DE60224844D1 - Dielektrisches betätigungsglied oder sensorstruktur und herstellungsverfahren - Google Patents

Dielektrisches betätigungsglied oder sensorstruktur und herstellungsverfahren

Info

Publication number
DE60224844D1
DE60224844D1 DE60224844T DE60224844T DE60224844D1 DE 60224844 D1 DE60224844 D1 DE 60224844D1 DE 60224844 T DE60224844 T DE 60224844T DE 60224844 T DE60224844 T DE 60224844T DE 60224844 D1 DE60224844 D1 DE 60224844D1
Authority
DE
Germany
Prior art keywords
sheet
sensor structure
manufacturing
dielectric actuator
dielectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60224844T
Other languages
English (en)
Other versions
DE60224844T2 (de
Inventor
Mohamed Yahia Benslimane
Peter Gravesen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Danfoss AS
Original Assignee
Danfoss AS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Danfoss AS filed Critical Danfoss AS
Publication of DE60224844D1 publication Critical patent/DE60224844D1/de
Application granted granted Critical
Publication of DE60224844T2 publication Critical patent/DE60224844T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/206—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using only longitudinal or thickness displacement, e.g. d33 or d31 type devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/084—Shaping or machining of piezoelectric or electrostrictive bodies by moulding or extrusion
DE60224844T 2001-12-21 2002-12-17 Dielektrisches betätigungsglied oder sensorstruktur und herstellungsverfahren Expired - Lifetime DE60224844T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DK200101933 2001-12-21
DKPA200101933 2001-12-21
PCT/DK2002/000862 WO2003056287A1 (en) 2001-12-21 2002-12-17 Dielectric actuator or sensor structure and method of making it

Publications (2)

Publication Number Publication Date
DE60224844D1 true DE60224844D1 (de) 2008-03-13
DE60224844T2 DE60224844T2 (de) 2009-01-08

Family

ID=8160924

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60224844T Expired - Lifetime DE60224844T2 (de) 2001-12-21 2002-12-17 Dielektrisches betätigungsglied oder sensorstruktur und herstellungsverfahren

Country Status (7)

Country Link
US (2) US7573064B2 (de)
EP (1) EP1466149B1 (de)
AT (1) ATE384935T1 (de)
AU (1) AU2002351736A1 (de)
DE (1) DE60224844T2 (de)
ES (1) ES2299614T3 (de)
WO (1) WO2003056287A1 (de)

Families Citing this family (51)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7320457B2 (en) 1997-02-07 2008-01-22 Sri International Electroactive polymer devices for controlling fluid flow
DE60037433T2 (de) 1999-07-20 2008-12-04 Sri International, Menlo Park Elektroaktive Polymergeneratoren
US7548015B2 (en) * 2000-11-02 2009-06-16 Danfoss A/S Multilayer composite and a method of making such
US8181338B2 (en) 2000-11-02 2012-05-22 Danfoss A/S Method of making a multilayer composite
US7400080B2 (en) 2002-09-20 2008-07-15 Danfoss A/S Elastomer actuator and a method of making an actuator
US7518284B2 (en) * 2000-11-02 2009-04-14 Danfoss A/S Dielectric composite and a method of manufacturing a dielectric composite
DE10054247C2 (de) * 2000-11-02 2002-10-24 Danfoss As Betätigungselement und Verfahren zu seiner Herstellung
US7166953B2 (en) 2001-03-02 2007-01-23 Jon Heim Electroactive polymer rotary clutch motors
US7233097B2 (en) 2001-05-22 2007-06-19 Sri International Rolled electroactive polymers
ES2299614T3 (es) * 2001-12-21 2008-06-01 Danfoss A/S Estructura de dispositivo dielectrico de accionamiento o deteccion y metodo para fabricar el mismo.
EP1570415B1 (de) * 2002-12-12 2009-08-19 Danfoss A/S Berührungssensorelement und sensorgruppe
ATE398988T1 (de) * 2003-02-24 2008-07-15 Danfoss As Elektroaktive elastische kompressionsbandage
DK1751843T3 (da) 2003-08-29 2012-12-17 Stanford Res Inst Int Forbelastning af elektroaktive polymer
DK1665880T3 (da) 2003-09-03 2013-02-25 Stanford Res Inst Int Elektroaktive overfladedeformations- polymertransducere
US7507472B2 (en) * 2004-03-09 2009-03-24 The United States Of America As Represented By The Administator Of National Aeronatics And Space Adminstration Multilayer electroactive polymer composite material comprising carbon nanotubes
ATE397912T1 (de) 2004-10-11 2008-07-15 Smm Medical Ab Elektroaktive kompressionsbandage
US7626319B2 (en) 2005-03-21 2009-12-01 Artificial Muscle, Inc. Three-dimensional electroactive polymer actuated devices
US7915789B2 (en) 2005-03-21 2011-03-29 Bayer Materialscience Ag Electroactive polymer actuated lighting
US7521840B2 (en) 2005-03-21 2009-04-21 Artificial Muscle, Inc. High-performance electroactive polymer transducers
US8054566B2 (en) 2005-03-21 2011-11-08 Bayer Materialscience Ag Optical lens displacement systems
US7750532B2 (en) 2005-03-21 2010-07-06 Artificial Muscle, Inc. Electroactive polymer actuated motors
US7521847B2 (en) 2005-03-21 2009-04-21 Artificial Muscle, Inc. High-performance electroactive polymer transducers
US7595580B2 (en) 2005-03-21 2009-09-29 Artificial Muscle, Inc. Electroactive polymer actuated devices
CA2636715A1 (en) 2006-01-13 2007-07-19 Smm Medical Ab Device, system and method for compression treatment of a body part
JP4845674B2 (ja) * 2006-10-26 2011-12-28 キヤノン株式会社 データ処理装置及び方法、通信装置、並びにプログラム
US7732999B2 (en) 2006-11-03 2010-06-08 Danfoss A/S Direct acting capacitive transducer
WO2008052560A1 (en) * 2006-11-03 2008-05-08 Danfoss A/S A multilayer composite and a method of making such
US7880371B2 (en) * 2006-11-03 2011-02-01 Danfoss A/S Dielectric composite and a method of manufacturing a dielectric composite
WO2008052559A2 (en) * 2006-11-03 2008-05-08 Danfoss A/S A dielectric composite and a method of manufacturing a dielectric composite
US7492076B2 (en) 2006-12-29 2009-02-17 Artificial Muscle, Inc. Electroactive polymer transducers biased for increased output
JP4961482B2 (ja) * 2007-01-24 2012-06-27 コンバテック・テクノロジーズ・インコーポレイテッド 導電性表面を有するエラストマー粒子を備えた圧力センサを備えるセンサシステム
EP2174360A4 (de) 2007-06-29 2013-12-11 Artificial Muscle Inc Wandler mit elektroaktivem polymer für anwendungen der sensorischen rückmeldung
WO2009144031A2 (en) * 2008-05-30 2009-12-03 Eppendorf Ag Apparatus and method for moving particles in a fluid
EP2239793A1 (de) 2009-04-11 2010-10-13 Bayer MaterialScience AG Elektrisch schaltbarer Polymerfilmaufbau und dessen Verwendung
DE102010022067A1 (de) 2010-05-31 2011-12-01 Leuphana Universität Lüneburg Stiftung Öffentlichen Rechts Aktuator- und/oder Sensorelement sowie Struktur und Manschette diese aufweisend
CA2828809A1 (en) 2011-03-01 2012-09-07 Francois EGRON Automated manufacturing processes for producing deformable polymer devices and films
CN103703404A (zh) 2011-03-22 2014-04-02 拜耳知识产权有限责任公司 电活化聚合物致动器双凸透镜系统
US20120248942A1 (en) 2011-04-01 2012-10-04 Bayer Materialscience Ag Electromechanical converter, method for its production and use thereof
EP2506325A1 (de) 2011-04-01 2012-10-03 Bayer Material Science AG Elektromechanischer Wandler, Verfahren zu dessen Herstellung und Verwendung desselben
US8891222B2 (en) 2012-02-14 2014-11-18 Danfoss A/S Capacitive transducer and a method for manufacturing a transducer
US8692442B2 (en) 2012-02-14 2014-04-08 Danfoss Polypower A/S Polymer transducer and a connector for a transducer
WO2013142552A1 (en) * 2012-03-21 2013-09-26 Bayer Materialscience Ag Roll-to-roll manufacturing processes for producing self-healing electroactive polymer devices
US9761790B2 (en) 2012-06-18 2017-09-12 Parker-Hannifin Corporation Stretch frame for stretching process
WO2014066576A1 (en) 2012-10-24 2014-05-01 Bayer Intellectual Property Gmbh Polymer diode
JP6180547B2 (ja) * 2013-01-29 2017-08-16 中国科学院蘇州納米技術与納米倣生研究所Ｓｕｚｈｏｕ Ｉｎｓｔｉｔｕｔｅ Ｏｆ Ｎａｎｏ−Ｔｅｃｈ Ａｎｄ Ｎａｎｏ−Ｂｉｏｎｉｃｓ（Ｓｉｎａｎｏ），Ｃｈｉｎｅｓｅ Ａｃａｄｅｍｙ Ｏｆ Ｓｃｉｅｎｃｅ 電子皮膚及びその製造方法と使用
WO2014121799A1 (en) 2013-02-07 2014-08-14 Danfoss Polypower A/S All compliant electrode
EP2775483B1 (de) 2013-03-06 2016-11-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Elektrisch leitendes Material und dessen Verwendung als Elektrode in einem dielektrischen Elastomerkomposit oder als elektrisch leitende, dehnbare Faser
CN106153178A (zh) * 2015-03-17 2016-11-23 中国科学院苏州纳米技术与纳米仿生研究所 柔性导电振膜、柔性振动传感器及其制备方法和应用
US11946821B2 (en) * 2018-07-10 2024-04-02 The Board Of Trustees Of The Leland Stanford Junior University Capacitive and tactile sensors and related sensing methods
US11233189B2 (en) * 2018-12-11 2022-01-25 Facebook Technologies, Llc Nanovoided tunable birefringence
DE102019123877B4 (de) * 2019-09-05 2022-06-09 CRRC New Material Technologies GmbH Dielektrische Vorrichtung mit einer Elektrode mit nicht-planaren Strukturierungen

Family Cites Families (132)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2130532A (en) 1933-01-16 1938-09-20 Dubilier Condenser Corp Electrical condenser
US2716708A (en) 1950-11-17 1955-08-30 Nat Res Dev Apparatus for launching ultrasonic waves
US3109202A (en) 1952-10-09 1963-11-05 Continental Gummi Werke Ag Mold for use in connection with the casting of transmission belts
BE642434A (de) 1958-06-04
US3544733A (en) 1967-06-15 1970-12-01 Minnesota Mining & Mfg Electrostatic acoustic transducer
US3565195A (en) * 1969-04-16 1971-02-23 Sibany Mfg Corp Electrical weighing apparatus using capacitive flexible mat
US3753294A (en) 1970-02-27 1973-08-21 Schlumberger Technology Corp Method and apparatus for measuring depth
US3912830A (en) 1971-10-13 1975-10-14 Kureha Chemical Ind Co Ltd Method of producing a piezoelectric or pyroelectric element
US3831629A (en) 1972-01-24 1974-08-27 Halkey Roberts Corp Check valve
US3875481A (en) * 1973-10-10 1975-04-01 Uniroyal Inc Capacitive weighing mat
US3898585A (en) 1974-01-14 1975-08-05 Ibm Leaky corrugated optical waveguide device
FR2309833A1 (fr) 1975-04-28 1976-11-26 Electricite De France Jauge capacitive pour le controle d'une dimension interieure d'un tube
CH609774A5 (de) * 1977-01-21 1979-03-15 Semperit Ag
JPS5411173U (de) 1977-06-24 1979-01-24
FR2409654B1 (fr) * 1977-11-17 1985-10-04 Thomson Csf Dispositif transducteur piezoelectrique et son procede de fabrication
US4376302A (en) * 1978-04-13 1983-03-08 The United States Of America As Represented By The Secretary Of The Navy Piezoelectric polymer hydrophone
US4322877A (en) 1978-09-20 1982-04-06 Minnesota Mining And Manufacturing Company Method of making piezoelectric polymeric acoustic transducer
GB2042256B (en) 1979-02-19 1983-08-17 Marconi Co Ltd Piezoelectric device
DE3006620A1 (de) * 1980-02-22 1981-09-03 Robert Bosch Gmbh, 7000 Stuttgart Beruehrungssensor
US4330730A (en) * 1980-03-27 1982-05-18 Eastman Kodak Company Wound piezoelectric polymer flexure devices
US4386386A (en) 1980-04-22 1983-05-31 Nippon Soken, Inc. Capacitor type sensor for detecting displacement or load
DE3023218A1 (de) * 1980-06-21 1982-02-25 Draloric Electronic GmbH, 8500 Nürnberg Kapazitiver drucksensor
US4494409A (en) 1981-05-29 1985-01-22 Kabushiki Kaisha Toyota Chuo Kenkyusho Engine vibration sensor
US4431882A (en) * 1982-08-12 1984-02-14 W. H. Brady Co. Transparent capacitance membrane switch
US4654546A (en) 1984-11-20 1987-03-31 Kari Kirjavainen Electromechanical film and procedure for manufacturing same
US4634917A (en) * 1984-12-26 1987-01-06 Battelle Memorial Institute Active multi-layer piezoelectric tactile sensor apparatus and method
US4852443A (en) * 1986-03-24 1989-08-01 Key Concepts, Inc. Capacitive pressure-sensing method and apparatus
DE3642780A1 (de) * 1986-05-05 1987-11-12 Siemens Ag Detektormatte und verfahren zu ihrer herstellung
GB8619800D0 (en) * 1986-08-14 1986-09-24 Microelectronics Applic Resear Tactile sensor device
DE3634855C1 (de) * 1986-10-13 1988-03-31 Peter Seitz Kapazitive Messanordnung zur Bestimmung von Kraeften und/oder Druecken
GB8625686D0 (en) * 1986-10-27 1986-11-26 Ministry Of Agriculture Fisher Assessing processing strains
US4825116A (en) * 1987-05-07 1989-04-25 Yokogawa Electric Corporation Transmitter-receiver of ultrasonic distance measuring device
US4879698A (en) * 1988-11-03 1989-11-07 Sensor Electronics, Inc. Piezopolymer actuators
DE8815246U1 (de) * 1988-12-07 1990-04-05 Brunner, Wolfgang, Dipl.-Ing. (Fh), 8999 Maierhoefen, De
DE3841243A1 (de) 1988-12-07 1990-06-13 Brunner Wolfgang Messanordnung, vorzugsweise in form einer messplattform
US5090248A (en) 1989-01-23 1992-02-25 The University Of Melbourne Electronic transducer
US5173162A (en) 1989-07-05 1992-12-22 Mitsui Toatsu Chemicals, Inc. Multi-layered electrostrictive effect element
JP3039971B2 (ja) 1989-09-19 2000-05-08 株式会社日立製作所 接合型圧電装置及び製造方法並びに接合型圧電素子
US5060527A (en) 1990-02-14 1991-10-29 Burgess Lester E Tactile sensing transducer
US5425275A (en) 1990-06-01 1995-06-20 Lockshaw; James Hull monitoring apparatus and method
DE4027753C2 (de) * 1990-09-01 1994-06-09 Karlheinz Dr Ziegler Kapazitiver Kraftsensor
US5090246A (en) * 1990-09-19 1992-02-25 Johnson Service Corp. Elastomer type low pressure sensor
FR2667256A1 (fr) * 1990-10-02 1992-04-03 Thomson Csf Dispositif pour eliminer le givre forme en surface d'une paroi, notamment d'une fenetre optique ou radioelectrique.
US5259099A (en) * 1990-11-30 1993-11-09 Ngk Spark Plug Co., Ltd. Method for manufacturing low noise piezoelectric transducer
JPH04253382A (ja) 1991-01-30 1992-09-09 Nec Corp 電歪効果素子
US5115680A (en) 1991-03-04 1992-05-26 Lew Hyok S Displacement sensor with mechanical preamplification means
US5341062A (en) 1991-11-12 1994-08-23 The Whitaker Corporation Piezoelectric energy generator
US5300813A (en) 1992-02-26 1994-04-05 International Business Machines Corporation Refractory metal capped low resistivity metal conductor lines and vias
US5329496A (en) * 1992-10-16 1994-07-12 Duke University Two-dimensional array ultrasonic transducers
US5449002A (en) * 1992-07-01 1995-09-12 Goldman; Robert J. Capacitive biofeedback sensor with resilient polyurethane dielectric for rehabilitation
JP3270527B2 (ja) 1992-07-08 2002-04-02 呉羽化学工業株式会社 筒状ないし曲面化圧電素子
US5321332A (en) * 1992-11-12 1994-06-14 The Whitaker Corporation Wideband ultrasonic transducer
US6282956B1 (en) 1994-12-29 2001-09-04 Kazuhiro Okada Multi-axial angular velocity sensor
US5642015A (en) * 1993-07-14 1997-06-24 The University Of British Columbia Elastomeric micro electro mechanical systems
US5515341A (en) 1993-09-14 1996-05-07 The Whitaker Corporation Proximity sensor utilizing polymer piezoelectric film
US5559387A (en) 1994-05-13 1996-09-24 Beurrier; Henry R. Piezoelectric actuators
JP3710479B2 (ja) 1994-06-24 2005-10-26 ユナイテッド テクノロジーズ コーポレイション ガス・タービン・エンジン用パイロット噴射装置
US5604314A (en) * 1994-10-26 1997-02-18 Bonneville Scientific Incorporated Triaxial normal and shear force sensor
US5528452A (en) * 1994-11-22 1996-06-18 Case Western Reserve University Capacitive absolute pressure sensor
US5977685A (en) * 1996-02-15 1999-11-02 Nitta Corporation Polyurethane elastomer actuator
JPH09223943A (ja) 1996-02-19 1997-08-26 Nec Corp 弾性表面波デバイス
US5817099A (en) 1996-06-06 1998-10-06 Skolik; Stephanie A. Universal port/seal device for ocular surgery
US5755909A (en) * 1996-06-26 1998-05-26 Spectra, Inc. Electroding of ceramic piezoelectric transducers
US5891065A (en) 1996-07-31 1999-04-06 Spinal Cord Society Mobile extremity pumping apparatus
DE19631188A1 (de) * 1996-08-02 1998-02-05 Heraeus Kulzer Gmbh Entladungslampenanordnung
JP2001503552A (ja) 1996-12-16 2001-03-13 シーゲイト テクノロジー エルエルシー バイモルフ圧電マイクロアクチュエータのヘッドとフレクシャとの組立体
JPH10247474A (ja) 1997-01-06 1998-09-14 Sony Corp 平面照明灯及びその製造方法
US5878620A (en) * 1997-01-23 1999-03-09 Schlege Systems, Inc. Conductive fabric sensor for vehicle seats
US6882086B2 (en) 2001-05-22 2005-04-19 Sri International Variable stiffness electroactive polymer systems
US7052594B2 (en) 2002-01-31 2006-05-30 Sri International Devices and methods for controlling fluid flow using elastic sheet deflection
US6809462B2 (en) 2000-04-05 2004-10-26 Sri International Electroactive polymer sensors
US6891317B2 (en) 2001-05-22 2005-05-10 Sri International Rolled electroactive polymers
US6812624B1 (en) 1999-07-20 2004-11-02 Sri International Electroactive polymers
US6545384B1 (en) 1997-02-07 2003-04-08 Sri International Electroactive polymer devices
US6586859B2 (en) 2000-04-05 2003-07-01 Sri International Electroactive polymer animated devices
US6543110B1 (en) 1997-02-07 2003-04-08 Sri International Electroactive polymer fabrication
US7320457B2 (en) 1997-02-07 2008-01-22 Sri International Electroactive polymer devices for controlling fluid flow
WO1998035529A2 (en) 1997-02-07 1998-08-13 Sri International Elastomeric dielectric polymer film sonic actuator
US6781284B1 (en) 1997-02-07 2004-08-24 Sri International Electroactive polymer transducers and actuators
US6376971B1 (en) 1997-02-07 2002-04-23 Sri International Electroactive polymer electrodes
US5841143A (en) * 1997-07-11 1998-11-24 The United States Of America As Represented By Administrator Of The National Aeronautics And Space Administration Integrated fluorescene
US6210514B1 (en) * 1998-02-11 2001-04-03 Xerox Corporation Thin film structure machining and attachment
WO1999048621A2 (en) 1998-03-26 1999-09-30 Exogen, Inc. Arrays made from flexible transducer elements
JPH11299273A (ja) 1998-04-15 1999-10-29 Minolta Co Ltd 圧電変換素子及び圧電変換素子を使用したアクチエ−タ
US6700304B1 (en) 1999-04-20 2004-03-02 Virginia Tech Intellectual Properties, Inc. Active/passive distributed absorber for vibration and sound radiation control
DE19826391A1 (de) * 1998-06-12 1999-12-23 Wet Automotive Systems Ag Sensor zur Anwesenheitserfassung von Personen
US6184608B1 (en) 1998-12-29 2001-02-06 Honeywell International Inc. Polymer microactuator array with macroscopic force and displacement
FR2793937A1 (fr) 1999-05-18 2000-11-24 Information Technology Dev Micro-actionneur deformable pour memoire a disques a moteur electrostatique
US6806621B2 (en) 2001-03-02 2004-10-19 Sri International Electroactive polymer rotary motors
DE60037433T2 (de) 1999-07-20 2008-12-04 Sri International, Menlo Park Elektroaktive Polymergeneratoren
DE60044940D1 (de) 1999-07-20 2010-10-21 Stanford Res Inst Int Elektroaktive polymere
US6664718B2 (en) 2000-02-09 2003-12-16 Sri International Monolithic electroactive polymers
US7064472B2 (en) 1999-07-20 2006-06-20 Sri International Electroactive polymer devices for moving fluid
US6222305B1 (en) 1999-08-27 2001-04-24 Product Systems Incorporated Chemically inert megasonic transducer system
JP2001135873A (ja) * 1999-11-08 2001-05-18 Minolta Co Ltd 圧電変換素子
FI108204B (fi) 1999-11-25 2001-11-30 Kari Johannes Kirjavainen Kalvo energioiden muuntamiseksi
US6911764B2 (en) 2000-02-09 2005-06-28 Sri International Energy efficient electroactive polymers and electroactive polymer devices
JP2001230462A (ja) * 2000-02-17 2001-08-24 Minolta Co Ltd 圧電変換素子
AU2001238675A1 (en) 2000-02-23 2001-09-03 Sri International Electroactive polymer thermal electric generators
US6768246B2 (en) 2000-02-23 2004-07-27 Sri International Biologically powered electroactive polymer generators
DE60131343T2 (de) 2000-03-03 2008-09-04 Daishinku Corp., Kakogawa Kristallresonator
DE20004248U1 (de) 2000-03-10 2000-07-06 Wet Automotive Systems Ag Drucksensor
US6411015B1 (en) 2000-05-09 2002-06-25 Measurement Specialties, Inc. Multiple piezoelectric transducer array
DE10049288B4 (de) * 2000-10-04 2004-07-15 Infineon Technologies Ag Elektronische Bauteile und eine Folienband zum Verpacken von Bonddrahtverbindungen elektronischer Bauteile sowie deren Herstellungsverfahren
US7400080B2 (en) 2002-09-20 2008-07-15 Danfoss A/S Elastomer actuator and a method of making an actuator
US8181338B2 (en) 2000-11-02 2012-05-22 Danfoss A/S Method of making a multilayer composite
US7548015B2 (en) 2000-11-02 2009-06-16 Danfoss A/S Multilayer composite and a method of making such
US7518284B2 (en) 2000-11-02 2009-04-14 Danfoss A/S Dielectric composite and a method of manufacturing a dielectric composite
DE10054247C2 (de) * 2000-11-02 2002-10-24 Danfoss As Betätigungselement und Verfahren zu seiner Herstellung
WO2002057799A2 (en) 2001-01-17 2002-07-25 Honeywell International Inc. Accelerometer whose seismic mass is shaped as whiffletree
US7166953B2 (en) 2001-03-02 2007-01-23 Jon Heim Electroactive polymer rotary clutch motors
JP2002289462A (ja) * 2001-03-27 2002-10-04 Alps Electric Co Ltd 薄膜キャパシタの製造方法とその薄膜キャパシタを備えた温度補償用薄膜コンデンサ及び電子機器と電子回路
US6581481B1 (en) 2001-05-07 2003-06-24 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Capacitive extensometer
US7233097B2 (en) 2001-05-22 2007-06-19 Sri International Rolled electroactive polymers
GB0123294D0 (en) * 2001-09-27 2001-11-21 1 Ltd Piezoelectric structures
US6689970B2 (en) 2001-10-04 2004-02-10 Lester E. Burgess Pressure actuated switching device and method and system for making same
US6876135B2 (en) 2001-10-05 2005-04-05 Sri International Master/slave electroactive polymer systems
US7104146B2 (en) * 2001-12-21 2006-09-12 Danfoss A/S Position sensor comprising elastomeric material
ES2299614T3 (es) 2001-12-21 2008-06-01 Danfoss A/S Estructura de dispositivo dielectrico de accionamiento o deteccion y metodo para fabricar el mismo.
SG103371A1 (en) * 2001-12-28 2004-04-29 Matsushita Electric Works Ltd Wearable human motion applicator
US6707236B2 (en) 2002-01-29 2004-03-16 Sri International Non-contact electroactive polymer electrodes
US6965189B2 (en) 2002-09-20 2005-11-15 Monodrive Inc. Bending actuators and sensors constructed from shaped active materials and methods for making the same
EP1570415B1 (de) * 2002-12-12 2009-08-19 Danfoss A/S Berührungssensorelement und sensorgruppe
ATE398988T1 (de) 2003-02-24 2008-07-15 Danfoss As Elektroaktive elastische kompressionsbandage
ES2356146T3 (es) 2003-03-03 2011-04-05 Sri International Polímeros electroactivos enrollados.
DK1751843T3 (da) 2003-08-29 2012-12-17 Stanford Res Inst Int Forbelastning af elektroaktive polymer
DK1665880T3 (da) 2003-09-03 2013-02-25 Stanford Res Inst Int Elektroaktive overfladedeformations- polymertransducere
US7732999B2 (en) 2006-11-03 2010-06-08 Danfoss A/S Direct acting capacitive transducer
US7880371B2 (en) 2006-11-03 2011-02-01 Danfoss A/S Dielectric composite and a method of manufacturing a dielectric composite
JP2008205180A (ja) 2007-02-20 2008-09-04 Fujitsu Ltd 半導体装置及びその製造方法
EP1976036A3 (de) 2007-03-30 2009-07-22 Tokai Rubber Industries, Ltd. Stellantrieb
WO2009018130A2 (en) 2007-07-27 2009-02-05 The Penn State Research Foundation Piezoelectric materials based on flexoelectric charge separation and their fabrication

Also Published As

Publication number Publication date
WO2003056287A1 (en) 2003-07-10
ES2299614T3 (es) 2008-06-01
EP1466149A1 (de) 2004-10-13
US7785905B2 (en) 2010-08-31
ATE384935T1 (de) 2008-02-15
US7573064B2 (en) 2009-08-11
US20080038860A1 (en) 2008-02-14
EP1466149B1 (de) 2008-01-23
AU2002351736A1 (en) 2003-07-15
DE60224844T2 (de) 2009-01-08
US20050104145A1 (en) 2005-05-19

Similar Documents

Publication Publication Date Title
DE60224844D1 (de) Dielektrisches betätigungsglied oder sensorstruktur und herstellungsverfahren
AU2003287874A1 (en) Tactile sensor element and sensor array
EP1753039A4 (de) Mehrschichtiges piezoelektrisches element und herstellungsverfahren dafür
EP1738217A4 (de) Flexibles elektrostatisches stellglied
WO2001004593A8 (en) Capacitive strain sensor and method for using the same
WO2004000717A3 (en) A micro-electromechanical variable capactitor
EP0756162A3 (de) Druckwandler
ATE432537T1 (de) Piezoelektrischer aktor
AU2003233327A1 (en) Method for the production of a monolithic multilayer actuator, monolithic multilayer actuator made of a piezoceramic or electrostrictive material, and external electrical contact for a monolithic multilayer actuator
WO2002005391A3 (en) Voltage and light induced strains in porous crystalline materials and uses thereof
EP1814170A3 (de) Piezoelektrischer/elektrostriktiver Aktor
WO2002037892A3 (de) Betätigungselement
EP1342988A3 (de) Kapazitiver Sensor
ATE517439T1 (de) Doppelt elektromechanisches element
JP2004531189A5 (de)
WO2002103816A3 (en) A piezoelectric actuator
WO2004019425A3 (de) Piezoaktor
JP2004503450A5 (de)
WO2004047192A3 (en) Electro-active actuator
EP1306216A3 (de) Piezoelektrische Vibratoreinheit
LU90783B1 (en) Foil-type switching element
DE50309047D1 (de) Piezoaktor
DE50113157D1 (de) Piezoaktor
EP1233462A3 (de) Vielschichtaktor mit versetzt angeordneten Kontaktflächen gleich gepolter Innenelektroden für ihre Aussenelektrode
AU2003244776A1 (en) Method of poling ferroelectric materials

Legal Events

Date Code Title Description
8364 No opposition during term of opposition