CN103575213A - Optical measurement device - Google Patents
Optical measurement device Download PDFInfo
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- CN103575213A CN103575213A CN201210281702.2A CN201210281702A CN103575213A CN 103575213 A CN103575213 A CN 103575213A CN 201210281702 A CN201210281702 A CN 201210281702A CN 103575213 A CN103575213 A CN 103575213A
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Abstract
The invention discloses an optical measurement device which comprises a measurement device body, a light source, a W-shaped optical fiber and a spectrograph, wherein the W-shaped optical fiber is provided with at least five ports. The optical measurement device is simple to operate, is composed of a vertical incidence measurement device body and an oblique incidence measurement device body, can be used for measuring the film thickness of a three-dimensional structure formed by a single layer film or multiple layers of films, the critical dimension, space appearance and material characteristics, and improves precision of sample measurement. Besides, the vertical incidence part can incline to 54.7 degrees and is used for measuring a monocrystalline silicon solar sample, the oblique incidence part can achieve multi-angle switching, and a friction plate enables the whole switching process to be stable.
Description
Technical field
The application relates to optical technical field, particularly a kind of optical measuring device.
Background technology
Along with the fast development of semicon industry, critical dimension (Critical Dimension), space pattern and the material behavior of utilizing optical measuring technique accurately to measure the three-dimensional structure that on wafer, single or multiple lift film forms become very important.In order to make measurement result effective, measuring system used should be able to be measured thickness and/or film formation in pinpoint accuracy ground.In well-known non-destructive detection technique, be photometry and ellipsometric measurement method, they obtain reflectivity data by measuring the electromagnetic radiation of sample reflection.In spectroscopic ellipsometers, there is the incident light of definite polarization state by sample reflection (general with larger incident angle), by analyzing catoptrical polarization state, can obtain the characteristic of sample.Because incident light comprises multi-frequency, form, can obtain spectral curve.Particularly, the polarization state of incident light has time dependence (making incident light pass through the polarizer of a rotation), or analyzes catoptrical method and have time dependence (making reflected light pass through the analyzer of a rotation).
Generally, semiconductive thin film need to measure the thickness d of film, refractive index n and extinction coefficient k.And Ellipsometric can only be measured two ellipsometric parameters, that is: φ and Δ, only cannot accurately provide the optical parametric (Acta Physica Sinica Vol.59, No.4) of sample thin film according to two ellipse folk prescription journeys, can only solve by the method for computer fitting.In order to increase measuring accuracy, obtain the additional information of target sample, researcher in this field has proposed a kind of spectroscopic ellipsometers (VASE, variable angle spectroscopic Ellipsometry) of variable-angle.This measurement mechanism can provide the ellipse folk prescription journey under a plurality of angles in theory, can increase measuring accuracy to a certain extent.Yet, in fact so often produce effects little, as Critical Reviews of Optical Science and Technology Volume CR72, described in 14-16 page, discovery when film thickness is carried out to data fitting, film thickness exists
scope in can obtain basic the same matched curve.For the film thickness of a hypothesis, thus the optical constant of film thereupon compensatory change obtain a same good fitting result, this is because the thickness of film and the optical constant of membraneous material are relevant often in matching.Therefore want only by Ellipsometric, accurately to measure film thickness and optical constant can be more difficult.In order accurately to measure sample, for example, measure thickness and the optical parametric of sample thin film, conventionally integrated a plurality of optical measuring devices in a compound optical measuring device, utilize two optical measuring devices of vertical incidence and oblique incidence to measure sample (referring to US Patent No. 5608526, US6713753) simultaneously.In general, the measuring system more complicated of integrated a plurality of optical measuring devices, and need a plurality of wideband light sources and sniffer, cost is higher.If as described in US Patent No. 6713753, adopt beam splitter to carry out coupling optical path, although also can reach, reduce light source and spectrometer, the requirement reducing costs, but in actual applications, optical path adjusting is also difficult for realizing, and, by beam splitter, carry out light splitting and close the light time, the logical efficiency of its light is lower, light beam for vertical incidence, at least need to pass through spectroscope twice, its theoretical throughput is only up to 25%, the light beam of oblique incidence, also need by a spectroscope, can reduce the accuracy of systematic survey, therefore this optical measuring device that comprises vertical incidence and oblique incidence is not extensively promoted in actual applications.
Application content
The application's technical matters to be solved is to provide a kind of optical measuring device that improves sample measurement precision.
For solving the problems of the technologies described above, the application provides the optical measuring device that comprises vertical incidence and oblique incidence a kind of simple in structure, easy to operate, lower-cost, comprises measuring instrument body, light source, has W shape optical fiber and the spectrometer of at least 5 ports; Described measuring instrument body comprises that mirror assembly, incident arm, reflection arm, sample stage assembly and lateral plate component form;
The first port of described optical fiber is connected with described incident arm; The second port of described optical fiber is connected with described light source; The 3rd port of described optical fiber is connected with described mirror assembly; The 4th port of described optical fiber is connected with described spectrometer; The five-port of described optical fiber is connected with described reflection arm; Described reflection arm is connected with described lateral plate component respectively with described incident arm; Described lateral plate component is connected with described sample stage assembly.
A kind of optical measuring device that the application provides, oblique incidence part can regulate incident arm and the angle that reflects arm symmetrically, realizes the handover measurement of multi-angle, and in handoff procedure, also can realize incident arm coaxial with reflection arm; In addition, regulate locking handwheel, the friction force of controlling well between friction disc can make whole handoff procedure steadily carry out.This optical measuring device can be used to thickness, critical dimension (Critical Dimension), space pattern and the material behavior of the three-dimensional structure of Measurement accuracy single or multiple lift film formation.In addition, the mirror assembly in the application can switch to 54.7 degree and measures monocrystalline solar silicon wafers, and can make mirror assembly in vertical survey and when 54.7 degree are measured, and height of specimen is consistent.During switching, only need hold handle and move, magnetic attraction after putting in place, simple to operate.
Accompanying drawing explanation
The structural representation of the optical measuring device that Fig. 1 provides for the embodiment of the present application;
The W shape optical fiber structure schematic diagram that Fig. 2 provides for the embodiment of the present application;
The measuring instrument body three-dimensional structure schematic diagram that Fig. 3 provides for the embodiment of the present application;
The measuring instrument body three-dimensional structure exploded perspective view that Fig. 4 provides for the embodiment of the present application;
The mirror assembly three-dimensional structure exploded perspective view that Fig. 5 provides for the embodiment of the present application;
The shaft coupling piece structural representation that Fig. 6 provides for the embodiment of the present application;
The U-shaped Mirror frame structure schematic diagram that Fig. 7 provides for the embodiment of the present application;
The incident arm, three-D structure exploded perspective view that Fig. 8 provides for the embodiment of the present application;
The reflection arm, three-D structure exploded perspective view that Fig. 9 provides for the embodiment of the present application;
The wave plate rotary components structural representation that Figure 10 provides for the embodiment of the present application;
The wave plate rotary components three-dimensional structure exploded perspective view that Figure 11 provides for the embodiment of the present application;
The sample stage modular construction schematic diagram that Figure 12 provides for the embodiment of the present application;
The sample stage structural representation that Figure 13 provides for the embodiment of the present application;
The lateral plate component three-dimensional structure schematic diagram that Figure 14 provides for the embodiment of the present application;
The lateral plate component rear view that Figure 15 provides for the embodiment of the present application;
The reflection arm support structural representation that Figure 16 provides for the embodiment of the present application;
The reflection arm support blast structural representation that Figure 17 provides for the embodiment of the present application;
The incident arm support structural representation that Figure 18 provides for the embodiment of the present application;
Incident arm support and reflection arm support syndeton schematic diagram that Figure 19 provides for the embodiment of the present application;
The incident arm configuration schematic diagram that Figure 20 provides for the embodiment of the present application;
The structural representation when mirror assembly that Figure 21 provides for the embodiment of the present application tilts to use;
Wherein, 1-measuring instrument body, 2-W shape optical fiber, 3-light source, 4-spectrometer, 5-controller, 6-control cables, 7-spectroscopic data cable, 8-control data cable, 9-computing machine, 2-1-the first port, 2-2-the second port, 2-3-three port, 2-4-four port, 2-5-the five-port, 1-1-mirror assembly, 1-2-incident arm, 1-3-reflection arm, 1-4-sample stage assembly, 1-5-lateral plate component, 1-1-1-L shaped framework, 1-1-2-riser, 1-1-3-crossbeam, 1-1-4-the first web joint, the two-dimentional adjustment rack of 1-1-5-the first, 1-1-6-the first spherical reflector, 1-1-7-U-shaped mirror holder, 1-1-8-the second spherical reflector, 1-1-9-level crossing, 1-1-10-fibre-optical splice, the two-dimentional adjustment rack of 1-1-11-the second, 1-1-12-the first card extender, 1-1-13-the first one dimension translation stage, 1-1-14-the second one dimension translation stage, 1-1-15-the second card extender, 1-1-16-fiber fixed frame, 1-1-17-shaft coupling piece, 1-1-18-locating stop piece, 1-1-19-handle, 1-1-20-cover plate, 1-1-21-light shield, 1-2-1-incident arm framework, 1-2-2-optical fiber jacket, 1-2-3-structure of fiber_optic, 1-2-4-screw thread pair, 1-2-5-lens carrier, 1-2-6-polarizer support, 1-2-7-diaphragm component, 1-2-8-locking swivel nut, 1-2-9-lens mount, 1-2-10-lens, 1-2-11-lens fixed mount, 1-2-12-lens clamp nut, 1-2-13-fiber fixed frame, 1-2-14-shell, 1-2-15-V-shaped groove, 1-3-1-reflection arm framework, 1-3-2-wave plate rotary components, 1-3-2-1-core motor, 1-3-2-2-the first adaptor, 1-3-2-3-the second adaptor 1-3-2-4-photoelectric sensor, 1-3-2-5-sensor catch, 1-3-2-6-wave plate seat, 1-3-2-7-wave plate, 1-3-2-8-brace, 1-3-2-9-stator, 1-3-2-10-the first adjusted screw, 1-3-2-11-trip bolt, 1-4-1-base, 1-4-2-electric lifting platform, 1-4-3-two dimension is adjusted platform, 1-4-4-sample stage, 1-4-5-the second web joint, 1-4-6-footing, 1-4-4-1-reference line, 1-4-4-2-vacuum tank, 1-5-1-side plate, 1-5-2-right angle muscle, 1-5-3-reflection arm support, 1-5-4-incident arm support, 1-5-5-the first friction disc, 1-5-6-the first axle, 1-5-7-vertical magnetic, 1-5-8-inclination magnetic, 1-5-9-the second axle, 1-5-10-slotted eye, 1-5-3-1-rocking arm, 1-5-3-2-framework, the movable pin of 1-5-3-3-the first, 1-5-3-4-locking handwheel, 1-5-3-5-the second friction disc, 1-5-3-6-cylinder, 1-5-3-7-adjustment screw thread pair, 1-5-3-8-gib screw, 1-5-3-9-the second adjusted screw, 1-5-3-10-the second adjusted screw hole, 1-5-3-11-three adjusts screw, 1-5-3-12-three adjusts screw hole, 1-5-4-1-three card extender, the movable pin of 1-5-4-2-the second.
Embodiment
As shown in Figure 1, the application is comprised of measuring instrument body 1, optical fiber 2, light source 3, spectrometer 4, controller 5, control cables 6, spectroscopic data cable 7, control data cable 8, computing machine 9.As shown in Figure 2, the preferred W shape of optical fiber, there are 5 ports such as the first port, the second port, the 3rd port, the 4th port, five-port, the second port 2-2 is connected with light source 3, the 4th port 2-4 is connected with spectrometer 4, the 3rd port 2-3 is connected with mirror assembly 1-1, and the first port 2-1 is connected with incident arm 1-2, and five-port 2-5 is connected with reflection arm 1-3.Controller 5 one end are connected with measuring instrument body 1 by control cables 6, and the other end is connected with computing machine 9 by controlling data cable 8, and spectrometer 4 is connected with computing machine 9 by spectroscopic data cable 7.
As shown in Figure 3, Figure 4, measuring instrument body 1 comprises mirror assembly 1-1, incident arm 1-2, reflection arm 1-3, sample stage assembly 1-4 and lateral plate component 1-5.
Mirror assembly 1-1 comprises L shaped framework 1-1-1 as shown in Figure 5, riser 1-1-2, crossbeam 1-1-3, the first web joint 1-1-4, the first two-dimentional adjustment rack 1-1-5, the first spherical reflector 1-1-6, U-shaped mirror holder 1-1-7, the second spherical reflector 1-1-8, level crossing 1-1-9, fibre-optical splice 1-1-10, the second two-dimentional adjustment rack 1-1-11, the first card extender 1-1-12, the first one dimension translation stage 1-1-13, the second one dimension translation stage 1-1-14, the second card extender 1-1-15, fiber fixed frame 1-1-16, shaft coupling piece 1-1-17, locating stop piece 1-1-18, handle 1-1-19, cover plate 1-1-20 and light shield 1-1-21.L shaped framework 1-1-1, riser 1-1-2, crossbeam 1-1-3, the first web joint 1-1-4 are interconnected to constitute an annular frame, and cover plate 1-1-20 has two, by screw, are connected with this annular frame, form a cavity.
In order well to control the installation accuracy requirement of optical element, as shown in Figure 7, U-shaped mirror holder 1-1-7 is integrated processing parts, can control well the installation accuracy requirement of optical element.The second spherical reflector 1-1-8, level crossing 1-1-9 are individually fixed in two sides of U-shaped mirror holder 1-1-7, and locate by bottom surface; The bottom surface of U-shaped mirror holder 1-1-7 and the laminating of L shaped framework 1-1-1 inner side one end, the one side laminating of the installed surface of the second spherical reflector 1-1-8 and riser 1-1-2; The first spherical reflector 1-1-6 is connected with the first two-dimentional adjustment rack 1-1-5 by a mirror holder, and the first two-dimentional adjustment rack 1-1-5 and riser 1-1-2 top are connected; Fibre-optical splice 1-1-10 is connected with the second two-dimentional adjustment rack 1-1-11, the second two-dimentional adjustment rack 1-1-11 is connected with the first one dimension translation stage 1-1-13 by the first card extender 1-1-12, the first one dimension translation stage 1-1-13 is connected with the second one dimension translation stage 1-1-14 by the second card extender 1-1-15, and the second one dimension translation stage 1-1-14 is fixed on the first web joint 1-1-4; Handle 1-1-19 is connected with the first web joint 1-1-4; Fiber fixed frame 1-1-16 is fixed on the side of L shaped framework 1-1-1.W shape optical fiber the 3rd port 2-3 is connected with fibre-optical splice 1-1-10 through the circular hole of L shaped framework 1-1-1 one end, adjust the first two-dimentional adjustment rack 1-1-11, the first one dimension translation stage 1-1-13, the second one dimension translation stage 1-1-14 and the second two-dimentional adjustment rack 1-1-5, can make the 3rd port 2-3 light out successively through the second spherical reflector 1-1-8, level crossing 1-1-9, reflex to the first spherical reflector 1-1-6 upper, and finally vertically beat on sample stage 1-4-4; The first one dimension translation stage 1-1-13, the second one dimension translation stage 1-1-14 direction of motion are mutually vertical, and all vertical with the emergent ray primary optical axis of fiber port 2-3; For guaranteeing the stable of the 3rd port 2-3, the optical fiber at the 3rd port 2-3 rear portion is fixed on fiber fixed frame 1-1-16.
As shown in Figure 6, shaft coupling piece 1-1-17 is connected by 4 of bottoms screw hole and one of side screw hole and L shaped framework 1-1-1; On shaft coupling piece 1-1-17, there is axis hole, and be connected by the axle 1-5-6 in end face screw and side screw and lateral plate component 1-5.
As shown in Figure 8, incident arm 1-2 comprises incident arm framework 1-2-1, optical fiber jacket 1-2-2, structure of fiber_optic 1-2-3, screw thread pair 1-2-4, lens carrier 1-2-5, polarizer support 1-2-6, diaphragm component 1-2-7, locking swivel nut 1-2-8, lens mount 1-2-9, lens 1-2-10, lens fixed mount 1-2-11, lens clamp nut 1-2-12, fiber fixed frame 1-2-13, shell 1-2-14; Wherein, the coaxial installing optical fibres successively of inside bottom support 1-2-3, lens carrier 1-2-5, polarizer support 1-2-6, diaphragm component 1-2-7, the lens 1-2-10 of incident arm framework 1-2-1; On structure of fiber_optic 1-2-3, have fibre-optical splice, bottom is provided with screw thread pair 1-2-4, regulates screw thread pair 1-2-4 can realize the axial fine setting of structure of fiber_optic 1-2-3; Lens carrier 1-2-5 is provided with lens; On polarizer support 1-2-6, Miniature turntable is installed, on Miniature turntable, polarizer is installed, polarizer has been adjusted after angle lockable; On diaphragm component 1-2-7, have plug type diaphragm, diaphragm component 1-2-7 is fixed on an end face inner side of incident arm framework 1-2-1; It is inner that lens 1-2-10 scioptics clamp nut 1-2-12 is fixed on lens mount 1-2-9, and lens mount 1-2-9 screws in the endoporus of lens fixed mount 1-2-11 by screw thread, by screwing the axial location of lens mount 1-2-9 adjustable lens 1-2-10; Lens fixed mount 1-2-11 front end has 4 axial gaps, and periphery is tapered, and lens fixed mount 1-2-11 root has external thread; Locking swivel nut 1-2-8 can screw with lens fixed mount 1-2-11 root external thread, by the locked lens mount 1-2-9 of cone match, locks swivel nut 1-2-8 simultaneously and radially has threaded hole, can add the further locked lens mount 1-2-9 of holding screw; Optical fiber jacket 1-2-2 is preferably elastomeric material, is embedded in the hole of incident arm framework 1-2-1 other end; Fiber fixed frame 1-2-13 is fixed on the incident arm framework 1-2-1 on optical fiber jacket 1-2-2 limit; Shell 1-2-14 is fixed on incident arm framework 1-2-1.
As shown in Fig. 1, Fig. 8, the fiber port 2-1 of W shape optical fiber 2 is connected with the fibre-optical splice of structure of fiber_optic 1-2-3 through optical fiber jacket 1-2-2, and fiber port 2-1 rear portion optical fiber is fixed on fiber fixed frame 1-2-13.
As shown in Figure 9, preferably reflect the structure of arm 1-3 and the structure of incident arm 1-2 is symmetrical, difference is that reflection arm 1-3 does not have diaphragm component, has increased wave plate rotary components 1-3-2 in the position of diaphragm component.In addition, the polarizer on incident arm is as the polarizer, and the polarizer on reflection arm is as analyzer.
As shown in Figure 10, Figure 11, wave plate rotary components 1-3-2 comprises core motor 1-3-2-1, adaptor 1-3-2-2, adaptor 1-3-2-3, photoelectric sensor 1-3-2-4, sensor catch 1-3-2-5, wave plate seat 1-3-2-6, wave plate 1-3-2-7, brace 1-3-2-8, stator 1-3-2-9, adjusts screw 1-3-2-10, trip bolt 1-3-2-11; Wherein, core motor 1-3-2-1 is hollow type 5 phase step motors, and aperture is 9mm, and its two ends connect respectively the first adaptor 1-3-2-2, the second adaptor 1-3-2-3; Wave plate 1-3-2-7 one end is fixed with brace 1-3-2-8, and be placed in wave plate seat 1-3-2-6, stator 1-3-2-9 compresses wave plate 1-3-2-7 by trip bolt 1-3-2-11, wave plate seat 1-3-2-6 is fixed on the rotary end surface of core motor 1-3-2-1, and core motor 1-3-2-1 rotates and can drive wave plate 1-3-2-7 synchronously to rotate.
As shown in figure 12, sample stage assembly 1-4 comprises base 1-4-1, electric lifting platform 1-4-2, two dimension adjustment platform 1-4-3, sample stage 1-4-4, the second web joint 1-4-5 and footing 1-4-6.Wherein, electric lifting platform 1-4-2 is fixed on base 1-4-1 central authorities, and two dimension is adjusted platform 1-4-3 end face and is connected with sample stage 1-4-4, and underrun the second web joint 1-4-5 is connected with electric lifting platform 1-4-2.By regulating two dimension, adjust the two-dimentional pitching of the adjustable sample stage 1-4-4 of platform 1-4-3.By computing machine 9, can accurately control the lifting of electric lifting platform 1-4-2.In order to measure the placement reference of monocrystalline solar silicon wafers and associated sample, as shown in figure 13, on sample stage 1-4-4, there are many reference line 1-4-4-1, arranged direction is preferably 45 degree; On sample stage 1-4-4, also comprise vacuum tank 1-4-4-2 in addition, can adapt to the sample vacuum suction of 4 inches and 6 inches.
As shown in Figure 14, Figure 15, lateral plate component 1-5 comprises side plate 1-5-1, right angle muscle 1-5-2, reflection arm support 1-5-3, incident arm support 1-5-4, friction disc 1-5-5, axle 1-5-6, vertical magnetic 1-5-7, inclination magnetic 1-5-8, axle 1-5-9; Its latus inframedium 1-5-1 is circular arc platy structure, and arc-shaped slot 1-5-10 is arranged at top, and side plate 1-5-1 is connected by screw and two right angle muscle 1-5-2 and base 1-4-1; Reflection arm support 1-5-3 and incident arm support 1-5-4 are symmetrically arranged, and can swing around axle 1-5-9, and at the side plate 1-5-1 tow sides that reflect the wobble area of arm support 1-5-3 and incident arm support 1-5-4, be all embedded with stainless steel friction disc 1-5-5, on the arc surface of side plate 1-5-1, have pin-and-hole; Axle 1-5-9 is positioned at side plate 1-5-1 home position; There is axle 1-5-6 the side top of axle 1-5-9 for mirror assembly 1-1 is installed; Axle 1-5-6 is attached with vertical magnetic 1-5-7 and inclination magnetic 1-5-8, and the location for mirror assembly 1-1 vertically and during inclination work is with fixing; Vertically the fixed orifice of magnetic 1-5-7 and inclination magnetic 1-5-8 is slotted hole, and its position can be finely tuned.
As shown in Figure 16, Figure 17, reflection arm support 1-5-3 comprises rocking arm 1-5-3-1, framework 1-5-3-2, movable pin 1-5-3-3, locking handwheel 1-5-3-4, the first friction disc 1-5-3-5, cylinder 1-5-3-6, adjusts screw thread pair 1-5-3-7, gib screw 1-5-3-8, the first adjustment screw 1-5-3-9, adjusts screw hole 1-5-3-10, adjusts screw 1-5-3-11, adjusts screw hole 1-5-3-12; Wherein, rocking arm 1-5-3-1 is F shape structure; framework 1-5-3-2 can insert in the F shape opening of rocking arm 1-5-3-1; regulate through four that adjust screw hole 1-5-3-12 adjust screw 1-5-3-11 can implementation framework 1-5-3-2 with respect to rocking arm 1-5-3-1 one dimension straight line and beat position, adjusting can be locked by 4 screws on limit after suitable; In the middle of framework 1-5-3-2 and rocking arm 1-5-3-1, respectively embed the first friction disc 1-5-3-5; the first friction disc 1-5-3-5 on rocking arm 1-5-3-1 can adjust screw 1-5-3-9 by regulating through three that adjust screw hole 1-5-3-10; the second friction disc 1-5-5 on the first friction disc 1-5-3-5 and side plate 1-5-1 is fitted tightly, regulate the movement of the first friction disc 1-5-3-5 on the adjustable framework 1-5-3-2 of locking handwheel 1-5-3-4; The first movable pin 1-5-3-3 is installed on rocking arm 1-5-3-1 top, coordinates with the pin-and-hole on side plate 1-5-1 arc surface; Cylinder 1-5-3-6 is arranged in the V-shaped groove of framework 1-5-3-2, for installing and accommodation reflex arm 1-3.
As shown in figure 18, the structure of incident arm support 1-5-4 is similar with the structure of reflection arm support 1-5-3, difference is that the second movable pin 1-5-4-2 of incident arm support 1-5-4 is first arranged on the 3rd card extender 1-5-4-1, the 3rd card extender 1-5-4-1 is being arranged on by screw on incident arm support 1-5-4, the second movable pin 1-5-4-2 can carry out carrying out as the direction as shown in Figure 18 the fine setting of position, to make up the mismachining tolerance of pin-and-hole on side plate 1-5-1 arc surface.As shown in figure 19, reflection arm support 1-5-3 and incident arm support 1-5-4 can swing around axle 1-5-9, and axle 1-5-9 is fixed on side plate 1-5-1.
As shown in figure 20, incident arm 1-2 has a V-shaped groove 1-2-15 with the back of reflection arm 1-3, during installation with reference to Figure 16, V-shaped groove 1-2-15 coordinates with cylinder 1-5-3-6, gib screw 1-5-3-8 locking reflection arm 1-3, unclamps gib screw 1-5-3-8, and screw thread pair 1-5-3-7 is adjusted in fine setting, adjustable reflection arm 1-3, around the beat of cylinder 1-5-3-6 and along the axial micro-displacement of cylinder 1-5-3-6, adjusts the complete screw 1-5-3-8 that is locked.
As shown in Fig. 3, Figure 14, extract the first movable pin 1-5-3-3 and the second movable pin 1-5-4-2, can regulate respectively incident arm 1-2 and the angle that reflects arm 1-3, and angle is symmetrical, can realize in the present embodiment the switching of incident angle 60 degree, 65 degree, 70 degree, 75 degree, also can realize incident arm 1-2 coaxial with reflection arm 1-3.In addition, regulate locking handwheel 1-5-3-4, the friction force of controlling well between friction disc can make whole handoff procedure more steady.
As shown in figure 21, for the mirror assembly 1-1 in the application switches to 54.7 situations of measuring monocrystalline solar silicon wafers while spending; In design, make rotation center and the optical path axis of mirror assembly 1-1 have a reasonable eccentric throw, guarantee that mirror assembly 1-1 is consistent in vertical survey and the height of specimen when 54.7 degree are surveyed.During switching, only need hold handle 1-1-19 and move, magnetic attraction after completing, simple to operate.
The application discloses a kind of optical measuring device, can regulate respectively the angle of incident arm and reflection arm, and angle symmetry can realize the switching of multi-angle, also can realize incident arm coaxial with reflection arm; In addition, regulate locking handwheel, the friction force of controlling well between friction disc can make whole handoff procedure more steady.Mirror assembly in the application can switch to 54.7 and measures monocrystalline solar silicon wafers while spending; In design, make rotation center and the optical path axis of mirror assembly have a reasonable eccentric throw, guarantee that mirror assembly is consistent in vertical survey and the height of specimen when 54.7 degree are surveyed.During switching, only need hold handle and move, magnetic attraction after putting in place, simple to operate.
Two measurement mechanisms of a kind of optical measuring device that the application provides is integrated vertical incidence and oblique incidence, integrated level is high, simple in structure, easy to operate, and feature richness is powerful.The oblique incidence part of this optical measuring device can regulate incident arm and the angle that reflects arm symmetrically, realizes the handover measurement of multi-angle, and in handoff procedure, also can realize incident arm coaxial with reflection arm; In addition, regulate locking handwheel, the friction force of controlling well between friction disc can make whole handoff procedure steadily carry out.This optical measuring device can be used to thickness, critical dimension (Critical Dimension), space pattern and the material behavior of the three-dimensional structure of Measurement accuracy single or multiple lift film formation.In addition, the mirror assembly in the application can switch to 54.7 degree and measures monocrystalline solar silicon wafers, and can make mirror assembly in vertical survey and when 54.7 degree are measured, and height of specimen is consistent.During switching, only need hold handle and move, magnetic attraction after putting in place, simple to operate.
It should be noted last that, above embodiment is only in order to the application's technical scheme to be described and unrestricted, although the application is had been described in detail with reference to example, those of ordinary skill in the art is to be understood that, can modify or be equal to replacement the application's technical scheme, and not departing from the spirit and scope of present techniques scheme, it all should be encompassed in the middle of the application's claim scope.
Claims (10)
1. an optical measuring device, is characterized in that, comprises measuring instrument body, light source, has W shape optical fiber and the spectrometer of at least 5 ports;
Described measuring instrument body comprises that mirror assembly, incident arm, reflection arm, base, sample stage assembly and lateral plate component form;
The first port of described optical fiber is connected with described incident arm; The second port of described optical fiber is connected with described light source; The 3rd port of described optical fiber is connected with described mirror assembly; The 4th port of described optical fiber is connected with described spectrometer; The five-port of described optical fiber is connected with described reflection arm; Described reflection arm is connected with described lateral plate component respectively with described incident arm; Described lateral plate component is connected with described sample stage assembly; Described mirror assembly is connected with described lateral plate component.
2. optical measuring device as claimed in claim 1, is characterized in that, described mirror assembly comprises:
L shaped framework, riser, crossbeam, the first web joint, the first two-dimentional adjustment rack, the first spherical reflector, U-shaped mirror holder, the second spherical reflector, level crossing, fibre-optical splice, the second two-dimentional adjustment rack, the first card extender, the first one dimension translation stage, the second one dimension translation stage, the second card extender, fiber fixed frame, shaft coupling piece, locating stop piece, handle, cover plate and light shield;
Wherein, described L shaped framework, riser, crossbeam, the first web joint are interconnected to constitute an annular frame, and described cover plate is connected with this annular frame, form a cavity;
Described the second spherical reflector, level crossing are individually fixed in two sides of U-shaped mirror holder;
The bottom surface of described U-shaped mirror holder and the laminating of L shaped framework inner side one end, the installed surface of the second spherical reflector and the laminating of the one side of riser;
Described the first spherical reflector is connected with the first two-dimentional adjustment rack, and the first two-dimentional adjustment rack and riser top are connected;
Described fibre-optical splice is connected with the second two-dimentional adjustment rack; Described the second two-dimentional adjustment rack is connected with described the first one dimension translation stage by described the first card extender;
Described the first one dimension translation stage is connected with the second one dimension translation stage by described the second card extender, and the second one dimension translation stage is fixed on the first web joint;
Described handle is connected with the first web joint; Described fiber fixed frame is fixed on frame facet; The 3rd port of described optical fiber is connected with fibre-optical splice, and the optical fiber that contains described the 3rd port is fixed on described fiber fixed frame;
Described shaft coupling piece and base of frame are connected; Axle in described shaft coupling piece and described lateral plate component is connected.
3. optical measuring device as claimed in claim 1, is characterized in that, described incident arm comprises:
Incident arm framework, optical fiber jacket, structure of fiber_optic, screw thread pair, lens carrier, polarizer support, diaphragm component, locking swivel nut, lens mount, lens, lens fixed mount, lens clamp nut, fiber fixed frame and shell; Wherein,
Coaxial structure of fiber_optic, lens carrier, polarizer support, diaphragm component, the lens of being provided with successively of inside bottom of described incident arm framework;
On described structure of fiber_optic, have fibre-optical splice, bottom is provided with screw thread pair; Described lens carrier is provided with lens;
On described polarizer support, Miniature turntable is installed, on Miniature turntable, polarizer is installed;
On described diaphragm component, be provided with plug type diaphragm, diaphragm component is fixed on an end face inner side of incident arm framework;
Described lens scioptics clamp nut is fixed on lens mount inside, and lens mount screws in the endoporus of described lens fixed mount by screw thread;
Described lens fixed mount front end has axial gap, and periphery is tapered, and lens fixed mount root has external thread;
Described locking swivel nut can screw with lens fixed mount root external thread, by the locked lens mount of cone match, locks swivel nut simultaneously and radially has threaded hole, can add the further locked lens mount of holding screw;
Described optical fiber jacket is embedded in the hole of incident arm framework other end;
Described fiber fixed frame is fixed on the incident arm framework on optical fiber jacket limit;
Described shell is fixed on incident arm framework;
The first port of described optical fiber is connected with the fibre-optical splice of structure of fiber_optic through optical fiber jacket, and the first end metastomium optical fiber of optical fiber is fixed on fiber fixed frame.
4. optical measuring device as claimed in claim 1, is characterized in that, described reflection arm comprises:
Reflection arm framework, optical fiber jacket, structure of fiber_optic, screw thread pair, lens carrier, polarizer support, wave plate rotary components, locking swivel nut, lens mount, lens, lens fixed mount, lens clamp nut, fiber fixed frame and shell; Wherein,
Coaxial structure of fiber_optic, lens carrier, polarizer support, wave plate rotary components, the lens of being provided with successively of inside bottom of described reflection arm framework;
On described structure of fiber_optic, be provided with fibre-optical splice, bottom is provided with screw thread pair; Described lens carrier is provided with lens;
On described polarizer support, Miniature turntable is installed, on Miniature turntable, polarizer is installed;
Described wave plate rotary components is fixed on an end face inner side of reflection arm framework;
Described lens scioptics clamp nut is fixed on lens mount inside, and lens mount screws in the endoporus of described lens fixed mount by screw thread;
Described lens fixed mount front end has axial gap, and periphery is tapered, and lens fixed mount root has external thread;
Described locking swivel nut can screw with lens fixed mount root external thread, by the locked lens mount of cone match, locks swivel nut simultaneously and radially has threaded hole, can add the further locked lens mount of holding screw;
Described optical fiber jacket is embedded in the hole of reflection arm framework other end;
Described fiber fixed frame is fixed on the reflection arm framework on optical fiber jacket limit;
Described shell is fixed on reflection arm framework;
The five-port of described optical fiber is connected with the fibre-optical splice of structure of fiber_optic through optical fiber jacket, and the five-port rear portion optical fiber of optical fiber is fixed on fiber fixed frame.
5. optical measuring instrument as claimed in claim 4, is characterized in that, described wave plate rotary components comprises:
Core motor, the first adaptor, the second adaptor, photoelectric sensor, sensor catch, wave plate seat, wave plate, brace, stator, adjustment screw and trip bolt;
Wherein, described core motor two ends connect respectively first, second adaptor;
Described wave plate one end is fixed with described brace, and is placed in wave plate seat;
Described stator compresses wave plate by trip bolt;
Described wave plate seat is fixed on the rotary end surface of core motor.
6. optical measuring device as claimed in claim 1, is characterized in that, described sample stage assembly comprises:
Electric lifting platform, two dimension are adjusted platform, the sample stage that is provided with vacuum tank and the second web joint;
Wherein, described electric lifting platform is fixed on described base central authorities;
Described two dimension is adjusted countertop and is connected with described sample stage, and underrun the second web joint is connected with motorized stage electric lifting platform;
On described sample stage, be provided with many reference lines, for the placement reference of sample.
7. optical measuring device as claimed in claim 1, is characterized in that, described lateral plate component comprises:
Side plate, reflection arm support, incident arm support, friction disc, axle, vertical magnetic, inclination magnetic and rocking shaft;
Wherein, described side plate and base are connected; Described reflection arm support and incident arm support can swing around rocking shaft, and are all embedded with friction disc at the described side plate tow sides that reflect the wobble area of arm support and incident arm support;
On the arc surface of described side plate, have pin-and-hole, for fixing incident arm support and reflection arm support;
Described rocking shaft is positioned at side plate home position;
Described axle is arranged on the side top of described rocking shaft, and described mirror assembly can rotate around the axis; Described axle is attached with vertical magnetic and inclination magnetic.
8. optical measuring device as claimed in claim 7, is characterized in that, described reflection arm support comprises:
Rocking arm, framework, movable pin, locking handwheel, friction disc, cylinder, adjustment screw thread pair, gib screw, first are adjusted screw, first and are adjusted screw hole, the second adjustment screw and the second adjustment screw hole; Wherein, described rocking arm is F shape structure, and described framework can insert in the F shape opening of rocking arm; Described first adjusts screw adjusts screw hole through first, and the first adjustment screw is lockable; In the middle of described framework and described rocking arm, respectively embed a friction disc; Friction disc on described rocking arm can with described side plate on friction disc fit tightly, locking handwheel adjustable; Described movable pin is installed on rocking arm top, coordinates with the pin-and-hole on side plate arc surface; Described cylinder is arranged in the V-shaped groove of framework.
9. optical measuring device as claimed in claim 8, is characterized in that:
The movable pin of described incident arm support is to be first arranged on a card extender, and card extender is arranged on incident arm support by screw again, and movable pin can be finely tuned; Reflection arm support and incident arm support can swing around rocking shaft, and rocking shaft is fixed on side plate.
10. optical measuring device as claimed in claim 8, is characterized in that:
Described incident arm is all provided with V-shaped groove with the back of reflection arm, V-shaped groove and cylindrical fit during installation, and gib screw can be locked reflection arm, and gib screw can lock or unclamp.
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| CN201210281702.2A CN103575213B (en) | 2012-08-09 | 2012-08-09 | Optical measuring device |
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| CN201210281702.2A CN103575213B (en) | 2012-08-09 | 2012-08-09 | Optical measuring device |
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| CN104730035A (en) * | 2015-03-06 | 2015-06-24 | 南京航空航天大学 | System for measuring main component content of emulsion and detection method thereof |
| CN105841615A (en) * | 2015-12-31 | 2016-08-10 | 广东工业大学 | Line structured light microscopic measurement device |
| CN106659484A (en) * | 2014-09-01 | 2017-05-10 | 株式会社岛津制作所 | Light measuring apparatus |
| CN107102434A (en) * | 2017-06-01 | 2017-08-29 | 中国科学院合肥物质科学研究院 | Adjusting polarization degree light source based on slide heap |
| CN107449362A (en) * | 2017-08-30 | 2017-12-08 | 江西昌河航空工业有限公司 | A kind of adjusting means for being used to measure thread parameter on optical measuring instrument |
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| CN110261348A (en) * | 2019-07-04 | 2019-09-20 | 中南林业科技大学 | Near infrared spectrum fruit internal quality detection device |
| CN110261348B (en) * | 2019-07-04 | 2021-06-22 | 中南林业科技大学 | Near infrared spectrum fruit internal quality detection device |
| CN112762843A (en) * | 2019-11-01 | 2021-05-07 | 应用材料公司 | Integrated reflectometer or ellipsometer |
| CN112762843B (en) * | 2019-11-01 | 2023-10-20 | 应用材料公司 | Integrated reflectometer or ellipsometer |
| CN111504200A (en) * | 2020-05-07 | 2020-08-07 | 山东菏鲁电子科技有限公司 | Visual detector that pencil connects |
| CN111678458A (en) * | 2020-06-18 | 2020-09-18 | 东莞市小可智能设备科技有限公司 | Tin ball vision measuring device and measuring method thereof |
| CN113566716A (en) * | 2021-08-27 | 2021-10-29 | 西安应用光学研究所 | Device and method for measuring micro relative displacement of reflector component in vibration environment |
| CN114739300A (en) * | 2022-03-29 | 2022-07-12 | 上海优睿谱半导体设备有限公司 | Method for measuring epitaxial layer thickness of epitaxial wafer |
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