DE69004597T2 - Beschleunigungsmesser mit Pulsantrieb. - Google Patents

Beschleunigungsmesser mit Pulsantrieb.

Info

Publication number
DE69004597T2
DE69004597T2 DE90630049T DE69004597T DE69004597T2 DE 69004597 T2 DE69004597 T2 DE 69004597T2 DE 90630049 T DE90630049 T DE 90630049T DE 69004597 T DE69004597 T DE 69004597T DE 69004597 T2 DE69004597 T2 DE 69004597T2
Authority
DE
Germany
Prior art keywords
accelerometer
pulse drive
pulse
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE90630049T
Other languages
English (en)
Other versions
DE69004597D1 (de
Inventor
Gregory J Mcbrien
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Breed Automotive Technology Inc
Original Assignee
United Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Technologies Corp filed Critical United Technologies Corp
Publication of DE69004597D1 publication Critical patent/DE69004597D1/de
Application granted granted Critical
Publication of DE69004597T2 publication Critical patent/DE69004597T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
DE90630049T 1989-02-28 1990-02-22 Beschleunigungsmesser mit Pulsantrieb. Expired - Fee Related DE69004597T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/317,217 US4987779A (en) 1989-02-28 1989-02-28 Pulse-driven accelerometer arrangement

Publications (2)

Publication Number Publication Date
DE69004597D1 DE69004597D1 (de) 1993-12-23
DE69004597T2 true DE69004597T2 (de) 1994-03-10

Family

ID=23232646

Family Applications (1)

Application Number Title Priority Date Filing Date
DE90630049T Expired - Fee Related DE69004597T2 (de) 1989-02-28 1990-02-22 Beschleunigungsmesser mit Pulsantrieb.

Country Status (6)

Country Link
US (1) US4987779A (de)
EP (1) EP0385917B1 (de)
JP (1) JP2851673B2 (de)
CA (1) CA2010987C (de)
DE (1) DE69004597T2 (de)
IL (1) IL93542A0 (de)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0672899B2 (ja) * 1988-04-01 1994-09-14 株式会社日立製作所 加速度センサ
US5142921A (en) * 1990-10-29 1992-09-01 Litton Systems, Inc. Force balance instrument with electrostatic charge control
US5205171A (en) * 1991-01-11 1993-04-27 Northrop Corporation Miniature silicon accelerometer and method
EP0537347B1 (de) * 1991-03-30 1997-01-22 OKADA, Kazuhiro Beschleunigungssensor mit Selbsttest
JP3151956B2 (ja) * 1992-09-04 2001-04-03 株式会社村田製作所 加速度センサ
US5576483A (en) * 1993-10-01 1996-11-19 Hysitron Incorporated Capacitive transducer with electrostatic actuation
US5473946A (en) * 1994-09-09 1995-12-12 Litton Systems, Inc. Accelerometer using pulse-on-demand control
US5511420A (en) * 1994-12-01 1996-04-30 Analog Devices, Inc. Electric field attraction minimization circuit
US5535626A (en) * 1994-12-21 1996-07-16 Breed Technologies, Inc. Sensor having direct-mounted sensing element
US5659195A (en) * 1995-06-08 1997-08-19 The Regents Of The University Of California CMOS integrated microsensor with a precision measurement circuit
JP3435979B2 (ja) * 1996-04-26 2003-08-11 株式会社デンソー 物理量検出装置
US5939633A (en) * 1997-06-18 1999-08-17 Analog Devices, Inc. Apparatus and method for multi-axis capacitive sensing
DE19929767C2 (de) * 1999-06-29 2002-06-13 Litef Gmbh Beschleunigungsmeßeinrichtung
US6360602B1 (en) * 1999-07-29 2002-03-26 Litton Systems, Inc. Method and apparatus reducing output noise in a digitally rebalanced accelerometer
US6865946B2 (en) * 2003-01-16 2005-03-15 The Boeing Company Flexure plate dual capacitance accelerometer
US6901801B2 (en) * 2003-07-28 2005-06-07 The Boeing Company Capacitance acceleration derivative detector
US7124634B2 (en) * 2003-07-29 2006-10-24 The Boeing Company Single plate capacitive acceleration derivative detector
EP1779121A1 (de) * 2004-08-17 2007-05-02 Analog Devices, Inc. Mehrfachachsenbeschleunigungssensor
US7310577B2 (en) * 2004-09-29 2007-12-18 The Boeing Company Integrated capacitive bridge and integrated flexure functions inertial measurement unit
US7360425B2 (en) * 2004-11-22 2008-04-22 The Boeing Company Compensated composite structure
US7228739B2 (en) 2004-11-23 2007-06-12 The Boeing Company Precision flexure plate
US7331229B2 (en) * 2004-12-09 2008-02-19 The Boeing Company Magnetic null accelerometer
US7137208B2 (en) * 2004-12-14 2006-11-21 The Boeing Company Leveling device
US7296470B2 (en) * 2005-04-14 2007-11-20 The Boeing Company Extended accuracy flexured plate dual capacitance accelerometer
US7368923B2 (en) * 2005-12-22 2008-05-06 Honeywell International Inc. Time interval trimmed differential capacitance sensor
US7757555B2 (en) * 2006-08-30 2010-07-20 Robert Bosch Gmbh Tri-axis accelerometer having a single proof mass and fully differential output signals
US7610809B2 (en) * 2007-01-18 2009-11-03 Freescale Semiconductor, Inc. Differential capacitive sensor and method of making same
US8800371B2 (en) * 2012-03-08 2014-08-12 Industrial Technology Research Institute Electrostatic force generator and force measurement system and accelerometer having the same
US9027403B2 (en) 2012-04-04 2015-05-12 Analog Devices, Inc. Wide G range accelerometer
US9046547B2 (en) * 2012-08-13 2015-06-02 Pgs Geophysical As Accelerometer having multiple feedback systems operating on a given proof mass
US9341646B2 (en) * 2012-12-19 2016-05-17 Northrop Grumman Guidance And Electronics Company, Inc. Bias reduction in force rebalanced accelerometers
CN105759075B (zh) * 2016-02-25 2017-09-19 中国科学院地质与地球物理研究所 一种高精度挠性加速度计
US10512164B2 (en) * 2017-10-02 2019-12-17 Encite Llc Micro devices formed by flex circuit substrates

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2326233C2 (de) * 1973-05-23 1986-02-06 Hans-Werner Dr.-Ing. 6382 Friedrichsdorf Fischer Verfahren zur Linearisierung der selbsttätigen elektrostatischen Kraftkompensation
US3877313A (en) * 1973-07-23 1975-04-15 Singer Co Electrostatic accelerometer
FR2454103A1 (fr) * 1979-04-11 1980-11-07 Sagem Perfectionnements aux accelerometres pendulaires asservis
DE3023528C2 (de) * 1980-06-24 1984-11-29 W.C. Heraeus Gmbh, 6450 Hanau Aluminium enthaltender Feinstdraht
US4353254A (en) * 1980-12-18 1982-10-12 The Singer Company Control circuit for electro-static accelerometer
GB2096326B (en) * 1981-04-06 1984-08-15 Secr Defence Force-balance pendulum accelerometers
US4679434A (en) * 1985-07-25 1987-07-14 Litton Systems, Inc. Integrated force balanced accelerometer
JPH0672899B2 (ja) * 1988-04-01 1994-09-14 株式会社日立製作所 加速度センサ

Also Published As

Publication number Publication date
DE69004597D1 (de) 1993-12-23
CA2010987A1 (en) 1990-08-31
EP0385917B1 (de) 1993-11-18
EP0385917A1 (de) 1990-09-05
JP2851673B2 (ja) 1999-01-27
JPH02278160A (ja) 1990-11-14
IL93542A0 (en) 1990-11-29
CA2010987C (en) 1998-12-15
US4987779A (en) 1991-01-29

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: BREED AUTOMOTIVE TECHNOLOGY, INC., LAKELAND, FLA.,

8328 Change in the person/name/address of the agent

Free format text: HENKEL, FEILER & HAENZEL, 81675 MUENCHEN

8339 Ceased/non-payment of the annual fee