CN1126843A - 数字微镜装置的最佳电子操作 - Google Patents
数字微镜装置的最佳电子操作 Download PDFInfo
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- CN1126843A CN1126843A CN95102761A CN95102761A CN1126843A CN 1126843 A CN1126843 A CN 1126843A CN 95102761 A CN95102761 A CN 95102761A CN 95102761 A CN95102761 A CN 95102761A CN 1126843 A CN1126843 A CN 1126843A
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- Prior art keywords
- voltage
- minute surface
- bias voltage
- mirror
- bias
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S359/00—Optical: systems and elements
- Y10S359/904—Micromirror
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Control Of Indicators Other Than Cathode Ray Tubes (AREA)
Abstract
Description
Claims (19)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/206,812 | 1994-03-07 | ||
US08/206,812 US5444566A (en) | 1994-03-07 | 1994-03-07 | Optimized electronic operation of digital micromirror devices |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1126843A true CN1126843A (zh) | 1996-07-17 |
CN1078355C CN1078355C (zh) | 2002-01-23 |
Family
ID=22768079
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN95102761A Expired - Fee Related CN1078355C (zh) | 1994-03-07 | 1995-03-07 | 数字微镜装置的最佳电子操作方法 |
Country Status (8)
Country | Link |
---|---|
US (1) | US5444566A (zh) |
EP (1) | EP0671644B1 (zh) |
JP (1) | JP3921247B2 (zh) |
KR (1) | KR100368366B1 (zh) |
CN (1) | CN1078355C (zh) |
CA (1) | CA2143079C (zh) |
DE (1) | DE69521350T2 (zh) |
TW (1) | TW266349B (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101490596B (zh) * | 2006-07-13 | 2011-07-06 | 硅探索株式会社 | 用于微镜装置的显示控制系统 |
CN102317998B (zh) * | 2009-02-12 | 2015-06-24 | 国际商业机器公司 | 基于微机电系统的装置的高速静电致动 |
Families Citing this family (235)
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- 1995-02-21 CA CA002143079A patent/CA2143079C/en not_active Expired - Fee Related
- 1995-03-03 EP EP95103049A patent/EP0671644B1/en not_active Expired - Lifetime
- 1995-03-03 DE DE69521350T patent/DE69521350T2/de not_active Expired - Lifetime
- 1995-03-06 KR KR1019950004486A patent/KR100368366B1/ko not_active IP Right Cessation
- 1995-03-06 JP JP04585695A patent/JP3921247B2/ja not_active Expired - Fee Related
- 1995-03-07 CN CN95102761A patent/CN1078355C/zh not_active Expired - Fee Related
- 1995-05-18 TW TW084104914A patent/TW266349B/zh not_active IP Right Cessation
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CN101490596B (zh) * | 2006-07-13 | 2011-07-06 | 硅探索株式会社 | 用于微镜装置的显示控制系统 |
CN102317998B (zh) * | 2009-02-12 | 2015-06-24 | 国际商业机器公司 | 基于微机电系统的装置的高速静电致动 |
Also Published As
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CA2143079A1 (en) | 1995-09-08 |
TW266349B (zh) | 1995-12-21 |
EP0671644B1 (en) | 2001-06-20 |
DE69521350D1 (de) | 2001-07-26 |
JP3921247B2 (ja) | 2007-05-30 |
EP0671644A1 (en) | 1995-09-13 |
CN1078355C (zh) | 2002-01-23 |
CA2143079C (en) | 2005-08-23 |
KR100368366B1 (ko) | 2003-03-28 |
DE69521350T2 (de) | 2002-05-02 |
US5444566A (en) | 1995-08-22 |
JPH07294832A (ja) | 1995-11-10 |
KR950033555A (ko) | 1995-12-26 |
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