CN104075841A - Detection circuit for pressure sensor of aeroengine - Google Patents

Detection circuit for pressure sensor of aeroengine Download PDF

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Publication number
CN104075841A
CN104075841A CN201410265263.5A CN201410265263A CN104075841A CN 104075841 A CN104075841 A CN 104075841A CN 201410265263 A CN201410265263 A CN 201410265263A CN 104075841 A CN104075841 A CN 104075841A
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resistance
voltage
detection circuit
circuit
output
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CN104075841B (en
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许会元
郑德华
杨正军
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SICHUAN YAMEI POWER TECHNOLOGY Co Ltd
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SICHUAN YAMEI POWER TECHNOLOGY Co Ltd
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Abstract

The invention provides a detection circuit for a pressure sensor of an aeroengine. The pressure sensor is electrically connected with an AD converting unit through a sensor loop detection unit and an input instrumentation amplifier respectively. Voltages of four detection resistors of a Wheatstone bridge of the pressure sensor are input to the instrumentation amplifier U2; the instrumentation amplifier U2 transmits a collected voltage value to the AD converting unit; the loop detection unit detects voltage drops of detection points on the four detection resistors of the Wheatstone bridge, the voltage drops are operationally amplified through an operational amplifier on the loop detection unit and then are transmitted to the AD converting unit, and a CPU of an electronic controller of the aeroengine judges faults of the detection points of the Wheatstone bridge of the pressure sensor according to an output voltage value of one loop detection circuit and the voltage obtained after AD conversion through the AD converting unit. The detection circuit has the advantages that the voltage is stable and reliable, output voltage ripples are very small, test accuracy is high, and a millivolt voltage difference value of P3 voltage output is not affected. The actual test shows that the maximum error is not greater than 0.05bar.

Description

Aeromotor pressure sensor detection circuit
Technical field
This technology is applicable to pressure sensor detection circuit, the especially testing circuit of aeromotor pressure transducer of the Huygens's balanced bridge that adopts strain resistor composition.
Background technology
Along with the development of integrated circuit and semiconductor technology, occurred the semiconductor force-sensing sensor of making as principle taking the piezoresistive effect of semiconductor material, and silicon piezoresistance type pressure sensor is wherein widely applied because having the advantages such as volume is little, performance is high, cheap.But utilize the electric bridge resistance of diffusion technique formation easily with temperature change, and the piezoresistance coefficient of pressure drag component has larger negative temperature coefficient, these easily cause the discrete of resistance value and temperature-coefficient of electrical resistance, cause thermal sensitivity drift and the zero point drift of pressure transducer.Source of error is because semiconductor material is very responsive to temperature, and four detection resistance of piezoresistive pressure sensor connect as Wheatstone bridge form more, and it has constant current and two kinds of working methods of constant voltage.
Pressure transducer is a kind of conventional pick-up unit, has certain application in multiple industries.User determines in working pressure sensor how detected pressures sensor seems very important.What aeromotor P3 pressure transducer mainly adopted is Huygens's balanced bridge of strain resistor composition, electric bridge supply voltage 9.5V~10.5V, excitation limit impedance is 0.9~10K Ω, the impedance of signal limit is 0.8~4K Ω, pressure limit 0~1300KPa absolute pressure, corresponding output voltage is 0~26mV, and output voltage is linear with the absolute pressure applying.Thus engine electronic control system device P3 pressure sensor detection circuit is required to provide reliablely and stablely excitation power supply, have energized circuit testing circuit, P3 input signal is carried out to high-precision low-drift amplification.
The detection method that pressure transducer is conventional has 3 kinds:
1, pressurization detects, and with the pressure source of standard, gives cell pressure, according to the variable quantity of the size of pressure and output signal, sensor is calibrated.And in the situation that condition is permitted, carry out the temperature detection of correlation parameter.
2, the detection at zero point, with the voltage gear of multimeter, detects under the condition of not exerting pressure, the output at zero point of sensor.This output is generally the voltage of mV level, if exceeded the technical indicator of sensor, the super scope of zero deviation of sensor is just described.
3, the detection on bridge road, whether the circuit of main detecting sensor is correct, is generally Hui Sitong full-bridge circuit, utilizes the ohms range of multimeter, impedance between amount input end and the impedance between output terminal, these two input, output-resistors that impedance is exactly pressure transducer.If impedance is infinitely great, bridge road disconnects, and illustrates that sensor has the definition of problem or pin there is no correct judgment.Although above-mentioned inspection method is simple and convenient, also inapplicable for the inspection of aeromotor pressure transducer, and also measuring accuracy is not high.What be input to engine controller due to P3 sensor is a voltage difference for millivolt level, and this voltage difference need to just can be obtained P3 force value through the high enlargement factor of instrument amplifier of high-precision low-drift.
The external P3 pressure transducer of aeroengine electronic controller is Huygens's balanced bridge of strain resistor composition.Pressure transducer running current is generally at 5~10mA, if easily the pressure transducer feed circuit of engine electronic control system device are damaged while there is the faults such as pressure transducer internal short-circuit or sensor line breakage.Normally work in order not affect balanced bridge, it is less that the general resistance of resistance is detected in loop.Introduce undesired signal for fear of aeromotor pressure transducer Huygens balanced bridge excitation input power; conventionally output must have current-limiting protection function and output current is controlled at 10mA left and right to require pressure transducer excitation to power, and power requirement voltage accuracy is high, ripple is little.
Summary of the invention
It is reliable that task of the present invention is to provide a kind of working stability, measuring accuracy is high, having excitation output short-circuit can not cause engine electronic control system device to damage, can obtain engine pressure value, especially can judge the testing circuit of pressure transducer aeromotor P3 pressure transducer whether working properly.
Above-mentioned purpose of the present invention can reach by following measures, a kind of aeromotor pressure sensor detection circuit, comprise excitation power supply, loop detection unit and input instrument amplifier, it is characterized in that: excitation power supply is by being connected electrically in integrating capacitor C3 and output terminal current-limiting resistance R11 triode Q4, the triode Q3 in parallel between comparison amplifier U1A reverse input end and output terminal, after Q4 conducting, Q3 base voltage is dragged down, cut-off Q3, composition reference voltage excitation output cut-off current-limiting holding circuit; The external pressure transducer of excitation power supply electrical connection engine electronic control system device, pressure transducer is respectively by sensor loop detecting unit and input instrument amplifier electrical connection AD converting unit; Four of pressure transducer Wheatstone bridges detect the voltage input instrument amplifier U2 of resistance, the magnitude of voltage collecting is transferred to AD converting unit, four of loop detection unit inspection Wheatstone bridges detect ohmically check point pressure drop, after processing, the operational amplifier amplifier on loop detection circuit delivers to AD converting unit, the wherein output voltage values of a road loop detection circuit of engine electronic control system device CPU basis, judges pressure transducer electric bridge check point fault according to voltage after AD converting unit AD conversion.
The present invention has following beneficial effect than prior art.
Excitation power supply is stable, reliable, ripple is little.The present invention adopts excitation power supply by being connected electrically in integrating capacitor C3 and output terminal current-limiting resistance R11 triode Q4, the triode Q3 in parallel between comparison amplifier U1A reverse input end and output terminal; after Q4 conducting, Q3 base voltage is dragged down; cut-off Q3; composition reference voltage excitation output cut-off current-limiting holding circuit; output voltage stabilization is reliable; ripple is very little, can not affect the millivolt step voltage difference of P3 Output pressure, and protection pressure transducer excitation power supply circuit can not damage by overcurrent.For aeromotor P3 pressure transducer detection technique provides reliable and stable excitation power supply output.The strength of current of P3 excitation power supply output is moderate, even if P3 excitation output short-circuit can not cause engine electronic control system device to damage yet.
The present invention is input to the characteristic of 0~26mV voltage difference of engine controller according to aeromotor P3 pressure transducer, adopt high-precision low-drift, the input signal magnifier that can amplify 100 times of left and right obtains P3 force value, solved P3 sensor electrical pressure reduction faint, force value is obtained difficult problem.
Protection of the present invention and measuring ability are perfect, prove that through test of long duration this circuit working is reliable and stable, and measuring accuracy is high, are no more than 0.05bar through actual test maximum error, and common errors is in 0.01bar left and right.
Brief description of the drawings
Below in conjunction with drawings and Examples, the present invention is further described.
Fig. 1 is aeromotor pressure sensor detection circuit block diagram of the present invention.
Fig. 2 is the circuit theory schematic diagram of Fig. 1 pressure transducer excitation power supply.
The circuit theory schematic diagram of Fig. 3 Fig. 1.
Embodiment
Consult Fig. 1, Fig. 2.Huygens's balanced bridge that aeromotor pressure transducer is made up of strain resistor, its testing circuit mainly comprises pressure transducer excitation power supply, pressure transducer loop detection unit and pressure transducer input instrument amplifier.Excitation power supply is by being connected electrically in integrating capacitor C3 and output terminal current-limiting resistance R11 triode Q4, the triode Q3 in parallel between comparison amplifier U1A reverse input end and output terminal, after Q4 conducting, Q3 base voltage is dragged down, cut-off Q3, composition reference voltage excitation output cut-off current-limiting holding circuit; Excitation power supply electrical connection pressure transducer, pressure transducer is respectively by sensor loop detecting unit and input instrument amplifier electrical connection AD converting unit; Four of pressure transducer Wheatstone bridges detect the voltage input instrument amplifier U2 of resistance, the magnitude of voltage collecting is transferred to AD converting unit by instrument amplifier U2, four of loop detection unit inspection Wheatstone bridges detect ohmically check point pressure drop, after processing, the operational amplifier amplifier on loop detection circuit delivers to AD converting unit, the wherein output voltage values of a road loop detection circuit of engine electronic control system device CPU basis, judges pressure transducer electric bridge check point fault according to voltage after AD converting unit AD conversion.
Pressure transducer excitation power supply comprises: the shunt circuit of divider resistance R5 and R7 current-limiting resistance R6 in parallel, filter capacitor C1 and stake resistance R7 shunt capacitance C2 composition, be parallel to integrating capacitor C3 and output terminal current-limiting resistance R11 between comparison amplifier U1A reverse input end and output terminal, through the resistance resistance R 12 of triode Q4 integrating capacitor C3 in parallel, and through triode Q4, triode Q3 and peripheral resistance R 8, resistance R 9, resistance R 10 and the diode D1 of resistance R 11 parallel connections, resistance R 3, resistance R 14 and diode D2.The 10V reference voltage that engine electronic control system device provides is through current-limiting resistance R6 current limliting and filter capacitor C1 filtering input U1A comparison amplifier positive input, gather output voltage to U1A comparer negative terminal by resistance R 12, Q3 conducting is controlled in comparer output after R11 current limliting, after Q3 conducting+electric current of 15V is through current-limiting resistance R10 and Q3, from Q3 emitter output current to current sampling resistor R13, from R13 output 10V voltage to external pressure sensor, this output is exactly pressure transducer excitation power supply anode.The integrating capacitor C3 that U1A compares in amplifying circuit is the negative feedback device that suppresses ripple, can allow output voltage ripple less.
Secondly, the 10V reference voltage that engine electronic control system device provides is equally through resistance R 5 and R7 dividing potential drop, this partial pressure value arrives triode Q4 after capacitor C 2 filtering, because partial pressure value size makes Q4 in cut-off state, this partial pressure value increases a bit more just can allow Q4 in conducting, and the upper voltage of sampling resistor R13 just can superpose with this partial pressure value and make Q4 conducting after resistance R 8 and R9.Pressure transducer running current is generally at 5~10mA.In the time that external pressure sensor output current is excessive, in resistance R 13, voltage increases, and this voltage and R5 and the stack of R7 partial pressure value just can be by Q4 conductings; after Q4 conducting, Q3 base voltage is dragged down; Q3 cut-off, pressure transducer output is turn-offed, and protection pressure transducer excitation power supply circuit can not damage by overcurrent.Because Q3, Q4 are operated in linear condition, pressure transducer excitation power supply output voltage temperature is reliable, ripple is little, and pressure transducer short circuit can not cause circuit to damage.
Consult Fig. 3.In aeromotor pressure sensor detection circuit, excitation electric positive pressure enters from bridge power supply input anode, outputs to after energized circuit detects resistance and gets back to driving voltage negative terminal through bridge power supply negative terminal.Pressure transducer 10V driving voltage is after R1, the R3 of Huygens's balanced bridge or R2, two branch roads of R4, R1, R3 double bridge contact pressure input anode that sensor loop detecting unit detects resistance input end electric bridge from four of Wheatstone bridges are drawn circuit, electrical connection is connected across penetrates between operational amplifier U3A positive input and output terminal resistance R 20, by parallel resistance R18 series capacitance C7, the shunt circuit forming through resistance R 19, by resistance R 20 resistance in series R21, parallel resistance R22 forms a loop detection circuit 1.Diagonal angle electric bridge R3, R4 both arms contact that sensor loop detecting unit detects resistance input end electric bridge from four of Wheatstone bridges are drawn circuit, connect an energized circuit being formed by resistance R 30 parallel resistance R31 and capacitor C 10, described energized circuit is electrically connected operational amplifier U4B positive input by resistance R 30 with the also interface of capacitor C 10, forms a loop detection circuit 2 of voltage detecting point; And draw circuit from R2, R4 double bridge contact, electrical connection is connected across penetrates with between amplifier U3B positive input and output terminal resistance R 25, by parallel resistance R24 series capacitance C8, the shunt circuit forming through resistance R 23, by another loop detection circuit 3 of resistance R 25 resistance in series R27 compositions.The running fire of instrument amplifier U2 phase, with amplifier U3B positive input, forms pressure transducer by resistance R 29 shunt capacitance C9 electrical connection operational amplifier U4A positive inputs and gathers voltage follower circuit; Above-mentioned loop detection circuit output voltage is after AD converter conversion, and the engine electronic control system device CPU basis wherein output voltage values of a road loop detection circuit is judged pressure transducer electric bridge check point fault.
Pressure transducer output voltage is within the scope of 0~26mV, and linear corresponding pressure is 0~1300kpa, and this voltage must pass through 100 times of left and right of instrument amplifier amplification that high input impedance, high-amplification-factor, high precision, low temperature waft.Instrument amplifier U2 circuit can adopt AD621 instrument amplifier to amplify 100 times to the differential voltage of electric bridge both arms input, resistance R 28 is the devices that regulate enlargement factor, instrument amplifier U2 output voltage is penetrated with amplification to U4A after resistance R 29 and capacitor C 9 current limliting filtering, more reliable and more stable through U4A pressure signal after treatment like this, U4A output voltage is delivered to the processing of AD converting unit.CPU just can go out engine force value according to linear sensor property calculation according to voltage after AD conversion.
Resistance R 3, R4 bridge electric contact and resistance R 30, R31 contact place voltage are the check point of energized circuit voltage, resistance R 1, R3 and resistance R 2, R4 bridge electrical nodes place voltage are the checkpoint of electric bridge both arms voltage, also be anode and the negative terminal of external pressure sensor input signal simultaneously, in loop, just have like this 3 voltage detecting points.
The amplifying circuit being made up of operational amplifier U3A and U3B is respectively the voltage detecting dot circuit of electric bridge two arms, and it is also voltage detecting dot circuit that the amplifier that U4B forms detects energized circuit.Pressure sensor signal anode is after resistance R 18 and direct earth capacitance C7 current-limiting impedance coupling, be input to operational amplifier U3A anode and instrument amplifier U2 anode, capacitor C 7 is filtered into anode input filter, U3A is for penetrating with amplifier, resistance R 17 is feedback resistance, and object is to make U3A output stable as early as possible.Resistance R 20, the R21 of the series connection of U3A output terminal are output current limiting resistance, and stake resistance R22 is output load resistance.Same pressure sensor signal negative terminal is after resistance R 2, connected resistance R 24 current-limiting impedances of R4 bridge electrical nodes are mated, be input to operational amplifier U3B anode and U2 instrument amplifier negative terminal, capacitor C 8 is filtered into negative terminal input filter, U3B is for penetrating with amplifier, resistance R 23 is feedback resistance, object is to make U3B output stable as early as possible, and connected resistance R 25, the R27 of U3B output terminal is output current limiting resistance, and stake resistance R26 is output load resistance.Energized circuit detects voltage anode to U4B after resistance R 30 and capacitor C 10 current limliting filtering, and U4B is for penetrating with amplifier, and its output voltage values is generally in 0.5V left and right.
General output ring alignment detection circuit 1, loop detection circuit 2 output voltages are in 4.5V left and right, loop detection circuit 3 output voltages are 0.5V left and right voltage, these 3 voltages are after AD converter conversion, engine electronic control system device CPU just can judge whether short circuit of electric bridge, disconnected arm, resistance according to magnitude of voltage and the fault such as not mate, wherein loop detection 1, loop detection 2 are exported and are not prerequisite, because can judge according to loop detection circuit 3 output voltage values equally whether both arms disconnect or short circuit, so loop detection circuit 3 is prerequisite.

Claims (10)

1. an aeromotor pressure sensor detection circuit, comprise excitation power supply, loop detection unit and input instrument amplifier, it is characterized in that: excitation power supply is by being connected electrically in integrating capacitor C3 and output terminal current-limiting resistance R11 triode Q4, the triode Q3 in parallel between comparison amplifier U1A reverse input end and output terminal, after Q4 conducting, Q3 base voltage is dragged down, cut-off Q3, composition reference voltage excitation output cut-off current-limiting holding circuit; The external pressure transducer of excitation power supply electrical connection engine electronic control system device, pressure transducer is respectively by sensor loop detecting unit and input instrument amplifier electrical connection AD converting unit; Four of pressure transducer Wheatstone bridges detect the voltage input instrument amplifier U2 of resistance, the magnitude of voltage collecting is transferred to AD converting unit, four of loop detection unit inspection Wheatstone bridges detect ohmically check point pressure drop, after processing, the operational amplifier amplifier on loop detection circuit delivers to AD converting unit, the wherein output voltage values of a road loop detection circuit of engine electronic control system device CPU basis, judges pressure transducer electric bridge check point fault according to voltage after AD converting unit AD conversion.
2. aeromotor pressure sensor detection circuit as claimed in claim 1, is characterized in that: pressure transducer excitation power supply comprises: the shunt circuit of divider resistance R5 and R7 current-limiting resistance R6 in parallel, filter capacitor C1 and stake resistance R7 shunt capacitance C2 composition.
3. aeromotor pressure sensor detection circuit as claimed in claim 1, it is characterized in that: the 10V reference voltage that engine electronic control system device provides is through current-limiting resistance R6 current limliting and filter capacitor C1 filtering input U1A comparison amplifier positive input, gather output voltage to U1A comparer negative terminal by resistance R 12, Q3 conducting is controlled in comparer output after R11 current limliting, after Q3 conducting+electric current of 15V is through current-limiting resistance R10 and Q3, from Q3 emitter output current to current sampling resistor R13, from R13 output 10V voltage to external pressure sensor, this output is exactly pressure transducer excitation power supply anode.
4. aeromotor pressure sensor detection circuit as claimed in claim 1, is characterized in that: the integrating capacitor C3 that U1A compares in amplifying circuit is the negative feedback device that suppresses ripple.
5. aeromotor pressure sensor detection circuit as claimed in claim 1, it is characterized in that: the 10V reference voltage that engine electronic control system device provides is equally through resistance R 5 and R7 dividing potential drop, this partial pressure value arrives triode Q4 after capacitor C 2 filtering, partial pressure value size makes Q4 in cut-off state, and the upper voltage of sampling resistor R13 is after resistance R 8 and R9 and this partial pressure value stack conducting Q4.
6. aeromotor pressure sensor detection circuit as claimed in claim 5, is characterized in that: after Q4 conducting, Q3 base voltage dragged down, and Q3 cut-off, pressure transducer output is turn-offed, and protection pressure transducer excitation power supply circuit can not damage by overcurrent.
7. aeromotor pressure sensor detection circuit as claimed in claim 1, it is characterized in that: pressure transducer 10V driving voltage is through the R1 of Huygens's balanced bridge, R3 or R2, after two branch roads of R4, sensor loop detecting unit detects the R1 of resistance input end electric bridge from four of Wheatstone bridges, R3 double bridge contact pressure input anode is drawn on circuit, electrical connection is connected across penetrates between operational amplifier U3A positive input and output terminal resistance R 20, by parallel resistance R18 series capacitance C7, the shunt circuit forming through resistance R 19, by resistance R 20 resistance in series R21, parallel resistance R22 forms a loop detection circuit 1.
8. aeromotor pressure sensor detection circuit as claimed in claim 1, it is characterized in that: diagonal angle electric bridge R3, R4 both arms contact that sensor loop detecting unit detects resistance input end electric bridge from four of Wheatstone bridges are drawn circuit, connect an energized circuit being made up of resistance R 30 parallel resistance R31 and capacitor C 10.
9. aeromotor pressure sensor detection circuit as claimed in claim 8, it is characterized in that: described energized circuit is electrically connected operational amplifier U4B positive input by resistance R 30 with the also interface of capacitor C 10, forms a loop detection circuit 2 of voltage detecting point; And draw circuit from R2, R4 double bridge contact, electrical connection is connected across penetrates with between amplifier U3B positive input and output terminal resistance R 25, by parallel resistance R24 series capacitance C8, the shunt circuit forming through resistance R 23, by resistance R, 25 resistance in series R27 form another loop detection circuit 3.
10. aeromotor pressure sensor detection circuit as claimed in claim 1, it is characterized in that: the running fire of instrument amplifier U2 phase, with amplifier U3B positive input, forms pressure transducer by resistance R 29 shunt capacitance C9 electrical connection operational amplifier U4A positive inputs and gathers voltage follower circuit; Above-mentioned loop detection circuit output voltage is after AD converter conversion, and the engine electronic control system device CPU basis wherein output voltage values of a road loop detection circuit is judged pressure transducer electric bridge check point fault.
CN201410265263.5A 2014-06-13 2014-06-13 aircraft engine pressure sensor detection circuit Active CN104075841B (en)

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105634496A (en) * 2015-12-25 2016-06-01 北京长峰微电科技有限公司 Generation method of excitation signal in aging experiment
CN106405214A (en) * 2016-08-18 2017-02-15 中国航空工业集团公司上海航空测控技术研究所 Detection device of piezoelectric sensor
CN108956005A (en) * 2018-08-08 2018-12-07 陈德连 pressure sensor
CN109412542A (en) * 2018-12-10 2019-03-01 中国航发南方工业有限公司 Pressure signal conditioning circuit and electronic controller
CN112254875A (en) * 2020-10-26 2021-01-22 南通大学 Circuit and method for judging connection state of bridge sensor
CN112798180A (en) * 2021-01-04 2021-05-14 珠海格力电器股份有限公司 Fault detection method of force sensor and computer-readable storage medium
CN113865757A (en) * 2021-09-16 2021-12-31 歌尔微电子股份有限公司 Detection circuit and detection method of piezoresistive pressure sensor and electronic equipment
CN114812915A (en) * 2022-06-24 2022-07-29 中国空气动力研究与发展中心低速空气动力研究所 Pressure scanning valve circuit
JP7430575B2 (en) 2019-05-29 2024-02-13 シリコン マイクロストラクチャーズ, インコーポレイテッド Voltage zeroing pressure sensor preamplifier

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CN105634496B (en) * 2015-12-25 2018-11-20 北京航天微电科技有限公司 The production method of pumping signal in a kind of senile experiment
CN105634496A (en) * 2015-12-25 2016-06-01 北京长峰微电科技有限公司 Generation method of excitation signal in aging experiment
CN106405214A (en) * 2016-08-18 2017-02-15 中国航空工业集团公司上海航空测控技术研究所 Detection device of piezoelectric sensor
CN106405214B (en) * 2016-08-18 2019-04-05 中国航空工业集团公司上海航空测控技术研究所 A kind of piezoelectric transducer detection device
CN108956005A (en) * 2018-08-08 2018-12-07 陈德连 pressure sensor
CN108956005B (en) * 2018-08-08 2024-03-22 陈德连 Pressure sensor
CN109412542A (en) * 2018-12-10 2019-03-01 中国航发南方工业有限公司 Pressure signal conditioning circuit and electronic controller
JP7430575B2 (en) 2019-05-29 2024-02-13 シリコン マイクロストラクチャーズ, インコーポレイテッド Voltage zeroing pressure sensor preamplifier
CN112254875A (en) * 2020-10-26 2021-01-22 南通大学 Circuit and method for judging connection state of bridge sensor
CN112254875B (en) * 2020-10-26 2022-03-08 南通大学 Circuit and method for judging connection state of bridge sensor
CN112798180A (en) * 2021-01-04 2021-05-14 珠海格力电器股份有限公司 Fault detection method of force sensor and computer-readable storage medium
CN113865757A (en) * 2021-09-16 2021-12-31 歌尔微电子股份有限公司 Detection circuit and detection method of piezoresistive pressure sensor and electronic equipment
CN114812915A (en) * 2022-06-24 2022-07-29 中国空气动力研究与发展中心低速空气动力研究所 Pressure scanning valve circuit
CN114812915B (en) * 2022-06-24 2022-10-18 中国空气动力研究与发展中心低速空气动力研究所 Pressure scanning valve circuit

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