DE10345299B3 - High accuracy, combined pressure- and temperature sensor used in injection mold for plastic, comprises infra red transmission system and sensor, with piezoelectric axial pressure sensor - Google Patents

High accuracy, combined pressure- and temperature sensor used in injection mold for plastic, comprises infra red transmission system and sensor, with piezoelectric axial pressure sensor Download PDF

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Publication number
DE10345299B3
DE10345299B3 DE2003145299 DE10345299A DE10345299B3 DE 10345299 B3 DE10345299 B3 DE 10345299B3 DE 2003145299 DE2003145299 DE 2003145299 DE 10345299 A DE10345299 A DE 10345299A DE 10345299 B3 DE10345299 B3 DE 10345299B3
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Prior art keywords
tube
pressure
window
temperature sensor
infra red
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DE2003145299
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German (de)
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Erhard Giese
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/041—Mountings in enclosures or in a particular environment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0818—Waveguides
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0875—Windows; Arrangements for fastening thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0092—Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/08—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of piezoelectric devices, i.e. electric circuits therefor

Abstract

An infra red transparent window (10) is located at one end, in a bore of the casing (15). Infra red radiation arriving, is led through the tube (11) by reflection at its inner surface (12), to an infra red measurement element (13). This is located at the far end of the tube. The pressure measurement section is formed by a piezoelectric quartz component (19). An infra red transparent window (10) is located at one end, in a bore of the casing (15). Infra red radiation arriving, is led through the tube (11) by reflection at its inner surface (12), to an infra red measurement element (13). This is located at the far end of the tube. The pressure measurement section is formed by a piezoelectric quartz component (19). This is positioned around the tube and gripped by the bore wall of the casing (15). It measures axial pressure exerted on the casing. The window is sapphire and tube is internally-polished metal. At least the inner surface is gold. There is a second sapphire window (16) at the far end. The tube acts radially and resiliently against the quartz element (19). The quartz element has an external circular cross section resting against the casing wall. Its internal chordal sections rest against the outside of the tube (11). The casing is highly-insulated from the tube; these two components forming the electrodes of the quartz piezoelectric sensor. The bore accepting the tube, lies centrally and axially within the casing.

Description

Die Erfindung betrifft einen Druck/Temperatur-Sensor, also einen Sensor, der dazu in der Lage ist, sowohl den Druck, als auch die Temperatur in einem bestimmten Bereich zu messen.The The invention relates to a pressure / temperature sensor, ie a sensor, which is capable of doing both the pressure and the temperature to measure in a particular area.

Solche Sensoren werden beispielsweise in einer Kunststoff-Spritzgießform verwendet.Such Sensors are used for example in a plastic injection mold.

Es ist bekannt, zum einen Druck-Sensoren und zum anderen Temperatur-Sensoren als einzelne Messaufnehmer auszubilden. Es ist jedoch für die Prozesssteuerung von erheblicher Bedeutung, dass beide Messgrößen an genau derselben Stelle gemessen werden.It is known, on the one hand pressure sensors and on the other hand temperature sensors as individual sensors. It is, however, for process control Of considerable importance, that both measurands in exactly the same place be measured.

Aus der DE 40 18 998 A1 ist ein faseroptischer Drucksensor bekannt, der mit einem Infrarot-Temperaturmesssystem versehen ist. Aus der DE 195 24 146 ist eine Drucksensor bekannt, die mit einem piezoelektrischen System versehen ist. Die JP 01 267 426 A auf Wärmestrahlung ansprechendes Temperaturmesselement, das mit einem dieses abdichtenden Fenster versehen ist. Aus der DE 197 55 500 A1 und der EP 1 057 586 sind weiter bereits Drucksensoren bekannt, in deren unmittelbarer Nähe sich ein konventionelles Oberflächenthermometer befindet. Diese Oberflächenthermometer sind aber zur Messung der tatsächlichen Temperatur des Spritzlings praktisch nicht geeignet, da sie zu langsam reagieren, die Messung vom jeweiligen Anpressdruck abhängig und durch thermische Kopplung zwischen der Werkzeugwandung und der Messstelle ein unvermeidlicher, erheblicher Messfehler entsteht.From the DE 40 18 998 A1 a fiber optic pressure sensor is known, which is provided with an infrared temperature measuring system. From the DE 195 24 146 a pressure sensor is known, which is provided with a piezoelectric system. The JP 01 267 426 A thermal radiation responsive temperature sensing element provided with a sealing window. From the DE 197 55 500 A1 and the EP 1 057 586 Furthermore, pressure sensors are already known, in the immediate vicinity of which there is a conventional surface thermometer. However, these surface thermometers are practically unsuitable for measuring the actual temperature of the molded part because they react too slowly, the measurement depends on the respective contact pressure and, due to thermal coupling between the tool wall and the measuring point, an unavoidable, considerable measurement error arises.

Der Erfindung liegt die Aufgabe zugrunde, einen Druck/Temperatur-Sensor zu schaffen, der eine Messung beider Größen an genau derselben Stelle ermöglicht.Of the Invention is based on the object, a pressure / temperature sensor to provide a measurement of both sizes in exactly the same place.

Erfindungsgemäß wird diese Aufgabe dadurch gelöst, dass der Infrarotsensorteil ein für IR-Strahlung durchgängiges Fenster, ein sich mit seinem einen Ende an das Fenster anschließenden, die IR-Strahlung an seiner Innenfläche reflektierend leitendes Rohr und ein an dem anderen Ende des Rohres angeordnetes IR-Messelement aufweist und das Druckmessteil durch um das Rohr angeordnete, in dem Gehäuse eingespannte, den auf das Gehäuse ausgeübten axialen Druck erfassende piezoelektrische Quarzelemente gebildet wird.According to the invention this Task solved by that the infrared sensor part a continuous window for IR radiation, a with its one end adjoining the window, the IR radiation on his inner surface reflective conductive tube and one at the other end of the tube has arranged IR measuring element and the pressure measuring part by arranged around the pipe, clamped in the housing, the on the Housing exerted axial Pressure sensing piezoelectric quartz elements is formed.

Erfindungsgemäß bilden also das Gehäuse und die Quarzelemente eine Funktionseinheit, indem axial auf die Stirnfläche des Gehäuses einwirkende Kraft oder ein auf die Stirnfläche einwirkender Druck die Quarzelemente staucht und piezoelektrische Ladungen freisetzt.Form according to the invention So the case and the quartz elements a functional unit by axially on the end face of the housing acting force or acting on the face pressure the Quartz elements upsets and releases piezoelectric charges.

Die Unteransprüche geben vorteilhafte Ausgestaltungen der Erfindung an.The under claims indicate advantageous embodiments of the invention.

Die Erfindung wird im folgenden anhand einer Zeichnung erläutert. Dabei zeigt:The Invention will be explained below with reference to a drawing. there shows:

1 eine Längsschnittansicht auf einen derartigen Sensor, und 1 a longitudinal sectional view of such a sensor, and

2 eine Querschnittsansicht entlang der Linie A-A von 1. 2 a cross-sectional view along the line AA of 1 ,

Der Sensor besteht aus einem Gehäuse 15, das ein Rohr 11 aufnimmt, bei dem es sich vorzugsweise um Metallrohr, ganz besonders bevorzugt um ein aus Gold bestehendes Rohr oder aber jedenfalls um ein an seiner Innenfläche 12 mit Gold beschichtetem Rohr 11 handelt. Die Innenfläche 12 des Rohres 11 soll dabei spiegelnd poliert sein.The sensor consists of a housing 15 that a pipe 11 which is preferably metal tube, most preferably a tube made of gold or at least one on its inner surface 12 with gold coated tube 11 is. The inner surface 12 of the pipe 11 should be mirror polished.

Auf seiner dem zu messenden Bereich zugewandten Stirnseite wird das Gehäuse 15 von einem für IR-Strahlung durchlässigen Fenster 10, vorzugsweise einem Saphirfenster 10, nach außen abgedichtet. Das Saphirfenster 10 stößt flächig gegen einen Absatz des Gehäuses 15 derart an, dass ein auf die Außenfläche 14 des Saphirfensters 10 ausgeübter Druck auf das Gehäuse 15 übertragen wird.On its front side facing the area to be measured becomes the housing 15 from a window transparent to IR radiation 10 , preferably a sapphire window 10 , sealed to the outside. The sapphire window 10 abuts flat against a shoulder of the housing 15 such that on the outside surface 14 of the sapphire window 10 applied pressure on the housing 15 is transmitted.

Das Rohr 11 besteht aus einem auf seiner Innenseite 12 spiegelnd poliertem Metallrohr, in dem die Wärmestrahlung durch Vielfachreflektion geleitet wird. Die Innenseite 12 des Rohres 11 kann spiegelnd vergoldet sein, das Rohr 11 kann aber auch selbst aus Gold bestehen.The pipe 11 consists of one on its inside 12 mirror-polished metal tube, in which the heat radiation is passed through multiple reflection. The inside 12 of the pipe 11 can be mirrored gilded, the tube 11 but can also be made of gold itself.

Am rückseitigen Ende des Rohres 11 befindet sich ein Messelement 13 für die IR-Strahlung. Dabei handelt es sich vorzugsweise um ein sogenanntes Thermopile-Messelement, dass die Wärme-Strahlungsenergie absorbiert und in eine dazu proportionale Thermospannung wandelt.At the back end of the pipe 11 there is a measuring element 13 for the IR radiation. This is preferably a so-called thermopile measuring element that absorbs the heat radiation energy and converts it into a proportional thermoelectric voltage.

Vor dem IR-Messelement 13 befindet sich ein weiteres ein Rohr 11 abschließendes zweites Saphirfenster 16, das als spektrales Filter dient und mindestens einen Teil der störenden Wärmestrahlung von dem IR-Messelement 13 fernhält, die von der Innenseite des Rohres 11 abgestrahlt wird, wenn der ganze Sensor bei erhöhter Umwelttemperatur betrieben wird. Das rückseitige Ende des Rohrs 11 ist so ausgebildet, dass es als Aufnahme für das IR-Messelement 13 und dessen elektrischen Anschlüssen 17 dient.In front of the IR measuring element 13 there is another one pipe 11 final second sapphire window 16 , which serves as a spectral filter and at least a part of the disturbing heat radiation from the IR measuring element 13 keeps away from the inside of the pipe 11 is emitted when the entire sensor is operated at elevated environmental temperature. The back end of the pipe 11 is designed to act as a receptacle for the IR sensing element 13 and its electrical connections 17 serves.

Konzentrisch um das Rohr 11 sind in Vertiefungen in der Innenwandung der Bohrung des Gehäuses 15 eingespannte piezoelektrische Quarzelemente 19 angeordnet, die ringförmig oder stabförmig ausgebildet sein können. Wenn auf diese Anordnung in axialer Richtung ein Druck ausgeübt wird, so geben die Quarzelemente 19 eine zu dem Druck proportionale La dung ab, die über eine geeignete Elektrodenanordnung an den Quarzen abgegriffen werden kann.Concentric around the pipe 11 are in recesses in the inner wall of the bore of the housing 15 clamped piezoelectric quartz elements 19 arranged, which may be formed annular or rod-shaped. If on this arrangement in the axial direction a pressure is exerted, so give the quartz elements 19 a proportional to the pressure from La dung, which can be tapped via a suitable electrode assembly on the quartz.

Bei der dargestellten Ausbildung des Sensors sind drei stabförmige Piezo-Quarze 19 mit, wie sich aus 2 ergibt, einem kreisabschnittförmigen Querschnitt, wobei die kreisbogenförmige Außenseite an der Innenwandung des Gehäuses 15 anliegt und der kreissehnenförmige Abschnitt an der Außenseite des Rohrs 11 anliegt.In the illustrated embodiment of the sensor are three rod-shaped piezo-quartz 19 with, how out 2 results in a circular section-shaped cross section, wherein the circular arc-shaped outer side on the inner wall of the housing 15 abuts and the circular chord-shaped portion on the outside of the tube 11 is applied.

Die Quarze sind dabei so aus dem Kristallmaterial geschnitten, dass der piezoelektrische Effekt transversal auftritt, die elektrische Ladung also senkrecht zur Krafteinleitung, nämlich an die Innenseite 20 und die Außenseite 21 der Quarze und damit an das Rohr 11 bzw. an das gegenüber dem Rohr 11 elektrisch isolierten Gehäuse 15 abgegeben und über an diesen Elemente angeordneten Anschlussleitungen 23, 24 abgegriffen werden können.The crystals are cut out of the crystal material in such a way that the piezoelectric effect occurs transversely, ie the electrical charge is perpendicular to the introduction of force, namely to the inside 20 and the outside 21 the quartz and thus the pipe 11 or to the opposite the pipe 11 electrically insulated housing 15 discharged and arranged on these elements connecting lines 23 . 24 can be tapped.

Claims (10)

Druck/Temperatur-Sensor, mit einem Gehäuse, einem Infrarotsensorteil und einem Quarzdrucksensorteil, dadurch gekennzeichnet, dass der Infrarotsensorteil ein für IR-Strahlung durchgängiges Fenster (10), ein in eine Bohrung des Gehäuses (15) eingebrachtes, sich mit seinem einen Ende an das Fenster (10) anschließendes, die IR-Strahlung an seiner Innenfläche (12) reflektierend leitendes Rohr (11) und ein an dem anderen Ende des Rohres (11) angeordnetes IR-Messelement (13) aufweist, und das Druckmessteil durch um das Rohr (11) angeordnet in die Wandung der Bohrung in dem Gehäuse (15) eingespannte, den in die den auf das Gehäuse (15) ausgeübten axialen Druck erfassende piezoelektrische Quarzelemente (19) gebildet wird.Pressure / temperature sensor, comprising a housing, an infrared sensor part and a quartz pressure sensor part, characterized in that the infrared sensor part has an IR radiation continuous window ( 10 ), into a bore of the housing ( 15 ), with its one end to the window ( 10 ), the IR radiation on its inner surface ( 12 ) Reflective Conductive Tube ( 11 ) and one at the other end of the tube ( 11 ) arranged IR measuring element ( 13 ), and the pressure measuring part through around the pipe ( 11 ) disposed in the wall of the bore in the housing ( 15 ), in which the on the housing ( 15 ) exerted axial pressure sensing piezoelectric quartz elements ( 19 ) is formed. Druck/Temperatur-Sensor nach Anspruch 1, dadurch gekennzeichnet, dass das Fenster (10) ein Saphierfenster ist.Pressure / temperature sensor according to claim 1, characterized in that the window ( 10 ) is a sapphire window. Druck/Temperatur-Fenster nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass das Rohr (11) ein auf seiner Innenseite spiegelnd poliertes Metallrohr ist.Pressure / temperature window according to claim 1 or 2, characterized in that the tube ( 11 ) is a mirror-polished on its inside metal tube. Druck/Temperatur-Sensor nach Anspruch 3, dadurch gekennzeichnet, dass jedenfalls die Innenfläche (12) des Rohres (11) aus Gold besteht.Pressure / temperature sensor according to claim 3, characterized in that in any case the inner surface ( 12 ) of the pipe ( 11 ) consists of gold. Druck/Temperatur-Sensor nach einem der vorangehenden Ansprüche, dadurch gekennzeichnet, dass das Rohr (11) an seinem dem ersten Fenster (10) abgewandten Ende mit einem zweiten Fenster (16) versehen ist.Pressure / temperature sensor according to one of the preceding claims, characterized in that the tube ( 11 ) at its the first window ( 10 ) facing away from the end with a second window ( 16 ) is provided. Druck/Temperatur-Sensor nach Anspruch 5, dadurch gekennzeichnet, das dass zweite Fenster (16) ein Saphirfenster ist.Pressure / temperature sensor according to claim 5, characterized in that the second window ( 16 ) is a sapphire window. Druck/Temperatur-Sensor nach Anspruch 5, dadurch gekennzeichnet, dass das Rohr (12) radial federelastisch auf die Quarzelemente (19) wirkt.Pressure / temperature sensor according to claim 5, characterized in that the tube ( 12 ) radially resiliently on the quartz elements ( 19 ) acts. Druck/Temperatur-Sensor nach Anspruch 6, dadurch gekennzeichnet, dass die Quarzelemente (19) kreisabschnittförmig ausgebildet und mit ihrem Kreisbogenabschnitt an der Wandung der Bohrung des Gehäuses (15) und mit ihrem Sehnenabschnitt an der Außenseite des Rohres (11) anliegen.Pressure / temperature sensor according to claim 6, characterized in that the quartz elements ( 19 ) circular segment-shaped and with its circular arc portion on the wall of the bore of the housing ( 15 ) and with its chord portion on the outside of the tube ( 11 ) issue. Druck/Temperatur-Sensor nach einem der vorangehenden Ansprüche, dass das Rohr (11) und das zu diesem hoch isolierte Gehäuse (15) die Elektroden der Quarzelemente (19) bilden.Pressure / temperature sensor according to one of the preceding claims, that the tube ( 11 ) and to this highly insulated housing ( 15 ) the electrodes of the quartz elements ( 19 ) form. Druck/Temperatur-Sensor nach einem der vorangehenden Ansprüche, dadurch gekennzeichnet, dass die das Rohr (11) aufnehmende Bohrung in dem Gehäuse (15) axial mittig in dem Gehäuse (15) angeordnet ist.Pressure / temperature sensor according to one of the preceding claims, characterized in that the tube ( 11 ) receiving bore in the housing ( 15 ) axially centrally in the housing ( 15 ) is arranged.
DE2003145299 2003-09-30 2003-09-30 High accuracy, combined pressure- and temperature sensor used in injection mold for plastic, comprises infra red transmission system and sensor, with piezoelectric axial pressure sensor Expired - Lifetime DE10345299B3 (en)

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EP2228635A1 (en) * 2009-03-13 2010-09-15 Millipore Corporation Device for determining a physical value of a liquid flowing in a pipe
WO2011063537A1 (en) * 2009-11-25 2011-06-03 Kistler Holding Ag Pressure sensor for low-viscosity media
DE102009057765A1 (en) * 2009-12-10 2011-06-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Signal guiding device for manufacturing electrical contact with sensor in deformation tool, has pins extending from front side of body to rear side of body, where device is arranged between shaping area of tool and outer side of tool
US8640560B2 (en) 2008-03-26 2014-02-04 Emd Millipore Corporation System and method for interfacing sensors to a sterile flow stream
EP2784461A1 (en) * 2013-03-27 2014-10-01 VEGA Grieshaber KG Pressure measurement cell for detecting the pressure of a medium adjoining the measurement cell
WO2017003648A1 (en) * 2015-06-30 2017-01-05 Rosemount Inc. Thermowell with infrared sensor
US9885610B2 (en) 2014-12-22 2018-02-06 Rosemount Inc. Thermowell system with vibration detection

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US8844388B2 (en) 2008-03-26 2014-09-30 Emd Millipore Corporation System and method for interfacing sensors to a sterile flow stream
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WO2011063537A1 (en) * 2009-11-25 2011-06-03 Kistler Holding Ag Pressure sensor for low-viscosity media
US9074952B2 (en) 2009-11-25 2015-07-07 Kistler Holding Ag Pressure sensor for low-viscosity media
DE102009057765A1 (en) * 2009-12-10 2011-06-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Signal guiding device for manufacturing electrical contact with sensor in deformation tool, has pins extending from front side of body to rear side of body, where device is arranged between shaping area of tool and outer side of tool
EP2784461A1 (en) * 2013-03-27 2014-10-01 VEGA Grieshaber KG Pressure measurement cell for detecting the pressure of a medium adjoining the measurement cell
WO2014154696A1 (en) * 2013-03-27 2014-10-02 Vega Grieshaber Kg Pressure-measuring cell for measuring the pressure of a medium adjoining the measuring cell
US9885610B2 (en) 2014-12-22 2018-02-06 Rosemount Inc. Thermowell system with vibration detection
WO2017003648A1 (en) * 2015-06-30 2017-01-05 Rosemount Inc. Thermowell with infrared sensor
US9891111B2 (en) 2015-06-30 2018-02-13 Rosemount Inc. Thermowell with infrared sensor

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