DE602004026254D1 - Räumlicher Lichtmodulator mit IC-Aktuator und Methode zur Herstellung desselben - Google Patents

Räumlicher Lichtmodulator mit IC-Aktuator und Methode zur Herstellung desselben

Info

Publication number
DE602004026254D1
DE602004026254D1 DE602004026254T DE602004026254T DE602004026254D1 DE 602004026254 D1 DE602004026254 D1 DE 602004026254D1 DE 602004026254 T DE602004026254 T DE 602004026254T DE 602004026254 T DE602004026254 T DE 602004026254T DE 602004026254 D1 DE602004026254 D1 DE 602004026254D1
Authority
DE
Germany
Prior art keywords
actuator
making
same
light modulator
spatial light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602004026254T
Other languages
English (en)
Inventor
Pradeep K Govil
James G Tsacoyeanes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASML Holding NV
Original Assignee
ASML Holding NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASML Holding NV filed Critical ASML Holding NV
Publication of DE602004026254D1 publication Critical patent/DE602004026254D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/90—Methods

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
DE602004026254T 2003-08-29 2004-08-20 Räumlicher Lichtmodulator mit IC-Aktuator und Methode zur Herstellung desselben Active DE602004026254D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/651,048 US7385750B2 (en) 2003-08-29 2003-08-29 Spatial light modulator using an integrated circuit actuator

Publications (1)

Publication Number Publication Date
DE602004026254D1 true DE602004026254D1 (de) 2010-05-12

Family

ID=34104722

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004026254T Active DE602004026254D1 (de) 2003-08-29 2004-08-20 Räumlicher Lichtmodulator mit IC-Aktuator und Methode zur Herstellung desselben

Country Status (8)

Country Link
US (2) US7385750B2 (de)
EP (1) EP1510848B8 (de)
JP (2) JP2005078079A (de)
KR (1) KR100642178B1 (de)
CN (1) CN100570428C (de)
DE (1) DE602004026254D1 (de)
SG (1) SG130940A1 (de)
TW (1) TWI335304B (de)

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KR100818194B1 (ko) * 2005-12-14 2008-03-31 삼성전기주식회사 리본의 정확한 임계치수 구현이 가능한 광변조기 소자의제조 방법
KR100861055B1 (ko) * 2005-12-14 2008-09-30 삼성전기주식회사 복수의 구동 소자를 가진 광변조기 소자
KR100782003B1 (ko) * 2005-12-26 2007-12-06 삼성전기주식회사 접합층을 가지는 광변조기 소자
KR100809329B1 (ko) * 2006-09-08 2008-03-07 삼성전자주식회사 광학계의 수차를 보정하기 위한 미러를 포함하는포토리소그래피 장치 및 수차 보정부를 포함하는 미러
KR100827619B1 (ko) * 2006-10-11 2008-05-07 삼성전기주식회사 영상 왜곡 보정 방법 및 그 장치
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US7755061B2 (en) * 2007-11-07 2010-07-13 Kla-Tencor Technologies Corporation Dynamic pattern generator with cup-shaped structure
US8905610B2 (en) 2009-01-26 2014-12-09 Flex Lighting Ii, Llc Light emitting device comprising a lightguide film
US8253119B1 (en) 2009-07-27 2012-08-28 Kla-Tencor Corporation Well-based dynamic pattern generator
US8089051B2 (en) * 2010-02-24 2012-01-03 Kla-Tencor Corporation Electron reflector with multiple reflective modes
US9651729B2 (en) 2010-04-16 2017-05-16 Flex Lighting Ii, Llc Reflective display comprising a frontlight with extraction features and a light redirecting optical element
US8373144B1 (en) 2010-08-31 2013-02-12 Kla-Tencor Corporation Quasi-annular reflective electron patterning device
US8913241B2 (en) * 2012-07-23 2014-12-16 Corning Incorporated Hyperspectral imaging system and method for imaging a remote object
IL224301A0 (en) 2013-01-17 2013-06-27 Rafael Advanced Defense Sys New mode division multiplexing for an optical communication system
US11009646B2 (en) 2013-03-12 2021-05-18 Azumo, Inc. Film-based lightguide with interior light directing edges in a light mixing region
KR102399830B1 (ko) * 2015-03-16 2022-05-20 삼성디스플레이 주식회사 전기활성 폴리머 액츄에이터의 제조 방법
KR20190100974A (ko) * 2017-01-20 2019-08-29 어플라이드 머티어리얼스, 인코포레이티드 안티-블레이즈드 dmd를 이용한 해상도 향상 디지털 리소그래피
CN107728312A (zh) * 2017-10-24 2018-02-23 上海天马微电子有限公司 一种空间光调制器及显示装置
WO2020142731A1 (en) 2019-01-03 2020-07-09 Flex Lighting Ii, Llc Reflective display comprising a lightguide and light turning film creating multiple illumination peaks
CN113678036B (zh) * 2019-01-09 2024-02-02 阿祖莫公司 包括以不同的折叠角折叠的耦合光导的反射型显示器
US11513274B2 (en) 2019-08-01 2022-11-29 Azumo, Inc. Lightguide with a light input edge between lateral edges of a folded strip
US11899198B2 (en) 2022-05-23 2024-02-13 Applied Materials, Inc. Controlling light source wavelengths for selectable phase shifts between pixels in digital lithography systems

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US7385750B2 (en) * 2003-08-29 2008-06-10 Asml Holding N.V. Spatial light modulator using an integrated circuit actuator

Also Published As

Publication number Publication date
KR20050021920A (ko) 2005-03-07
US20050046921A1 (en) 2005-03-03
EP1510848B1 (de) 2010-03-31
JP2008052296A (ja) 2008-03-06
JP4694548B2 (ja) 2011-06-08
EP1510848B8 (de) 2010-05-19
TW200508142A (en) 2005-03-01
SG130940A1 (en) 2007-04-26
CN100570428C (zh) 2009-12-16
TWI335304B (en) 2011-01-01
US7385750B2 (en) 2008-06-10
CN1651968A (zh) 2005-08-10
JP2005078079A (ja) 2005-03-24
US7525718B2 (en) 2009-04-28
US20080231937A1 (en) 2008-09-25
EP1510848A1 (de) 2005-03-02
KR100642178B1 (ko) 2006-11-10

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