Search Images Maps Play YouTube News Gmail Drive More »
Sign in
Screen reader users: click this link for accessible mode. Accessible mode has the same essential features but works better with your reader.

Patents

  1. Advanced Patent Search
Publication numberCN103760173 A
Publication typeApplication
Application numberCN 201410015005
Publication date30 Apr 2014
Filing date14 Jan 2014
Priority date14 Jan 2014
Also published asCN103760173B
Publication number201410015005.1, CN 103760173 A, CN 103760173A, CN 201410015005, CN-A-103760173, CN103760173 A, CN103760173A, CN201410015005, CN201410015005.1
Inventors梁龙, 李学春, 姜有恩, 林圆圆, 陈醉雨
Applicant中国科学院上海光学精密机械研究所
Export CitationBiBTeX, EndNote, RefMan
External Links: SIPO, Espacenet
Surface defect screening device for optical element and screening method thereof
CN 103760173 A
Abstract
The invention relates to a surface defect screening device for an optical element and a screening method thereof. The device comprises a pulse laser source, an electric displacement table, a focusing lens, a PIN tube, a data collection card, a computer and a fixing piece, wherein the optical element to be tested is fixed on the electric displacement table through the fixing piece, the pulse laser source irradiates the optical element, then is reflected, the focusing lens and the PIN tube are sequentially arranged in the direction of a reflected light beam, and the PIN tube is positioned on an image plane of the focusing lens; and signals output by the PIN tube are collected via the data collection card and sent to the computer, and the output end of the computer is connected with the control end of the electric displacement table. According to the device and the method, provided by the invention, positions, basic sizes and other information of surface defects of the optical element can be recorded in real time, and the device and the method have the characteristics of simplicity, real-time property, automation and reliability.
Claims(3)  translated from Chinese
1.一种光学兀件表面缺陷筛查装置,特征在于其构成包括:脉冲激光源(I)、电动位移台(2)、聚焦透镜(3)、PIN管(4)、数据采集卡(5)、计算机(6)和固定件(7),待测的光学元件(8)通过所述的固定件(7)固定在所述的电动位移台(2)上,在所述的脉冲激光源(I)照射在所述的光学元件(8)上反射后,在该反射光束方向依次设置所述的聚焦透镜(3)和PIN管(4),所述的PIN管(4)位于所述的该聚焦透镜(3)的像平面;所述的PIN管(4)输出的信号经所述的数据采集卡(5)采集送所述的计算机(6),所述的计算机(6)的输出端接所述的电动位移台(2 )的控制端。 An optical surface defects Wu screening device, characterized in that it constituted comprising: a pulsed laser source (I), the electric displacement station (2), a focusing lens (3), PIN tube (4), data acquisition cards (5 ), computer (6) and the fixed member (7), an optical element under test (8) (7) is fixed by the fixing member in the electric displacement station (2), the pulsed laser source in said (I) irradiating said optical element (8) reflected in the direction of the reflected light beam sequentially setting said focusing lens (3) and the PIN diode (4), said PIN diode (4) is located in the of the focusing lens (3) of the image plane; said PIN diode (4) data acquisition card output signal via the (5) acquisition computer (6) to send said computer (6) of the said the output end of the electric displacement station (2) a control terminal.
2.根据权利要求1所述的光学元件表面缺陷筛查过程的记录装置,其特征在于所述的计算机(6)控制所述的电动位移台(2)的运动速度、运动距离,同时控制所述的数据采集卡与所述的脉冲激光源(I)的脉冲时钟同步。 2. The surface of the optical element according to claim 1, wherein the defect recording apparatus of the screening process, characterized in that the computer (6), wherein said motor displacement control station (2) moving speed, movement distance, while the control said data acquisition card with the pulsed laser source (I) of the pulse clock synchronization.
3.利用权利要求1所述的光学元件表面缺陷筛查装置进行光学元件表面缺陷筛查的方法,其特征在于该方法包括下列步骤: ①将待测的光学元件(8)通过所述的固定件(7)固定在所述的电动位移台(2)上,启动所述的计算机驱动并控制所述的电动位移台(2)将所述的脉冲激光源(I)输出的脉冲激光移动到待测光学元件(8)扫描的起点,设定所述的脉冲激光源(I)输出的脉冲激光的脉冲间隔为At,设电动位移台(2)的运动速度为u ; ②所述的计算机同步控制所述的脉冲激光源(I)、电动位移台(2)和数据采集卡(5)同步工作:当所述的脉冲激光源(I)的第一个脉冲辐照所述的待测光学元件(8)的同时,所述的数据采集卡开始工作,数据采集卡以时间h为起点,在单脉冲内采集m个有效电压值U1, U2, IV..IV..Um并输入计算机(6),再通过计算机(6)对所述的m个数据采用求和计算ν=Συ,,第一个脉冲的电压记为V1,所述的脉冲激光源(I)对所述的待测光学元件(8)进I行扫描,以后依次记为V2, Vf Vn ; ③电压序列Vp V2,Vn,设置一个允许的最大变化值AV,当电压Vi的变化大于AV时,记为Vk,确定光学元件上对应的点就是一个缺陷点,记录从开始扫描到该缺陷点出现的时间为k*At,则位移台工作距离为u*k*At,由于光学元件的尺寸已知,得到缺陷点的具体位置信息,同时,根据Vk的大小值确定缺陷点的相对大小。 A surface of the optical element 3. The use of claim defect screening method for an optical element means surface defect screening, characterized in that the method comprises the following steps: ① tested optical element (8) is fixed by the (7) fixed to the electric displacement station (2), boot the computer drives and controls the electric displacement station (2) a pulsed laser pulsed laser source (I) is moved to said output (8) start scanning optical element under test, said pulsed laser light source is set (I) of the pulsed laser light output pulse interval At, provided the electric displacement units (2) is the velocity u; ② said computer synchronous control of the pulsed laser source (I), the electric displacement station (2) and data acquisition (5) synchronization: tested when the pulsed laser source (I), said first pulse irradiation The optical element (8) at the same time, data acquisition card to work according to the data acquisition card in time h as a starting point, an effective voltage value collected m in a single pulse U1, U2, IV..IV..Um and entered into the computer (6), and then through the computer (6) for the m data using summations ν = Συ ,, the first pulse voltage referred to as V1, said to be of the pulsed laser source (I) photometry element (8) into the I-line scanning, later followed credited to V2, Vf Vn; ③ maximum voltage change sequence Vp V2, Vn, set a permissible value AV, when the change in voltage Vi is greater than AV, denoted by Vk, determining a corresponding point on the optical element is a defect point, the recording starts from the time the scanning point defects appears as k * At, the displacement distance of the work station u * k * At, due to the size of the optical element is known, to obtain defect specific location information points, while the relative size of the defect point is determined according to the size of the value Vk.
Description  translated from Chinese

光学元件表面缺陷筛查装置和筛查方法 Optical surface defect screening device and screening methods

技术领域 Technical Field

[0001] 本发明涉及一种光学元件表面缺陷,特别是一种光学元件表面缺陷筛查装置和筛查方法。 [0001] The present invention relates to an optical element surface defects, particularly surface defects is an optical element and a screening method for screening device.

背景技术 Background

[0002] 光学元件表面缺陷包括元件加工过程中形成的麻点和划痕、表面镀膜内部的杂质,光学元件内部折射率不均匀性形成的小透镜,以及光学元件使用过程中形成的激光损伤等。 [0002] The optical element comprises a surface pitting defects formed during the machining element and scratches, coating the interior surface of the impurity, the refractive index of the optical element internal unevenness formed small lenses, and an optical element formed in the course of laser damage . 部分损伤点在激光辐照下会发生损伤增长,并且损伤点引起的光场调制会破坏后续光路中的光学兀件。 Part of the damage point will occur in the laser irradiation damage growth, and the optical field modulation caused damage points will destroy follow the optical path of the optical Wu member.

[0003] 现有的缺陷损伤检测技术主要利用激光与光学元件相互作用产生的各种效应来实现。 [0003] The shortcomings of existing damage detection technology mainly using various effects of laser and optical components to achieve interaction. 常见的有等离子体闪光法、散光法、光热法等。 Common are plasma flash method, astigmatism method, photothermal method.

[0004] 等离子体闪光法是指当脉冲激光作用于光学元件表面,缺陷点会吸收激光,辐照点会迅速升温产生气化,导致原子电离,产生等离子体,出现闪光。 [0004] The plasma flash method means that when the pulse laser optical element surface defects point will absorb laser radiation spot will quickly produce vaporization temperature, causing ionization to generate plasma, appear flash.

[0005] 散射法是采用激光照射光学元件,缺陷点在激光辐照后形成损失后会产生散射光,通过散射光的强度变化来确定该点是不是缺陷点。 [0005] The scattering method is the use of laser illumination optics, defect point will produce scattered light in the laser irradiation, after losses by the intensity of the scattered light to determine changes in the spot is not a defect point. 目前,常用的缺陷检测技术多采用白光光源照射待测元件产生散射光,通过面阵CXD探测缺陷的信息。 At present, the common defect detection technique to use more white light source to produce scattered light irradiation test element, by the area array probe CXD defects. 利用CXD采集激光辐照前后辐照区域的图像,采用图像相减法实现缺陷判别。 CXD capture images before and after the use of laser irradiation irradiation, using image subtraction achieve defect discrimination. 对介质膜上一点采集两次图像,当两幅图像出现差异时认为该点为缺陷点。 Collect twice for the dielectric film that image, the image appears when the difference between the two is that the point defect points. 图像相减法对系统稳定性要求高,否则差分后会出现虚像,从而导致误判。 Image subtraction system stability requirements, otherwise there will be a virtual image after difference, resulting in miscarriage of justice. 另外由于面阵CCD的感光面积较小,对于大口径光学元件的检测需要分块进行,一块光学元件需要采集多幅图像,耗时较久。 Also due to the small area CCD sensitive area, for the detection of large-diameter optical components need chunking, one optical element multiple images to be collected, took longer.

[0006] 由此可见,如何实现光学元件表面缺陷位置快速、实时、准确记录成为一个急需解决的问题。 [0006] Thus, how fast optical surface defect location, real-time, accurate records become an urgent problem.

发明内容 DISCLOSURE

[0007] 本发明针对上述现有检测装置存在的不足,提出一种光学元件表面缺陷筛查装置和筛查方法。 [0007] The present invention is directed to less than the above conventional detection means, proposes an optical element surface defect screening device and the screening method. 该装置可对光学元件表面缺陷的位置和基本尺寸等信息进行实时的记录,具有简易、实时、自动和可靠的特点。 The device can position the optical element surface defects and basic dimensions and other information in real-time record, with a simple, real-time, automatic and reliable.

[0008] 本发明的技术解决方案如下: [0008] The technical solution of the present invention are as follows:

[0009] 一种光学元件表面缺陷筛查装置,特点在于其构成包括:脉冲激光源、电动位移台、聚焦透镜、PIN管、数据采集卡、计算机和固定件,待测的光学元件通过所述的固定件固定在所述的电动位移台上,在所述的脉冲激光源照射在所述的光学元件上反射后,在该反射光束方向依次设置所述的聚焦透镜和PIN管,所述的PIN管位于所述的该聚焦透镜的像平面;所述的PIN管输出的信号经所述的数据采集卡采集送所述的计算机,所述的计算机的输出端接所述的电动位移台的控制端。 [0009] An optical element surface defect screening apparatus characterized in that it constitutes comprising: a pulsed laser source, the electric displacement units, focusing lens, PIN tube, data acquisition card, a computer and a fixed member, through said optical element to be measured The fixing member is fixed to the electric displacement stage, after the irradiation of the pulsed laser source reflected on the optical element in the direction of the reflected light beam sequentially sets the PIN diode and a focusing lens, wherein PIN tube of the focusing lens is located at the image plane; data acquisition card's PIN pipe the output of the signal sent through the acquisition of the computer, the output of the computer terminating the electric displacement station control terminal.

[0010] 所述的计算机控制所述的电动位移台的运动速度、运动距离,同时控制所述的数据采集卡与所述的脉冲激光源的脉冲时钟同步。 [0010] The computer controlling the movement speed of the electric displacement of the table, the movement distance, while the pulse clock controls the data acquisition card with the pulsed laser source synchronization. [0011] 利用上述光学元件表面缺陷筛查装置进行光学元件表面缺陷筛查的方法,其特点在于该方法包括下列步骤: [0011] With the above optical element means surface defect screening method for screening an optical element surface defects, characterized in that the method comprises the steps of:

[0012] ①将待测的光学元件通过所述的固定件固定在所述的电动位移台上,启动所述的计算机驱动并控制所述的电动位移台将所述的脉冲激光源输出的脉冲激光移动到待测光学元件扫描的起点,设定所述的脉冲激光源输出的脉冲激光的脉冲间隔为△ t,设电动位移台的运动速度为U ; [0012] ① the fixing member of the optical element measured by said fixed displacement in the electric stage, the computer starts driving and controlling the electric station to said displacement pulsed laser source output pulse laser scanning optical element is moved to the test start, setting the output of said pulsed laser source of the pulsed laser pulse interval △ t, the moving speed of the electric displacement station is set U;

[0013] ②所述的计算机同步控制所述的脉冲激光源、电动位移台和数据采集卡同步工作:当所述的脉冲激光源的第一个脉冲辐照所述的待测光学元件的同时,所述的数据采集卡开始工作,数据采集卡以时间h为起点,在单脉冲内采集m个有效电压值 [0013] ② computer synchronization control of the pulsed laser source said, the electric displacement station and data acquisition card synchronization: When the measured optical element of the first pulse irradiation of the pulsed laser source at the same time The data acquisition card to work according to the data acquisition card h as a starting point in time, collect the m effective voltage value in a single pulse

并输入计算机, 再通过计算机对所述的m个数据采用求和计算\ And entered into the computer, and then calculated by summing the data on the computer m using \

Figure CN103760173AD00041

,第一个脉冲的电 , The first pulse of electricity

压记为V1,所述的脉冲激光源对所述的待测光学元件进行扫描,以后依次记为V2,V^Vn ; Pressure denoted by V1, the pulsed laser source of the optical device under test is scanned, followed later referred to as V2, V ^ Vn;

[0014] ③电压序列\、V2, Vn,设置一个允许的最大变化值Λ V,当电压Vi的变化大于AV时,记为Vk,确定光学元件上对应的点就是一个缺陷点,记录从开始扫描到该缺陷点出现的时间为k* At,则位移台工作距离为u*k*At,由于光学元件的尺寸已知,得到缺陷点的具体位置信息,同时,根据Vk的大小值确定缺陷点的相对大小。 [0014] ③ voltage sequence \, the maximum change value V2, Vn, set a permissible Λ V, when the change in voltage Vi is greater than AV, denoted by Vk, determine the corresponding point on the optical element is a defect point, the recording from the beginning Scan to the time point of occurrence of a defect k * At, the displacement distance of the work station u * k * At, due to the size of the optical elements known to give the specific location information of the defective dot, while the defect is determined according to the size of the value of Vk the relative size of the dots.

[0015] 本发明的技术效果如下: [0015] Technical effects of the present invention are as follows:

[0016] 本发明的高速PIN管相对于常用的大面阵C⑶成本较低,且转换速度快。 [0016] High-speed PIN tube of the present invention with respect to the common area array C⑶ lower cost, and conversion speed.

[0017] 本发明可以对光学元件表面缺陷的位置和基本尺寸等信息进行实时的记录,具有简易、实时、自动、可靠的特点。 [0017] The present invention can be an optical element surface defects location and basic dimensions and other information in real-time record, with a simple, real-time, automated, and reliable.

附图说明 Brief Description

[0018] 图1是本发明光学元件表面缺陷筛查过程的记录装置的示意图。 [0018] FIG. 1 is a schematic view of the optical element surface defects recording apparatus of the present invention of the screening process.

[0019] 图2是本装置扫描时脉冲光辐照位置示意图。 [0019] FIG. 2 is a schematic diagram of the pulsed light irradiation position when the unit scan.

[0020]图3是数据采集卡采集电压值与激光脉冲辐照的时序示意图。 [0020] FIG. 3 is a data acquisition card with voltage pulse laser irradiation Timing Diagram.

[0021] 图中:1 一脉冲激光,2 —电动位移台,3 —聚焦透镜,4 一PIN管,5 —数据采集卡,6 一计算机,7 —固定件和8 一待测光学元件。 [0021] in which: 1-pulse laser, 2 - electric displacement units, 3 - focus lens, a PIN diode 4, 5 - data acquisition card, a computer 6 and 7 - Fixed pieces and 8 a test optics.

[0022] 图2脉冲光从光学元件左上角开始,计算机6控制位移台2带动光学元件8按示意图方向匀速移动,水平方向一行结束后元件上移一个光斑尺寸,水平方向与上一行相反,以此类推。 [0022] FIG. 2 pulsed light starting from the top left of optical elements, the computer 6 controls the displacement of the station 2 driven by a schematic diagram of the direction of the optical element 8 uniform movement, after the end of the horizontal line shift a spot size on the line in the horizontal direction and the opposite element to Such push.

[0023] 图3是数据采集卡5采集输入到计算机6辐照点对应的电压值。 [0023] FIG. 3 is a data acquisition card collecting input 5 to 6 point computer radiation corresponding voltage value.

具体实施方式 DETAILED DESCRIPTION

[0024] 下面结合实例和附图对本发明做进一步说明,但不应以此限制本发明的保护范围。 [0024] The following examples and figures combined with further illustrate the present invention, but should not be used to limit the scope of the invention.

[0025] 请参阅图1,图1是本发明光学元件表面缺陷筛查过程的记录装置的示意图。 [0025] See Figure 1, Figure 1 is a schematic view of an optical element of the present invention is a surface defect recording apparatus of the screening process. 由图可见,本发明光学元件表面缺陷筛查装置,构成包括:脉冲激光源1、电动位移台2、聚焦透镜3、PIN管4、数据采集卡5、计算机6和固定件7,待测的光学元件8通过所述的固定件7固定在所述的电动位移台2上,在所述的脉冲激光源I照射在所述的光学元件8上反射后,在该反射光束方向依次设置所述的聚焦透镜3和PIN管4,所述的PIN管4位于所述的该聚焦透镜3的像平面;所述的PIN管4输出的信号经所述的数据采集卡5采集送所述的计算机6,所述的计算机6的输出端接所述的电动位移台2的控制端。 The figure shows by means of the present invention, the defect screening surface of the optical element, constituting comprising: a pulsed laser source 1, the electric displacement table 2, a focusing lens 3, PIN tube 4, the data acquisition card 5, computer 6 and the fixed member 7, to be tested 8 on the optical element 2, irradiating the pulsed laser source I after 8 wherein the reflective optical element, in the direction of the reflected light beam successively disposed in the fixing member 7 by the fixed station of the electric displacement The focusing lens 3 and PIN tube 4, said PIN diode 4 is located according to the focusing lens 3 image plane; data acquisition card PIN tube 4 according to the signal output by the computer to send the five acquisition of 6, the output of the electric machine 6 of the termination of the displacement control terminal station 2.

[0026] 所述的计算机6控制所述的电动位移台2的运动速度、运动距离,同时控制所述的数据采集卡与所述的脉冲激光源I的脉冲时钟同步。 [0026] The computer 6 controls the speed of movement of the electric displacement station 2, the movement distance, while controlling the data acquisition card and I said pulsed laser source pulse clock synchronization.

[0027] 利用上述的光学元件表面缺陷筛查装置进行光学元件表面缺陷筛查的方法,包括下列步骤: [0027] The use of the above-mentioned optical element surface defects screening apparatus for screening method for an optical element of surface defects, comprising the steps of:

[0028] ①将待测的光学元件8通过所述的固定件7固定在所述的电动位移台2上,启动所述的计算机驱动并控制所述的电动位移台2,将所述的脉冲激光源I输出的脉冲激光移动到待测光学元件8扫描的起点,设定所述的脉冲激光源I输出的脉冲激光的脉冲间隔为At,设电动位移台2的运动速度为u ; , The pulse [0028] ① the fixing member 8 to be measured through the optical element 7 is fixed to said displacement of said electric station 2, the computer starts driving and controlling said displacement of said electric station 2 the output of the laser source I move to the start point of pulse laser 8 under test scanning optical element, the pulsed laser source set of I output pulse interval of pulse laser light At, provided the electric displacement velocity table 2 for u;

[0029] ②所述的计算机同步控制所述的脉冲激光源1、电动位移台2和数据采集卡5同步工作:当所述的脉冲激光源I的第一个脉冲辐照所述的待测光学元件8的同时,所述的数据采集卡开始工作,数据采集卡以时间h为起点,在单脉冲内采集m个有效电压值U1, U2, U3-1Vum并输入计算机6,所述的计算机6对所述的m个数据采用求和计算 [0029] ② said computer synchronization control according to a pulsed laser source, the electric displacement station 2 and the data acquisition card 5 synchronization: tested first pulse irradiation of pulsed laser source said I, when while the optical element 8, data acquisition card to work according to the data acquisition card in time h as a starting point, an effective voltage value collected m in a single pulse U1, U2, U3-1Vum 6 and entered into the computer, said computer m data using six pairs of the summations

Figure CN103760173AD00051

,第一个 First

脉冲的电压记为V1,所述的脉冲激光源I对所述的待测光学元件8进行扫描,以后依次记为V2, V3…νΝ; Voltage pulse is denoted as V1, I said pulsed laser source to test the optical element 8 is scanned sequentially after referred to as V2, V3 ... νΝ;

[0030] ③电压序列Vp V2, Vn,设置一个允许的最大变化值Λ V,当电压Vi的变化大于AV时,记为Vk,确定光学元件上对应的点就是一个缺陷点,记录从开始扫描到该缺陷点出现的时间为k* At,则位移台工作距离为u*k*At,由于光学元件的尺寸已知,得到缺陷点的具体位置信息,同时,根据Vk的大小值确定缺陷点的相对大小。 [0030] The maximum change in voltage sequence ③ Vp V2, Vn, set a permissible Λ V, when the change in voltage Vi is greater than AV, denoted by Vk, determine the corresponding point on the optical element is a defect point, the recording from the beginning of the scan the time of the occurrence of a defect point k * At, the displacement station working distance of u * k * At, due to the size of the optical elements known to give specific location information of defect points, while point defects is determined according to the size of the value Vk The relative size.

[0031] 设光学元件尺寸为长Lci,宽d,脉冲光斑直径为D。 [0031] provided optical element dimensions of length Lci, width d, pulse spot diameter D. 当a〈=u*k*At〈a+l时,缺陷点坐标为: When a <= u * k * At <a + l, the defect coordinates are:

[0032]当 a 为奇数时,坐标为(Ltl- υ Δ t+a*L0, aD+D/2): [0032] When a is an odd number, coordinates (Ltl- υ Δ t + a * L0, aD + D / 2):

[0033]当 a 为偶数时,坐标为(u *k* Δ t_a*L。,aD+D/2)。 [0033] When a is even, the coordinates (u * k * Δ t_a * L., aD + D / 2).

[0034] 实验表明,本发明可以对光学元件表面缺陷的位置和基本尺寸等信息进行实时的记录,具有简易、实时、自动、可靠的特点。 [0034] The experimental results show that the present invention can be an optical element surface defects location and basic dimensions and other information in real-time record, with a simple, real-time, automated, and reliable.

Patent Citations
Cited PatentFiling datePublication dateApplicantTitle
CN1662808A *6 May 200331 Aug 2005应用材料股份有限公司Optical technique for detecting buried defects in opaque films
CN103748454A *10 Jul 201223 Apr 2014科磊股份有限公司Wafer inspection
JP2011197012A * Title not available
US20060290923 *22 Jun 200628 Dec 2006Hiroyuki NakanoMethod and apparatus for detecting defects
US20130286387 *25 Nov 201131 Oct 2013Hitachi High-Technologies CorporationDefect inspection method and defect inspection device
Non-Patent Citations
Reference
1 *李锡善等: "光盘盘基缺陷自动测试仪", 《仪器仪表学报》, vol. 13, no. 2, 31 May 1992 (1992-05-31)
Referenced by
Citing PatentFiling datePublication dateApplicantTitle
CN104990930A *9 Jul 201521 Oct 2015中国科学院上海光学精密机械研究所Optical element defect laser near field modulating and detecting device and induced damage prediction method
CN104990930B *9 Jul 201520 Oct 2017中国科学院上海光学精密机械研究所光学元件缺陷激光近场调制检测装置及诱导损伤预测方法
Classifications
International ClassificationG01B11/00, G01N21/95
Legal Events
DateCodeEventDescription
30 Apr 2014C06Publication
4 Jun 2014C10Entry into substantive examination
8 Jun 2016C14Grant of patent or utility model