DE60231600D1 - Verfahren und anlage zur trennung und rückgewinnung von halogengas - Google Patents

Verfahren und anlage zur trennung und rückgewinnung von halogengas

Info

Publication number
DE60231600D1
DE60231600D1 DE60231600T DE60231600T DE60231600D1 DE 60231600 D1 DE60231600 D1 DE 60231600D1 DE 60231600 T DE60231600 T DE 60231600T DE 60231600 T DE60231600 T DE 60231600T DE 60231600 D1 DE60231600 D1 DE 60231600D1
Authority
DE
Germany
Prior art keywords
halogengas
recovering
separating
recovering halogengas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60231600T
Other languages
English (en)
Inventor
Osamu Yamamoto
Masayuki Kinouchi
Naoki Takada
Yoji Kase
Masao Kikuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ube Corp
Original Assignee
Ube Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2001393642A external-priority patent/JP4089223B2/ja
Priority claimed from JP2002010262A external-priority patent/JP4089230B2/ja
Application filed by Ube Industries Ltd filed Critical Ube Industries Ltd
Application granted granted Critical
Publication of DE60231600D1 publication Critical patent/DE60231600D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D63/00—Apparatus in general for separation processes using semi-permeable membranes
    • B01D63/02—Hollow fibre modules
    • B01D63/031—Two or more types of hollow fibres within one bundle or within one potting or tube-sheet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D63/00—Apparatus in general for separation processes using semi-permeable membranes
    • B01D63/02—Hollow fibre modules
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • B01D53/225—Multiple stage diffusion
    • B01D53/226—Multiple stage diffusion in serial connexion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2313/00—Details relating to membrane modules or apparatus
    • B01D2313/18—Specific valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2313/00—Details relating to membrane modules or apparatus
    • B01D2313/60—Specific sensors or sensor arrangements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2313/00—Details relating to membrane modules or apparatus
    • B01D2313/90—Additional auxiliary systems integrated with the module or apparatus
DE60231600T 2001-01-25 2002-01-23 Verfahren und anlage zur trennung und rückgewinnung von halogengas Expired - Lifetime DE60231600D1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2001016571 2001-01-25
JP2001393642A JP4089223B2 (ja) 2001-12-26 2001-12-26 ハロゲン化合物ガスの分離回収装置および分離回収方法
JP2002010262A JP4089230B2 (ja) 2001-01-25 2002-01-18 ハロゲン化合物ガスの分離回収装置および分離回収方法
PCT/JP2002/000470 WO2002058826A1 (fr) 2001-01-25 2002-01-23 Appareil et procede de separation et de collection de gaz haloide

Publications (1)

Publication Number Publication Date
DE60231600D1 true DE60231600D1 (de) 2009-04-30

Family

ID=27345807

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60231600T Expired - Lifetime DE60231600D1 (de) 2001-01-25 2002-01-23 Verfahren und anlage zur trennung und rückgewinnung von halogengas

Country Status (4)

Country Link
US (1) US6921428B2 (de)
EP (1) EP1360985B1 (de)
DE (1) DE60231600D1 (de)
WO (1) WO2002058826A1 (de)

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WO2009048114A1 (ja) * 2007-10-12 2009-04-16 Taiyo Nippon Sanso Corporation ガス精製方法
JP5020059B2 (ja) * 2007-12-28 2012-09-05 三菱電機株式会社 ガス絶縁開閉装置
WO2010038810A1 (ja) * 2008-09-30 2010-04-08 宇部興産株式会社 非対称ガス分離膜、及びガス分離方法
DE102010003507A1 (de) * 2010-03-31 2011-10-06 Volker J. Wetzel Gaspermeationsanlage und Verfahren zur Gaspermeation
RU2013144196A (ru) 2011-03-02 2015-04-10 Франклин Фьюэлинг Системз, Инк. Система отслеживания плотности газа
KR101249261B1 (ko) * 2011-04-15 2013-04-01 한국과학기술연구원 Ｓｆ6 분리회수장치 및 방법
BR112014015017B8 (pt) * 2011-12-22 2021-07-06 Statoil Petroleum As método e sistema para separação de fluidos com um sistema integrado de controle
FR2985437A1 (fr) * 2012-01-10 2013-07-12 Alstom Technology Ltd Procede de filtration d'effluents gazeux d'une installation industrielle
WO2013126397A1 (en) 2012-02-20 2013-08-29 Franklin Fueling Systems, Inc. Moisture monitoring system
HUE045214T2 (hu) * 2012-11-14 2019-12-30 Evonik Fibres Gmbh Membrános gázelválasztó berendezés gáz összetételének szabályozása
KR101514801B1 (ko) * 2013-06-25 2015-04-24 (주)파인텍 과불화화합물의 분리 및 재활용시스템
CN103668490B (zh) * 2013-12-23 2016-03-16 江苏智道工程技术有限公司 一种氨纶干法纺丝介质循环方法及系统
KR101487437B1 (ko) * 2014-04-01 2015-02-03 지에스건설 주식회사 가스 분리시스템
KR101540585B1 (ko) * 2014-06-20 2015-07-31 한국과학기술연구원 기체회수장치 및 방법
CN104174250B (zh) * 2014-08-15 2015-12-09 国家电网公司 一种六氟化硫和四氟化碳混合气体预分离的方法
KR101676099B1 (ko) * 2014-09-24 2016-11-15 오씨아이 주식회사 Nf3 가스 분리농축 방법, 장치 및 시스템
DE102015206744A1 (de) * 2015-04-15 2016-11-03 Rwe Deutschland Ag Verfahren zum Trocknen eines Gasraums sowie Anordnung umfassend einen schutzgasbefüllten Gasraum
CN104792365B (zh) * 2015-04-21 2017-03-08 国家电网公司 六氟化硫气体质量现场一体化检测装置及方法
WO2018078529A1 (en) * 2016-10-25 2018-05-03 Waters Technologies Corporation Gas liquid separator and associated methods
KR101919302B1 (ko) * 2017-07-28 2018-11-19 한국전력공사 이산화탄소 분리막 플랜트 이상 감지 시스템
EP3695897A1 (de) 2019-02-12 2020-08-19 Haffmans B.V. System und verfahren zum trennen eines gasgemisches
EP3797857A1 (de) 2019-09-30 2021-03-31 General Electric Technology GmbH Verfahren und vorrichtung zum recyceln von heptafluorisobutyronitril
EP3834917A1 (de) * 2019-12-13 2021-06-16 WIKA Alexander Wiegand SE & Co. KG Serviceanlage für gasräume
US11731076B1 (en) * 2022-09-30 2023-08-22 Air Products And Chemicals, Inc. Membrane process and system for high recovery of a nonpermeating gas utilizing a sweep gas

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US5730779A (en) * 1996-10-31 1998-03-24 Air Products And Chemicals, Inc. Fluorochemical recovery and recycle using membranes
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JP2000140576A (ja) 1998-11-05 2000-05-23 Kanto Denka Kogyo Co Ltd フッ素系ガス含有混合物の無害化処理システム
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US6395066B1 (en) * 1999-03-05 2002-05-28 Ube Industries, Ltd. Partially carbonized asymmetric hollow fiber separation membrane, process for its production, and gas separation method
DE19923155A1 (de) * 1999-05-20 2000-11-23 Solvay Fluor & Derivate SF¶6¶-Abtrennung aus Isoliergasen aus gasisolierten Leitungen
JP2001062240A (ja) * 1999-08-27 2001-03-13 Air Liquide Japan Ltd 混合ガスの濃度調整方法および濃度調整装置
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JP4018858B2 (ja) * 1999-12-20 2007-12-05 大同エアプロダクツ・エレクトロニクス株式会社 パーフルオロ化合物分離回収方法およびそれに用いるパーフルオロ化合物分離回収装置
FR2829403B1 (fr) * 2001-09-11 2003-12-12 Air Liquide Procede de production par permeation, a partir d'un melange gazeux, d'au moins deux flux gazeux et installation de mise en oeuvre d'un tel procede

Also Published As

Publication number Publication date
US6921428B2 (en) 2005-07-26
EP1360985B1 (de) 2009-03-18
EP1360985A1 (de) 2003-11-12
EP1360985A4 (de) 2005-03-23
WO2002058826A1 (fr) 2002-08-01
US20040045432A1 (en) 2004-03-11

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