DE60224844D1 - Dielektrisches betätigungsglied oder sensorstruktur und herstellungsverfahren - Google Patents

Dielektrisches betätigungsglied oder sensorstruktur und herstellungsverfahren

Info

Publication number
DE60224844D1
DE60224844D1 DE60224844T DE60224844T DE60224844D1 DE 60224844 D1 DE60224844 D1 DE 60224844D1 DE 60224844 T DE60224844 T DE 60224844T DE 60224844 T DE60224844 T DE 60224844T DE 60224844 D1 DE60224844 D1 DE 60224844D1
Authority
DE
Germany
Prior art keywords
sheet
sensor structure
manufacturing
dielectric actuator
dielectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60224844T
Other languages
English (en)
Other versions
DE60224844T2 (de
Inventor
Mohamed Yahia Benslimane
Peter Gravesen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Danfoss AS
Original Assignee
Danfoss AS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Danfoss AS filed Critical Danfoss AS
Application granted granted Critical
Publication of DE60224844D1 publication Critical patent/DE60224844D1/de
Publication of DE60224844T2 publication Critical patent/DE60224844T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/206—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using only longitudinal or thickness displacement, e.g. d33 or d31 type devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/084—Shaping or machining of piezoelectric or electrostrictive bodies by moulding or extrusion
DE60224844T 2001-12-21 2002-12-17 Dielektrisches betätigungsglied oder sensorstruktur und herstellungsverfahren Expired - Lifetime DE60224844T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DK200101933 2001-12-21
DKPA200101933 2001-12-21
PCT/DK2002/000862 WO2003056287A1 (en) 2001-12-21 2002-12-17 Dielectric actuator or sensor structure and method of making it

Publications (2)

Publication Number Publication Date
DE60224844D1 true DE60224844D1 (de) 2008-03-13
DE60224844T2 DE60224844T2 (de) 2009-01-08

Family

ID=8160924

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60224844T Expired - Lifetime DE60224844T2 (de) 2001-12-21 2002-12-17 Dielektrisches betätigungsglied oder sensorstruktur und herstellungsverfahren

Country Status (7)

Country Link
US (2) US7573064B2 (de)
EP (1) EP1466149B1 (de)
AT (1) ATE384935T1 (de)
AU (1) AU2002351736A1 (de)
DE (1) DE60224844T2 (de)
ES (1) ES2299614T3 (de)
WO (1) WO2003056287A1 (de)

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ES2299614T3 (es) 2008-06-01
US7573064B2 (en) 2009-08-11
ATE384935T1 (de) 2008-02-15
US20080038860A1 (en) 2008-02-14
US20050104145A1 (en) 2005-05-19
WO2003056287A1 (en) 2003-07-10
EP1466149B1 (de) 2008-01-23
US7785905B2 (en) 2010-08-31
AU2002351736A1 (en) 2003-07-15
EP1466149A1 (de) 2004-10-13

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