DE3685331D1 - Verfahren zur pruefung von platinen fuer integrierte schaltungen mittels eines lasers im vakuum. - Google Patents

Verfahren zur pruefung von platinen fuer integrierte schaltungen mittels eines lasers im vakuum.

Info

Publication number
DE3685331D1
DE3685331D1 DE8686114711T DE3685331T DE3685331D1 DE 3685331 D1 DE3685331 D1 DE 3685331D1 DE 8686114711 T DE8686114711 T DE 8686114711T DE 3685331 T DE3685331 T DE 3685331T DE 3685331 D1 DE3685331 D1 DE 3685331D1
Authority
DE
Germany
Prior art keywords
selected pad
pads
emission
laser
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8686114711T
Other languages
English (en)
Inventor
Johannes Georg Beha
Armin Blacha
Rolf Clauberg
Hugo K Seitz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3685331D1 publication Critical patent/DE3685331D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE8686114711T 1986-10-23 1986-10-23 Verfahren zur pruefung von platinen fuer integrierte schaltungen mittels eines lasers im vakuum. Expired - Fee Related DE3685331D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP86114711A EP0264481B1 (de) 1986-10-23 1986-10-23 Verfahren zur Prüfung von Platinen für integrierte Schaltungen mittels eines Lasers im Vakuum

Publications (1)

Publication Number Publication Date
DE3685331D1 true DE3685331D1 (de) 1992-06-17

Family

ID=8195524

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686114711T Expired - Fee Related DE3685331D1 (de) 1986-10-23 1986-10-23 Verfahren zur pruefung von platinen fuer integrierte schaltungen mittels eines lasers im vakuum.

Country Status (4)

Country Link
US (1) US4843329A (de)
EP (1) EP0264481B1 (de)
JP (1) JPH0614084B2 (de)
DE (1) DE3685331D1 (de)

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2226643B (en) * 1988-12-22 1992-11-18 Stc Plc Device testing apparatus and method
US4978908A (en) * 1989-03-22 1990-12-18 Texas Instruments Incorporated Scanning electron microscope based parametric testing method and apparatus
US5159752A (en) * 1989-03-22 1992-11-03 Texas Instruments Incorporated Scanning electron microscope based parametric testing method and apparatus
US4970461A (en) * 1989-06-26 1990-11-13 Lepage Andrew J Method and apparatus for non-contact opens/shorts testing of electrical circuits
US5017863A (en) * 1989-10-20 1991-05-21 Digital Equipment Corporation Electro-emissive laser stimulated test
EP0429739B1 (de) * 1989-11-28 1993-10-27 International Business Machines Corporation Verfahren zur Inspektion von Durchkontakt-Stiften in integrierten Schaltungspackungen mittels Photoemission
US5039938A (en) * 1990-06-21 1991-08-13 Hughes Aircraft Company Phosphor glow testing of hybrid substrates
US5122753A (en) * 1990-12-20 1992-06-16 Microelectronics And Computer Technology Corporation Method of testing electrical components for defects
US5216359A (en) * 1991-01-18 1993-06-01 University Of North Carolina Electro-optical method and apparatus for testing integrated circuits
US5301012A (en) * 1992-10-30 1994-04-05 International Business Machines Corporation Optical technique for rapid inspection of via underetch and contamination
US5747999A (en) * 1994-08-15 1998-05-05 Okano Hitech Co., Ltd. Feed control element used in substrate inspection and method and apparatus for inspecting substrates
US5587664A (en) * 1995-07-12 1996-12-24 Exsight Ltd. Laser-induced metallic plasma for non-contact inspection
US5959459A (en) * 1996-12-10 1999-09-28 International Business Machines Corporation Defect monitor and method for automated contactless inline wafer inspection
DE19742055C2 (de) * 1997-09-24 2000-02-24 Ita Ingb Testaufgaben Gmbh Vorrichtung zum Testen von Schaltungsplatinen
US6608494B1 (en) * 1998-12-04 2003-08-19 Advanced Micro Devices, Inc. Single point high resolution time resolved photoemission microscopy system and method
US6448802B1 (en) * 1998-12-21 2002-09-10 Intel Corporation Photosensors for testing an integrated circuit
US6512385B1 (en) * 1999-07-26 2003-01-28 Paul Pfaff Method for testing a device under test including the interference of two beams
US6359451B1 (en) 2000-02-11 2002-03-19 Image Graphics Incorporated System for contactless testing of printed circuit boards
WO2001058558A2 (en) 2000-02-14 2001-08-16 Eco 3 Max Inc. Process for removing volatile organic compounds from an air stream and apparatus therefor
US6469529B1 (en) * 2000-05-30 2002-10-22 Advanced Micro Devices, Inc. Time-resolved emission microscopy system
US6590398B1 (en) 2000-07-06 2003-07-08 Honeywell Advanced Circuits, Inc. Fixture-less bare board tester
TWI221922B (en) * 2001-02-19 2004-10-11 Nihon Densan Read Kabushiki Ka A circuit board testing apparatus and method for testing a circuit board
US7202690B2 (en) 2001-02-19 2007-04-10 Nidec-Read Corporation Substrate inspection device and substrate inspecting method
US7733499B2 (en) 2001-12-06 2010-06-08 Attofemto, Inc. Method for optically testing semiconductor devices
US9952161B2 (en) 2001-12-06 2018-04-24 Attofemto, Inc. Methods for obtaining and analyzing digital interferometric data for computer testing and developing semiconductor and anisotropic devices and materials
US7206078B2 (en) * 2002-05-03 2007-04-17 Attofemto, Inc. Non-destructive testing system using a laser beam
US8462350B2 (en) 2001-12-06 2013-06-11 Attofemto, Inc. Optically enhanced holographic interferometric testing methods for the development and evaluation of semiconductor devices, materials, wafers, and for monitoring all phases of development and manufacture
US7400411B2 (en) * 2001-12-06 2008-07-15 Attofemto, Inc. Method for optically testing semiconductor devices
US6774990B2 (en) * 2002-08-23 2004-08-10 Intel Corporation Method to inspect patterns with high resolution photoemission
US7030977B2 (en) * 2003-05-06 2006-04-18 Visteon Global Technologies, Inc. Non-contact optical system for production testing of electronic assemblies
KR100982830B1 (ko) 2003-06-30 2010-09-16 오에이치티 가부시끼가이샤 회로 기판 패턴의 단락 검사 장치 및 단락 검사 방법
FR2881832B1 (fr) * 2005-02-04 2007-04-20 Beamind Soc Par Actions Simpli Procede de test de conducteurs electriques par effet photoelectrique, au moyen d'une plaque separatrice
JP5013754B2 (ja) * 2005-06-13 2012-08-29 キヤノン株式会社 電磁波検出装置、放射線検出装置、放射線検出システム及びレーザ加工方法
CN100502021C (zh) * 2005-06-13 2009-06-17 佳能株式会社 电磁辐射检测设备、辐射检测设备和系统及激光处理方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3436651A (en) * 1966-12-23 1969-04-01 Texas Instruments Inc Electronic method and apparatus utilizing photoemissive means for testing circuit board continuity
GB1594597A (en) * 1977-02-11 1981-07-30 Lintech Instr Ltd Electron probe testing analysis and fault diagnosis in electronic circuits
US4640002A (en) * 1982-02-25 1987-02-03 The University Of Delaware Method and apparatus for increasing the durability and yield of thin film photovoltaic devices
IL68568A0 (en) * 1983-05-04 1983-09-30 Optrotech Ltd Apparatus and method for automatic inspection of printed circuitboards
US4706018A (en) * 1984-11-01 1987-11-10 International Business Machines Corporation Noncontact dynamic tester for integrated circuits
US4670710A (en) * 1985-03-29 1987-06-02 International Business Machines Corporation Noncontact full-line dynamic AC tester for integrated circuits
US4644264A (en) * 1985-03-29 1987-02-17 International Business Machines Corporation Photon assisted tunneling testing of passivated integrated circuits
JPS61267336A (ja) * 1985-05-21 1986-11-26 Matsushita Electric Ind Co Ltd 半導体装置の検査方法および検査装置
US4703260A (en) * 1985-09-23 1987-10-27 International Business Machines Corporation Full chip integrated circuit tester

Also Published As

Publication number Publication date
EP0264481A1 (de) 1988-04-27
EP0264481B1 (de) 1992-05-13
JPS63115071A (ja) 1988-05-19
US4843329A (en) 1989-06-27
JPH0614084B2 (ja) 1994-02-23

Similar Documents

Publication Publication Date Title
DE3685331D1 (de) Verfahren zur pruefung von platinen fuer integrierte schaltungen mittels eines lasers im vakuum.
DE3683053D1 (de) Verfahren zur kontaktfreien pruefung von platinen fuer integrierte schaltungen unter atmosphaerischen bedingungen.
US3796947A (en) Electron beam testing of film integrated circuits
US6859052B1 (en) Electric test of the interconnection of electric conductors on a substrate
ATE25151T1 (de) Untersuchungs- und pruefungsverfahren fuer eine elektrische vorrichtung in der art einer integrierten oder gedruckten schaltung.
EP0216077B1 (de) Anordnung zur Prüfung eines Chips in seiner Gesamtheit
CA1220559A (en) Noncontact dynamic tester for integrated circuits
CA2027190A1 (en) Electro-emissive laser stimulated test
MX24356A (es) Metodo y sistema de electrodo sensible a la determinacion electroquimica de un analito o una oxireductaza
DE50000836D1 (de) Verfahren zum einbringen von durchkontaktierungslöchern in ein beidseitig mit metallschichten versehenes, elektrisch isolierendes basismaterial
ATE49678T1 (de) Photoresistbelichtungsverfahren und geraet unter verwendung eines elektronenstrahls, dessen energie und ladung gesteuert werden.
US4621232A (en) Inspection of unsintered single layer or multilayer ceramics using a broad area electrical contacting structure
ATE31376T1 (de) Einrichtung zum verhindern von beschaedigungen von bausteinen bzw. leiterbahnen auf einer leiterplatte.
EP0072938A2 (de) Verfahren zum Verbinden eines Halbleiterchips mit einem Chipträger
SE8402518L (sv) Forfarande for att inspektera integrerade kretsar, eller andra objekt
US3763425A (en) Method of testing the continuity of an electrical conductor by use of an electron beam converted from high to low energy
KR19990028830A (ko) 비 접촉검사용 레이저 유도 금속성 플라즈마
JPS5574147A (en) Terminal connection
US5030909A (en) Method and system for contactless testing of electronic activity in an integrated circuit chip-to-test after passivation thereof
ES466448A1 (es) Un metodo perfeccionado de implantacion ionica en pastillas de material semiconductor, en la fabricacion de circuitos integrados.
KR960005943A (ko) 반도체 소자의 격리방법
JPS5773934A (en) Sample holder for electron beam exposure
JPS5627927A (en) Location in electron beam injection
JPS5390876A (en) Inspecting method for integrated semiconductor circuit device
DK462383A (da) Fremgangsmaade til elektroplettering

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee