DE3854865T2 - Selbsttätiges laminographie-system zur inspektion von elektronika - Google Patents

Selbsttätiges laminographie-system zur inspektion von elektronika

Info

Publication number
DE3854865T2
DE3854865T2 DE3854865T DE3854865T DE3854865T2 DE 3854865 T2 DE3854865 T2 DE 3854865T2 DE 3854865 T DE3854865 T DE 3854865T DE 3854865 T DE3854865 T DE 3854865T DE 3854865 T2 DE3854865 T2 DE 3854865T2
Authority
DE
Germany
Prior art keywords
computer system
item
synchronization
electron beam
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE3854865T
Other languages
English (en)
Other versions
DE3854865D1 (de
Inventor
Bruce Baker
Robert Corey
John Adams
Edward Ross
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Four PI Systems Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Four PI Systems Corp filed Critical Four PI Systems Corp
Publication of DE3854865D1 publication Critical patent/DE3854865D1/de
Application granted granted Critical
Publication of DE3854865T2 publication Critical patent/DE3854865T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/043—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using fluoroscopic examination, with visual observation or video transmission of fluoroscopic images
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/044—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using laminography or tomosynthesis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/304—Contactless testing of printed or hybrid circuits
DE3854865T 1987-10-30 1988-10-04 Selbsttätiges laminographie-system zur inspektion von elektronika Expired - Fee Related DE3854865T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/115,171 US4926452A (en) 1987-10-30 1987-10-30 Automated laminography system for inspection of electronics
PCT/US1988/003423 WO1989004477A1 (en) 1987-10-30 1988-10-04 Automated laminography system for inspection of electronics

Publications (2)

Publication Number Publication Date
DE3854865D1 DE3854865D1 (de) 1996-02-15
DE3854865T2 true DE3854865T2 (de) 1996-06-13

Family

ID=22359695

Family Applications (1)

Application Number Title Priority Date Filing Date
DE3854865T Expired - Fee Related DE3854865T2 (de) 1987-10-30 1988-10-04 Selbsttätiges laminographie-system zur inspektion von elektronika

Country Status (8)

Country Link
US (1) US4926452A (de)
EP (1) EP0355128B1 (de)
JP (1) JPH06100451B2 (de)
AT (1) ATE132627T1 (de)
CA (1) CA1323453C (de)
DE (1) DE3854865T2 (de)
IL (1) IL87934A0 (de)
WO (1) WO1989004477A1 (de)

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US7729468B2 (en) 2004-02-27 2010-06-01 Kabushiki Kaisha Toshiba X-ray tomograph and stereoradioscopic image construction equipment
DE102010010723A1 (de) 2010-03-09 2011-09-15 Yxlon International Gmbh Laminographieanlage

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CA1323453C (en) 1993-10-19
WO1989004477A1 (en) 1989-05-18
EP0355128B1 (de) 1996-01-03
JPH06100451B2 (ja) 1994-12-12
EP0355128A1 (de) 1990-02-28
IL87934A0 (en) 1989-03-31
EP0355128A4 (en) 1991-07-17
ATE132627T1 (de) 1996-01-15
JPH02501411A (ja) 1990-05-17
DE3854865D1 (de) 1996-02-15
US4926452A (en) 1990-05-15

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