DE602005013864D1 - Schaltungsplatte für Tintenstrahldruckkopf, Verfahren zu ihrer Herstellung und damit ausgestatteter Tintenstrahldruckkopf - Google Patents

Schaltungsplatte für Tintenstrahldruckkopf, Verfahren zu ihrer Herstellung und damit ausgestatteter Tintenstrahldruckkopf

Info

Publication number
DE602005013864D1
DE602005013864D1 DE602005013864T DE602005013864T DE602005013864D1 DE 602005013864 D1 DE602005013864 D1 DE 602005013864D1 DE 602005013864 T DE602005013864 T DE 602005013864T DE 602005013864 T DE602005013864 T DE 602005013864T DE 602005013864 D1 DE602005013864 D1 DE 602005013864D1
Authority
DE
Germany
Prior art keywords
ink jet
jet printhead
therewith
making
circuit board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005013864T
Other languages
English (en)
Inventor
Toshiyasu Sakai
Teruo Ozaki
Kenji Ono
Ichiro Saito
Sakai Yokoyama
Satoshi Ibe
Kazuaki Shibata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE602005013864D1 publication Critical patent/DE602005013864D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14072—Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
DE602005013864T 2004-08-16 2005-08-12 Schaltungsplatte für Tintenstrahldruckkopf, Verfahren zu ihrer Herstellung und damit ausgestatteter Tintenstrahldruckkopf Active DE602005013864D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004236607A JP4182035B2 (ja) 2004-08-16 2004-08-16 インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド

Publications (1)

Publication Number Publication Date
DE602005013864D1 true DE602005013864D1 (de) 2009-05-28

Family

ID=35058718

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005013864T Active DE602005013864D1 (de) 2004-08-16 2005-08-12 Schaltungsplatte für Tintenstrahldruckkopf, Verfahren zu ihrer Herstellung und damit ausgestatteter Tintenstrahldruckkopf

Country Status (5)

Country Link
US (1) US7641316B2 (de)
EP (1) EP1627742B1 (de)
JP (1) JP4182035B2 (de)
CN (1) CN100406256C (de)
DE (1) DE602005013864D1 (de)

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JP4537246B2 (ja) * 2004-05-06 2010-09-01 キヤノン株式会社 インクジェット記録ヘッド用基体の製造方法及び該方法により製造された前記基体を用いた記録ヘッドの製造方法
JP4137027B2 (ja) * 2004-08-16 2008-08-20 キヤノン株式会社 インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド
JP4646602B2 (ja) * 2004-11-09 2011-03-09 キヤノン株式会社 インクジェット記録ヘッド用基板の製造方法
US8142678B2 (en) * 2005-08-23 2012-03-27 Canon Kabushiki Kaisha Perovskite type oxide material, piezoelectric element, liquid discharge head and liquid discharge apparatus using the same, and method of producing perovskite type oxide material
JP4926669B2 (ja) 2005-12-09 2012-05-09 キヤノン株式会社 インクジェットヘッドのクリーニング方法、インクジェットヘッドおよびインクジェット記録装置
US8438729B2 (en) * 2006-03-09 2013-05-14 Canon Kabushiki Kaisha Method of producing liquid discharge head
JP4963679B2 (ja) * 2007-05-29 2012-06-27 キヤノン株式会社 液体吐出ヘッド用基体及びその製造方法、並びに該基体を用いる液体吐出ヘッド
WO2008146894A1 (en) * 2007-05-29 2008-12-04 Canon Kabushiki Kaisha Substrate for liquid discharge head, method of manufacturing the same, and liquid discharge head using such substrate
US7862156B2 (en) * 2007-07-26 2011-01-04 Hewlett-Packard Development Company, L.P. Heating element
JP5311975B2 (ja) * 2007-12-12 2013-10-09 キヤノン株式会社 液体吐出ヘッド用基体及びこれを用いる液体吐出ヘッド
US8152279B2 (en) * 2008-06-18 2012-04-10 Canon Kabushiki Kaisha Liquid ejection head having substrate with nickel-containing layer
JP5312202B2 (ja) * 2008-06-20 2013-10-09 キヤノン株式会社 液体吐出ヘッド及びその製造方法
JP2015080918A (ja) 2013-10-23 2015-04-27 キヤノン株式会社 液体吐出ヘッドおよび該液体吐出ヘッドの製造方法
WO2015116050A1 (en) * 2014-01-29 2015-08-06 Hewlett-Packard Development Company, L.P. Thermal ink jet printhead
JP6504905B2 (ja) 2015-05-08 2019-04-24 キヤノン株式会社 液体吐出ヘッド及び該ヘッドのクリーニング方法、並びに記録装置
JP7163134B2 (ja) 2018-10-18 2022-10-31 キヤノン株式会社 液体吐出ヘッド、液体吐出ヘッドの製造方法および液体吐出装置
WO2020196349A1 (ja) * 2019-03-26 2020-10-01 京セラ株式会社 サーマルヘッドおよびサーマルプリンタ
US11247459B2 (en) * 2019-07-22 2022-02-15 Canon Kabushiki Kaisha Liquid charging apparatus, liquid charging method, and manufacturing method
CN110931629A (zh) * 2019-12-11 2020-03-27 重庆大学 一种用于高掺钪浓度氮化铝生长的结构

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JPS60116451A (ja) * 1983-11-30 1985-06-22 Canon Inc 液体噴射記録ヘツド
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US6357862B1 (en) * 1998-10-08 2002-03-19 Canon Kabushiki Kaisha Substrate for ink jet recording head, ink jet recording head and method of manufacture therefor
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US6688729B1 (en) 1999-06-04 2004-02-10 Canon Kabushiki Kaisha Liquid discharge head substrate, liquid discharge head, liquid discharge apparatus having these elements, manufacturing method of liquid discharge head, and driving method of the same
US6402302B1 (en) 1999-06-04 2002-06-11 Canon Kabushiki Kaisha Liquid discharge head, manufacturing method thereof, and microelectromechanical device
EP1057634B1 (de) 1999-06-04 2004-12-08 Canon Kabushiki Kaisha Flüssigkeitsausstosskopf, Flüsigkeitsausstossvorrichtung und Verfahren zur Herstellung eines Flüssigkeitsausstosskopfes
JP3592136B2 (ja) 1999-06-04 2004-11-24 キヤノン株式会社 液体吐出ヘッドおよびその製造方法と微小電気機械装置の製造方法
JP2001105599A (ja) 1999-10-05 2001-04-17 Canon Inc 液体吐出ヘッド、液体吐出ヘッドの製造方法および液体吐出装置
JP2001138521A (ja) 1999-11-11 2001-05-22 Canon Inc インクジェット記録ヘッドおよび該記録ヘッドを用いたインクジェット記録装置
JP2001287364A (ja) 2000-04-05 2001-10-16 Canon Inc インクジェットヘッド用基体、インクジェットヘッド及びインクジェット記録装置
JP4557386B2 (ja) * 2000-07-10 2010-10-06 キヤノン株式会社 記録ヘッド用基板の製造方法
JP2004195688A (ja) * 2002-12-16 2004-07-15 Fuji Xerox Co Ltd インクジェット用記録ヘッド及びその製造方法
JP3962719B2 (ja) 2002-12-27 2007-08-22 キヤノン株式会社 インクジェットヘッド用基体およびこれを用いるインクジェットヘッドとその製造方法
JP4537246B2 (ja) 2004-05-06 2010-09-01 キヤノン株式会社 インクジェット記録ヘッド用基体の製造方法及び該方法により製造された前記基体を用いた記録ヘッドの製造方法
JP4137027B2 (ja) 2004-08-16 2008-08-20 キヤノン株式会社 インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド
JP4630680B2 (ja) 2005-01-31 2011-02-09 キヤノン株式会社 半導体素子の製造方法およびインクジェット記録ヘッドの製造方法

Also Published As

Publication number Publication date
US20060033782A1 (en) 2006-02-16
CN100406256C (zh) 2008-07-30
CN1736714A (zh) 2006-02-22
EP1627742A1 (de) 2006-02-22
EP1627742B1 (de) 2009-04-15
JP4182035B2 (ja) 2008-11-19
JP2006051772A (ja) 2006-02-23
US7641316B2 (en) 2010-01-05

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8364 No opposition during term of opposition