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Publication numberCN103760173 B
Publication typeGrant
Application numberCN 201410015005
Publication date8 Jun 2016
Filing date14 Jan 2014
Priority date14 Jan 2014
Also published asCN103760173A
Publication number201410015005.1, CN 103760173 B, CN 103760173B, CN 201410015005, CN-B-103760173, CN103760173 B, CN103760173B, CN201410015005, CN201410015005.1
Inventors梁龙, 李学春, 姜有恩, 林圆圆, 陈醉雨
Applicant中国科学院上海光学精密机械研究所
Export CitationBiBTeX, EndNote, RefMan
External Links: SIPO, Espacenet
光学元件表面缺陷筛查装置和筛查方法 Optical element surface defects screening apparatus and method for screening translated from Chinese
CN 103760173 B
Abstract  translated from Chinese
一种光学元件表面缺陷筛查装置和筛查方法,该装置的构成包括:脉冲激光源、电动位移台、聚焦透镜、PIN管、数据采集卡、计算机和固定件,待测的光学元件通过所述的固定件固定在所述的电动位移台上,在所述的脉冲激光源照射在所述的光学元件上反射后,在该反射光束方向依次设置所述的聚焦透镜和PIN管,所述的PIN管位于所述的该聚焦透镜的像平面;所述的PIN管输出的信号经所述的数据采集卡采集送所述的计算机,所述的计算机的输出端接所述的电动位移台的控制端。 An optical element surface defect screening and screening apparatus constituting the apparatus comprising: a pulsed laser source, the electric displacement station, a focusing lens, PIN control, data acquisition card, computer and the fixed member of the optical element to be measured by the said fixing member is fixed to said electric moving stage, after the irradiation of the pulsed laser source is reflected on the optical element in the direction of the reflected light beam successively setting said PIN diode and a focusing lens, said the PIN diode is located in the focus of the lens image plane; data acquisition card of the PIN diode output signal is sent to the computer of the acquisition, the output of the computer terminating the electric displacement station control terminal. 本发明可以对光学元件表面缺陷的位置和基本尺寸等信息进行实时的记录,具有简易、实时、自动、可靠的特点。 The present invention can be an optical element surface defect location and size of the basic information such as real-time recording, with simple, real-time, automatic, reliable.
Claims(2)  translated from Chinese
  1. I. 一种利用光学元件表面缺陷筛查装置进行光学元件表面缺陷筛查的方法,该光学元件表面缺陷筛查装置,包括:脉冲激光源(1)、电动位移台(2)、聚焦透镜(3)、PIN管(4)、数据采集卡(5)、计算机(6)和固定件(7),待测的光学元件(8)通过所述的固定件(7)固定在所述的电动位移台(2)上,在所述的脉冲激光源(1)照射在所述的光学元件(8)上反射后,在该反射光束方向依次设置所述的聚焦透镜(3)和PIN管(4),所述的PIN管(4)位于所述的该聚焦透镜(3)的像平面;所述的PIN管(4)输出的信号经所述的数据采集卡巧)采集送至所述的计算机(6),所述的计算机(6)的输出端接所述的电动位移台(2)的控制端,其特征在于该方法包括下列步骤: ① 将待测的光学元件(8)通过所述的固定件(7)固定在所述的电动位移台(2)上,启动所述的计算机驱动并控制所述的电动位移台(2)将所述的脉冲激光源(1)输出的脉冲激光移动到待测光学元件(8)扫描的起点,设定所述的脉冲激光源(1)输出的脉冲激光的脉冲间隔为A t,设电动位移台(2)的运动速度为U; ② 所述的计算机同步控制所述的脉冲激光源(1)、电动位移台(2)和数据采集卡(5)同步工作:当所述的脉冲激光源(1)的第一个脉冲福照所述的待测光学元件(8)的同时,所述的数据采集卡开始工作,数据采集卡W时间to为起点,在单脉冲内采集m个有效电压值m, U2,U3…Un…Um并输入计算机(6),再通过计算机(6)对所述的m个数据采用求和计算V=I;化,第一个脉冲的电压记为Vi,所述的脉冲激光源(1)对所述的待测光学元件(8)进行 I. a use of the optical element surface defects screening apparatus for screening an optical element of surface defects, the optical element surface defects screening apparatus, comprising: a pulsed laser source (1), an electric translation stage (2), a focusing lens ( 3), PIN tube (4), data acquisition card (5), the computer (6) and the fixed member (7), the tested optical element (8) (7) is fixed by the fixing member in said electric displacement station (2), pulsed laser source in said (1) irradiating the optical element (8) on reflection, the reflected light beam in the direction of the focusing lens are sequentially arranged (3) and PIN diode ( 4), said PIN diode (4) is located in the the focusing lens (3) of the image plane; data acquisition card of the PIN diode (4) of the output signal by said Qiao) to said collection computer (6), computer (6) of the output of the electric displacement termination units (2) a control terminal, wherein the method comprises the following steps: ① optical element under test (8) the fixing member (7) fixed to the electric displacement station (2), the computer starts the driving and controlling the electric displacement station (2) of the pulsed laser source (1) output pulsed laser light moves to the optic under test (8) of the scanning start point, setting the pulsed laser source (1) of the pulsed laser light output pulse interval a t, is provided an electric translation stage (2) moving speed U; ② the computer synchronization control of the pulsed laser source (1), the electric displacement station (2) and a data acquisition card (5) synchronization: when the pulsed laser source (1) according to the first pulse blessing said measured optical element (8) at the same time, the data acquisition card to work, the data acquisition card W to time as a starting point, an effective voltage value collected m m in a single pulse, U2, U3 ... Un ... Um and entered into the computer (6), and then through the computer (6) for the sum of m data calculated using V = I; of the voltage pulse is first referred to as Vi, the pulsed laser source (1) to tested optical element (8)
  2. 1. 扫描,W后依次记为V2 ,V3…Vn; ③ 电压序列Vi、V2,V3-,Vn,设置一个允许的最大变化值AV,当电压Vi的变化大于AV时, 记为Vk,确定光学元件上对应的点就是一个缺陷点,记录从开始扫描到该缺陷点出现的时间为k* At,则位移台工作距离为u*k* At,由于光学元件的尺寸已知,得到缺陷点的具体位置信息,同时,根据Vk的大小值确定缺陷点的相对大小。 1. Scan, W is successively recorded after V2, V3 ... Vn; ③ sequence voltage Vi, V2, V3-, Vn, set a maximum allowable change value AV, when the change in voltage Vi more than AV, denoted Vk, OK optical element corresponding point is a point defect, scan to start recording from the time point of occurrence of a defect k * At, the displacement of the station working distance u * k * At, due to the size of the optical elements known to give point defects specific location information, and to determine the relative size of the point defects in accordance with the size of the Vk value.
Description  translated from Chinese
光学元件表面缺陷筛查装置和筛查方法 Optical element surface defects screening apparatus and method for screening

技术领域 TECHNICAL FIELD

[0001] 本发明涉及一种光学元件表面缺陷,特别是一种光学元件表面缺陷筛查装置和筛查方法。 [0001] The present invention relates to an optical element surface defects, particularly surface defects of an optical element and a screening means for screening.

背景技术 Background technique

[0002] 光学元件表面缺陷包括元件加工过程中形成的麻点和划痕、表面镀膜内部的杂质,光学元件内部折射率不均匀性形成的小透镜,以及光学元件使用过程中形成的激光损伤等。 [0002] The optical element includes an element surface pitting defects formed during machining and scratches, coating the interior surface of the impurity, the refractive index of the optical element internal unevenness formed small lenses, and an optical element formed in the course of laser injury . 部分损伤点在激光辐照下会发生损伤增长,并且损伤点引起的光场调制会破坏后续光路中的光学元件。 Partially damaged point in the laser irradiation damage growth will occur, and the optical field modulation caused damage points will destroy the subsequent optical path of the optical elements.

[0003] 现有的缺陷损伤检测技术主要利用激光与光学元件相互作用产生的各种效应来实现。 [0003] Existing defect damage detection technology mainly using a variety of effects of laser interaction with optical elements to achieve. 常见的有等离子体闪光法、散光法、光热法等。 Common are plasma flash method, astigmatism method, photothermal method.

[0004] 等离子体闪光法是指当脉冲激光作用于光学元件表面,缺陷点会吸收激光,辐照点会迅速升温产生气化,导致原子电离,产生等离子体,出现闪光。 [0004] Plasma flash method means that when the laser pulse applied to the surface of the optical element, the defective dot will absorb laser radiation spot will produce gasification rapid warming, causing atoms ionized plasma is generated by blinking.

[0005] 散射法是采用激光照射光学元件,缺陷点在激光辐照后形成损失后会产生散射光,通过散射光的强度变化来确定该点是不是缺陷点。 [0005] scattering method is to use laser illumination optics, will produce scattered light point defect after loss after laser irradiation is formed by the intensity of the scattered light to determine the point at this point is not a defect. 目前,常用的缺陷检测技术多采用白光光源照射待测元件产生散射光,通过面阵CCD探测缺陷的信息。 At present, the common defect detection technology to use more white light source irradiating the test element to produce scattered light detected by the CCD array defects. 利用CCD采集激光辐照前后辐照区域的图像,采用图像相减法实现缺陷判别。 Use CCD image capture before and after irradiation of laser irradiation, using image subtraction achieve defect discrimination. 对介质膜上一点采集两次图像,当两幅图像出现差异时认为该点为缺陷点。 One o'clock on the dielectric film image capture twice, when the difference between the two images appear that the point defect points. 图像相减法对系统稳定性要求高,否则差分后会出现虚像,从而导致误判。 Image subtraction system stability requirements, otherwise there will be a virtual image after difference, leading to miscarriage of justice. 另外由于面阵CCD的感光面积较小,对于大口径光学元件的检测需要分块进行,一块光学元件需要采集多幅图像,耗时较久。 Also due to the small area CCD sensitive area, for the detection of large aperture optical elements need chunking, an optical element you need to collect more images, takes longer.

[0006] 由此可见,如何实现光学元件表面缺陷位置快速、实时、准确记录成为一个急需解决的问题。 [0006] Thus, how fast optical surface defect location, real-time, accurate records become an urgent problem.

发明内容 SUMMARY

[0007] 本发明针对上述现有检测装置存在的不足,提出一种光学元件表面缺陷筛查装置和筛查方法。 [0007] The present invention is directed to the above-mentioned deficiencies existing detection means, proposes an optical element surface of the screening apparatus and method for screening defective. 该装置可对光学元件表面缺陷的位置和基本尺寸等信息进行实时的记录,具有简易、实时、自动和可靠的特点。 The device may be an optical element surface defect location and size of the basic information such as real-time recording, with simple, real-time, automatic and reliable.

[0008] 本发明的技术解决方案如下: [0008] The technical solution of the present invention are as follows:

[0009] -种光学元件表面缺陷筛查装置,特点在于其构成包括:脉冲激光源、电动位移台、聚焦透镜、PIN管、数据采集卡、计算机和固定件,待测的光学元件通过所述的固定件固定在所述的电动位移台上,在所述的脉冲激光源照射在所述的光学元件上反射后,在该反射光束方向依次设置所述的聚焦透镜和PIN管,所述的PIN管位于所述的该聚焦透镜的像平面;所述的PIN管输出的信号经所述的数据采集卡采集送所述的计算机,所述的计算机的输出端接所述的电动位移台的控制端。 [0009] - optical surface defects kind of screening devices, are characterized by their constitution comprising: a pulsed laser source, electric translation stage, the focus lens, PIN tube, data acquisition card, a computer and a fixed member, through said optical device under test the fixing member fixed to said electric moving stage, after the irradiation of the pulsed laser source is reflected on the optical element in the direction of the reflected light beam successively setting said PIN diode and a focusing lens, wherein PIN tube located at the focus of the lens image plane; data acquisition card of the PIN diode output signal is sent to the computer of the acquisition, the output of the computer terminating the electric displacement station control terminal.

[0010] 所述的计算机控制所述的电动位移台的运动速度、运动距离,同时控制所述的数据采集卡与所述的脉冲激光源的脉冲时钟同步。 [0010] The computer controlling the movement speed of the electric displacement of the station, the movement distance, while the clock pulse control of the data acquisition card with the pulsed laser source synchronization.

[0011] 利用上述光学元件表面缺陷筛查装置进行光学元件表面缺陷筛查的方法,其特点在于该方法包括下列步骤: [0011] With the above optical element surface defects screening apparatus for screening an optical element surface defects, characterized in that the method comprises the steps of:

[0012] ①将待测的光学元件通过所述的固定件固定在所述的电动位移台上,启动所述的计算机驱动并控制所述的电动位移台将所述的脉冲激光源输出的脉冲激光移动到待测光学元件扫描的起点,设定所述的脉冲激光源输出的脉冲激光的脉冲间隔为At,设电动位移台的运动速度为u; [0012] ① the fixing member through the optical element to be measured is fixed in the displacement of the electric stage, and the computer starts the driving control of the electric translation stage to the output of the pulsed laser source pulse starting to move the laser scanning optical device under test, the set of the pulsed laser source of the laser output pulse to pulse interval At, the moving speed of the electric translation stage is set U;

[0013] ②所述的计算机同步控制所述的脉冲激光源、电动位移台和数据采集卡同步工作:当所述的脉冲激光源的第一个脉冲辐照所述的待测光学元件的同时,所述的数据采集卡开始工作,数据采集卡以时间to为起点,在单脉冲内采集m个有效电压值U1,U2,U3…un…Um 并输入计算机,再通过计算机对所述的m个数据采用求和计算\ = U,,第一个脉冲的电压i 记为Vi,所述的脉冲激光源对所述的待测光学元件进行扫描,以后依次记为ν2,ν3ν Ν; [0013] ② the computer synchronization control of the pulsed laser source, the electric displacement station and data acquisition card synchronization: When the measured optical element according to the first pulse irradiation of the pulsed laser source at the same time the data acquisition card to work according to the data acquisition card as a starting point in time to collect the m effective voltage value in a single pulse U1, U2, U3 ... un ... Um, and entered into the computer, and then through the computer's m data using summations \ = U ,, a first voltage pulse i denoted Vi, the pulsed laser source of the optical element under test is scanned, later followed credited to ν2, ν3 ν Ν;

[0014] ③电压序列1、2,3~^设置一个允许的最大变化值&,当电压1的变化大于八V时,记为Vk,确定光学元件上对应的点就是一个缺陷点,记录从开始扫描到该缺陷点出现的时间为k* At,则位移台工作距离为U*k* At,由于光学元件的尺寸已知,得到缺陷点的具体位置信息,同时,根据Vk的大小值确定缺陷点的相对大小。 Maximum change in [0014] ③ voltage sequence 1, 2, 3 ~ ^ set an allowable & , when the voltage 1 in more than eight V, denoted by Vk, determine the optical element corresponding point is a defect point, record time from the start of the scan to the defect appears to point k * At, the displacement of the station working distance of U * k * At, due to the size of the optical elements known to give specific information about the location of point defects, while to determine the relative size of the point defects in accordance with the size of the Vk value.

[0015] 本发明的技术效果如下: [0015] Technical effects of the present invention are as follows:

[0016] 本发明的高速PIN管相对于常用的大面阵C⑶成本较低,且转换速度快。 [0016] High-speed PIN diode of the present invention with respect to the common area array C⑶ lower cost, and conversion speed.

[0017] 本发明可以对光学元件表面缺陷的位置和基本尺寸等信息进行实时的记录,具有简易、实时、自动、可靠的特点。 [0017] The present invention can be an optical element surface defect location and size of the basic information such as real-time recording, with simple, real-time, automatic, reliable.

附图说明 BRIEF DESCRIPTION

[0018] 图1是本发明光学元件表面缺陷筛查过程的记录装置的示意图。 [0018] FIG. 1 is a schematic view of the optical element of the present invention, the surface defect screening process of the recording apparatus.

[0019] 图2是本装置扫描时脉冲光辐照位置示意图。 [0019] FIG. 2 is a schematic diagram of pulsed light irradiation position when the unit scan.

[0020] 图3是数据采集卡采集电压值与激光脉冲辐照的时序示意图。 [0020] FIG. 3 is a data acquisition card voltage pulse laser irradiation Timing Diagram.

[0021 ]图中:1 一脉冲激光,2 -电动位移台,3 -聚焦透镜,4一PIN管,5 -数据采集卡,6 - 计算机,7 -固定件和8 -待测光学元件。 [0021] in which: a pulsed laser 1, 2 - electric displacement units, 3 - focusing lens, a PIN diode 4, 5 - data acquisition card, 6 - Computer 7 - Fixed member and 8 - test optical element.

[0022] 图2脉冲光从光学元件左上角开始,计算机6控制位移台2带动光学元件8按示意图方向匀速移动,水平方向一行结束后元件上移一个光斑尺寸,水平方向与上一行相反,以此类推。 [0022] FIG. 2 pulsed light start from the top left of the optical element, the computer 6 controls the displacement of the station 2 driven by the optical element 8 a schematic view of the direction of constant speed, after the end of the horizontal line shift a spot size on the line in the horizontal direction and the opposite element to forth.

[0023] 图3是数据采集卡5采集输入到计算机6辐照点对应的电压值。 [0023] FIG. 3 is a data acquisition card collecting input 5 to 6 point computer radiation corresponding to the voltage value.

具体实施方式 detailed description

[0024] 下面结合实例和附图对本发明做进一步说明,但不应以此限制本发明的保护范围。 [0024] The following examples in conjunction with the accompanying drawings of the present invention is further illustrated, but should not be used to limit the scope of the present invention.

[0025] 请参阅图1,图1是本发明光学元件表面缺陷筛查过程的记录装置的示意图。 [0025] See Figure 1, Figure 1 is a schematic view of an optical element of the present invention, a surface defect screening process of the recording apparatus. 由图可见,本发明光学元件表面缺陷筛查装置,构成包括:脉冲激光源1、电动位移台2、聚焦透镜3、PIN管4、数据采集卡5、计算机6和固定件7,待测的光学元件8通过所述的固定件7固定在所述的电动位移台2上,在所述的脉冲激光源1照射在所述的光学元件8上反射后,在该反射光束方向依次设置所述的聚焦透镜3和PIN管4,所述的PIN管4位于所述的该聚焦透镜3的像平面;所述的PIN管4输出的信号经所述的数据采集卡5采集送所述的计算机6,所述的计算机6的输出端接所述的电动位移台2的控制端。 Be seen by means of the present invention, the defect screening surface optical element, constituting comprising: a pulsed laser source 1, electric moving table 2, the focusing lens 3, PIN tube 4, the data acquisition card 5, a computer 6 and the fixed member 7, the test the optical element 8 through the fixing member 7 is fixed on the electric translation stage 2, the irradiation of the pulse laser source 1 after reflection on the optical element 8 is, in the direction of the reflected light beam successively setting said the focusing lens 3 and 4 PIN diode, the PIN is located on the tube 4 of the focusing lens 3 image plane; data acquisition card PIN diode 4 according to the signal output by the acquisition of 5 to send the computer's 6, the electric computer output termination 6 of the displacement control terminal station 2.

[0026] 所述的计算机6控制所述的电动位移台2的运动速度、运动距离,同时控制所述的数据采集卡与所述的脉冲激光源1的脉冲时钟同步。 [0026] The computer 6 controls the moving speed of the electric displacement station 2, the movement distance, while controlling the data acquisition card with the clock pulse of the pulsed laser source 1 synchronized.

[0027] 利用上述的光学元件表面缺陷筛查装置进行光学元件表面缺陷筛查的方法,包括下列步骤: [0027] The use of the above optical surface defects screening device for screening an optical element of surface defects, comprising the steps of:

[0028] ①将待测的光学元件8通过所述的固定件7固定在所述的电动位移台2上,启动所述的计算机驱动并控制所述的电动位移台2,将所述的脉冲激光源1输出的脉冲激光移动到待测光学元件8扫描的起点,设定所述的脉冲激光源1输出的脉冲激光的脉冲间隔为At,设电动位移台2的运动速度为u; , The pulse [0028] ① the fixing member 8 to be measured through the optical element 7 is fixed to said displacement of said electric board 2, the computer starts driving and controlling the electric Stages 2 a laser light source outputted laser light pulse is moved to the start point of the scan optic under test 8, the pulsed laser source of a set of output pulse laser light of a pulse interval of At, provided the electric displacement velocity U of stage 2;

[0029] ②所述的计算机同步控制所述的脉冲激光源1、电动位移台2和数据采集卡5同步工作:当所述的脉冲激光源1的第一个脉冲辐照所述的待测光学元件8的同时,所述的数据采集卡开始工作,数据采集卡以时间to为起点,在单脉冲内采集m个有效电压值m,u 2,u3… un…Um并输入计算机6,所述的计算机6对所述的m个数据采用求和计算Hi,_第一个脉冲的电压记为Vi,所述的脉冲激光源1对所述的待测光学元件8进行扫描,以后依次记为V2, V3***Vn; [0029] ② computer according to the sync control pulse laser source 1, electric Stages 2 and the data acquisition card 5 synchronization: test pulse laser source 1, the first pulse of the irradiated when while the optical element 8, the data acquisition card to work, the data acquisition card as a starting point in time to collect the m effective voltage value m in a single pulse, u 2, u3 ... un ... Um 6 and entered into the computer, the m data referred to in the computer using six pairs of the sum calculation Hi, _ the first pulse voltage referred to as Vi, the optical element under test pulsed laser source said one pair of said scan 8, later followed remember is V2, V3 *** Vn;

[0030] ③电压序列VfVN,设置一个允许的最大变化值Δ V,当电压Vi的变化大于Δ V时,记为Vk,确定光学元件上对应的点就是一个缺陷点,记录从开始扫描到该缺陷点出现的时间为k* At,则位移台工作距离为U*k* At,由于光学元件的尺寸已知,得到缺陷点的具体位置信息,同时,根据Vk的大小值确定缺陷点的相对大小。 [0030] The maximum change value ③ voltage sequence VfVN, set an allowable Δ V, when the change in voltage Vi is greater than Δ V, denoted by Vk, determine the optical element corresponding to the point is a defect point, recording starts from the scan to the time point defects appears as k * At, the displacement of the station working distance of U * k * At, due to the size of the optical elements known to give specific information about the location of point defects, while the defect is determined based on the point value of the relative size of Vk size.

[0031] 设光学元件尺寸为长Lo,宽d,脉冲光斑直径为D。 [0031] provided the optical element dimensions of length Lo, broad d, pulse spot diameter D. 当a〈=u*k*At〈a+l时,缺陷点坐标为: When a <= u * k * At <a + l, the point defect coordinates:

[0032]当a为奇数时,坐标为α〇-υ*1ς*Δ t+a*Lo,aD+D/2): [0032] When a is odd, coordinates α〇-υ * 1ς * Δ t + a * Lo, aD + D / 2):

[0033] 当a为偶数时,坐标为(u*k* Δ t_a*Lo,aD+D/2)。 [0033] When a is even, the coordinates (u * k * Δ t_a * Lo, aD + D / 2).

[0034] 实验表明,本发明可以对光学元件表面缺陷的位置和基本尺寸等信息进行实时的记录,具有简易、实时、自动、可靠的特点。 [0034] Experimental results show that the present invention can be an optical element surface defect location and size of the basic information such as real-time recording, with simple, real-time, automatic, reliable.

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Classifications
International ClassificationG01N21/95, G01B11/00
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