CN104296738A - Driving stability lifting method and device for micromechanical gyroscope - Google Patents

Driving stability lifting method and device for micromechanical gyroscope Download PDF

Info

Publication number
CN104296738A
CN104296738A CN201410604008.9A CN201410604008A CN104296738A CN 104296738 A CN104296738 A CN 104296738A CN 201410604008 A CN201410604008 A CN 201410604008A CN 104296738 A CN104296738 A CN 104296738A
Authority
CN
China
Prior art keywords
driving
micromechanical gyro
frequency signal
equivalent capacity
capacitance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201410604008.9A
Other languages
Chinese (zh)
Other versions
CN104296738B (en
Inventor
吴学忠
陈志华
肖定邦
侯占强
何汉辉
李文印
王兴华
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National University of Defense Technology
Original Assignee
National University of Defense Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National University of Defense Technology filed Critical National University of Defense Technology
Priority to CN201410604008.9A priority Critical patent/CN104296738B/en
Publication of CN104296738A publication Critical patent/CN104296738A/en
Application granted granted Critical
Publication of CN104296738B publication Critical patent/CN104296738B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719

Landscapes

  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)

Abstract

The invention discloses a driving stability lifting method and device for a micromechanical gyroscope. The method comprises the following steps: low-frequency signals which are the same as the inherent frequency of the driving mode of the micromechanical gyroscope and inphase with the alternating current driving voltage of the micromechanical gyroscope are generated according to voltage signals outputted by the micromechanical gyroscope; the low-frequency signals used as a direct current bias voltage are loaded on a shunt capacitor in parallel connection between the driving counter electrodes of the micromechanical gyroscope; the alternating current driving voltage is driven by the direct current bias voltage and the alternating current driving voltage in combination with driving high frequency sine carrier waves; the device comprises a low frequency signal acquisition circuit and the shunt capacitor, and the shunt capacitor is in parallel connection between the driving counter electrodes of the micromechanical gyroscope. According to the invention, unstable driving caused by capacitance mismatching caused by the machining precision errors of the micromechanical gyroscope can be overcome, and the detection accuracy and reliability of the micromechanical gyroscope can be improved.

Description

For driving stability method for improving and the device of micromechanical gyro
Technical field
The present invention relates to micromechanical gyro Driving technique field, be specifically related to a kind of driving stability method for improving for micromechanical gyro and device.
Background technology
Micromechanical gyro is the device for measuring the motion of object relative inertness Space Rotating.The output signal of micromechanical gyro, after Weak Signal Processing, can be used for driving carrier or platform topworks to carry out stability contorting and Navigation Control.Micromechanical gyro adopts Bulk micro machining to be prepared from, but due to the impact of precision can be subject to processing, make to process the micromechanical gyro obtained in the symmetry of structure, there is difference more or less, these differences can make the size of driving electric capacity produce deviation, the driving driving electric capacity to produce under identical driving voltage is varied in size, and then affects the stabilized driving of gyro.
Summary of the invention
The technical problem to be solved in the present invention be to provide a kind of can overcome driving electric capacity that micromechanical gyro machining precision error causes do not mate and the driving that causes unstable, promote the accuracy of detection of micromechanical gyro and the driving stability method for improving for micromechanical gyro of reliability and device.
For solving the problems of the technologies described above, the technical solution used in the present invention is:
For a driving stability method for improving for micromechanical gyro, implementation step is as follows:
1) between the driving pole plate of micromechanical gyro, arrange shunt capacitance in advance, make the positive pole equivalent capacity C driving pole plate d+, negative pole equivalent capacity C d-both capacitances are equal;
2) voltage signal exported by micromechanical gyro generates low frequency signal through modulation /demodulation, phase shift, the drive singal of micromechanical gyro is made up of DC offset voltage, AC drive voltage and driving high frequency sinusoidal carrier wave three part, described low frequency signal is identical with the driven-mode natural frequency of micromechanical gyro, with the AC drive voltage homophase driving micromechanical gyro;
3) described low frequency signal is loaded on the shunt capacitance being connected in parallel on and arranging between the driving pole plate of micromechanical gyro.
Preferably, described step 1) between the driving pole plate of micromechanical gyro, arrange that shunt capacitance specifically refers to: at the positive pole equivalent capacity C of the driving pole plate of micromechanical gyro d+be arranged in parallel shunt capacitance, make positive pole equivalent capacity C d+, both shunt capacitances capacitance sum equal to drive the negative pole equivalent capacity C of pole plate d-capacitance, make to drive the positive pole equivalent capacity C of pole plate d+, negative pole equivalent capacity C d-both capacitances are equal; Or driving the negative pole equivalent capacity C of pole plate d-be arranged in parallel shunt capacitance, make negative pole equivalent capacity C d-, both shunt capacitances capacitance sum equal to drive the positive pole equivalent capacity C of pole plate d+capacitance, make to drive the positive pole equivalent capacity C of pole plate d+, negative pole equivalent capacity C d-both capacitances are equal.
Preferably, described step 2) in voltage signal that micromechanical gyro is exported to generate the detailed step of low frequency signal through modulation /demodulation as follows:
2.1) signal that micromechanical gyro exports is carried out convert of capacitor to voltage;
2.2) voltage signal after convert of capacitor to voltage is carried out high-pass filtering extraction high-frequency signal wherein;
2.3) high-frequency signal that extraction obtains is carried out multiplication demodulation and obtain low frequency signal;
2.4) low frequency signal demodulation obtained carries out low-pass filtering and obtains the low frequency signal identical with driven-mode natural frequency;
2.5) low frequency signal identical with driven-mode natural frequency is carried out phase shift adjustment, obtain identical with the driven-mode natural frequency of micromechanical gyro and with the low frequency signal of AC drive voltage homophase driving micromechanical gyro.
The present invention also provides a kind of driving stability lifting gear for micromechanical gyro, it is characterized in that: comprise low frequency signal acquisition cuicuit and shunt capacitance, the driving pole plate chien shih that described shunt capacitance is connected in parallel on micromechanical gyro must drive the positive pole equivalent capacity C of pole plate d+, negative pole equivalent capacity C d-both capacitances are equal, the voltage signal that described low frequency signal acquisition cuicuit exports according to micromechanical gyro generates low frequency signal through modulation /demodulation, phase shift, described low frequency signal is identical with the driven-mode natural frequency of micromechanical gyro, with the AC drive voltage homophase driving micromechanical gyro, described low frequency signal is loaded on shunt capacitance by described low frequency signal acquisition cuicuit.
Preferably, specifically refer between the driving pole plate that described shunt capacitance is connected in parallel on micromechanical gyro: described shunt capacitance and micromechanical gyro the positive pole equivalent capacity C of driving pole plate d+be arranged in parallel, make positive pole equivalent capacity C d+, both shunt capacitances capacitance sum equal to drive the negative pole equivalent capacity C of pole plate d-capacitance, make to drive the positive pole equivalent capacity C of pole plate d+, negative pole equivalent capacity C d-both capacitances are equal; Or described shunt capacitance and micromechanical gyro the negative pole equivalent capacity C of driving pole plate d-be arranged in parallel, make negative pole equivalent capacity C d-, both shunt capacitances capacitance sum equal to drive the positive pole equivalent capacity C of pole plate d+capacitance, make to drive the positive pole equivalent capacity C of pole plate d+, negative pole equivalent capacity C d-both capacitances are equal.
Preferably, described low frequency signal acquisition cuicuit comprises the capacitance-voltage conversion circuit be connected successively, high-pass filtering circuit, demodulator circuit, low-pass filter circuit, phase-shift circuit, the capacitance signal that micromechanical gyro exports is converted to voltage signal by described capacitance-voltage conversion circuit, the voltage signal that capacitance-voltage conversion circuit exports by described high-pass filtering circuit carries out high-pass filtering extraction high-frequency signal wherein, the high-frequency signal that high-pass filtering circuit exports by described demodulator circuit carries out multiplication demodulation and obtains low frequency signal, the drive singal of micromechanical gyro is by DC offset voltage, AC drive voltage and driving high frequency sinusoidal carrier wave three part composition, the low frequency signal that demodulator circuit exports by described low-pass filter circuit carries out low-pass filtering and obtains the low frequency signal identical with the driven-mode natural frequency of micromechanical gyro, the low frequency signal that low-pass filter circuit exports by described phase-shift circuit carries out phase shift adjustment, obtain identical with the driven-mode natural frequency of micromechanical gyro, and with drive the low frequency signal of AC drive voltage homophase of micromechanical gyro, the output terminal of described phase-shift circuit is connected with the two poles of the earth of shunt capacitance.
The driving stability method for improving that the present invention is used for micromechanical gyro has following advantage: the present invention arranges shunt capacitance in advance between the driving pole plate of micromechanical gyro, makes the positive pole equivalent capacity C driving pole plate d+, negative pole equivalent capacity C d-both capacitances are mutually reciprocity, the voltage signal exported according to micromechanical gyro generate identical with the driven-mode natural frequency of micromechanical gyro and with the low frequency signal of AC drive voltage homophase driving micromechanical gyro, by this identical with the driven-mode natural frequency of micromechanical gyro and and the low frequency signal of the AC drive voltage homophase of driving micromechanical gyro be loaded on the shunt capacitance between the driving pole plate being connected in parallel on micromechanical gyro.The drive singal of micromechanical gyro is made up of three parts: DC offset voltage, AC drive voltage and driving high frequency sinusoidal carrier wave.By identical with the driven-mode natural frequency of micromechanical gyro and with drive the low frequency signal of AC drive voltage homophase of micromechanical gyro to feed back to shunt capacitance to offset the driving electric capacity caused due to machining precision not mate and realize stability contorting, the frequency of AC drive voltage is identical with driven-mode natural frequency, thus the vibration realized under resonance condition, drive high frequency sinusoidal carrier wave for the modulation to signal.By identical with the driven-mode natural frequency of micromechanical gyro and and drive the low frequency signal of AC drive voltage homophase of micromechanical gyro to be loaded on the shunt capacitance between the driving pole plate being connected in parallel on micromechanical gyro, can overcome that driving electric capacity that micromechanical gyro machining precision error causes does not mate and the driving that causes is unstable, the accuracy of detection and the reliability that promote micromechanical gyro.
It is the present invention for device corresponding to the driving stability lifting gear method of micromechanical gyro that the present invention is used for the driving stability lifting gear of micromechanical gyro, comprise and realize the present invention for circuit components corresponding to the driving stability method for improving of micromechanical gyro and annexation thereof, therefore also there is the present invention for the identical technique effect of the driving stability method for improving of micromechanical gyro, therefore do not repeat them here.
Accompanying drawing explanation
Fig. 1 is the principle schematic of embodiment of the present invention method.
Fig. 2 is the framed structure schematic diagram of embodiment of the present invention device.
Marginal data: 1, low frequency signal acquisition cuicuit; 11, capacitance-voltage conversion circuit; 12, high-pass filtering circuit; 13, demodulator circuit; 14, low-pass filter circuit; 15, phase-shift circuit; 2, shunt capacitance.
Embodiment
As shown in Figure 1, the present embodiment is as follows for the implementation step of the driving stability method for improving of micromechanical gyro:
1) between the driving pole plate of micromechanical gyro, arrange shunt capacitance in advance, make the positive pole equivalent capacity C driving pole plate d+, negative pole equivalent capacity C d-both capacitances are mutually reciprocity;
2) voltage signal exported by micromechanical gyro generates low frequency signal through modulation /demodulation, phase shift, the drive singal of micromechanical gyro is made up of DC offset voltage, AC drive voltage and driving high frequency sinusoidal carrier wave three part, low frequency signal is identical with the driven-mode natural frequency of micromechanical gyro, with the AC drive voltage homophase driving micromechanical gyro;
3) low frequency signal is loaded into and the shunt capacitance being connected in parallel on and arranging between the driving pole plate of micromechanical gyro offsets the driving electric capacity caused due to mismachining tolerance does not mate, realize stability contorting.
The present embodiment is a shunt capacitance in parallel with the position of the driving capacitor equivalent of micromechanical gyro on circuit, output voltage can obtain the output signal identical with driven-mode natural frequency after modulation /demodulation, by this signal feedback on shunt capacitance, so just, the driving voltage size inputted by shunt capacitance one end can be regulated, jointly drive micromechanical gyro by DC offset voltage and AC drive voltage, driving high frequency sinusoidal carrier wave, thus realize driving circuit stability contorting.Not mating of the driving electric capacity caused due to machining precision can be offset by shunt capacitance, improve and drive stability.
In the present embodiment, step 1) between the driving pole plate of micromechanical gyro, arrange that shunt capacitance specifically refers to: at the positive pole equivalent capacity C of the driving pole plate of micromechanical gyro d+be arranged in parallel shunt capacitance, make positive pole equivalent capacity C d+, both shunt capacitances capacitance sum equal to drive the negative pole equivalent capacity C of pole plate d-capacitance, make to drive the positive pole equivalent capacity C of pole plate d+, negative pole equivalent capacity C d-both capacitances are mutually reciprocity; Or driving the negative pole equivalent capacity C of pole plate d-be arranged in parallel shunt capacitance, make negative pole equivalent capacity C d-, both shunt capacitances capacitance sum equal to drive the positive pole equivalent capacity C of pole plate d+capacitance, make to drive the positive pole equivalent capacity C of pole plate d+, negative pole equivalent capacity C d-both capacitances are mutually reciprocity.
In the present embodiment, step 2) detailed step as follows:
2.1) voltage signal that micromechanical gyro exports is carried out convert of capacitor to voltage (C/V conversion);
2.2) voltage signal after convert of capacitor to voltage is carried out high-pass filtering extraction high-frequency signal wherein;
2.3) high-frequency signal that extraction obtains is carried out multiplication demodulation and obtain low frequency signal;
2.4) low frequency signal demodulation obtained carries out low-pass filtering and obtains the low frequency signal identical with driven-mode natural frequency;
2.5) low frequency signal identical with driven-mode natural frequency is carried out phase shift adjustment, obtain identical with the driven-mode natural frequency of micromechanical gyro and with the low frequency signal of AC drive voltage homophase driving micromechanical gyro.
The step 3 of the present embodiment) low frequency signal is loaded on the shunt capacitance that is connected in parallel on and arranges between the driving pole plate of micromechanical gyro.The drive singal of micromechanical gyro is made up of three parts: DC offset voltage, AC drive voltage and driving high frequency sinusoidal carrier wave, to the voltage V that driving electric capacity the two poles of the earth of micromechanical gyro apply d+and V d-shown in (1).
V d + = V d + V a sin ω x t + E fd sin ω fd t V d - = V d - V a sin ω x t - E fd sin ω fd t - - - ( 1 )
In formula (1), V drepresent DC offset voltage, V asin ω xt represents AC drive voltage, E fdsin ω fdt then represents driving high frequency sinusoidal carrier wave.
As shown in Figure 2, the present embodiment is used for the driving stability lifting gear of micromechanical gyro and comprises low frequency signal acquisition cuicuit 1 and shunt capacitance 2, and the driving pole plate chien shih that shunt capacitance 2 is connected in parallel on micromechanical gyro must drive the positive pole equivalent capacity C of pole plate d+, negative pole equivalent capacity C d-both capacitances are mutually reciprocity, the voltage signal that low frequency signal acquisition cuicuit 1 exports according to micromechanical gyro generates low frequency signal through modulation /demodulation, phase shift, low frequency signal is identical with the driven-mode natural frequency of micromechanical gyro, with the AC drive voltage homophase driving micromechanical gyro, low frequency signal is loaded into by low frequency signal acquisition cuicuit 1 shunt capacitance 2 offsets the driving electric capacity caused due to mismachining tolerance does not mate, and realizes stability contorting.
In the present embodiment, specifically refer between the driving pole plate that shunt capacitance 2 is connected in parallel on micromechanical gyro: shunt capacitance 2 and micromechanical gyro the positive electric capacity C of driving pole plate d+be arranged in parallel, make positive electric capacity C d+, both shunt capacitances 2 capacitance sum equal to drive the negative capacitance C of pole plate d-capacitance, make to drive the positive pole equivalent capacity C of pole plate d+, negative pole equivalent capacity C d-both capacitances are mutually reciprocity; Or shunt capacitance 2 and micromechanical gyro the negative capacitance C of driving pole plate d-be arranged in parallel, make negative capacitance C d-, both shunt capacitances 2 capacitance sum equal to drive the positive electric capacity C of pole plate d+capacitance, make to drive the positive pole equivalent capacity C of pole plate d+, negative pole equivalent capacity C d-both capacitances are mutually reciprocity.
In the present embodiment, low frequency signal acquisition cuicuit 1 comprises the capacitance-voltage conversion circuit 11 be connected successively, high-pass filtering circuit 12, demodulator circuit 13, low-pass filter circuit 14, phase-shift circuit 15, micromechanical gyro output signal is converted to voltage signal by capacitance-voltage conversion circuit 11, the voltage signal that capacitance-voltage conversion circuit 11 exports by high-pass filtering circuit 12 carries out high-pass filtering extraction high-frequency signal wherein, the high-frequency signal that high-pass filtering circuit 12 exports by demodulator circuit 13 carries out multiplication demodulation and obtains low frequency signal, the drive singal of micromechanical gyro is by DC offset voltage, AC drive voltage and driving high frequency sinusoidal carrier wave three part composition, the low frequency signal that demodulator circuit 13 exports by low-pass filter circuit 14 carries out low-pass filtering and obtains the low frequency signal identical with the driven-mode natural frequency of micromechanical gyro, the low frequency signal that low-pass filter circuit 14 exports by phase-shift circuit 15 carries out phase shift adjustment, obtain identical with the driven-mode natural frequency of micromechanical gyro, and with drive the low frequency signal of AC drive voltage homophase of micromechanical gyro, the output terminal of phase-shift circuit 15 is connected with the two poles of the earth of shunt capacitance 2.
In the present embodiment, the output voltage of capacitance-voltage conversion circuit 11 is such as formula shown in (2).
V c = - V d + C d + + V d - C d - C f = - V d ( C d + + C d - ) + ( V a sin ω x t + E fd sin ω fd t ) ( C d + - C d - ) C f - - - ( 2 )
In formula (2), V crepresent the output voltage signal of capacitance-voltage conversion circuit 11, V d+and V d-represent the on-load voltage at driving pole plate the two poles of the earth of micromechanical gyro, C d+represent that micromechanical gyro drives the positive pole equivalent capacity of pole plate, C d-represent that micromechanical gyro drives the negative pole equivalent capacity of pole plate, C frepresent electric capacity C in capacitance-voltage conversion circuit 11 shown in Fig. 2 fcapacitance, V drepresent DC offset voltage, V asin ω xt represents AC drive voltage, E fdsin ω fdt then represents driving high frequency sinusoidal carrier wave.
In the present embodiment, high-pass filtering circuit 12 is for the output voltage signal V by capacitance-voltage conversion circuit 11 ccarrying out high-pass filtering, to reject d. c. voltage signal and frequency be ω xlow frequency signal after, its output voltage signal is such as formula shown in (3).
V ch = - K h E fd sin ω fd t · ΔC d C f - - - ( 3 )
In formula (3), V chrepresent the output voltage signal of high-pass filtering circuit 12, K hrepresent the voltage amplification factor of high-pass filtering circuit 12, E fdsin ω fdt then represents driving high frequency sinusoidal carrier wave, Δ C drepresent the difference between the positive pole equivalent capacity of micromechanical gyro driving pole plate, negative pole equivalent capacity, C frepresent electric capacity C in capacitance-voltage conversion circuit 11 shown in Fig. 2 fcapacitance.
In the present embodiment, demodulator circuit 13 obtains low frequency signal for the output voltage signal of high-pass filtering circuit 12 is carried out multiplication demodulation.Because the difference DELTA C between the positive pole equivalent capacity of the driving pole plate of micromechanical gyro, negative pole equivalent capacity drelevant with the displacement of driving axial, when gyrosystem frequency of operation is driven-mode natural frequency, its change frequency is driven-mode resonance frequency omega x, and Δ C damplitude is constant.Therefore, can suppose there is formula (4).
ΔC d C f = K d cos ω x t - - - ( 4 )
In formula (4), Δ C drepresent the difference between the positive pole equivalent capacity of micromechanical gyro driving pole plate, negative pole equivalent capacity, C frepresent electric capacity C in capacitance-voltage conversion circuit 11 shown in Fig. 2 fcapacitance, K drepresent the scale-up factor of driving axial relative capacity variable quantity and driving axial displacement amplitude, ω xrepresent driven-mode resonance frequency.Formula (5) then can be obtained according to formula (4).Therefore, demodulator circuit 13 is by V chcarry out the output voltage signal V that multiplication demodulation obtains deshown in (6).
V ch＝K d·K h·E fd·sinω fdt·cosω xt (5)
In formula (5), V chrepresent the output voltage signal of high-pass filtering circuit 12, K drepresent the scale-up factor of driving axial relative capacity variable quantity and driving axial displacement amplitude, K hrepresent the voltage amplification factor of high-pass filtering circuit 12, E fdrepresent the amplitude driving high frequency sinusoidal carrier wave, sin ω fdt represents the phase place driving high frequency sinusoidal carrier wave, ω xrepresent driven-mode resonance frequency.
V de＝K d·K h·E fd 2·sin 2ω fdt·cosω xt (6)
In formula (6), V derepresent the output voltage signal of demodulator circuit 13, K drepresent the scale-up factor of driving axial relative capacity variable quantity and driving axial displacement amplitude, K hrepresent the voltage amplification factor of high-pass filtering circuit 12, E fdrepresent the amplitude driving high frequency sinusoidal carrier wave, sin ω fdt represents the phase place driving high frequency sinusoidal carrier wave, ω xrepresent driven-mode resonance frequency.
In the present embodiment, low-pass filter circuit 14 carries out low-pass filtering for low frequency signal demodulation exported and obtains the low frequency signal V identical with driven-mode natural frequency deo.Filtered output voltage signal V deoshown in (7).
V deo = K d · K h · K se · E fd 2 2 cos ω x t - - - ( 7 )
In formula (7), K drepresent the scale-up factor of driving axial relative capacity variable quantity and driving axial displacement amplitude, K hrepresent the voltage amplification factor of high-pass filtering circuit 12, K sefor the enlargement factor of low-pass filter, E fdthen represent the amplitude driving high frequency sinusoidal carrier wave, ω xrepresent driven-mode resonance frequency.The low frequency signal that low-pass filter circuit 14 obtains is identical with driven-mode natural frequency, but there is deviation in phase place, therefore needs to carry out phase shift process further by phase-shift circuit 15, by the output voltage signal V of low-pass filter circuit 14 deothe shunt capacitance feeding back to input end after phase shift can realize the stability contorting to driving.The low frequency signal V identical with driven-mode natural frequency that low-pass filtering exports by phase-shift circuit 15 deocarry out phase shift adjustment, obtain the low frequency signal with the AC drive voltage homophase driving micromechanical gyro, low frequency signal is loaded into shunt capacitance as DC offset voltage, jointly drives micromechanical gyro by DC offset voltage and AC drive voltage, driving high frequency sinusoidal carrier wave.
The foregoing is only the preferred embodiment of the present invention, protection scope of the present invention is not limited in above-mentioned embodiment, and every technical scheme belonging to the principle of the invention all belongs to protection scope of the present invention.For a person skilled in the art, some improvements and modifications of carrying out under the prerequisite not departing from principle of the present invention, these improvements and modifications also should be considered as protection scope of the present invention.

Claims (6)

1., for a driving stability method for improving for micromechanical gyro, it is characterized in that implementation step is as follows:
1) between the driving pole plate of micromechanical gyro, arrange shunt capacitance in advance, make the positive pole equivalent capacity C driving pole plate d+, negative pole equivalent capacity C d-both capacitances are equal;
2) voltage signal exported by micromechanical gyro generates low frequency signal through modulation /demodulation, phase shift, the drive singal of micromechanical gyro is made up of DC offset voltage, AC drive voltage and driving high frequency sinusoidal carrier wave three part, described low frequency signal is identical with the driven-mode natural frequency of micromechanical gyro, with the AC drive voltage homophase driving micromechanical gyro;
3) described low frequency signal is loaded on the shunt capacitance being connected in parallel on and arranging between the driving pole plate of micromechanical gyro.
2. the driving stability method for improving for micromechanical gyro according to claim 1, it is characterized in that, described step 1) between the driving pole plate of micromechanical gyro, arrange that shunt capacitance specifically refers to: at the positive pole equivalent capacity C of the driving pole plate of micromechanical gyro d+be arranged in parallel shunt capacitance, make positive pole equivalent capacity C d+, both shunt capacitances capacitance sum equal to drive the negative pole equivalent capacity C of pole plate d-capacitance, make to drive the positive pole equivalent capacity C of pole plate d+, negative pole equivalent capacity C d-both capacitances are equal; Or driving the negative pole equivalent capacity C of pole plate d-be arranged in parallel shunt capacitance, make negative pole equivalent capacity C d-, both shunt capacitances capacitance sum equal to drive the positive pole equivalent capacity C of pole plate d+capacitance, make to drive the positive pole equivalent capacity C of pole plate d+, negative pole equivalent capacity C d-both capacitances are equal.
3. the driving stability method for improving for micromechanical gyro according to claim 1 and 2, is characterized in that, described step 2) in voltage signal that micromechanical gyro is exported to generate the detailed step of low frequency signal through modulation /demodulation as follows:
2.1) signal that micromechanical gyro exports is carried out convert of capacitor to voltage;
2.2) voltage signal after convert of capacitor to voltage is carried out high-pass filtering extraction high-frequency signal wherein;
2.3) high-frequency signal that extraction obtains is carried out multiplication demodulation and obtain low frequency signal;
2.4) low frequency signal demodulation obtained carries out low-pass filtering and obtains the low frequency signal identical with driven-mode natural frequency;
2.5) low frequency signal identical with driven-mode natural frequency is carried out phase shift adjustment, obtain identical with the driven-mode natural frequency of micromechanical gyro and with the low frequency signal of AC drive voltage homophase driving micromechanical gyro.
4. the driving stability lifting gear for micromechanical gyro, it is characterized in that: comprise low frequency signal acquisition cuicuit (1) and shunt capacitance (2), the driving pole plate chien shih that described shunt capacitance (2) is connected in parallel on micromechanical gyro must drive the positive pole equivalent capacity C of pole plate d+, negative pole equivalent capacity C d-both capacitances are equal, the voltage signal that described low frequency signal acquisition cuicuit (1) exports according to micromechanical gyro generates low frequency signal through modulation /demodulation, phase shift, described low frequency signal is identical with the driven-mode natural frequency of micromechanical gyro, with the AC drive voltage homophase driving micromechanical gyro, and described low frequency signal to be loaded on shunt capacitance (2).
5. the driving stability lifting gear for micromechanical gyro according to claim 4, it is characterized in that, specifically refer between the driving pole plate that described shunt capacitance (2) is connected in parallel on micromechanical gyro: described shunt capacitance (2) and micromechanical gyro the positive pole equivalent capacity C of driving pole plate d+be arranged in parallel, make positive pole equivalent capacity C d+, both capacitance sums of shunt capacitance (2) equal to drive the negative pole equivalent capacity C of pole plate d-capacitance, make to drive the positive pole equivalent capacity C of pole plate d+, negative pole equivalent capacity C d-both capacitances are equal; Or described shunt capacitance (2) and micromechanical gyro the negative pole equivalent capacity C of driving pole plate d-be arranged in parallel, make negative pole equivalent capacity C d-, both capacitance sums of shunt capacitance (2) equal to drive the positive pole equivalent capacity C of pole plate d+capacitance, make to drive the positive pole equivalent capacity C of pole plate d+, negative pole equivalent capacity C d-both capacitances are equal.
6. the driving stability lifting gear for micromechanical gyro according to claim 4 or 5, it is characterized in that, described low frequency signal acquisition cuicuit (1) comprises the capacitance-voltage conversion circuit (11) be connected successively, high-pass filtering circuit (12), demodulator circuit (13), low-pass filter circuit (14), phase-shift circuit (15), the capacitance signal that micromechanical gyro exports is converted to voltage signal by described capacitance-voltage conversion circuit (11), the voltage signal that capacitance-voltage conversion circuit (11) exports is carried out high-pass filtering extraction high-frequency signal wherein by described high-pass filtering circuit (12), the high-frequency signal that high-pass filtering circuit (12) exports is carried out multiplication demodulation and obtains low frequency signal by described demodulator circuit (13), the drive singal of micromechanical gyro is by DC offset voltage, AC drive voltage and driving high frequency sinusoidal carrier wave three part composition, the low frequency signal that demodulator circuit (13) exports is carried out low-pass filtering and obtains the low frequency signal identical with the driven-mode natural frequency of micromechanical gyro by described low-pass filter circuit (14), the low frequency signal that low-pass filter circuit (14) exports is carried out phase shift adjustment by described phase-shift circuit (15), obtain identical with the driven-mode natural frequency of micromechanical gyro, and with drive the low frequency signal of AC drive voltage homophase of micromechanical gyro, the output terminal of described phase-shift circuit (15) is connected with the two poles of the earth of shunt capacitance (2).
CN201410604008.9A 2014-10-31 2014-10-31 Driving stability lifting method and device for micromechanical gyroscope Active CN104296738B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201410604008.9A CN104296738B (en) 2014-10-31 2014-10-31 Driving stability lifting method and device for micromechanical gyroscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201410604008.9A CN104296738B (en) 2014-10-31 2014-10-31 Driving stability lifting method and device for micromechanical gyroscope

Publications (2)

Publication Number Publication Date
CN104296738A true CN104296738A (en) 2015-01-21
CN104296738B CN104296738B (en) 2017-02-08

Family

ID=52316574

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410604008.9A Active CN104296738B (en) 2014-10-31 2014-10-31 Driving stability lifting method and device for micromechanical gyroscope

Country Status (1)

Country Link
CN (1) CN104296738B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111595313A (en) * 2020-06-01 2020-08-28 上海航天控制技术研究所 Axisymmetric resonant gyro parameter excitation method based on discrete electrode

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5992233A (en) * 1996-05-31 1999-11-30 The Regents Of The University Of California Micromachined Z-axis vibratory rate gyroscope
US6626039B1 (en) * 1999-09-17 2003-09-30 Millisensor Systems And Actuators, Inc. Electrically decoupled silicon gyroscope
CN102759365A (en) * 2012-07-12 2012-10-31 中国人民解放军国防科学技术大学 Bias stability improving method and device for silicon micromechanical gyroscope
CN103148847A (en) * 2013-03-06 2013-06-12 莫冰 System and method for eliminating in-phase error of micromechanical gyroscope based on differential
CN103162680A (en) * 2013-03-19 2013-06-19 中国人民解放军国防科学技术大学 Silicon microgyroscope performance improving method and device based on force balance closed-loop control

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5992233A (en) * 1996-05-31 1999-11-30 The Regents Of The University Of California Micromachined Z-axis vibratory rate gyroscope
US6626039B1 (en) * 1999-09-17 2003-09-30 Millisensor Systems And Actuators, Inc. Electrically decoupled silicon gyroscope
CN102759365A (en) * 2012-07-12 2012-10-31 中国人民解放军国防科学技术大学 Bias stability improving method and device for silicon micromechanical gyroscope
CN103148847A (en) * 2013-03-06 2013-06-12 莫冰 System and method for eliminating in-phase error of micromechanical gyroscope based on differential
CN103162680A (en) * 2013-03-19 2013-06-19 中国人民解放军国防科学技术大学 Silicon microgyroscope performance improving method and device based on force balance closed-loop control

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
DINGBANG XIAO 等: "Improvement of mechanical performance for vibratory microgyroscope based on sense mode closed-loop control", 《JOURNAL OF MICRO/NANOLITHOGRAPHY,MEMS,AND MOEMS》 *
XIAO DINGBANG 等: "Higu-performance micromachined gyroscope with a slanted suspension cantilever", 《JOURNAL OF SEMICONDUCTORS》 *
侯占强: "蝶翼式微陀螺零偏稳定性提升关键技术研究", 《中国博士学位论文全文数据库 信息科技辑》 *
吴学忠 等: "电容式微加速度计的闭环检测技术研究", 《传感技术学报》 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111595313A (en) * 2020-06-01 2020-08-28 上海航天控制技术研究所 Axisymmetric resonant gyro parameter excitation method based on discrete electrode
CN111595313B (en) * 2020-06-01 2022-06-24 上海航天控制技术研究所 Axisymmetric resonant gyro parameter excitation method based on discrete electrode

Also Published As

Publication number Publication date
CN104296738B (en) 2017-02-08

Similar Documents

Publication Publication Date Title
CN103822623B (en) A kind of oscillatory type silicon micromechanical gyro quadrature error closed loop compensation circuit
EP2447671B1 (en) Angular velocity sensor, and synchronous detection circuit used therein
CN103869098B (en) A kind of silicon micro-resonance type accelerometer circuit control system
CN104535057B (en) A kind of silicon micro mechanical linearly coupled formula gyro and its quadrature error rigidity bearing calibration
CN103162681B (en) Method and device for testing signals used for micromechanical gyroscope
CN102012464B (en) Micro capacitance measurement method and special device
CN110426025B (en) Real-time automatic mode matching method for micromechanical gyroscope
CN104197923B (en) A kind of micro- capacitance top signal detecting method based on carrier wave detection
CN202502163U (en) Weak capacitance detection device for capacitive MEMS device
CN109029409A (en) Parameter amplification method and its device in a kind of tunable grid structure micromechanical gyro
CN115452032A (en) Digital demodulation device and method for rotary transformer
CN107449414A (en) The closed loop phase lock drive circuit of MEMS gyroscope
CN102607546A (en) Orthogonal error processing method for micromechanical gyroscope and device
CN103292799B (en) Electric measuring method for vibrating amplitude of silicon micro-electromechanical structure
CN107702731B (en) Method for testing gyroscope with unknown parameters
CN111220139B (en) Micro-electro-mechanical multi-ring gyro force balance mode measurement and control circuit system
CN102201811B (en) Method and device for reducing microwave power frequency shift of atomic frequency standard
CN100368773C (en) Method for extracting one-way harmonic wave of condenser type micro-gyroscope responsive signals and extraction apparatus therefor
CN210005012U (en) multi-loop digital closed-loop control device for silicon MEMS gyroscope
CN115824181A (en) Resonance gyro time-sharing multiplexing capacitance detection method, control system and resonance gyro
CN104296738A (en) Driving stability lifting method and device for micromechanical gyroscope
CN102508034B (en) Method and device for measuring parameters of micro solid gyroscope equivalent circuit
CN105180969A (en) Microgyroscope batch dynamic testing method oriented to closed loop detection
GB2529277A (en) Systems and methods for determining acceleration based on phase demodulation of an electrical signal
CN113765516B (en) MEMS resonator closed-loop control method and control structure

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant