DE3574997D1 - Pulsierendes plasmaverfahren. - Google Patents
Pulsierendes plasmaverfahren.Info
- Publication number
- DE3574997D1 DE3574997D1 DE8585301251T DE3574997T DE3574997D1 DE 3574997 D1 DE3574997 D1 DE 3574997D1 DE 8585301251 T DE8585301251 T DE 8585301251T DE 3574997 T DE3574997 T DE 3574997T DE 3574997 D1 DE3574997 D1 DE 3574997D1
- Authority
- DE
- Germany
- Prior art keywords
- plasma process
- pulsating plasma
- pulse repetition
- gas
- pulsating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F4/00—Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/515—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using pulsed discharges
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Water Treatment By Electricity Or Magnetism (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Absorbent Articles And Supports Therefor (AREA)
- Drying Of Semiconductors (AREA)
- Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
- Luminescent Compositions (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB8405647 | 1984-03-03 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3574997D1 true DE3574997D1 (de) | 1990-02-01 |
Family
ID=10557570
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8585301251T Expired - Lifetime DE3574997D1 (de) | 1984-03-03 | 1985-02-25 | Pulsierendes plasmaverfahren. |
Country Status (6)
Country | Link |
---|---|
US (1) | US4824690A (de) |
EP (1) | EP0154483B1 (de) |
JP (1) | JPH0726212B2 (de) |
AT (1) | ATE49023T1 (de) |
DE (1) | DE3574997D1 (de) |
GB (1) | GB2155862B (de) |
Families Citing this family (48)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2291888B (en) * | 1984-06-08 | 1996-06-26 | Barr & Stroud Ltd | Optical coating |
JPS62216637A (ja) * | 1986-03-19 | 1987-09-24 | Anelva Corp | プラズマ処理装置 |
DE3629000C1 (de) * | 1986-08-27 | 1987-10-29 | Nukem Gmbh | Verfahren und Vorrichtung zum Ausbilden einer Schicht durch plasmachemischen Prozess |
DE3700633C2 (de) * | 1987-01-12 | 1997-02-20 | Reinar Dr Gruen | Verfahren und Vorrichtung zum schonenden Beschichten elektrisch leitender Gegenstände mittels Plasma |
DE3841730C2 (de) * | 1988-12-10 | 1997-06-19 | Widia Gmbh | Verfahren zum Beschichten eines metallischen Grundkörpers mit einem nichtleitenden Beschichtungsmaterial |
KR930011413B1 (ko) | 1990-09-25 | 1993-12-06 | 가부시키가이샤 한도오따이 에네루기 겐큐쇼 | 펄스형 전자파를 사용한 플라즈마 cvd 법 |
JP3042127B2 (ja) * | 1991-09-02 | 2000-05-15 | 富士電機株式会社 | 酸化シリコン膜の製造方法および製造装置 |
CA2077773A1 (en) * | 1991-10-25 | 1993-04-26 | Thomas R. Anthony | Microwave, rf, or ac/dc discharge assisted flame deposition of cvd diamond |
US5442160A (en) * | 1992-01-22 | 1995-08-15 | Avco Corporation | Microwave fiber coating apparatus |
US5525392A (en) * | 1992-12-10 | 1996-06-11 | International Business Machines Corporation | Magnetic recording medium having a fluorinated polymeric protective layer formed by an ion beam |
US5380566A (en) * | 1993-06-21 | 1995-01-10 | Applied Materials, Inc. | Method of limiting sticking of body to susceptor in a deposition treatment |
KR100326488B1 (ko) * | 1993-06-21 | 2002-06-20 | 조셉 제이. 스위니 | 플라즈마화학기상증착법 |
US5399388A (en) * | 1994-02-28 | 1995-03-21 | The United States Of America As Represented By The Secretary Of The Navy | Method of forming thin films on substrates at low temperatures |
DE4429380C1 (de) * | 1994-08-15 | 1996-04-25 | Biotronik Mess & Therapieg | Verfahren zur Herstellung einer nichtkollabierenden intravasalen Gefäßprothese (Stent) |
US5643639A (en) * | 1994-12-22 | 1997-07-01 | Research Triangle Institute | Plasma treatment method for treatment of a large-area work surface apparatus and methods |
US5543605A (en) * | 1995-04-13 | 1996-08-06 | Avco Corporation | Microwave fiber coating apparatus |
US5983828A (en) * | 1995-10-13 | 1999-11-16 | Mattson Technology, Inc. | Apparatus and method for pulsed plasma processing of a semiconductor substrate |
US6794301B2 (en) | 1995-10-13 | 2004-09-21 | Mattson Technology, Inc. | Pulsed plasma processing of semiconductor substrates |
US6253704B1 (en) * | 1995-10-13 | 2001-07-03 | Mattson Technology, Inc. | Apparatus and method for pulsed plasma processing of a semiconductor substrate |
KR970064327A (ko) * | 1996-02-27 | 1997-09-12 | 모리시다 요이치 | 고주파 전력 인가장치, 플라즈마 발생장치, 플라즈마 처리장치, 고주파 전력 인가방법, 플라즈마 발생방법 및 플라즈마 처리방법 |
DE19640528A1 (de) * | 1996-10-01 | 1998-04-02 | Roland Dr Gesche | Verfahren, Vorrichtung und Behälter für die Behandlung von Teilen mit vakuumtechnischen Prozessen |
US5849628A (en) * | 1996-12-09 | 1998-12-15 | Micron Technology, Inc. | Method of producing rough polysilicon by the use of pulsed plasma chemical vapor deposition and products produced by same |
US6303523B2 (en) | 1998-02-11 | 2001-10-16 | Applied Materials, Inc. | Plasma processes for depositing low dielectric constant films |
US6593247B1 (en) | 1998-02-11 | 2003-07-15 | Applied Materials, Inc. | Method of depositing low k films using an oxidizing plasma |
US6287990B1 (en) | 1998-02-11 | 2001-09-11 | Applied Materials, Inc. | CVD plasma assisted low dielectric constant films |
US6660656B2 (en) | 1998-02-11 | 2003-12-09 | Applied Materials Inc. | Plasma processes for depositing low dielectric constant films |
US6054379A (en) | 1998-02-11 | 2000-04-25 | Applied Materials, Inc. | Method of depositing a low k dielectric with organo silane |
US6627532B1 (en) * | 1998-02-11 | 2003-09-30 | Applied Materials, Inc. | Method of decreasing the K value in SiOC layer deposited by chemical vapor deposition |
US6147009A (en) | 1998-06-29 | 2000-11-14 | International Business Machines Corporation | Hydrogenated oxidized silicon carbon material |
US5985375A (en) * | 1998-09-03 | 1999-11-16 | Micron Technology, Inc. | Method for pulsed-plasma enhanced vapor deposition |
US6355571B1 (en) | 1998-11-17 | 2002-03-12 | Applied Materials, Inc. | Method and apparatus for reducing copper oxidation and contamination in a semiconductor device |
US20010049181A1 (en) | 1998-11-17 | 2001-12-06 | Sudha Rathi | Plasma treatment for cooper oxide reduction |
DE19911046B4 (de) * | 1999-03-12 | 2006-10-26 | Robert Bosch Gmbh | Plasmaverfahren |
US6821571B2 (en) | 1999-06-18 | 2004-11-23 | Applied Materials Inc. | Plasma treatment to enhance adhesion and to minimize oxidation of carbon-containing layers |
DE60041341D1 (de) * | 1999-08-17 | 2009-02-26 | Tokyo Electron Ltd | Gepulstes plasmabehandlungsverfahren und vorrichtung |
US6794311B2 (en) | 2000-07-14 | 2004-09-21 | Applied Materials Inc. | Method and apparatus for treating low k dielectric layers to reduce diffusion |
KR100615410B1 (ko) * | 2000-08-02 | 2006-08-25 | 인터내셔널 비지네스 머신즈 코포레이션 | 저 유전 상수 다상 물질 및 그 증착 방법 |
US6709721B2 (en) | 2001-03-28 | 2004-03-23 | Applied Materials Inc. | Purge heater design and process development for the improvement of low k film properties |
PT1253216E (pt) * | 2001-04-27 | 2004-04-30 | Europ Economic Community | Metodo e aparelhagem para tratamento sequencial por plasma |
US7199328B2 (en) * | 2001-08-29 | 2007-04-03 | Tokyo Electron Limited | Apparatus and method for plasma processing |
GB0211354D0 (en) * | 2002-05-17 | 2002-06-26 | Surface Innovations Ltd | Atomisation of a precursor into an excitation medium for coating a remote substrate |
GB0212848D0 (en) * | 2002-06-01 | 2002-07-17 | Surface Innovations Ltd | Introduction of liquid/solid slurry into an exciting medium |
US8216986B2 (en) | 2003-10-15 | 2012-07-10 | Kajal Parekh | Low-phosphorous lubricant additive |
US8216982B2 (en) | 2003-10-15 | 2012-07-10 | Kajal Parekh | Low-phosphorous lubricants |
US20070193935A1 (en) * | 2006-01-13 | 2007-08-23 | Platinum Research Organization, L.P. | System and method for providing continuous, in-situ, antiwear chemistry to engine oil using a filter system |
KR20080082775A (ko) * | 2007-03-09 | 2008-09-12 | 삼성전자주식회사 | 액정표시장치와 그 제조방법 |
WO2011163592A2 (en) | 2010-06-24 | 2011-12-29 | Board Of Regents, The University Of Texas System | Alkylphoshorofluoridothioates having low wear volume and methods for synthesizing and using same |
WO2013169779A1 (en) | 2012-05-07 | 2013-11-14 | Board Of Regents, The University Of Texas System | Synergistic mixtures of ionic liquids with other ionic liquids and/or with ashless thiophosphates for antiwear and/or friction reduction applications |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3108900A (en) * | 1959-04-13 | 1963-10-29 | Cornelius A Papp | Apparatus and process for producing coatings on metals |
GB1582231A (en) * | 1976-08-13 | 1981-01-07 | Nat Res Dev | Application of a layer of carbonaceous material to a surface |
JPS55155034A (en) * | 1979-05-21 | 1980-12-03 | Shin Etsu Chem Co Ltd | Plasma treatment of surface of polyvinyl chloride resin molded article |
DE3010314C2 (de) * | 1980-03-18 | 1982-01-07 | Beerwald, Hans, Dr.Rer.Nat., 5370 Kall | Verfahren zur innenbeschichtung von elektrisch nicht leitfähigen Rohren mittels Gasentladungen |
GB2079267B (en) * | 1980-07-11 | 1983-10-26 | Ass Elect Ind | Manufacture of optical fibre preforms |
GB2105729B (en) * | 1981-09-15 | 1985-06-12 | Itt Ind Ltd | Surface processing of a substrate material |
US4422897A (en) * | 1982-05-25 | 1983-12-27 | Massachusetts Institute Of Technology | Process for selectively etching silicon |
US4401507A (en) * | 1982-07-14 | 1983-08-30 | Advanced Semiconductor Materials/Am. | Method and apparatus for achieving spatially uniform externally excited non-thermal chemical reactions |
US4500563A (en) * | 1982-12-15 | 1985-02-19 | Pacific Western Systems, Inc. | Independently variably controlled pulsed R.F. plasma chemical vapor processing |
JPS59128281A (ja) * | 1982-12-29 | 1984-07-24 | 信越化学工業株式会社 | 炭化けい素被覆物の製造方法 |
DE3326020A1 (de) * | 1983-07-20 | 1985-01-31 | Schott Glaswerke, 6500 Mainz | Plasmaverfahren zur chemischen behandlung von objekten und substanzen |
US4510172A (en) * | 1984-05-29 | 1985-04-09 | International Business Machines Corporation | Technique for thin insulator growth |
-
1985
- 1985-02-25 DE DE8585301251T patent/DE3574997D1/de not_active Expired - Lifetime
- 1985-02-25 AT AT85301251T patent/ATE49023T1/de not_active IP Right Cessation
- 1985-02-25 EP EP85301251A patent/EP0154483B1/de not_active Expired
- 1985-03-01 GB GB08505319A patent/GB2155862B/en not_active Expired
- 1985-03-01 JP JP60040981A patent/JPH0726212B2/ja not_active Expired - Lifetime
-
1987
- 1987-11-03 US US07/117,923 patent/US4824690A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0726212B2 (ja) | 1995-03-22 |
ATE49023T1 (de) | 1990-01-15 |
EP0154483A2 (de) | 1985-09-11 |
GB8505319D0 (en) | 1985-04-03 |
GB2155862A (en) | 1985-10-02 |
EP0154483B1 (de) | 1989-12-27 |
GB2155862B (en) | 1987-06-24 |
EP0154483A3 (en) | 1986-08-20 |
JPS60215777A (ja) | 1985-10-29 |
US4824690A (en) | 1989-04-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: NORTHERN TELECOM LTD., MONTREAL, QUEBEC, CA |
|
8328 | Change in the person/name/address of the agent |
Free format text: KOCH, G., DIPL.-ING. HAIBACH, T., DIPL.-PHYS. DR.RER.NAT. FELDKAMP, R., DIPL.-ING., PAT.-ANWAELTE, 80339 MUENCHEN |