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Publication numberCN103901359 A
Publication typeApplication
Application numberCN 201210590876
Publication date2 Jul 2014
Filing date31 Dec 2012
Priority date31 Dec 2012
Also published asCN103901359B
Publication number201210590876.7, CN 103901359 A, CN 103901359A, CN 201210590876, CN-A-103901359, CN103901359 A, CN103901359A, CN201210590876, CN201210590876.7
Inventors吴信毅, 沈轩任, 高宏达
Applicant致茂电子(苏州)有限公司
Export CitationBiBTeX, EndNote, RefMan
External Links: SIPO, Espacenet
Test platform with dry environment
CN 103901359 A
Abstract
A test platform with a dry environment comprises a bearing seat, a flow guiding mechanism and a drying air generating device. The bearing seat comprises a testing area, the flow guiding mechanism surrounds the bearing seat, the drying air generating device is connected to the flow guiding mechanism to generate drying air, and the drying air is guided by the flow guiding mechanism to flow to the testing area, so that the dry environment is generated, and moisture condensation is avoided.
Claims(9)  translated from Chinese
1.一种具有干燥环境的测试平台,其特征在于,该测试平台包含: 一承载座,具有一测试区域; 一导流机构,设置包围该承载座的周边;以及一干燥气体产生装置,连结于该导流机构,用以产生一干燥气体,该干燥气体利用该导流机构的引导往该测试区域流动,以产生干燥环境防止结露。 A test platform having a dry environment, characterized in that the test platform comprising: a carrier housing having a test area; a diversion mechanism disposed surrounding the periphery of the bearing seat; and a drying gas generation means, connecting to the diversion means for generating a drying gas, the drying gas utilization mechanism to guide the diversion of the flow test area to produce a dry environment to prevent condensation.
2.根据权利要求1所述的具有干燥环境的测试平台,其特征在于,该导流机构具有一导流部,且在该干燥气体流动至该导流部后,利用该导流部的引导往该测试区域流动。 2. According to one of the test platform having a dry environment claim, characterized in that the guide means having a guide portion, and after the drying gas flows to the guide portion by the guide portion of the guide The test area to flow.
3.根据权利要求2所述的具有干燥环境的测试平台,其特征在于,该导流机构还具有多个出气孔,该干燥气体由该些出气孔流动至该导流部。 According to claim 2, wherein the test platform having a dry environment, characterized in that the diversion mechanism also has a plurality of pores, the dry gas flow From these vents to the diversion unit.
4.根据权利要求3所述的具有干燥环境的测试平台,其特征在于,该导流机构还具有一进气孔,用以连结该干燥气体产生装置,该干燥气体由该进气孔进入该导流机构并流动至该些出气孔。 According to claim 3, wherein the test platform having a dry environment, characterized in that the diversion mechanism also has a inlet port for connecting the dry gas generation means, the drying gas entering the air intake by that diversion mechanism and flows to the plurality of vent.
5.根据权利要求2所述的具有干燥环境的测试平台,其特征在于,该导流部具有一导流角,藉以增加该干燥气体往该测试区域流动的均匀性。 According to claim 2, wherein the test platform having a dry environment, characterized in that the guide portion has a relief angle, so as to increase the drying gas flow to the test area uniformity.
6.根据权利要求1所述的具有干燥环境的测试平台,其特征在于,用以测试一布有发光二极管芯片的待测晶圆。 According to one of the test platform having a dry environment claim, wherein the fabric has to be measured in order to test a wafer-emitting diode chips.
7.根据权利要求1所述的具有干燥环境的测试平台,其特征在于,还包含: 一壳体,用以遮盖该测试区域的上方空间;以及一干燥气体管线,连结于该干燥气体产生装置,该干燥气体管线设置于该壳体内部,以于该测试区域的上方空间产生干燥环境防止结露。 According to any one of the test platform having a dry environment claim, characterized in that, further comprising: a housing for covering the space above the test region; and a drying gas line, is connected to the drying gas generation means The drying gas line provided in the interior of the casing to produce a dry environment in the space above the test area to prevent condensation.
8.根据权利要求1所述的具有干燥环境的测试平台,其特征在于,该干燥气体产生装置为一空气过滤器。 According to claim 1, wherein the test platform having a dry environment, characterized in that the drying gas generating means is an air filter.
9.根据权利要求1所述的具有干燥环境的测试平台,其特征在于,该承载座为一具有温度控制功能的承载座,对该测试区域进行温度控制。 According to claim 1, wherein the test platform having a dry environment, characterized in that the bearing seat is a carrier having a temperature control function blocks, the test zone temperature control.
Description  translated from Chinese

具有干燥环境的测试平台 Dry conditions with a test platform

技术领域 Technical Field

[0001] 本发明涉及一种具有干燥环境的测试平台,尤其涉及一种利用导流机构将干燥气体引导至测试区域,以产生干燥环境的测试平台。 [0001] The present invention relates to a dry environment of the test platform, in particular, it relates to a diversion mechanism the dry gas to the test area to dry conditions produce test platform.

背景技术 Background

[0002] 随着科技发展与时代进步的同时,人们环保意识抬头及环保观念随着进步,节能减碳已成为世界各国重视的议题及努力的目标,因此以往常使用的白炙灯、日光灯、碘钨灯以及高压钠灯,渐渐地被发光二极管(Light Emitting Diode;LED)灯取代,LED灯具备不易碎、省电、环保无汞、光源具方向性、体积小、色域丰富、可应用于低温环境、造成光害少以及工作寿命长的优点,因此LED将广泛地、革命性地取代传统的白炽灯等现有的光源,进而成为符合节能环保主题的主要光源。 [0002] With the technological development and the progress of time, while the rise of environmental awareness and environmental consciousness with the progress, has become a target for carbon reduction issues and the efforts of world attention, and therefore the usual incandescent lamps used in fluorescent lamps, halogen lamp and high pressure sodium lamp, gradually being light-emitting diode (Light Emitting Diode; LED) lamps to replace, LED lights have no fragile, energy saving, environmentally friendly mercury-free light source with directivity, small size, rich color gamut, can be applied low temperatures, resulting in less light pollution as well as the advantages of long service life, the LED will be widely, revolutionary light source to replace the traditional incandescent existing, and thus become a major source of energy-saving and environmental protection in line with the theme.

[0003] 其中,现有的LED芯片制造工艺工艺包含有在基底材料的基板上形成磊晶硅晶圆(Epitaxial Wafer)的磊晶硅工艺、使用晶圆来生产数个LED芯片的晶粒工艺、利用晶粒工艺所生产的LED芯片的封装工艺、以及测试已经由封装工艺所处理的LED芯片的测试工艺。 [0003] where existing LED chip manufacturing process technology includes the formation of epitaxial silicon wafer substrate material on a substrate (Epitaxial Wafer) epitaxial silicon process, using a wafer to produce a plurality of LED chips die process , the use of grain produced by the process of the LED chip packaging technology, the LED chip and the test process has been handled by the test packaging process. 其中,在传统LED芯片的测试工艺中,需于测试平台上进行电性测试,进而得知一晶圆(圆片)上每一LED芯片的光学特性与电流特性,而在进行电性测试的过程中,由于测试环境通常需要为常温,更甚者需要在不同的温度下进行测试(如负40C或负50C的低温或135C的高温等)。 Wherein, in the conventional LED chip testing process, the need to be electrically tested on a test platform, and thus that the optical properties of an LED chip of each wafer (wafer) on the current characteristics, and performing electrical tests process, due to the test environment normally is room temperature, or worse still needs to be tested at different temperatures (such as negative 40 C to 50 C or negative low or high temperature to 135 C, etc.). 然而,由于现有的测试平台的测试环境的湿度较高,当其于低温环境下进行测试时,LED芯片容易有结露甚至结冰的问题发生,进而影响到电性测试的结果,因此现有技术仍有改善的空间。 However, due to the high current test platform test environment humidity which, when tested at low temperatures, LED chip susceptible to condensation or icing occurs, thereby affecting the results of the electrical tests, so now art is still room for improvement.

发明内容 DISCLOSURE

[0004] 本发明所欲解决的技术问题与目的: [0004] The present invention is seeking to solve the technical problem and the purpose of:

[0005] 有鉴于在现有技术中,由于现有的测试平台在低温环境下测试芯片时,其有容易结露甚至结冰的问题而影响到电性测试的结果,所以必须将该测试平台置于一干燥容室内,且该容室必须确实与外界隔离,以避免上述结露问题发生,当测试过程需要维修或者测试结束时,皆必须让系统回温至常温才能进行后续作业,使用上有其不方便性。 [0005] In view of the prior art, since the existing test platform at a low temperature environment test chip, which has easy condensation or icing problems affecting the results of the electrical test, it must be the test platform placed in a drying capacity of the room, and the accommodating chamber from the outside world must indeed, in order to avoid condensation problems described above, when the testing process needs to be repaired or end of the test, all systems must be allowed to warm to room temperature in order to carry out follow-up work, the use of It has its inconveniences.

[0006] 缘此,本发明的主要目的在于提供一种具有干燥环境的测试平台,其是利用导流机构将干燥气体引导至测试区域,藉以产生包覆测试平台及待测物的干燥测试环境进而防止结露。 [0006] The edge of this, the main object of the present invention is to provide a drying environment having a test platform, which is the use of guide means guiding the drying gas to the test area, and thereby generating test platform analyte coated dry test environment thereby preventing condensation.

[0007] 本发明解决问题的技术手段: [0007] The present invention solves the problem of technical means:

[0008] 本发明为解决现有技术的问题,所采用的必要技术手段是提供一种具有干燥环境的测试平台,测试平台包含一承载座、一导流机构以及一干燥气体产生装置。 [0008] The present invention solves the problems of the prior art, the necessary technical means are used to provide a dry environment of the test platform, test platform includes a carrier base, a diversion mechanism and a drying gas generator. 承载座具有一测试区域,导流机构设置包围承载座的周边,干燥气体产生装置系连结于导流机构,用以产生一干燥气体,干燥气体系利用导流机构的引导往测试区域流动,以包覆测试区域及待测物产生干燥环境防止结露。 Bearing seat having a test area, diversion institutional settings surrounding the bearing seat of the surrounding area dry gas generating device connected to the diversion system means for generating a dry gas, dry gas system by the guide mechanism to guide the flow of the test area to cover the test area and the analyte to produce a dry environment to prevent condensation. [0009] 较佳者,上述的测试平台中,导流机构具有一导流部,且在干燥气体流动至导流部后,利用导流部的引导往测试区域流动,且导流机构还具有多个出气孔,干燥气体由该些出气孔流动至导流部。 [0009] Preferably who said the test platform, diversion mechanism has a guide portion and the drying gas flow to the diversion unit after using the guide portion to guide the flow of the test area, and also has a guide mechanism a plurality of pores, drying gas flow from the vents to the some diversion unit. 此外,导流机构还具有一进气孔,用以连结干燥气体产生装置,干燥气体由进气孔进入导流机构并流动至该些出气孔,另外,导流部具有一导流角,藉以增加干燥气体往测试区域流动的均匀性。 In addition, the diversion mechanism also has a inlet port for connecting dry gas generation means, the drying gas from the inlet port into the draft mechanism to flow to some of the pores, in addition, the diversion unit has a relief angle, thereby increase the drying gas flow to the test area uniformity.

[0010] 较佳者,上述的测试平台中,其用以测试一布有发光二极管(Light EmittingDiode;LED)芯片的待测晶圆(圆片)(wafer),并且还包含一壳体以及一干燥气体管线,壳体用以遮盖测试区域的上方空间,而干燥气体管线连结于干燥气体产生装置,干燥气体管线设置于壳体内部,以于测试区域的上方空间产生干燥环境防止结露。 [0010] Preferably who said the test platform, which is used to test a cloth with light-emitting diode (Light EmittingDiode; LED) test chip wafers (wafer) (wafer), and further comprising a housing and a drying gas line, the space above the housing to cover the test area, and the drying gas line is connected to the drying gas generating means, the drying gas line disposed inside the housing, in order to produce a dry environment in the space above the test area to prevent condensation. 此外,干燥气体产生装置为一空气过滤器,且承载座为一具有温度控制功能的承载座,可对测试区域进行温度控制。 In addition, dry gas generating means is an air filter, and having a bearing seat for the bearing seat temperature control function may control the temperature of the test area.

[0011] 本发明对照现有技术的功效: [0011] The present invention controls the effectiveness of the prior art:

[0012] 相较于现有技术,利用本发明所提供的具有干燥环境的测试平台,由于利用导流机构将干燥气体引导至测试区域而产生干燥的测试环境,因而使得在测试LED芯片时可防止结露或结冰的现象发生,进而提高电性测试的可靠度。 [0012] Compared to the prior art, the present invention provides the use of a test platform having a dry environment, since the test environment arising from the use of diversion drying means drying gas to the test area, thus making it possible in the test LED chip prevent condensation or freezing occurs, thus improving the reliability of electrical testing.

[0013] 以下结合附图和具体实施例对本发明进行详细描述,但不作为对本发明的限定。 [0013] The following accompanying drawings and specific embodiments of the present invention will be described in detail, but do not limit the present invention.

附图说明 Brief Description

[0014] 图1显示本发明第一较佳实施例的具有干燥环境的测试平台的示意图; [0014] FIG. 1 shows a schematic of the present invention has a dry test platform first preferred embodiment;

[0015] 图2显示本发明第一较佳实施例的承载座以及导流机构立体剖视示意图; [0015] Figure 2 shows an example of the carrier seat and diversion mechanism the first preferred embodiment of the present invention is a schematic perspective sectional view;

[0016] 图3显示本发明第二较佳实施例的测试平台的承载座以及导流机构立体剖视示意图;以及 [0016] Figure 3 shows the test platform housing carrying a second preferred embodiment of the present invention and a sectional perspective view showing deflector means; and

[0017] 图4显示本发明第三实施例的具有干燥环境的测试平台的剖视示意图。 [0017] Figure 4 shows a sectional view of the third embodiment of the present invention have a dry test platform.

[0018] 其中,附图标记 [0018] wherein reference numeral

[0019] 1、1a 具有干燥环境的测试平台 [0019] 1,1a having a dry environment test platform

[0020] IlUla 承载座 [0020] IlUla bearing seat

[0021] IllUlla 测试区域 [0021] IllUlla test area

[0022] 12、12a 导流机构 [0022] 12,12a diversion mechanism

[0023] 121、121a 导流部 [0023] 121,121a diversion unit

[0024] 1211 导流角 [0024] 1211 diversion angle

[0025] 122、122a 进气孔 [0025] 122,122a air intake

[0026] 123a 出气孔 [0026] 123a vents

[0027] 13 干燥气体产生装置 [0027] 13 drying gas generating means

[0028] 14 壳体 [0028] 14 housing

[0029] 15 干燥气体管线 [0029] 15 dry gas pipeline

具体实施方式 DETAILED DESCRIPTION

[0030] 由于本发明所提供的具有干燥环境的测试平台中,其组合实施方式不胜枚举,故在此不再一一赘述,仅列举三个较佳实施例来加以具体说明。 [0030] Since the present invention provides a test platform in a dry environment, the combination of numerous embodiments, it is not going to repeat them here, just to name three preferred embodiments to be described in detail. [0031] 请一并参阅图1以及图2,图1显示本发明第一较佳实施例的具有干燥环境的测试平台的示意图,图2显示本发明第一较佳实施例的承载座以及导流机构立体剖视示意图。 [0031] Please also refer to Figure 1 and Figure 2, Figure 1 shows a schematic of the test platform having a dry environment of a first preferred embodiment of the present invention, Figure 2 shows the bearing seat of the first preferred embodiment of the present invention as well as guide perspective sectional view of the flow mechanism. 如图所示,本发明第一较佳实施例所提供的具有干燥环境的测试平台I用以测试一布有发光二极管(Light Emitting Diode;LED)芯片的待测晶圆(wafer),当然在其他实施例中可测试其他待测物而不限于上述,其中,具有干燥环境的测试平台I包含一具有温度控制功能的承载座11、一导流机构12以及一干燥气体产生装置13,承载座11具有一测试区域111,测试区域111用以容置上述的待测物以进行电性测试,且承载座11可对测试区域111进行温度控制。 As shown, the first preferred embodiment of the present invention provides a test platform environment dry cloth I used to test a light emitting diode (Light Emitting Diode; LED) wafer test chip (wafer), of course, other embodiments other analytes can be tested without limited to the above, wherein the test platform having a dry environment I comprises a bearing seat having a temperature control function 11, a guide mechanism 12 and a drying gas producing means 13, bearing seat 11 having a test area 111, the test area 111 for accommodating the aforementioned analytes for electrical test, and the bearing housing 11 can test area 111 for temperature control.

[0032] 导流机构12设置包围承载座11的周边,进一步而言环绕并邻近于承载座11而设置,且导流机构12以及承载座11间具有缝隙,而导流机构12可由一般具有刚性的金属材质制成,此外,导流机构12设有一导流部121以及四个进气孔122 (图中仅标示一个),导流部121具有导流角1211,而导流角1211遮盖于上述的缝隙,而导流角1211的角度例如是三十度或四十五度(以导流部121的平面为水平面而往下所张的角度),但不限于上述。 [0032] The deflector means 12 is provided surrounding the periphery of the bearing holder 11, and further surrounding the concerned adjacent bearing seat 11 provided, and the guide means 12 and bearing seat 11 has a slit, and the guide mechanism 12 may be generally rigid made of metal material, in addition, guide means 12 is provided with a guide portion 121, and four air intake 122 (only one labeled), corner guide portion 121 having a guide 1211, and the diversion angle covered in 1211 the above-mentioned gap, and the angle of diversion angle 1211, for example, thirty degrees or forty-five degrees (planar guide section 121 is horizontal and down the sheet perspective), but is not limited to the above.

[0033] 干燥气体产生装置13连结于导流机构12,具体而言是利用管线(图未示)连结于进气孔122,且干燥气体产生装置13可产生干燥气体,而干燥气体产生装置13为一空气过滤器,但不限于上述,只要是可产生干燥气体的装置均不脱离本发明的精神。 [0033] The drying gas producing means 13 is connected to the guide means 12, specifically, the recycling line (not shown) is connected to the inlet port 122, and the drying gas producing means 13 can produce a drying gas, while the drying gas producing means 13 as an air filter, but it is not limited to the above, as long as it can produce the drying gas apparatus without departing from the spirit of the invention.

[0034] 其中,使用者在启动本发明第一较佳实施例所提供的具有干燥环境的测试平台I时,干燥气体产生装置13产生干燥气体,且干燥气体经由管线以及上述的缝隙,并经由进气孔122而流动,在干燥气体流动至导流部121后,是利用导流机构12的引导往测试区域111流动,以使测试区域111形成干燥环境进而防止结露,其中,导流角1211可增加干燥气体往测试区域111流动的均匀性。 [0034] wherein, when a user starts the test platform I having a dry environment first preferred embodiment of the present invention provides a drying gas generating means 13 generates the drying gas and the drying gas via line and said slit and through inlet port 122 and flows in the dry gas flow to the diversion unit 121, the guide mechanism to guide the use of 12 to 111 flow test area, the test area 111 is formed so that a dry environment thus preventing condensation, which, diversion angle 1211 increase the drying gas flow to the test area 111 uniformity.

[0035] 请参阅图3,图3显示本发明第二较佳实施例的测试平台的承载座以及导流机构立体剖视示意图。 [0035] Refer to Figure 3, Figure 3 shows the bearing seat test platform for the second preferred embodiment of the present invention and a perspective sectional view of the diversion mechanism. 如图3所示,第二较佳实施例与第一较佳实施例不同的是,导流机构12a仅包含导流部121a、多个进气孔122a (图中仅标示一个)以及多个出气孔123a (图中仅标示一个),而不包含如第一较佳实施例的导流角1211。 3, the second preferred embodiment is different from the first preferred embodiment, the guide means comprise guide portions 12a 121a only, a plurality of intake holes 122a (only one indicated in Figure) and a plurality of vent 123a (only one labeled in FIG.), and does not include relief angle as in the first preferred embodiment is 1211. 其中,使用者在启动本发明第二较佳实施例所提供的具有干燥环境的测试平台Ia时,干燥气体是由进气孔122a进入导流机构12a并流动至该些出气孔123a,干燥气体再由该些出气孔123a流动至导流部121a,再利用导流部121a的引导往测试区域Illa流动,其他均与第一较佳实施例相同,在此不再予以赘述。 Wherein, when the user starts the test platform having a second preferred embodiment of the dry environment of the present invention to provide Ia, drying gas inlet orifice 122a is made to enter the guide mechanism 12a, and these flows to the air outlet port 123a, the drying gas From these results then flow out of holes 123a to guide portion 121a, and then use the guide portion 121a of the diversion to the test area Illa flow, the other was the same as the first preferred embodiment example, will not be repeated here.

[0036] 请参阅图4,图4显示本发明第三实施例的具有干燥环境的测试平台的剖视示意图。 [0036] Refer to Figure 4, Figure 4 shows a schematic cross-sectional view of the test platform having a dry environment of the third embodiment of the present invention. 如图4所示,与第一较佳实施例不同的是,具有干燥环境的测试平台I还包含一壳体14以及一干燥气体管线15,壳体14用以遮盖测试区域111的上方空间,而干燥气体管线15连结于干燥气体产生装置13,并且设置于壳体14的内部,以于测试区域111的上方空间产生干燥环境而防止结露,其余均与第一较佳实施例相同,在此不再予以赘述。 4, the first preferred embodiment except that the test platform I having a dry environment further comprises a housing 14 and a drying gas line 15, the housing 14 to cover the test area of the upper space 111, The drying gas line 15 is connected to the drying gas generating device 13, and is provided in the interior of the housing 14, so as to produce a dry environment in the space above the test area 111 and to prevent condensation, the rest were the same as in the first preferred embodiment, in This is no longer to be mentioned here.

[0037] 综合以上所述,利用本发明所提供的具有干燥环境的测试平台,由于利用导流机构将干燥气体引导至测试区域而产生干燥的测试环境,因而使得在测试LED芯片时可防止结露或结冰的现象发生,进而提高电性测试的可靠度。 [0037] Based on the above described, the present invention provides the use of a test platform having a dry environment, since the test environment arising from the use of drying the drying gas diversion mechanism guided to the test area, thus making the LED chip can be prevented when the test node dew or freezing occurs, thus improving the reliability of electrical testing.

[0038]当然,本发明还可有其它多种实施例,在不背离本发明精神及其实质的情况下,熟悉本领域的技术人员当可根据本发明作出各种相应的改变和变形,但这些相应的改变和变形都应属于本发明所附的权利要求的保护范围。 [0038] Of course, the present invention may also have other various embodiments without departing from the spirit and essence of the invention, those skilled in the art can be made when all appropriate changes and modifications in accordance with the present invention, but these respective changes and modifications within the scope of protection of the present invention should be appended claims.

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Classifications
International ClassificationF26B21/00, G01R31/44
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