CN103785940A - Vacuum electron beam welding jig for aluminum alloy structure members of IC (integrate circuit) equipment - Google Patents

Vacuum electron beam welding jig for aluminum alloy structure members of IC (integrate circuit) equipment Download PDF

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Publication number
CN103785940A
CN103785940A CN201210434040.8A CN201210434040A CN103785940A CN 103785940 A CN103785940 A CN 103785940A CN 201210434040 A CN201210434040 A CN 201210434040A CN 103785940 A CN103785940 A CN 103785940A
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CN
China
Prior art keywords
aluminum alloy
electron beam
transverse slat
vacuum electron
slide unit
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Granted
Application number
CN201210434040.8A
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Chinese (zh)
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CN103785940B (en
Inventor
乔红超
赵吉宾
于彦凤
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Shenyang Institute of Automation of CAS
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Shenyang Institute of Automation of CAS
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Priority to CN201210434040.8A priority Critical patent/CN103785940B/en
Publication of CN103785940A publication Critical patent/CN103785940A/en
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Publication of CN103785940B publication Critical patent/CN103785940B/en
Expired - Fee Related legal-status Critical Current
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00Electron-beam welding or cutting
    • B23K15/0013Positioning or observing workpieces, e.g. with respect to the impact; Aligning, aiming or focusing electronbeams
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00Electron-beam welding or cutting
    • B23K15/0046Welding
    • B23K15/0053Seam welding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00Electron-beam welding or cutting
    • B23K15/06Electron-beam welding or cutting within a vacuum chamber

Abstract

The invention belongs to the field of aluminum alloy structure members of IC (integrate circuit) equipment, and particularly relates to a vacuum electron beam welding jig for aluminum alloy structure members of IC equipment. The vacuum electron beam welding jig comprises a two-dimensional numerical control platform, a beam frame, clamping sliders, base plates and cross plates. The cross plates are disposed on the two-dimensional numerical control platform through uprights, and adjusting screws for adjusting working distance are arranged on the cross plates; the beam frame sleeving the uprights is in threaded connection with the adjusting screws and performs axial reciprocating movement along the uprights through rotation of the adjusting screws; the beam frame is sleeved with the clamping sliders which are clamped in the middle of a welded work piece, one side of the work piece is supported through the clamping sliders, the other side of the work piece is supported through the base plates laid on the beam frame, and clamping screws used for adjusting the clamping distance are arranged on the clamping sliders. The vacuum electron beam welding jig has the advantages of simple structure, light mass, convenience in use, low cost and the like, production efficiency can be improved, and evenness and stability of welding quality are guaranteed.

Description

A kind of IC equipment aluminum alloy junction member vacuum electron beam welding fixture
Technical field
The invention belongs to IC equipment aluminum alloy junction member welding field, specifically a kind of IC equipment aluminum alloy junction member vacuum electron beam welding fixture.
Background technology
Be different from the simple function requirement of other industry parts, IC (integrate circuit, integrated circuit) parts of equipment often will take into account the complex function requirements such as intensity, strain, anticorrosive, characteristic electron, electromagnetic property, material purity, the complexity that is various complex technologys is integrated, often adopts aluminum alloy materials.The general requirement on machining accuracy of structural member of IC equipment is high, in order to meet the requirement of IC equipment precision welding, solve an aluminium alloy hard-to-weld difficult problem, adopt the vacuum electron beam welding process having without advantages such as welding rod, not oxidizable, good process repeatability and heat distortion amount are little.Very responsive to line and magnetic field when aluminum alloy vacuum electron beam welding, especially be greater than the aluminium alloy structure of 3mm for thickness, line easy generation less than normal is lack of penetration, and line weld metal bigger than normal easily subsides, magnetic field exists will cause deflection of a beam of electrons, can not realize along desired trajectory and welding; In addition, intensity of aluminum alloy coefficient is low, thermal conductivity large (be about steel 4 times), linear expansion coefficient is large, easily produce welding deformation and welding point softening, so design specialized non-magnetic, conduct electricity good, location and clamp reliable special fixture, will greatly improve welding quality and the production efficiency of IC equipment aluminum alloy junction member.
Summary of the invention
The object of the present invention is to provide a kind of IC equipment aluminum alloy junction member vacuum electron beam welding fixture.This weld jig can effectively clamp IC equipment aluminum alloy junction member and weld on existing vacuum electron beam welder.
The object of the invention is to be achieved through the following technical solutions:
The present invention includes two dimension NC auto platform, cross beam frame, grip slide, backing plate and transverse slat, wherein transverse slat is arranged on two dimension NC auto platform by column, is provided with the adjustment screw rod of adjusting operating distance on transverse slat; Described cross beam frame is enclosed within on column and with described adjustment screw flight and is connected, and adjusts screw rod move along the axial reciprocating of column by rotation; On described cross beam frame, be arranged with soldered Workpiece clamping at middle grip slide, a side of described workpiece is supported by grip slide, and opposite side supports by the backing plate being placed on cross beam frame, and described grip slide is provided with the clamping screw of adjusting clamping distance.
Wherein: the both sides at the grip slide of clamping work pieces are respectively equipped with transverse slat, are equipped with adjustment screw rod on each transverse slat, and one end of described adjustment screw rod is rotatably installed on transverse slat, and the other end is free end; The both sides of described cross beam frame are inserted in by two free ends of adjusting screw rod respectively, and are connected with adjustment screw flight; Be positioned at one end that adjustment screw rod on one of them transverse slat of both sides of grip slide is arranged on this side transverse slat, the adjustment screw rod on another transverse slat is arranged on the other end of this side transverse slat; Described adjustment screw rod parallels with column; One end of described clamping screw is rotatably installed on the grip slide of described workpiece either side, and the other end of clamping screw is threaded with the grip slide of described workpiece opposite side; The described grip slide being threaded with clamping screw moves back and forth along cross beam frame, and by positioning and locking screw and cross beam frame butt location; The inner side of described grip slide is provided with the second locating slot along the length direction of grip slide, and a side of two soldered workpiece rides on this second locating slot, and opposite side rides on described backing plate; Between two backing plates of described soldered two workpiece opposite sides below, be provided with the slag protective plate being arranged on cross beam frame, the weld seam between two soldered workpiece be positioned at this slag protective plate directly over;
Described two dimension NC auto platform comprises X-axis slide unit, Y-axis slide unit and workbench, and wherein X-axis slide unit is arranged on the screw of Y-axis slide unit, is connected with the threads of lead screw of Y-axis slide unit by screw, moves back and forth along the leading screw of Y-axis slide unit; Described workbench is arranged on the screw of X-axis slide unit, is connected with the threads of lead screw of X-axis slide unit by screw, moves back and forth, and move back and forth along the leading screw of Y-axis slide unit with X-axis slide unit along the leading screw of X-axis slide unit; One end of described column is connected with transverse slat, and the other end is connected with described workbench by connecting plate; Between described connecting plate and workbench, locate by locating slot and locating piece, and fix by T-shaped groove and T-shaped screws clamp.
Advantage of the present invention and good effect are:
1. the present invention can regulate clamping distance by clamping screw, can adjust operating distance by adjusting screw rod, has realized the automatic welding of IC equipment configuration part, can improve the production efficiency of IC equipment configuration part, guarantees the uniformity of welding quality.
2. the present invention can realize the approximately IC equipment configuration part welding of 230 × 230 × 200mm, the about 30kg of maximum weight of gap 0~0.15mm, workpiece size.
3. the present invention is provided with slag protective plate below weld seam, both can prevent from that slag from dropping on clamping screw 8 clamp bodies such as grade to damage fixture, makes again to weld after electronic beam current complete stability again.
4. clamping and positioning of the present invention is reliable, has greatly improved welding quality and the production efficiency of IC equipment aluminum alloy junction member.
The present invention have simple in structure, quality is light, easy to use, low cost and other advantages, in enhancing productivity, has guaranteed uniformity and the stability of welding quality.
6. the present invention adopts aluminium alloy and 304 stainless steel materials, has both guaranteed the electric conductivity (electronics that guarantees electron beam can flow back to the earth) of fixture, has guaranteed again not carrying magnetic (guaranteeing that electron beam does not deflect), realizes electronic beam current direction reliable and stable.
Accompanying drawing explanation
Fig. 1 is perspective view of the present invention;
Wherein: 1 is X-axis slide unit, 2 is Y-axis slide unit, and 3 is workbench, and 4 is connecting plate, 5 is column, and 6 for adjusting screw rod, and 7 is cross beam frame, 8 is clamping screw, and 9 is grip slide, and 10 is workpiece, 11 is weld seam, and 12 is backing plate, and 13 is slag protective plate, 14 is positioning and locking screw, and 15 is locating piece, and 16 is T-shaped groove, 17 is the first locating slot, and 18 is the second locating slot, and 19 is transverse slat.
The specific embodiment
Below in conjunction with accompanying drawing, the invention will be further described.
As shown in Figure 1, the present invention includes two dimension NC auto platform, cross beam frame 7, grip slide 9, backing plate 12 and transverse slat 19, wherein two dimension NC auto platform is arranged on vacuum electron beam welder, comprise X-axis slide unit 1, Y-axis slide unit 2 and workbench 3, X-axis slide unit 1 is arranged on the screw of Y-axis slide unit 2, be connected with the threads of lead screw of Y-axis slide unit 2 by screw, move back and forth along the leading screw of Y-axis slide unit 2; Workbench 3 is arranged on the screw of X-axis slide unit 1, is connected with the threads of lead screw of X-axis slide unit 1 by screw, moves back and forth, and move back and forth along the leading screw of Y-axis slide unit 2 with X-axis slide unit 1 along the leading screw of X-axis slide unit 1.Between connecting plate 4 and workbench 3, locate by locating slot and locating piece, and fix by T-shaped groove and T-shaped screws clamp; The bottom edge that is connecting plate 4 is provided with multiple locating pieces 15, and the top surface edge relevant position of workbench 3 has the first locating slot 17 that quantity is identical, and the locating piece 15 on connecting plate 4 inserts in the first locating slot 17 of workbench 3 and positions; On workbench 3 and connecting plate 4, have T-shaped groove 16, by T-shaped screw, workbench 3 and connecting plate 4 are fixedly clamped.
Transverse slat 19 is arranged on connecting plate 4 by many root posts 5, and transverse slat 19 is two, lays respectively at the both sides of two soldered workpiece 10; The column 5 of the present embodiment is four, and one end (upper end) of four root posts 5 is affixed with four ends of two transverse slats 19 respectively, and the other end (lower end) of four root posts 5 is fixed on connecting plate 4.The adjustment screw rod 6 of adjusting operating distance is all installed on each transverse slat 19, and one end (upper end) of each adjustment screw rod 6 is rotatably installed on transverse slat 19, and the other end (lower end) is free end.Wherein the adjustment screw rod 6 on a side transverse slat 19 is arranged on one end of this side transverse slat 19, and the adjustment screw rod 6 on opposite side transverse slat 19 is arranged on the other end of this side transverse slat 19.
Cross beam frame 7 is by two crossbeams and two quadra structures that vertical beam forms, four ends of two vertical beams are passed by four root posts 5 respectively, two crossbeams are inserted in by two free ends of adjusting screw rod 6 respectively, and be threaded with adjusting screw rod 6, adjust screw rod 6 by rotation cross beam frame 7 entirety are moved along the axial reciprocating of column 5; Adjusting screw rod 6 and four root posts 5 for two is parallel to each other.
On cross beam frame 7, be arranged with the grip slide 9 in the middle of soldered workpiece 10 is clamped in, grip slide 9 is two, between two transverse slats 19; The two ends of each grip slide 9 are enclosed within respectively on the vertical beam of cross beam frame 7, are provided with the clamping screw 8 of adjusting clamping distance on grip slide 9.One end of clamping screw 8 is rotatably installed on any grip slide 9, the other end of clamping screw 8 is threaded with an another grip slide 9, by rotation clamping screw 8, the grip slide 9 being threaded with clamping screw 8 is moved back and forth along the vertical beam of cross beam frame 7, and then regulate clamping distance.After distance to be clamped is adjusted, the grip slide 9 being threaded with clamping screw 8 is the vertical beam butt location with cross beam frame 7 by positioning and locking screw 14.
The inner side of each grip slide 9 is provided with the second locating slot 18 along the length direction of grip slide, and a side of two soldered workpiece 10 rides on this second locating slot 18, and opposite side rides on the backing plate 12 being placed between 7 liang of vertical beams of cross beam frame.Between two backing plates 12 of soldered two workpiece 10 opposite sides belows, be provided with the slag protective plate 13 being arranged between 7 liang of vertical beams of cross beam frame, the weld seam 11 between two soldered workpiece 10 be positioned at this slag protective plate 13 directly over.
Cross beam frame 7, grip slide 9 and transverse slat 19 are realized welding gun by the motion of X-axis slide unit 1 and Y-axis slide unit 2 and are welded along specified path.
Adjustment screw rod 6 of the present invention, cross beam frame 7, clamping screw 8, grip slide 9, backing plate 12 and slag protective plate adopt conduction and not magnetic aluminium alloy and stainless steel material.
Workpiece principle of the present invention is:
When use, first workbench 3 is installed on X-axis slide unit 1, the locating piece 15 on connecting plate 4 coordinates with the first locating slot 17 on workbench 3 behind location, T-shaped screw is put into the T-shaped groove 16 of workbench 3 and connecting plate 4, and workbench 3 is fixing with connecting plate 4.Then, backing plate 12 is placed on cross beam frame 7, two soldered workpiece 10 is put into the second locating slot 18 of grip slide 9, according to the size of workpiece 10, adjust the position of one of them grip slide 9 by rotation clamping screw 8, and be locked with positioning and locking screw 14.Slag protective plate 13 is placed on to the below of weld seam, both can have prevented from that slag from dropping on clamping screw 8 clamp bodies such as grade to damage fixture, make again to weld again after electronic beam current complete stability.Finally, rotation adjustment screw rod 6 is adjusted to the operating distance of setting, and mobile X, Y- axis slide unit 1,2 weld.

Claims (10)

1. an IC equipment aluminum alloy junction member vacuum electron beam welding fixture, it is characterized in that: comprise two dimension NC auto platform, cross beam frame (7), grip slide (9), backing plate (12) and transverse slat (19), wherein transverse slat (19) is arranged on two dimension NC auto platform by column (5), is provided with the adjustment screw rod (6) of adjusting operating distance on transverse slat (19); Described cross beam frame (7) is enclosed within column (5) above and is threaded with described adjustment screw rod (6), adjusts screw rod (6) move along the axial reciprocating of column (5) by rotation; On described cross beam frame (7), be arranged with the grip slide (9) in the middle of soldered workpiece (10) is clamped in, one side of described workpiece (10) is supported by grip slide (9), opposite side supports by the backing plate (12) being placed on cross beam frame (7), and described grip slide (9) is provided with the clamping screw (8) of adjusting clamping distance.
2. by IC equipment aluminum alloy junction member vacuum electron beam welding fixture claimed in claim 1, it is characterized in that: be respectively equipped with transverse slat (19) in the both sides of the grip slide (9) of clamping work pieces (10), on each transverse slat (19), be equipped with and adjust screw rod (6), it is upper that one end of described adjustment screw rod (6) is rotatably installed in transverse slat (19), and the other end is free end; The both sides of described cross beam frame (7) are inserted in by two free ends of adjusting screw rod (6) respectively, and are threaded with adjustment screw rod (6).
3. by IC equipment aluminum alloy junction member vacuum electron beam welding fixture claimed in claim 2, it is characterized in that: be positioned at adjustment screw rod (6) on one of them transverse slat (19) of both sides of grip slide (9) and be arranged on one end of this side transverse slat (19), the adjustment screw rod (6) on another transverse slat (19) is arranged on the other end of this side transverse slat (19).
4. by the I C equipment aluminum alloy junction member vacuum electron beam welding fixture described in claim 1 or 2, it is characterized in that: described adjustment screw rod (6) parallels with column (5).
5. by IC equipment aluminum alloy junction member vacuum electron beam welding fixture claimed in claim 1, it is characterized in that: one end of described clamping screw (8) is rotatably installed on the grip slide (9) of described workpiece (10) either side, and the other end of clamping screw (8) is threaded with the grip slide (9) of described workpiece (10) opposite side.
6. by IC equipment aluminum alloy junction member vacuum electron beam welding fixture claimed in claim 5, it is characterized in that: the described grip slide (9) being threaded with clamping screw (8) moves back and forth along cross beam frame (7), and by positioning and locking screw (14) and cross beam frame (7) butt location.
7. by IC equipment aluminum alloy junction member vacuum electron beam welding fixture claimed in claim 5, it is characterized in that: the inner side of described grip slide (9) is provided with the second locating slot (18) along the length direction of grip slide, it is upper that one side of soldered two workpiece (10) rides over this second locating slot (18), and opposite side rides on described backing plate (12).
8. by IC equipment aluminum alloy junction member vacuum electron beam welding fixture claimed in claim 5, it is characterized in that: between two backing plates (12) of described soldered two workpiece (10) opposite side below, be provided with the slag protective plate (13) being arranged on cross beam frame (7), the weld seam (11) between soldered two workpiece (10) be positioned at this slag protective plate (13) directly over.
9. by IC equipment aluminum alloy junction member vacuum electron beam welding fixture claimed in claim 1, it is characterized in that: described two dimension NC auto platform comprises X-axis slide unit (1), Y-axis slide unit (2) and workbench (3), wherein X-axis slide unit (1) is arranged on the screw of Y-axis slide unit (2), be connected with the threads of lead screw of Y-axis slide unit (2) by screw, move back and forth along the leading screw of Y-axis slide unit (2); Described workbench (3) is arranged on the screw of X-axis slide unit (1), is connected with the threads of lead screw of X-axis slide unit (1) by screw, moves back and forth, and move back and forth along the leading screw of Y-axis slide unit (2) with X-axis slide unit (1) along the leading screw of X-axis slide unit (1); One end of described column (5) is connected with transverse slat (19), and the other end is connected with described workbench (3) by connecting plate (4).
10. by I C equipment aluminum alloy junction member vacuum electron beam welding fixture claimed in claim 9, it is characterized in that: between described connecting plate (4) and workbench (3), locate by locating slot and locating piece, and fix by T-shaped groove and T-shaped screws clamp.
CN201210434040.8A 2012-11-02 2012-11-02 A kind of IC equips aluminum alloy junction component vacuum electron beam welding fixture Expired - Fee Related CN103785940B (en)

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CN103785940B CN103785940B (en) 2015-09-09

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104959725A (en) * 2015-06-08 2015-10-07 航天材料及工艺研究所 Electron beam welding deformation control method of large variable-thickness component
CN109894783A (en) * 2017-12-08 2019-06-18 长春设备工艺研究所 Tailstock plate flexibility quick-fitting device

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5170028A (en) * 1989-08-28 1992-12-08 Hitachi, Ltd. Process and apparatus, for electron beam welding of a member partially enclosed in vacuum chamber, and the member formed thereby
US6722872B1 (en) * 1999-06-23 2004-04-20 Stratasys, Inc. High temperature modeling apparatus
CN1695896A (en) * 2005-05-26 2005-11-16 上海交通大学 Flexible device for multipoint clamping and positioning spatial 3D thin wall part
RU2405664C1 (en) * 2009-10-15 2010-12-10 Федеральное Государственное Унитарное Предприятие "Научно-Производственное Объединение "Техномаш" Electron-beam welding device
CN201720625U (en) * 2009-12-23 2011-01-26 浙江吉利汽车研究院有限公司 White car lifting appliance
CN201940744U (en) * 2010-12-07 2011-08-24 成都飞机工业(集团)有限责任公司 Vacuum electron beam test piece general welding device
CN202861621U (en) * 2012-11-02 2013-04-10 中国科学院沈阳自动化研究所 Integrated circuit (IC) equipment aluminum alloy structural part vacuum electron beam welding jig

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5170028A (en) * 1989-08-28 1992-12-08 Hitachi, Ltd. Process and apparatus, for electron beam welding of a member partially enclosed in vacuum chamber, and the member formed thereby
US6722872B1 (en) * 1999-06-23 2004-04-20 Stratasys, Inc. High temperature modeling apparatus
CN1695896A (en) * 2005-05-26 2005-11-16 上海交通大学 Flexible device for multipoint clamping and positioning spatial 3D thin wall part
RU2405664C1 (en) * 2009-10-15 2010-12-10 Федеральное Государственное Унитарное Предприятие "Научно-Производственное Объединение "Техномаш" Electron-beam welding device
CN201720625U (en) * 2009-12-23 2011-01-26 浙江吉利汽车研究院有限公司 White car lifting appliance
CN201940744U (en) * 2010-12-07 2011-08-24 成都飞机工业(集团)有限责任公司 Vacuum electron beam test piece general welding device
CN202861621U (en) * 2012-11-02 2013-04-10 中国科学院沈阳自动化研究所 Integrated circuit (IC) equipment aluminum alloy structural part vacuum electron beam welding jig

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104959725A (en) * 2015-06-08 2015-10-07 航天材料及工艺研究所 Electron beam welding deformation control method of large variable-thickness component
CN109894783A (en) * 2017-12-08 2019-06-18 长春设备工艺研究所 Tailstock plate flexibility quick-fitting device

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