Embodiment
Based on a communication means for label in the Long-distance Control of semiconductor equipment, it is characterized in that, first set up the set of SECS information model, then apparatus for establishing end is connected with the SECS of host side, then the SECS information of carrying out between equipment end and host side sends and receives.In the present embodiment,
The set of described SECS information model comprises the set of equipment end SECS information model and the set of host side SECS information model, the set of equipment end SECS information model comprises multiple equipment end SECS information model, equipment end SECS information model is respectively each production functional configuration, the set of host side SECS information model comprises the set of multiple host side SECS information model, and equipment end SECS information model and host side SECS information model adopt following methods to obtain:
SECS information model comprises: the SECS information format in the international SEMI standard E5 corresponding to this production function, and all labels that this information format must have, all variable data item labels that described all labels that must have comprise an information labels and must have, described all variable data item labels that must have refer to all variable data item labels that this SECS information format has, and each variable data item must be endowed a variable data item label; Information labels must have uniqueness in the set of SECS information model compared with out of Memory label, the method realizing information labels uniqueness is as follows: the classification integer of English alphabet s, SECS information format, the function integer of English alphabet f, SECS information format, English alphabet v, Integer n, form information labels in order, described Integer n refers to the order of current SECS information format in the set of SECS information model, if first, Integer n equals 1, if second, Integer n equals 2, by that analogy; (example: s1f13v1, s1f13v2, s1f14v1, s1f14v2, etc.);
All variable data item labels must be unique within the scope of current SECS information model, the method realizing variable data item tag uniqueness is as follows: English alphabet v, integer m composition variable data item label in order, described integer m refers to the order of current variable data item in current SECS information format, if first variable data item, integer m equals 1, if second variable data item, integer m equals 2, by that analogy (example: v1, v2, v3, etc.);
The SECS establishment of connection method of equipment end and host side is as follows:
Set up the socket of server type network layer in equipment end, and start to listen to, if socket is set up unsuccessful, then exit current procedures; Client type network socket is set up in host side, if socket is set up unsuccessful, then exit current procedures, host side starts connection request interval timer, and (HSMS mode is T6, RS232 mode is T2), (HSMS mode is SELECT.req to send SECS connection request data message to equipment end, RS232 mode is ENQ, defined by E37 and E4 respectively), if host side receive in interval timer equipment end permitted attachable data message (HSMS mode is SELECT.res, RS232 mode is EOT, is defined respectively by E37 and E4), successful connection; Other situation is connection failure; Equipment end, if be in connection status, just refuses all connection requests,
SECS information between equipment end and host side sends and comprises the following steps:
Step 4.1: equipment produces the data event about production function, described data event comprises data and label, described data comprise the data of classification integer (i.e. Stream Number) in SECS information model corresponding to this production function, function integer (i.e. Function Number), all variable data items, described label comprises the information labels in SECS information model corresponding to this production function, and all variable data item labels in SECS information model corresponding to this production function;
Step 4.2: selected equipment end SECS information model one by one from the set of equipment end SECS information model, and by the information labels on selected device end SECS information model, classification integer Stream Number, function integer Function Number, the data type of variable data item and length, variable data item label respectively with the information labels in described data event, classification integer Stream Number, function integer (Function Number), the data type of variable data item and length, variable data item label compares, if there is the information labels on selected device end SECS information model, classification integer Stream Number), function integer Function Number, the data type of variable data item and length, variable data item label respectively with the information labels in described data event, classification integer Stream Number, function integer Function Number, the data type of variable data item and length, variable data item label is completely equal, then the data of variable data item in data event are assigned to the variable data item with identical variable data item label on selected device end SECS information model, remove all labels in the equipment end SECS information model after assignment, and using the SECS information removed after label as the equipment end SECS information needing to send, otherwise, then abandon the transmission of current data event,
Step 4.3: according to international SEMI standard E4 or E37, the equipment end SECS information that the needs described step 4.2 generated send is converted to byte arrays, and after adding SECS information header byte arrays and length byte array, sends to main frame.
Based on the communication means of label in the Long-distance Control of semiconductor equipment according to claim 4, it is characterized in that, between described equipment end and host side, SECS receives information comprises the following steps:
Step 5.1: main frame receives the byte arrays adding SECS information header byte arrays and length byte array, according to international SEMI standard E4 or E37, is reduced into a concrete SECS information byte arrays.
Step 5.2: choose host side SECS information model one by one from the set of host side SECS information model, and by the classification integer Stream Number on selected host side SECS information model, function integer Function Number, direction byte, W byte, list and variable data item respectively with the classification integer Stream Number of SECS information concrete described in step 5.1, function integer Function Number, direction byte, W byte, list and variable data item compare, whether the number more only comparing list institute containing element of list is equal, the type of the more only comparing data of variable data item and length, if the classification integer Stream Number occurring on selected host side SECS information model, function integer Function Number, direction byte, W byte, list and variable data item respectively with the classification integer Stream Number of SECS information concrete described in step 5.1, function integer Function Number, direction byte, W byte, list and variable data item completely equal, then using the matching template of selected concrete SECS information model as SECS information concrete described in step 5.1, and enter step 5.3, otherwise, be that impenetrable information is abandoned depending on SECS information described in step 5.1.
Step 5.3: classification integer Stream Number will be obtained from SECS information described in step 5.1), the value of function integer Function Number, variable data item with from host side SECS information model described in step 5.2, obtain information labels and variable data item label, form a data event.
With reference to the accompanying drawings, explanation is specifically made to specific embodiment of the invention scheme:
The production function that can provide according to equipment and link, the required SECS information model set used of the equipment that defines, and use label rule of the present invention, form a text, be referred to as SML file, the equipment of That file defines carries out all SECS information models of SECS communication;
According to HSMS(E37) or RS232 (E4) mode set up SECS communication link;
Use SECS information model and its label of comprising to carry out the Code And Decode of SECS information, realize the operation control to equipment and data interaction; Disconnect SECS communication link;
the method of the required SECS information template set used of define equipment: according to the purposes of equipment and the function that can provide to production line thereof, use the definition format of SEMI standard E5, the information model defined in E5 and implication are contrasted one by one with the function that equipment can provide, define all information model definition needing to use; Then a text is compiled in the definition of these information models, in editing process, need to add label according to the present invention, its rule is as follows: each information model definition, all must with a label, and only have a label (note: also use label in the world, but do not have this to specify, and the rule of label is different, using method and scope are also different, under seeing), this label is the label of SECS information model level, must have uniqueness in whole SML file; Each SECS information model definition is made up of list and data item, and list can not be designated label; Data item is divided into constant data item and variable data item, constant data item is in SECS communication, the data item that its value is forever constant, variable data item is in SECS communication, the data item that its value may change (annotates: such as, in certain SECS information, the value of certain data item is integer data 5, send next time or receive and the information of this information all fours time, the value of this data item possible is integer data 10); Constant data item can not be designated label, and variable data item must be designated a label, and this label must be unique in the definition of current information model; The nomenclature of label is as follows: label is made up of English alphabet and numeral; Even if there is the information model definition of multiple similar (namely identical Stream and Function numeral, refers to SEMI standard E5) of the same race, also different labels must be used; The grammer of label in SML file: immediately following after each SECS information declaration, use character=, be then concrete tag name, see specific embodiment; SEMI standard E5 gives the definition of the SECS information model in standard, because distinct device has different purposes, and SML file is for individual plants, so a SML file, except comprising certain subclass of the SECS information model set that SEMI standard E5 provides, also may include the self-defining SECS information model of equipment, but self-defining SECS information model also must meet the requirement of SEMI standard E5, adopt the form that SEMI standard E5 is identical, and label of the present invention rule must be used.
After SECS communication link is set up, parsing coding is carried out to the data that will send, concrete steps are: upper layer application is needed to the data sent, must with the label of SECS level of information, this label corresponds to a unique SECS information model, if having variable item in the definition of the SECS information that will send, the data of this variable item also must with correct label, if do not have label or label not in above-mentioned dictionary, just refusal sends or makes mistakes; Information model corresponding to label and the upper layer application data come that occur together are mated, if do not mated, just refusal sends or makes mistakes, if coupling, is is directly received and sent by the cover of above foundation; Matching ratio comparatively time, check that Stream Number(is see SEMI standard E5) and Function Number(see SEMI standard E5) whether equal, if do not have one not etc., just refusal sends or makes mistakes; If there is variable data item in template, so must comprises value and their corresponding labels of all variable data items in request msg, carry out detailed comparing according to label with the relevant variable data item in information model, comparing data type, data length;
After receiving a SECS information, the information received is decoded, concrete steps are: with the information model in information model dictionary one by one compared with, if also do not find coupling after all templates in dictionary are finished, be considered as the information that can not understand and process, refused according to relevant SEMI standard; If meet certain model of this information aggregate, just accept and corresponding label is notified this information of upper layer application process together with this information data, the information under same label notifies upper layer application process sequentially.First compare Stream Number(during coupling see SEMI standard E5) and Function Number(see SEMI standard E5), then carrying out profound coupling to deleting the object after choosing, comprising all lists and data item; The coupling of data item only needs matched data type and data length, if data item is variable data item, except recording the value of this variable data item, also must records the label of this variable data item, and they are mapped; The coupling of list uses the definition of SEMI standard E5 completely;
The step disconnecting SECS communication link is: if network socket is receiving or sending in data procedures, just wait for; If not, under the mode of RS232, directly disconnect socket; Under the mode of HSMS, first send Separate.req(and defined by E37), then disconnect socket.
The present invention is applicable in the SECS communication based on SEMI standard, uses the SECS II information format specified by SEMI standard E5; Specifically, the present invention is on the basis of following SEMI standard E4, E5, E37, proposes new label rule, and introduces other corresponding concept.
As shown in Figure 1, network layer refers to network calculations layer, comprises data cube computation, physical network etc.; RS232 agreement or ICP/IP protocol are transport layer, are general network communication means; SECS protocol layer (E4 or E37) is equivalent to dialogue layer, and it can use TCP/IP approach, also can use RS232 approach, sends the relevant information of SEMI standard E5.Wherein SEMI standard E4 describes session rules when using RS232 approach, and SEMI standard E37 describes session rules when using TCP/IP approach.Upper layer application refers to the SECS/GEM system of producing long-range control host machine (Host) on line or equipment end, is logical process and the reaction level of SECS information.Application structure is as Fig. 5, equipment in Fig. 5 can need integrated equipment for any one, SECS communication is used between equipment and long-range control host machine, long-range control host machine (Host) and manufacturing execution system (MES system) or other produce between line software systems (as SAP etc.) and do not use SECS communication, but use out of Memory software engineering, as RPC, CORBA etc.
An embodiment is described below so that implementation process of the present invention to be described, general equipment will use up to a hundred SECS information models, and a complete SECS information model file is all larger; The present embodiment is that equipment end sends SECS information S1F13 to host side, and the SECS return information S1F14 that wait-receiving mode sends from host side, complete one send and receive circulation, these two information models are also that all devices must comprise, according to SEMI standard E5, the implication of S1F13 can have multiple use, it can be used to inquire that whether online the other side is, whether application layer also can use it in running order etc. to judge the other side, the SECS communication of host side generally adopts aggressive mode, and equipment end generally adopts Passive Mode.
As equipment end, must have the function whether inquiry host side is in operating state, this function generally uses S1F13 and S1F14 to come, and according to the general format of SEMI standard E5, the information model of definition S1F13 and S1F14 is as follows:
S1F13=
s1f13v1oUTPUT W # declares the information of setting out, must reply
This information of <L [0] >. # does not comprise any list and data item
S1F14=
s1f14v1iNPUT # declares an information of coming in, and information labels is s1f14v1
This packets of information of <L [2] # contains the list of 2 elements
<B [1] >=v1 # this be a Binary variable data item, label is called v1
The list of <L [2] #2 element, embeds the list that last layer is secondary
<A [8] >=v2 # this be a string variable data item, label is called v2
<A [8] ' ASM V1.0 ' > # this be a character string constant data item, there is no tag name
The embedded end of list (EOL) of > #
>. # end of list (EOL), information definition terminates
Here define two SECS information model S1F13 and S1F14, tag name is respectively
s1f13v1with
s1f14v1.Wherein S1F14 is the return information template of S1F13, and according to the definition of SEMI standard E5, S1F13 information can be used for inquiring that whether the other side is working properly, so must obtain return information, its return information must be S1F14; In return information, if the value that label is called the variable data item of v1 is 0, representing working properly, can carry out next step order, if not 0, is other shaping value, represents that the other side is in error condition, or other situation; The data item that label is called v2 is the version number of the other side's software, and the data item below it is constant, represents the style number of the other side;
2.set up label respectively according to above-mentioned definition to be called
s1f13v1with
s1f14v1information model is expressed, and tag name
s1f13v1information model corresponding with it,
s1f14v1information model corresponding with it leaves in dictionary; Each SECS information model contains its list and the expression of data item, if data item is variable data item, must with the label of this data item, and the dictionary containing information model expression obtained is the information model set of equipment end; Setting up in information model expression process, information labels and variable data item label will formed according to the present invention;
3.set up SECS communication link, as shown in Figure 2.First set up server type network socket in equipment end (i.e. Partner), then set up client type network socket in host side (drive end); If there is one end socket to set up unsuccessful, then exit this step; (HSMS mode is T6 to start connection request interval timer in host side, RS232 mode is T2), then (HSMS mode is SELECT.req to send SECS connection request data message to equipment end, RS232 mode is ENQ, defined by E37 and E4 respectively), judge that whether interval timer is overtime, if overtime, just exit; If there is no time-out, (HSMS mode is SELECT.res to judge whether to receive attachable data message perhaps, RS232 mode is EOT, defined by E37 and E4 respectively), if expression successful connection, thus enter connection status, if do not receive attachable data message perhaps, just enter and judge that whether interval timer is overtime and receive the circulation of being permitted attachable data message; At the SECS connection request data message receiving host side, (HSMS mode is SELECT.req to equipment end, RS232 mode is ENQ, defined by E37 and E4 respectively) after, judge whether to be in connection status, if so, just refuse to reply, if be not in connection status, send license link information SELECTres or EOT to host side, and enter connection status;
4.upon entering the connected state, both sides just can send and receive SECS information.Equipment end upper-layer functionality produces data event (with reference to figure 3), and this data event is with information labels
s1f13v1, classification integer is 1, and function integer is 13, does not have variable data item; SECS information model in this data event and dictionary is compared one by one, if inconsistent, terminate and report error message; Matching ratio comparatively time, first match information label, then check that Stream Number(is see SEMI standard E5) and Function Number(see SEMI standard E5), and then mate variable data item and their label, if do not have one not etc., just next template is selected, if do not find template just to refuse to send or make mistakes; Information labels in the present embodiment and information model dictionary is called
s1f13v1information model match, there is no variable data item, according to international SEMI standard E4 or E37, the information model with concrete data matched is converted to byte arrays, and after adding SECS information header byte arrays and length byte array, by the connection of having set up, send to main frame;
5.after host side receives byte arrays from network socket, need according to international SEMI standard E4 or E37, byte arrays is reduced into a SECS information, SECS information after reduction is mated with the SECS information model of host side, then the purpose of this SECS information can just be known, in the SECS information that host side has just received and host side SECS information model
s1f13v1match
,form corresponding data event after mating, this data event is given relevant function processor to process, after the process of concrete coupling and formation data event and equipment end receive SECS information similar (description see the present embodiment step 7);
6.host function processing module is receiving
s1f13v1data event after, formed information labels be
s1f14v1data event, send S1F14 to the other side, its process is identical with equipment end; The following describes equipment end receive the byte arrays of S1F14 after reduction process;
7.equipment end receives byte arrays from network socket, with reference to figure 6, according to international SEMI standard E4 or E37, byte arrays is reduced into a SECS information, SECS information after reduction is mated with the SECS information model of equipment end: this SECS message and the SECS information model in step 2 dictionary are matched one by one, if also do not find coupling after all templates in dictionary are finished, according to SEMI SECS standard E37 (TCP/IP approach) or E4 (RS232 approach) refusal; First compare Stream Number(during coupling see SEMI standard E5) and Function Number(see SEMI standard E5) whether be respectively 1 and 14, then profound coupling is carried out to deleting the template object after choosing, comprise all lists and data item, in general, if there is variable data item in template, so each variable data item needs to carry out detailed comparison one by one, such as data type, data length etc.; First the present embodiment mates outermost list and whether has just in time 2 elements, and if so, then mate respectively these 2 elements, first is Binary variable data item, mates its type and length; Second is nested list, first element of nested list to be length be 8 string variable data item, need to compare type and length, second element of nested list to be length be 8 character string constant amount data item, not only need comparing data type and length, also need to compare their concrete numerical value; Information labels in the present embodiment and equipment end SECS information model dictionary is
s1f14v1template match, record corresponding information labels name
s1f14v1, and the variable data item received in S1F14 respectively with their tag name
v1with
v2be mapped, then these data and their tag name, and information labels name
s1f14v1form a data event, give upper-layer functionality application interface to process;
8.break link.In general, SECS communication is once connect above, and without the need to break link, production is year after year, moves in circles; If need break link, first judge whether network socket is receiving or sending in data procedures, if just wait for; If not, under the mode of RS232, directly disconnect socket; Under the mode of HSMS, first send Separate.req(and defined by E37), then disconnect socket; Disconnect socket and reclaim related network resource.
Above embodiment contains two SECS message formats, and in general, a SML file needs the SECS source template definition comprising more than 100, but SECS communication process is just the same.