69028274T 1989-10-31 1990-10-31 Automatische mit hoher Geschwindigkeit arbeitende optische Prüfungsvorrichtung Expired - Fee Related DE69028274T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/429,859 US5131755A (en) 1988-02-19 1989-10-31 Automatic high speed optical inspection system

Publications (2)

Publication Number Publication Date
DE69028274D1 true DE69028274D1 (de) 1996-10-02
DE69028274T2 DE69028274T2 (de) 1997-04-17

Family

ID=23705015

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69028274T Expired - Fee Related DE69028274T2 (de) 1989-10-31 1990-10-31 Automatische mit hoher Geschwindigkeit arbeitende optische Prüfungsvorrichtung

Country Status (5)

Country Link
US (1) US5131755A (de)
EP (1) EP0426166B1 (de)
JP (1) JPH03160348A (de)
DE (1) DE69028274T2 (de)
IL (1) IL96010A (de)

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US5774222A (en) * 1994-10-07 1998-06-30 Hitachi, Ltd. Manufacturing method of semiconductor substrative and method and apparatus for inspecting defects of patterns on an object to be inspected
JP3570815B2 (ja) * 1996-04-26 2004-09-29 松下電器産業株式会社 部品実装機用画像撮像装置
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US6324298B1 (en) 1998-07-15 2001-11-27 August Technology Corp. Automated wafer defect inspection system and a process of performing such inspection
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US6616332B1 (en) 1999-11-18 2003-09-09 Sensarray Corporation Optical techniques for measuring parameters such as temperature across a surface
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JP2001343336A (ja) * 2000-05-31 2001-12-14 Nidek Co Ltd 欠陥検査方法及び欠陥検査装置
US6760471B1 (en) * 2000-06-23 2004-07-06 Teradyne, Inc. Compensation system and related techniques for use in a printed circuit board inspection system
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DE60229740D1 (de) 2001-05-15 2008-12-18 Ebara Corp Kontakthülse und durchkoppelgerät
US7009163B2 (en) * 2001-06-22 2006-03-07 Orbotech Ltd. High-sensitivity optical scanning using memory integration
JP2003016463A (ja) * 2001-07-05 2003-01-17 Toshiba Corp 図形の輪郭の抽出方法、パターン検査方法、パターン検査装置、プログラムおよびこれを格納したコンピュータ読み取り可能な記録媒体
GB2384852A (en) * 2001-09-03 2003-08-06 Millennium Venture Holdings Lt Workpiece inspection apparatus
DE10146583A1 (de) * 2001-09-21 2003-04-17 Siemens Ag Vorrichtung und Verfahren zum optischen Abtasten einer Substratscheibe
US6834855B2 (en) * 2001-10-09 2004-12-28 Edward J. Mancuso Dice scanner
US7126681B1 (en) * 2002-04-23 2006-10-24 Kla-Tencor Technologies Corporation Closed region defect detection system
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KR100598096B1 (ko) * 2003-12-01 2006-07-07 삼성전자주식회사 패턴 검사 장치 및 검사 방법
DE102005031647A1 (de) 2005-07-06 2007-01-11 Chromasens Gmbh Beleuchtungsvorrichtung zur Dunkelfeldbeleuchtung für eine optische Testvorrichtung und Verfahren zum optischen Abtasten eines Objektes
EP1744147B1 (de) 2005-07-13 2009-12-09 Audi Ag Verfahren und Vorrichtung zur optischen Prüfung von Carbon-Keramik-Brems- und Kupplungskomponenten
US9121843B2 (en) 2007-05-08 2015-09-01 Trustees Of Boston University Chemical functionalization of solid-state nanopores and nanopore arrays and applications thereof
US20090153814A1 (en) * 2007-12-12 2009-06-18 Langrel Charles B Self-cleaning scan head assembly
EP2403396B1 (de) * 2009-03-04 2019-08-14 Elie Meimoun Vorrichtung und verfahren zur überprüfung von wellenfrontanalysen
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US20110090489A1 (en) * 2009-10-21 2011-04-21 Robert Bishop Method and Apparatus for Detecting Small Reflectivity Variations in Electronic Parts at High Speed
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Also Published As

Publication number Publication date
EP0426166B1 (de) 1996-08-28
IL96010A0 (en) 1991-07-18
EP0426166A2 (de) 1991-05-08
EP0426166A3 (en) 1992-01-08
DE69028274T2 (de) 1997-04-17
US5131755A (en) 1992-07-21
JPH03160348A (ja) 1991-07-10
IL96010A (en) 1993-06-10

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8339 Ceased/non-payment of the annual fee