DE3583705D1 - Verfahren und vorrichtung zum nachweis von thermischen wellen. - Google Patents

Verfahren und vorrichtung zum nachweis von thermischen wellen.

Info

Publication number
DE3583705D1
DE3583705D1 DE8585303511T DE3583705T DE3583705D1 DE 3583705 D1 DE3583705 D1 DE 3583705D1 DE 8585303511 T DE8585303511 T DE 8585303511T DE 3583705 T DE3583705 T DE 3583705T DE 3583705 D1 DE3583705 D1 DE 3583705D1
Authority
DE
Germany
Prior art keywords
detecting thermal
thermal waves
waves
detecting
thermal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8585303511T
Other languages
English (en)
Inventor
Allan Rosencwaig
Walter Lee Smith
Jon Opsal
David L Willenborg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Therma Wave Inc
Original Assignee
Therma Wave Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Therma Wave Inc filed Critical Therma Wave Inc
Application granted granted Critical
Publication of DE3583705D1 publication Critical patent/DE3583705D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/72—Investigating presence of flaws
DE8585303511T 1984-05-21 1985-05-20 Verfahren und vorrichtung zum nachweis von thermischen wellen. Expired - Lifetime DE3583705D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/612,075 US4579463A (en) 1984-05-21 1984-05-21 Detecting thermal waves to evaluate thermal parameters

Publications (1)

Publication Number Publication Date
DE3583705D1 true DE3583705D1 (de) 1991-09-12

Family

ID=24451614

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8585303511T Expired - Lifetime DE3583705D1 (de) 1984-05-21 1985-05-20 Verfahren und vorrichtung zum nachweis von thermischen wellen.

Country Status (4)

Country Link
US (1) US4579463A (de)
EP (1) EP0165711B1 (de)
JP (1) JPS612046A (de)
DE (1) DE3583705D1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113358697A (zh) * 2021-04-27 2021-09-07 东南大学 基于非线性调频的高分辨率光热脉冲压缩热成像检测方法

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US6673637B2 (en) * 2000-09-20 2004-01-06 Kla-Tencor Technologies Methods and systems for determining a presence of macro defects and overlay of a specimen
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US6694284B1 (en) 2000-09-20 2004-02-17 Kla-Tencor Technologies Corp. Methods and systems for determining at least four properties of a specimen
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US6782337B2 (en) * 2000-09-20 2004-08-24 Kla-Tencor Technologies Corp. Methods and systems for determining a critical dimension an a presence of defects on a specimen
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113358697A (zh) * 2021-04-27 2021-09-07 东南大学 基于非线性调频的高分辨率光热脉冲压缩热成像检测方法
CN113358697B (zh) * 2021-04-27 2022-03-29 东南大学 基于非线性调频的高分辨率光热脉冲压缩热成像检测方法

Also Published As

Publication number Publication date
US4579463A (en) 1986-04-01
JPH0347703B2 (de) 1991-07-22
EP0165711A3 (en) 1987-10-28
JPS612046A (ja) 1986-01-08
EP0165711A2 (de) 1985-12-27
EP0165711B1 (de) 1991-08-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: THERMA-WAVE, INC. (N.D.GES.D. STAATES DELAWARE), F

8328 Change in the person/name/address of the agent

Free format text: BLUMBACH, P., DIPL.-ING., 65193 WIESBADEN WESER, W., DIPL.-PHYS. DR.RER.NAT. KRAMER, R., DIPL.-ING., 81245 MUENCHEN ZWIRNER, G., DIPL.-ING. DIPL.-WIRTSCH.-ING., 65193 WIESBADEN HOFFMANN, E., DIPL.-ING., PAT.-ANWAELTE, 82166 GRAEFELFING

8310 Action for declaration of annulment
8311 Complete invalidation