DE60328913D1 - Berührungssensorelement und sensorgruppe - Google Patents

Berührungssensorelement und sensorgruppe

Info

Publication number
DE60328913D1
DE60328913D1 DE60328913T DE60328913T DE60328913D1 DE 60328913 D1 DE60328913 D1 DE 60328913D1 DE 60328913 T DE60328913 T DE 60328913T DE 60328913 T DE60328913 T DE 60328913T DE 60328913 D1 DE60328913 D1 DE 60328913D1
Authority
DE
Germany
Prior art keywords
pressure transfer
transfer layer
elastomeric body
corrugations
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60328913T
Other languages
English (en)
Inventor
Peter Gravesen
Mohamed Yahia Benslimane
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Danfoss AS
Original Assignee
Danfoss AS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Danfoss AS filed Critical Danfoss AS
Application granted granted Critical
Publication of DE60328913D1 publication Critical patent/DE60328913D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/033Pointing devices displaced or positioned by the user, e.g. mice, trackballs, pens or joysticks; Accessories therefor
    • G06F3/0354Pointing devices displaced or positioned by the user, e.g. mice, trackballs, pens or joysticks; Accessories therefor with detection of 2D relative movements between the device, or an operating part thereof, and a plane or surface, e.g. 2D mice, trackballs, pens or pucks
    • G06F3/03547Touch pads, in which fingers can move on a surface
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0447Position sensing using the local deformation of sensor cells
DE60328913T 2002-12-12 2003-12-10 Berührungssensorelement und sensorgruppe Expired - Lifetime DE60328913D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DKPA200201908 2002-12-12
PCT/DK2003/000848 WO2004053782A1 (en) 2002-12-12 2003-12-10 Tactile sensor element and sensor array

Publications (1)

Publication Number Publication Date
DE60328913D1 true DE60328913D1 (de) 2009-10-01

Family

ID=32479668

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60328913T Expired - Lifetime DE60328913D1 (de) 2002-12-12 2003-12-10 Berührungssensorelement und sensorgruppe

Country Status (7)

Country Link
US (1) US7481120B2 (de)
EP (1) EP1570415B1 (de)
CN (1) CN1320432C (de)
AT (1) ATE440319T1 (de)
AU (1) AU2003287874A1 (de)
DE (1) DE60328913D1 (de)
WO (1) WO2004053782A1 (de)

Families Citing this family (63)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7320457B2 (en) 1997-02-07 2008-01-22 Sri International Electroactive polymer devices for controlling fluid flow
WO2001006575A1 (en) 1999-07-20 2001-01-25 Sri International Improved electroactive polymers
US8181338B2 (en) 2000-11-02 2012-05-22 Danfoss A/S Method of making a multilayer composite
DE10054247C2 (de) * 2000-11-02 2002-10-24 Danfoss As Betätigungselement und Verfahren zu seiner Herstellung
US7166953B2 (en) 2001-03-02 2007-01-23 Jon Heim Electroactive polymer rotary clutch motors
US7233097B2 (en) 2001-05-22 2007-06-19 Sri International Rolled electroactive polymers
AU2002351736A1 (en) * 2001-12-21 2003-07-15 Danfoss A/S Dielectric actuator or sensor structure and method of making it
AU2003263159A1 (en) 2002-09-20 2004-04-08 Danfoss A/S An elastomer actuator and a method of making an actuator
DE602004014592D1 (de) * 2003-02-24 2008-08-07 Danfoss As
US7436099B2 (en) 2003-08-29 2008-10-14 Sri International Electroactive polymer pre-strain
EP1665880B1 (de) 2003-09-03 2012-12-05 SRI International Elektroaktive oberflächendeformationspolymerwandler
DE102004026307B4 (de) * 2004-05-31 2016-02-11 Novineon Healthcare Technology Partners Gmbh Taktiles Instrument
US7737953B2 (en) * 2004-08-19 2010-06-15 Synaptics Incorporated Capacitive sensing apparatus having varying depth sensing elements
US7750532B2 (en) 2005-03-21 2010-07-06 Artificial Muscle, Inc. Electroactive polymer actuated motors
US7521840B2 (en) 2005-03-21 2009-04-21 Artificial Muscle, Inc. High-performance electroactive polymer transducers
US7595580B2 (en) 2005-03-21 2009-09-29 Artificial Muscle, Inc. Electroactive polymer actuated devices
US7626319B2 (en) 2005-03-21 2009-12-01 Artificial Muscle, Inc. Three-dimensional electroactive polymer actuated devices
US7521847B2 (en) 2005-03-21 2009-04-21 Artificial Muscle, Inc. High-performance electroactive polymer transducers
US7915789B2 (en) 2005-03-21 2011-03-29 Bayer Materialscience Ag Electroactive polymer actuated lighting
US8054566B2 (en) 2005-03-21 2011-11-08 Bayer Materialscience Ag Optical lens displacement systems
KR100608927B1 (ko) * 2005-05-26 2006-08-08 한국과학기술원 커패시터용 전극층과 커패시터용 전극층의 제조방법, 그전극층을 이용한 단위센서 및 그 단위센서를 이용한촉각센서
US7609178B2 (en) * 2006-04-20 2009-10-27 Pressure Profile Systems, Inc. Reconfigurable tactile sensor input device
GB2426341A (en) * 2005-05-19 2006-11-22 Univ Basel Measuring nano-scale mechanical displacements by the compression or expansion of a compliant insulator
US7692365B2 (en) * 2005-11-23 2010-04-06 Microstrain, Inc. Slotted beam piezoelectric composite
KR100809285B1 (ko) 2006-05-03 2008-03-04 전자부품연구원 다축 감지용 촉각센서 및 그 제조방법
US7732999B2 (en) 2006-11-03 2010-06-08 Danfoss A/S Direct acting capacitive transducer
US7880371B2 (en) * 2006-11-03 2011-02-01 Danfoss A/S Dielectric composite and a method of manufacturing a dielectric composite
CN100436306C (zh) * 2006-11-23 2008-11-26 西北工业大学 一种触觉传感器及其制作方法
US7492076B2 (en) 2006-12-29 2009-02-17 Artificial Muscle, Inc. Electroactive polymer transducers biased for increased output
US8970503B2 (en) 2007-01-05 2015-03-03 Apple Inc. Gestures for devices having one or more touch sensitive surfaces
US8144129B2 (en) * 2007-01-05 2012-03-27 Apple Inc. Flexible touch sensing circuits
US7952261B2 (en) * 2007-06-29 2011-05-31 Bayer Materialscience Ag Electroactive polymer transducers for sensory feedback applications
DE102007037502B4 (de) * 2007-08-08 2014-04-03 Epcos Ag Bauelement mit reduziertem Temperaturgang
KR101427586B1 (ko) 2007-12-26 2014-08-07 삼성디스플레이 주식회사 표시 장치 및 그 구동 방법
US8212575B2 (en) * 2008-12-29 2012-07-03 Lexmark International, Inc. Device for analyzing size and location of conductive item
EP2239793A1 (de) 2009-04-11 2010-10-13 Bayer MaterialScience AG Elektrisch schaltbarer Polymerfilmaufbau und dessen Verwendung
US8915151B2 (en) * 2009-06-05 2014-12-23 Sungkyunkwan University Foundation For Corporate Collaboration Active skin for conformable tactile interface
JP2011154442A (ja) * 2010-01-26 2011-08-11 Sony Corp センサ素子及び表示装置
US8069735B1 (en) 2010-11-10 2011-12-06 Artann Laboratories Inc. Tactile sensor array for soft tissue elasticity imaging
KR20140008416A (ko) 2011-03-01 2014-01-21 바이엘 인텔렉쳐 프로퍼티 게엠베하 변형가능한 중합체 장치 및 필름을 제조하기 위한 자동화 제조 방법
WO2012129357A2 (en) 2011-03-22 2012-09-27 Bayer Materialscience Ag Electroactive polymer actuator lenticular system
ITTO20110530A1 (it) * 2011-06-16 2012-12-17 Fond Istituto Italiano Di Tecnologia Sistema di interfaccia per interazione uomo-macchina
US9239346B2 (en) 2012-01-28 2016-01-19 The Regents Of The University Of California Systems for providing electro-mechanical sensors
US8692442B2 (en) 2012-02-14 2014-04-08 Danfoss Polypower A/S Polymer transducer and a connector for a transducer
US8891222B2 (en) 2012-02-14 2014-11-18 Danfoss A/S Capacitive transducer and a method for manufacturing a transducer
JP5905292B2 (ja) * 2012-02-21 2016-04-20 日本碍子株式会社 圧電素子及び圧電素子の製造方法
EP2828901B1 (de) 2012-03-21 2017-01-04 Parker Hannifin Corporation Rolle-an-rolle-herstellungsverfahren zur herstellung selbstheilender elektroaktiver polymervorrichtungen
KR20150031285A (ko) 2012-06-18 2015-03-23 바이엘 인텔렉쳐 프로퍼티 게엠베하 연신 공정을 위한 연신 프레임
TW201416652A (zh) * 2012-10-18 2014-05-01 Ind Tech Res Inst 壓力感測裝置及應用其之夾持設備
US9590193B2 (en) 2012-10-24 2017-03-07 Parker-Hannifin Corporation Polymer diode
JP5966869B2 (ja) * 2012-11-05 2016-08-10 富士通株式会社 接触状態検出装置、方法及びプログラム
WO2014094776A1 (en) 2012-12-19 2014-06-26 Danfoss Polypower A/S A stretchable conductor array
EP2953012B1 (de) * 2013-01-29 2018-04-18 Suzhou Institute of Nano-tech and Nano-bionics (SINANO) Chinese Academy of Sciences Elektronische haut, herstellungsverfahren und verwendung davon
US8754662B1 (en) * 2013-03-11 2014-06-17 Cypress Semiconductor Corporation Flipped cell sensor pattern
KR101533974B1 (ko) * 2014-07-02 2015-07-10 성균관대학교산학협력단 센서 및 그 제조방법
CN104316224B (zh) * 2014-11-04 2016-06-29 浙江大学 基于电容与压敏橡胶组合的三维力触觉传感单元
KR101731173B1 (ko) * 2015-09-02 2017-04-28 한국과학기술원 다공성 탄성중합체 유전층을 구비하는 정전용량형 압력센서
US9733062B2 (en) * 2015-11-20 2017-08-15 General Electric Company Systems and methods for monitoring component strain
DE102017100791B4 (de) * 2017-01-17 2018-09-06 Pilz Gmbh & Co. Kg Mehrschichtiger, taktiler Sensor mit Befestigungsmittel
WO2018144772A1 (en) * 2017-02-03 2018-08-09 The Regents Of The University Of California Enhanced pressure sensing performance for pressure sensors
EP3638465A4 (de) 2017-06-15 2021-07-07 OnRobot A/S Systeme, vorrichtungen und verfahren zur erfassung von orten und kräften
CN111051834A (zh) 2017-07-10 2020-04-21 小利兰·斯坦福大学托管委员会 电容式和触觉传感器及相关感测方法
WO2020014356A1 (en) * 2018-07-10 2020-01-16 The Board Of Trustees Of The Leland Stanford Junior University Capacitive and tactile sensors and related sensing methods

Family Cites Families (94)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2716708A (en) * 1950-11-17 1955-08-30 Nat Res Dev Apparatus for launching ultrasonic waves
US3109202A (en) * 1952-10-09 1963-11-05 Continental Gummi Werke Ag Mold for use in connection with the casting of transmission belts
BE642434A (de) * 1958-06-04
US3565195A (en) * 1969-04-16 1971-02-23 Sibany Mfg Corp Electrical weighing apparatus using capacitive flexible mat
US3753294A (en) 1970-02-27 1973-08-21 Schlumberger Technology Corp Method and apparatus for measuring depth
US3875481A (en) * 1973-10-10 1975-04-01 Uniroyal Inc Capacitive weighing mat
CH609774A5 (de) * 1977-01-21 1979-03-15 Semperit Ag
FR2409654B1 (fr) * 1977-11-17 1985-10-04 Thomson Csf Dispositif transducteur piezoelectrique et son procede de fabrication
US4376302A (en) * 1978-04-13 1983-03-08 The United States Of America As Represented By The Secretary Of The Navy Piezoelectric polymer hydrophone
US4330730A (en) * 1980-03-27 1982-05-18 Eastman Kodak Company Wound piezoelectric polymer flexure devices
US4386386A (en) 1980-04-22 1983-05-31 Nippon Soken, Inc. Capacitor type sensor for detecting displacement or load
US4494409A (en) 1981-05-29 1985-01-22 Kabushiki Kaisha Toyota Chuo Kenkyusho Engine vibration sensor
KR900001465B1 (ko) * 1981-10-27 1990-03-12 로즈 마운트 인코오포레이티드 분리된 감지 격막을 가진 용량성 압력 변환기
US4431882A (en) * 1982-08-12 1984-02-14 W. H. Brady Co. Transparent capacitance membrane switch
DE3372407D1 (en) * 1982-09-29 1987-08-13 Emi Ltd A tactile array sensor
US4584625A (en) * 1984-09-11 1986-04-22 Kellogg Nelson R Capacitive tactile sensor
US4578735A (en) * 1984-10-12 1986-03-25 Knecht Thomas A Pressure sensing cell using brittle diaphragm
US4654546A (en) 1984-11-20 1987-03-31 Kari Kirjavainen Electromechanical film and procedure for manufacturing same
US4634917A (en) * 1984-12-26 1987-01-06 Battelle Memorial Institute Active multi-layer piezoelectric tactile sensor apparatus and method
US4640137A (en) * 1985-05-31 1987-02-03 Lord Corporation Tactile sensor
US4852443A (en) * 1986-03-24 1989-08-01 Key Concepts, Inc. Capacitive pressure-sensing method and apparatus
DE3642780A1 (de) * 1986-05-05 1987-11-12 Siemens Ag Detektormatte und verfahren zu ihrer herstellung
GB8619800D0 (en) * 1986-08-14 1986-09-24 Microelectronics Applic Resear Tactile sensor device
DE3634855C1 (de) 1986-10-13 1988-03-31 Peter Seitz Kapazitive Messanordnung zur Bestimmung von Kraeften und/oder Druecken
GB8625686D0 (en) * 1986-10-27 1986-11-26 Ministry Of Agriculture Fisher Assessing processing strains
US4825116A (en) * 1987-05-07 1989-04-25 Yokogawa Electric Corporation Transmitter-receiver of ultrasonic distance measuring device
FR2615941B1 (fr) * 1987-05-25 1991-12-06 Sfena Dispositif de detection de position d'un organe de commande sur une tablette tactile
US4879698A (en) * 1988-11-03 1989-11-07 Sensor Electronics, Inc. Piezopolymer actuators
DE8815246U1 (de) * 1988-12-07 1990-04-05 Brunner, Wolfgang, Dipl.-Ing. (Fh), 8999 Maierhoefen, De
JP3156053B2 (ja) 1989-01-23 2001-04-16 ザ・ユニヴァーシテイ・オブ・メルボルン 電子変換器
US5028876A (en) * 1989-01-30 1991-07-02 Dresser Industries, Inc. Precision capacitive transducer circuits and methods
US5173162A (en) 1989-07-05 1992-12-22 Mitsui Toatsu Chemicals, Inc. Multi-layered electrostrictive effect element
US5060527A (en) * 1990-02-14 1991-10-29 Burgess Lester E Tactile sensing transducer
US5425275A (en) 1990-06-01 1995-06-20 Lockshaw; James Hull monitoring apparatus and method
DE4027753C2 (de) * 1990-09-01 1994-06-09 Karlheinz Dr Ziegler Kapazitiver Kraftsensor
US5090246A (en) * 1990-09-19 1992-02-25 Johnson Service Corp. Elastomer type low pressure sensor
FR2667256A1 (fr) * 1990-10-02 1992-04-03 Thomson Csf Dispositif pour eliminer le givre forme en surface d'une paroi, notamment d'une fenetre optique ou radioelectrique.
US5259099A (en) * 1990-11-30 1993-11-09 Ngk Spark Plug Co., Ltd. Method for manufacturing low noise piezoelectric transducer
JPH04253382A (ja) 1991-01-30 1992-09-09 Nec Corp 電歪効果素子
US5115680A (en) 1991-03-04 1992-05-26 Lew Hyok S Displacement sensor with mechanical preamplification means
US5225959A (en) * 1991-10-15 1993-07-06 Xerox Corporation Capacitive tactile sensor array and method for sensing pressure with the array
US5300813A (en) * 1992-02-26 1994-04-05 International Business Machines Corporation Refractory metal capped low resistivity metal conductor lines and vias
US5329496A (en) * 1992-10-16 1994-07-12 Duke University Two-dimensional array ultrasonic transducers
US5449002A (en) * 1992-07-01 1995-09-12 Goldman; Robert J. Capacitive biofeedback sensor with resilient polyurethane dielectric for rehabilitation
JP3270527B2 (ja) 1992-07-08 2002-04-02 呉羽化学工業株式会社 筒状ないし曲面化圧電素子
US5321332A (en) * 1992-11-12 1994-06-14 The Whitaker Corporation Wideband ultrasonic transducer
US5760530A (en) * 1992-12-22 1998-06-02 The United States Of America As Represented By The Secretary Of The Air Force Piezoelectric tactile sensor
US6282956B1 (en) 1994-12-29 2001-09-04 Kazuhiro Okada Multi-axial angular velocity sensor
US5642015A (en) * 1993-07-14 1997-06-24 The University Of British Columbia Elastomeric micro electro mechanical systems
EP0765453B1 (de) 1994-06-24 2001-01-10 United Technologies Corporation Voreinspritzung für gasturbinenanlagen
US5604314A (en) * 1994-10-26 1997-02-18 Bonneville Scientific Incorporated Triaxial normal and shear force sensor
US5528452A (en) * 1994-11-22 1996-06-18 Case Western Reserve University Capacitive absolute pressure sensor
US5977685A (en) 1996-02-15 1999-11-02 Nitta Corporation Polyurethane elastomer actuator
US5755909A (en) * 1996-06-26 1998-05-26 Spectra, Inc. Electroding of ceramic piezoelectric transducers
US6882086B2 (en) 2001-05-22 2005-04-19 Sri International Variable stiffness electroactive polymer systems
US6376971B1 (en) 1997-02-07 2002-04-23 Sri International Electroactive polymer electrodes
US7320457B2 (en) 1997-02-07 2008-01-22 Sri International Electroactive polymer devices for controlling fluid flow
US6543110B1 (en) 1997-02-07 2003-04-08 Sri International Electroactive polymer fabrication
US6781284B1 (en) 1997-02-07 2004-08-24 Sri International Electroactive polymer transducers and actuators
US7052594B2 (en) 2002-01-31 2006-05-30 Sri International Devices and methods for controlling fluid flow using elastic sheet deflection
US6545384B1 (en) 1997-02-07 2003-04-08 Sri International Electroactive polymer devices
US6812624B1 (en) 1999-07-20 2004-11-02 Sri International Electroactive polymers
US6586859B2 (en) 2000-04-05 2003-07-01 Sri International Electroactive polymer animated devices
US6891317B2 (en) 2001-05-22 2005-05-10 Sri International Rolled electroactive polymers
JP4388603B2 (ja) 1997-02-07 2009-12-24 エス アール アイ・インターナショナル 弾性誘電体ポリマフィルム音波アクチュエータ
US6809462B2 (en) 2000-04-05 2004-10-26 Sri International Electroactive polymer sensors
US5841143A (en) 1997-07-11 1998-11-24 The United States Of America As Represented By Administrator Of The National Aeronautics And Space Administration Integrated fluorescene
US6210514B1 (en) 1998-02-11 2001-04-03 Xerox Corporation Thin film structure machining and attachment
WO2001006575A1 (en) 1999-07-20 2001-01-25 Sri International Improved electroactive polymers
US6664718B2 (en) 2000-02-09 2003-12-16 Sri International Monolithic electroactive polymers
US6806621B2 (en) 2001-03-02 2004-10-19 Sri International Electroactive polymer rotary motors
US6222305B1 (en) 1999-08-27 2001-04-24 Product Systems Incorporated Chemically inert megasonic transducer system
JP2001135873A (ja) * 1999-11-08 2001-05-18 Minolta Co Ltd 圧電変換素子
US6911764B2 (en) 2000-02-09 2005-06-28 Sri International Energy efficient electroactive polymers and electroactive polymer devices
JP2001230462A (ja) * 2000-02-17 2001-08-24 Minolta Co Ltd 圧電変換素子
US6768246B2 (en) 2000-02-23 2004-07-27 Sri International Biologically powered electroactive polymer generators
WO2001063738A2 (en) 2000-02-23 2001-08-30 Sri International Electroactive polymer thermal electric generators
DE10054247C2 (de) 2000-11-02 2002-10-24 Danfoss As Betätigungselement und Verfahren zu seiner Herstellung
WO2002057799A2 (en) 2001-01-17 2002-07-25 Honeywell International Inc. Accelerometer whose seismic mass is shaped as whiffletree
US7166953B2 (en) 2001-03-02 2007-01-23 Jon Heim Electroactive polymer rotary clutch motors
JP2002289462A (ja) * 2001-03-27 2002-10-04 Alps Electric Co Ltd 薄膜キャパシタの製造方法とその薄膜キャパシタを備えた温度補償用薄膜コンデンサ及び電子機器と電子回路
US6581481B1 (en) 2001-05-07 2003-06-24 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Capacitive extensometer
US7233097B2 (en) 2001-05-22 2007-06-19 Sri International Rolled electroactive polymers
GB0123294D0 (en) * 2001-09-27 2001-11-21 1 Ltd Piezoelectric structures
US6689970B2 (en) 2001-10-04 2004-02-10 Lester E. Burgess Pressure actuated switching device and method and system for making same
US6876135B2 (en) 2001-10-05 2005-04-05 Sri International Master/slave electroactive polymer systems
EP1456599B1 (de) * 2001-12-21 2010-11-10 Danfoss A/S Positionssensor mit elastomerischem material
AU2002351736A1 (en) * 2001-12-21 2003-07-15 Danfoss A/S Dielectric actuator or sensor structure and method of making it
SG103371A1 (en) * 2001-12-28 2004-04-29 Matsushita Electric Works Ltd Wearable human motion applicator
US6707236B2 (en) 2002-01-29 2004-03-16 Sri International Non-contact electroactive polymer electrodes
AU2003225913A1 (en) 2002-03-18 2003-10-08 Roy David Kornbluh Electroactive polymer devices for moving fluid
US6965189B2 (en) * 2002-09-20 2005-11-15 Monodrive Inc. Bending actuators and sensors constructed from shaped active materials and methods for making the same
AU2003263159A1 (en) * 2002-09-20 2004-04-08 Danfoss A/S An elastomer actuator and a method of making an actuator
EP1665880B1 (de) 2003-09-03 2012-12-05 SRI International Elektroaktive oberflächendeformationspolymerwandler

Also Published As

Publication number Publication date
EP1570415B1 (de) 2009-08-19
ATE440319T1 (de) 2009-09-15
EP1570415A1 (de) 2005-09-07
CN1320432C (zh) 2007-06-06
AU2003287874A1 (en) 2004-06-30
CN1726453A (zh) 2006-01-25
US20060016275A1 (en) 2006-01-26
WO2004053782A1 (en) 2004-06-24
US7481120B2 (en) 2009-01-27

Similar Documents

Publication Publication Date Title
ATE440319T1 (de) Berührungssensorelement und sensorgruppe
ATE384935T1 (de) Dielektrisches betätigungsglied oder sensorstruktur und herstellungsverfahren
CN109238519B (zh) 一种混合式柔性触觉传感器
US4495434A (en) Pressure-sensitive transducer using piezo ceramic material
EP1753039A4 (de) Mehrschichtiges piezoelektrisches element und herstellungsverfahren dafür
EP1293928A3 (de) Koordinateneingabevorrichtung mit nicht-flacher Betriebs-Oberfläche und elektronisches Gerät
ATE432537T1 (de) Piezoelektrischer aktor
DE60201745D1 (de) Flexibler kapazitiver berührungssensor
DE60237463D1 (de) Flexibler sensor und herstellungsverfahren
LU90286B1 (fr) Capteur de force
JP2009527765A (ja) 容量タッチパッド技術を用いて、ロボット把持メカニズムに接触感覚を得させるシステム
TW200604005A (en) High durability touch panel
JP2018004640A (ja) 伸縮性力センサ
CN110987031A (zh) 一种柔性触觉传感器
WO2006040781A3 (en) Sensor for measuring phisical quantities based on the detection of the variation of an electrical parameter, and method for its fabrication
KR20170126302A (ko) 압력 센서 소자 및 압력 센서 소자 제조 방법
JP2023051944A (ja) 静電容量型検知センサ、静電容量型検知センサモジュールおよび静電容量型検知センサを用いた状態判定方法
CN113970392A (zh) 柔性接近觉与压力触觉传感器、传感系统及柔性电子皮肤
JP2019124506A (ja) 静電容量型センサ
NO20061409L (no) Piezoelektrisk trykkbolgesensor
JP2004531189A5 (de)
JP2006201061A5 (de)
JP2012181084A (ja) 静電容量型面状センサおよびその製造方法
JP2016193668A (ja) 把持検出装置
LU90783B1 (en) Foil-type switching element

Legal Events

Date Code Title Description
8364 No opposition during term of opposition