CN103513639A - Label-based communication method for semiconductor device in remote control - Google Patents

Label-based communication method for semiconductor device in remote control Download PDF

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CN103513639A
CN103513639A CN201310463037.3A CN201310463037A CN103513639A CN 103513639 A CN103513639 A CN 103513639A CN 201310463037 A CN201310463037 A CN 201310463037A CN 103513639 A CN103513639 A CN 103513639A
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secs
data item
information
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integer
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CN103513639B (en
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周炳君
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y02P90/02Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A label-based communication method for a semiconductor device in remote control comprises the steps of first establishing an SECS information template assembly, establishing SECS connection between the device side and the host side and then performing SECS information transmitting and receiving between the device side and the host side. The SECS information template assembly comprises a device-side SECS information template assembly and a host-side SECS information template assembly, wherein the device-side SECS information template assembly comprises multiple device-side SECS information templates which are respectively configured for each production function, and the host-side SECS information template assembly comprises multiple host-side SECS information templates including SECS information formats corresponding to production functions in international SEMI standard E5 and all of necessary labels. All of necessary labels include one information label and all of necessary variable data item labels, wherein all of necessary variable data item labels are all of variable data item labels owned by the SECS information formats, and one variable data item label is necessarily provided for each variable data item.

Description

Communication means based on label in the Long-distance Control of semiconductor equipment
Technical field
The present invention relates to network communication protocol technical field.In the SECS communication based on SEMI standard, use the SECS II information format by SEMI standard E5 regulation; Specifically, the present invention, on the basis of SEMI standard E5, has stipulated a kind of method of the SECS of enforcement II information.
Background technology
Semiconductor fabrication lines requires high cleanliness, high dustless, especially in wafer manufacture, produces on line, and most of manufacturing equipment is operated in high vacuum state, and manual operation easily causes the leakage of harmful gas; Increase along with manufacturing process complexity, before each processing procedure starts with finish after can have a some data between equipment and manufacturing execution system and other software systems (as advanced process system etc.) alternately, artificial these data of input are impossible, and the equipment on production line is generally from different equipment manufacturers, software systems and the technology on equipment, used are different, and this brings certain difficulty to the robotization of producing line.For this reason, the SEMI of international semiconductor employer's organization has released the robotization of a lot of standard ,Yi coaching device manufacturers and production line unit, realizes the integrated of distinct device, technique, flow process etc.The robotization that the SEMI standard of take is framework is integrated, not only can address these problems effectively, and bring the raising of throughput rate, the advantages such as improvement of yield to production line, is the inexorable trend of the semiconductor product line production automation now and from now on.
SECS (abbreviation of SEMI EQUIPMENT COMMUNICATIONS STANDARD) communication refers under SECS agreement (SEMI standard E4, E37), using SECS information format (E5 defines by SEMI standard) carry out equipment and produce the communication between line software, is to realize numerous distinct devices to produce the integrated basis of robotization on line.
On semiconductor production line, the operation of numerous equipment and control, production data is mutual, all by SECS communication, realizes.International semiconductor industry SEMI standard E4, E5, E37 separate provision agreement and the form of SECS communication, wherein E5 has stipulated definition and the implication thereof of SECS information, but do not provide method or the approach of enforcement, thereby many different implementation methods have been there is, as the use XML form method in recent years occurring, the shortcoming of this method is not use in SEMI standard E5 to have defined SECS information format, make between the information that sends and the form of actual definition discrepancy very large, and there is no that definition in E5 is directly perceived like that, readability; Generally use in the world at present, or the method and approach before 15 years, namely use the formal definition in E5, but in definition, introduce structure, front function, rear function, general label etc., the label rule of prior art is: for a SECS information, can use label, also can not use label, label can not be differentiated SECS information model completely, and label and SECS information model are not one-to-one relationships.The shortcoming of this method is, it makes the enforcement of SECS communication become complicated, and the control system of equipment needs treatment S ECS information itself, but the control system of equipment is only interested in the device data in SECS information or director data, there is no need to know the auxiliary data in SECS information completely, this method is the software engineering based on before 15 years, be suitable for structural computer programming, but, in nearly 10 years, Object Oriented technology has obtained sufficient development, and this technology cannot have been mated with it completely.
Summary of the invention
The invention provides the communication means based on label in a kind of Long-distance Control that can reduce the semiconductor equipment of coupling between SECS communications protocol and apparatus control system.
Technical solution of the present invention is as follows:
Long-distance Control in a communication means based on label, first set up the set of SECS information model, then the SECS of apparatus for establishing end and host side is connected, then carries out the SECS information sending and receiving between equipment end and host side.
Compared with prior art, tool of the present invention has the following advantages:
The application of the invention, can realize the production domesticization of the SECS protocol software, and the robotization realizing between numerous production equipments, production technology, the production schedule, product category is integrated, improves productive capacity, the throughput rate of semiconductor production line.
Although general equipment all adopts HSMS communication modes at present, still have a considerable amount of used equipments only to use RS232 communication modes; The present invention, by using stamp methods, combines HSMS and RS232 mode, thereby realize with same SECS communication platform, operates and controls new used equipment, has improved the automatization level of semiconductor factory.
From technical standpoint, by above-mentioned stamp methods, realized the smooth handing-over between SECS communications protocol and apparatus control system, and reduced to greatest extent the coupling between them, thereby can make full use of Object-oriented Technique, greatly simplify design and the programming of SECS agreement, and in prior art, for a SECS information, can use label, also can not use label, so cannot use label to be used as the corresponding means of up/down perforation, cause not corresponding between SECS information and label, make each SECS information must have individual class to express (in equipment end, often have more than 100 different SECS information definition), bottom SECS agreement also must be used concrete SECS information itself to be used as example, travel to and fro between between SECS protocol module and upper application module, not only degree of coupling is high, and can not make full use of Object-oriented Technique.
Accompanying drawing explanation
Fig. 1 is SECS communication structure figure.
Fig. 2 is SECS communication general steps figure.
Fig. 3 is data event structural drawing.
Fig. 4 connects process flow diagram for setting up SECS communication.
Fig. 5 is for sending information flow chart.
Fig. 6 is for receiving information flow chart.
Fig. 7 is application structure figure.
Embodiment
Long-distance Control in a communication means based on label, it is characterized in that, first set up the set of SECS information model, then the SECS of apparatus for establishing end and host side is connected, then carries out the SECS information sending and receiving between equipment end and host side.In the present embodiment,
The set of described SECS information model comprises equipment end SECS information model set and the set of host side SECS information model, the set of equipment end SECS information model comprises a plurality of equipment end SECS information models, equipment end SECS information model is respectively each production functional configuration, the set of host side SECS information model comprises the set of a plurality of host side SECS information model, and equipment end SECS information model and host side SECS information model adopt following methods to obtain:
SECS information model comprises: the SECS information format in the corresponding international SEMI standard E5 of this production function, and this information format all labels that must have, described all labels that must have comprise an information labels and all variable data item labels that must have, described all variable data item labels that must have refer to all variable data item labels that this SECS information format has, and each variable data item must be endowed a variable data item label; Information labels is compared and must be had uniqueness with out of Memory label in the set of SECS information model, the method that realizes information labels uniqueness is as follows: the function integer of the classification integer of English alphabet s, SECS information format, English alphabet f, SECS information format, English alphabet v, Integer n, form in order information labels, described Integer n refers to the order of current SECS information format in the set of SECS information model, if first, Integer n equals 1, if second, Integer n equals 2, by that analogy; (example: s1f13v1, s1f13v2, s1f14v1, s1f14v2, etc.);
All variable data item labels must be unique within the scope of current SECS information model, the method that realizes variable data item label uniqueness is as follows: English alphabet v, integer m composition variable data item label in order, described integer m refers to the order of current variable data item in current SECS information format, if first variable data item, integer m equals 1, if second variable data item, integer m equals 2, by that analogy (example: v1, v2, v3, etc.);
The SECS establishment of connection method of equipment end and host side is as follows:
In equipment end, set up the socket of server type network layer, and start to listen to, unsuccessful if socket is set up, exit current step; In host side, set up the socket of client's type network, if it is unsuccessful that socket is set up, exit current step, host side starts connection request interval timer, and (HSMS mode is T6, RS232 mode is T2), (HSMS mode is SELECT.req to equipment end, to send SECS connection request data message, RS232 mode is ENQ, by E37 and E4, defined respectively), if host side is received in interval timer, equipment end permitted attachable data message (HSMS mode is SELECT.res, RS232 mode is EOT, is defined respectively by E37 and E4), successful connection; Other situation is connection failure; Equipment end, if in connection status, is just refused all connection requests,
SECS information between equipment end and host side sends and comprises the following steps:
Step 4.1: equipment produces the data event about production function, described data event comprises data and label, described data comprise this production function the data of classification integer (being Stream Number) in corresponding SECS information model, function integer (being Function Number), all variable data items, described label comprise this production function information labels in corresponding SECS information model, and all variable data item labels in this corresponding SECS information model of production function institute;
Step 4.2: selected equipment end SECS information model one by one from the set of equipment end SECS information model, and by the information labels on selected device end SECS information model, classification integer Stream Number, function integer Function Number, the data type of variable data item and length, variable data item label respectively with described data event in information labels, classification integer Stream Number, function integer (Function Number), the data type of variable data item and length, variable data item label compares, if there is the information labels on selected device end SECS information model, classification integer Stream Number), function integer Function Number, the data type of variable data item and length, variable data item label respectively with described data event in information labels, classification integer Stream Number, function integer Function Number, the data type of variable data item and length, variable data item label is completely equal, the data of variable data item in data event are assigned to the variable data item with identical variable data item label on selected device end SECS information model, remove all labels in the equipment end SECS information model after assignment, and the equipment end SECS information that the SECS information of removing after label is sent as needs, otherwise, abandon the transmission of current data event,
Step 4.3: according to international SEMI standard E4 or E37, the equipment end SECS information that the needs that described step 4.2 is generated send is converted to byte arrays, and adds after SECS information header byte arrays and length byte array, sends to main frame.
Communication means based on label in the Long-distance Control of semiconductor equipment according to claim 4, is characterized in that, between described equipment end and host side, SECS information receives and comprises the following steps:
Step 5.1: main frame receives the byte arrays that adds SECS information header byte arrays and length byte array, according to international SEMI standard E4 or E37, is reduced into a concrete SECS information byte arrays.
Step 5.2: from the set of host side SECS information model, choose one by one host side SECS information model, and by the classification integer Stream Number on selected host side SECS information model, function integer Function Number, direction byte, W byte, list and variable data item respectively with the classification integer Stream Number of SECS information concrete described in step 5.1, function integer Function Number, direction byte, W byte, list and variable data item compare, whether the number that more only compares list institute containing element of list equates,, if there is the classification integer Stream Number on selected host side SECS information model in type and the length of the more only comparing data of variable data item, function integer Function Number, direction byte, W byte, list and variable data item respectively with the classification integer Stream Number of SECS information concrete described in step 5.1, function integer Function Number, direction byte, W byte, list and variable data item are completely equal, the matching template using selected concrete SECS information model as SECS information concrete described in step 5.1, and enter step 5.3, otherwise, depending on SECS information described in step 5.1, be that impenetrable information is abandoned.
Step 5.3: will from SECS information described in step 5.1, obtain classification integer Stream Number), the value of function integer Function Number, variable data item with from host side SECS information model described in step 5.2, obtain information labels and variable data item label, form a data event.
With reference to the accompanying drawings, specific embodiment of the invention scheme is made to more detailed explanation:
Production function and the link that according to equipment, can provide, define the SECS information model set of the required use of equipment, and use label rule of the present invention, form a text, be referred to as SML file, this document has defined all SECS information models that equipment carries out SECS communication;
According to HSMS(E37) or RS232 (E4) mode set up SECS communication link;
With the label that SECS information model and it comprise, carry out the Code And Decode of SECS information, realize operation control and data interaction to equipment; Disconnect SECS communication link;
the method of the SECS information template set of the required use of define equipment: according to the purposes of equipment and the function that can provide to production line thereof, use the definition format of SEMI standard E5, the information model defining in E5 and implication are contrasted one by one with the function that equipment can provide, define all information models that use that need and define; Then these information model definition are compiled to a text, in editing process, need to add label according to the present invention, its rule is as follows: each information model definition, all must be with a label, and only have a label (to note: also use in the world label, but there is no this regulation, and the rule of label is different, using method and scope are also different, under seeing), this label is the label of SECS information model level, must in whole SML file, have uniqueness; Each SECS information model definition is comprised of list and data item, and list can not designatedly have label; Data item is divided into constant data item and variable data item, constant data item is in SECS communication, its value is constant data item forever, variable data item is in SECS communication, the data item that its value may change (annotation: for example, in certain SECS information, the value of certain data item is integer data 5, sends next time or receives and during the information of this information all fours, the value of possible this data item is integer data 10); Constant data item can not designatedly have label, and the necessary designated label of variable data item, this label must be unique in current information model definition; The nomenclature of label is as follows: label is comprised of English alphabet and numeral; Even if having the information model definition of a plurality of similar (are identical Stream and Function numeral, refer to SEMI standard E5) of the same race, also must use different labels; The grammer of label in SML file: immediately following after each SECS information declaration, use character=, be then concrete tag name, see specific embodiment; SEMI standard E5 has provided the SECS information model definition in standard, because distinct device has different purposes, and SML file is for indivedual equipment, so SML file, except certain subclass that comprises the SECS information model set that SEMI standard E5 provides, also may include the self-defining SECS information model of equipment, but self-defining SECS information model also must meet the requirement of SEMI standard E5, adopt the identical form of SEMI standard E5, and essential use label rule of the present invention.
After SECS communication link is set up, the data that will send are resolved to coding, concrete steps are: the data that need to send upper layer application, must be with the label of SECS level of information, this label is corresponding to a unique SECS information model, if having variable item in the definition of the SECS information sending, the data of this variable item also must be with correct label, if there is no label or label not in above-mentioned dictionary, just refusal sends or makes mistakes; The corresponding information model of label and the upper layer application data of coming that occur together are mated, if do not mated, just refusal sends or makes mistakes, if coupling, directly the cover by above foundation receives and sends; Matching ratio compared with time, check that Stream Number(is referring to SEMI standard E5) and Function Number(referring to SEMI standard E5) whether equate, if do not have one not etc., just refusal sends or makes mistakes; If there is variable data item in template, in request msg, must comprise so value and their corresponding labels of all variable data items, according to the relevant variable data item in label and information model, carry out detailed comparison, comparing data type, data length;
After receiving a SECS information, the information receiving is decoded, concrete steps are: compare one by one with the information model in information model dictionary, if also do not find coupling after all templates in dictionary are finished, be considered as the information that can not understand and process, according to relevant SEMI standard, refused; If meet certain model of this information aggregate, just accept and notify upper layer application to process this information together with this information data on corresponding label, the information under same label notifies upper layer application to process sequentially.During coupling first relatively Stream Number(referring to SEMI standard E5) and Function Number(referring to SEMI standard E5), then the object of deleting after choosing is carried out to profound coupling, comprise all lists and data item; The coupling of data item only needs matched data type and data length, if data item is variable data item, except recording the value of this variable data item, also must records the label of this variable data item, and they are mapped; The coupling of list is used the definition of SEMI standard E5 completely;
The step that disconnects SECS communication link is: if network socket is receiving or sending in data procedures, just wait for; If not, under the mode of RS232, directly disconnect socket; Under the mode of HSMS, first send Separate.req(and defined by E37), then disconnect socket.
The present invention is applicable in the SECS communication based on SEMI standard, uses the SECS II information format by SEMI standard E5 regulation; Specifically, the present invention is following on the basis of SEMI standard E4, E5, E37, has proposed new label rule, and has introduced other corresponding concept.
As shown in Figure 1, network layer refers to network calculations layer, comprises that data connect, physical network etc.; RS232 agreement or ICP/IP protocol are transport layer, are general network communication means; SECS protocol layer (E4 or E37) is equivalent to dialogue layer, and it can use TCP/IP approach, also can use RS232 approach, sends the relevant information of SEMI standard E5.Wherein SEMI standard E4 has described the session rules while using RS232 approach, and SEMI standard E37 has described the session rules while using TCP/IP approach.Upper layer application refers to the long-range control host machine (Host) that produces on line or the SECS/GEM system of equipment end, is logical process and the reaction level of SECS information.Application structure is as Fig. 5, equipment in Fig. 5 can be the integrated equipment of any needs, between equipment and long-range control host machine, use SECS communication, long-range control host machine (Host) and manufacturing execution system (MES system) or other produce between line software systems (as SAP etc.) and do not use SECS communication, but use out of Memory software engineering, as RPC, CORBA etc.
An embodiment is described below implementation process of the present invention is described, general equipment will be used up to a hundred SECS information models, and a complete SECS information model file is all larger; The present embodiment is that equipment end sends SECS information S1F13 to host side, and wait receives the SECS return information S1F14 sending from host side, complete a sending and receiving circulation, these two information models are also that all devices must comprise, according to SEMI standard E5, the implication of S1F13 can have multiple use, can inquire that whether online the other side is with it, application layer also can judge that whether the other side is in running order etc. with it, the SECS communication of host side generally adopts aggressive mode, and equipment end generally adopts Passive Mode.
As equipment end, must there is the function whether inquiry host side is in duty, this function generally completes with S1F13 and S1F14, and according to the general format of SEMI standard E5, the information model of definition S1F13 and S1F14 is as follows:
S1F13= s1f13v1the information that one of OUTPUT W # statement is set out, must be replied
<L [0]>. this information of # does not comprise any list and data item
S1F14= s1f14v1iNPUT # declares an information of coming in, and information labels is s1f14v1
This packets of information of < L [2] # has contained the list of 2 elements
<B [1]>=v1 # this be a Binary variable data item, label is called v1
The list of #2 element of < L [2], embeds the inferior list of last layer
<A [8]>=v2 # this be a string variable data item, label is called v2
<A [8] ' ASM V1.0 '># this be a character string constant data item, there is no tag name
> the embedded end of list (EOL) of #
>. # end of list (EOL), information definition finishes
Here defined two SECS information model S1F13 and S1F14, tag name is respectively s1f13v1with s1f14v1.The return information template that wherein S1F14 is S1F13, according to the definition of SEMI standard E5, S1F13 information can be used for inquiring that whether the other side is working properly, so must obtain return information, its return information must be S1F14; In return information, if the value of the variable data item of label v1 by name is 0, representing working properlyly, can carry out next step order, if not 0, is other shaping value, represents that the other side is in error condition, or other situation; The data item of label v2 by name is the version number of the other side's software, and the data item below it is constant, represents the other side's style number;
2.according to above-mentioned definition, set up respectively label by name s1f13v1with s1f14v1information model is expressed, and tag name s1f13v1corresponding information model with it, s1f14v1corresponding information model leaves in dictionary with it; The list that each SECS information model has comprised it and the expression of data item, if data item is variable data item, must be with the label of this data item, the resulting dictionary that contains information model expression is the information model set of equipment end; In setting up information model expression process, form information labels and variable data item label according to the present invention;
3.set up SECS communication link, as shown in Figure 2.First in equipment end (being Partner), set up server type network socket, then in host side (drive end), set up the socket of client's type network; If there have one end socket to set up to be unsuccessful, exit this step; (HSMS mode is T6 in host side, to start connection request interval timer, RS232 mode is T2), then (HSMS mode is SELECT.req to equipment end, to send SECS connection request data message, RS232 mode is ENQ, by E37 and E4, defined respectively), judge that whether interval timer is overtime, if overtime, just would exit; If do not have overtime, judge whether to receive and permitted attachable data message (HSMS mode is SELECT.res, RS232 mode is EOT, by E37 and E4, defined respectively), if expression successful connection, thereby the connection status of entering, is not permitted attachable data message if received, just enter, judge that whether interval timer is overtime and receive the circulation of being permitted attachable data message; At the SECS connection request data message that receives host side, (HSMS mode is SELECT.req to equipment end, RS232 mode is ENQ, by E37 and E4, defined respectively) after, judge whether to be in connection status, if so, just refusal reply, if be not in connection status, to host side, send license link information SELECTres or EOT, and enter connection status;
4.after entering connection status, both sides just can sending and receiving SECS information.Equipment end upper-layer functionality produces data event (with reference to figure 3), and this data event is with information labels s1f13v1, classification integer is 1, function integer is 13, there is no variable data item; SECS information model in this data event and dictionary is compared one by one, if inconsistent, finish and report error message; Matching ratio compared with time, first match information label, then check that Stream Number(is referring to SEMI standard E5) and Function Number(referring to SEMI standard E5), and then coupling variable data item and their label, if do not have one not etc., just select next template, if just do not find template to refuse send or make mistakes; Information labels in the present embodiment and information model dictionary is by name s1f13v1information model match, there is no variable data item, according to international SEMI standard E4 or E37, the information model with concrete data matching is converted to byte arrays, and add that after SECS information header byte arrays and length byte array, the connection by having set up, sends to main frame;
5.host side is from network receives byte arrays, need to be according to international SEMI standard E4 or E37, byte arrays is reduced into a SECS information, SECS information after reduction is mated with the SECS information model of host side, then just can know the purpose of this SECS information, host side rigidly connects in the SECS information received and host side SECS information model s1f13v1match ,after coupling, form corresponding data event, this data event, give relevant function processor and process, specifically mate and form the process of data event and equipment end and receive similar (seeing the description of the present embodiment step 7) after SECS information;
6.host function processing module is receiving s1f13v1data event after, form information labels and be s1f14v1data event, send S1F14 to the other side, its process is identical with equipment end; Reduction process after the byte arrays that equipment end receives S1F14 is described below;
7.equipment end receives byte arrays from network, with reference to figure 6, according to international SEMI standard E4 or E37, byte arrays is reduced into a SECS information, SECS information after reduction is mated with the SECS information model of equipment end: this SECS message and the SECS information model in step 2 dictionary are matched one by one, if also do not find coupling after all templates in dictionary are finished, according to SEMI SECS standard E37 (TCP/IP approach) or E4 (RS232 approach) refusal; During coupling first relatively Stream Number(referring to SEMI standard E5) and Function Number(referring to SEMI standard E5) whether be respectively 1 and 14, then the template object of deleting after choosing is carried out to profound coupling, comprise all lists and data item, in general, if there is variable data item in template, each variable data item need to carry out detailed comparison one by one so, such as data type, data length etc.; First the present embodiment mates outermost list and whether has just in time 2 elements, if so, then these 2 elements is mated respectively, and first is Binary variable data item, mates its type and length; Second is nested list, first element of nested list is that length is 8 string variable data item, need to compare type and length, second element of nested list is that length is 8 character string constant amount data item, not only need comparing data type and length, also need to compare their concrete numerical value; Information labels in the present embodiment and equipment end SECS information model dictionary is s1f14v1template match, record corresponding information labels name s1f14v1, and receive variable data item in S1F14 respectively with their tag name v1with v2be mapped, then these data and their tag name, and information labels name s1f14v1form a data event, give upper-layer functionality application interface and process;
8.break link.In general, once after SECS communication connects above, without break link, production is year after year, moves in circles; If need break link, first judge whether network socket is receiving or sending in data procedures, just if wait for; If not, under the mode of RS232, directly disconnect socket; Under the mode of HSMS, first send Separate.req(and defined by E37), then disconnect socket; Disconnect socket and reclaim related network resource.
Above embodiment has comprised two SECS message formats, and in general, a SML file need to comprise 100 above SECS source template definition, but SECS communication process is just the same.

Claims (5)

1. the communication means based on label in the Long-distance Control of a semiconductor equipment, it is characterized in that, first set up the set of SECS information model, then the SECS of apparatus for establishing end and host side is connected, then carries out the SECS information sending and receiving between equipment end and host side.
2. the communication means based on label in the Long-distance Control of semiconductor equipment according to claim 1, it is characterized in that, the set of described SECS information model comprises equipment end SECS information model set and the set of host side SECS information model, the set of equipment end SECS information model comprises a plurality of equipment end SECS information models, equipment end SECS information model is respectively each production functional configuration, the set of host side SECS information model comprises the set of a plurality of host side SECS information model, and equipment end SECS information model and host side SECS information model adopt following methods to obtain:
SECS information model comprises: the SECS information format in the corresponding international SEMI standard E5 of this production function, and this information format all labels that must have, described all labels that must have comprise an information labels and all variable data item labels that must have, described all variable data item labels that must have refer to all variable data item labels that this SECS information format has, and each variable data item must be endowed a variable data item label; Information labels is compared and must be had uniqueness with out of Memory label in the set of SECS information model, the method that realizes information labels uniqueness is as follows: the function integer of the classification integer of English alphabet s, SECS information format, English alphabet f, SECS information format, English alphabet v, Integer n, form in order information labels, described Integer n refers to the order of current SECS information format in the set of SECS information model, if first, Integer n equals 1, if second, Integer n equals 2, by that analogy;
All variable data item labels must be unique within the scope of current SECS information model, the method that realizes variable data item label uniqueness is as follows: English alphabet v, integer m composition variable data item label in order, described integer m refers to the order of current variable data item in current SECS information format, if first variable data item, integer m equals 1, if second variable data item, integer m equals 2, by that analogy.
3. the communication means based on label in the Long-distance Control of semiconductor equipment according to claim 1, is characterized in that, the SECS establishment of connection method of equipment end and host side is as follows:
In equipment end, set up the socket of server type network layer, and start to listen to, unsuccessful if socket is set up, exit current step; In host side, set up the socket of client's type network, if it is unsuccessful that socket is set up, exit current step, host side starts connection request interval timer, and (HSMS mode is T6, RS232 mode is T2), (HSMS mode is SELECT.req to equipment end, to send SECS connection request data message, RS232 mode is ENQ, by E37 and E4, defined respectively), if host side is received in interval timer, equipment end permitted attachable data message (HSMS mode is SELECT.res, RS232 mode is EOT, is defined respectively by E37 and E4), successful connection; Other situation is connection failure; Equipment end is if in connection status, and just refusal is replied.
4. the communication means based on label in the Long-distance Control of semiconductor equipment according to claim 3, is characterized in that, the SECS information between equipment end and host side sends and comprises the following steps:
Step 4.1: equipment produces the data event about production function, described data event comprises data and label, described data comprise this production function classification integer Stream Number, function integer Function Number in corresponding SECS information model, the data of all variable data items, described label comprise this production function information labels in corresponding SECS information model, and all variable data item labels in this corresponding SECS information model of production function institute;
Step 4.2: selected equipment end SECS information model one by one from the set of equipment end SECS information model, and by the information labels on selected device end SECS information model, classification integer Stream Number, function integer Function Number, the data type of variable data item and length, variable data item label respectively with described data event in information labels, classification integer Stream Number, function integer Function Number, the data type of variable data item and length, variable data item label compares, if there is the information labels on selected device end SECS information model, classification integer Stream Number, function integer Function Number, the data type of variable data item and length, variable data item label respectively with described data event in information labels, classification integer Stream Number, function integer Function Number, the data type of variable data item and length, variable data item label is completely equal, the data of variable data item in data event are assigned to the variable data item with identical variable data item label on selected device end SECS information model, remove all labels in the equipment end SECS information model after assignment, and the equipment end SECS information that the SECS information of removing after label is sent as needs, otherwise, abandon the transmission of current data event,
Step 4.3: according to international SEMI standard E4 or E37, the equipment end SECS information that the needs that described step 4.2 is generated send is converted to byte arrays, and adds after SECS information header byte arrays and length byte array, sends to main frame.
5. the communication means based on label in the Long-distance Control of semiconductor equipment according to claim 4, is characterized in that, between described equipment end and host side, SECS information receives and comprises the following steps:
Step 5.1: main frame receives the byte arrays that adds SECS information header byte arrays and length byte array, according to international SEMI standard E4 or E37, is reduced into a concrete SECS information byte arrays;
Step 5.2: from the set of host side SECS information model, choose one by one host side SECS information model, and by the classification integer Stream Number on selected host side SECS information model, function integer Function Number, direction byte, W byte, list and variable data item respectively with the classification integer Stream Number of SECS information concrete described in step 5.1, function integer Function Number, direction byte, W byte, list and variable data item compare, whether the number that more only compares list institute containing element of list equates,, if there is the classification integer Stream Number on selected host side SECS information model in type and the length of the more only comparing data of variable data item, function integer Function Number, direction byte, W byte, list and variable data item respectively with the classification integer Stream Number of SECS information concrete described in step 5.1, function integer Function Number, direction byte, W byte, list and variable data item are completely equal, the matching template using selected concrete SECS information model as SECS information concrete described in step 5.1, and enter step 5.3, otherwise, depending on SECS information described in step 5.1, be that impenetrable information is abandoned,
Step 5.3: will from SECS information described in step 5.1, obtain classification integer Stream Number), the value of function integer Function Number, variable data item with from host side SECS information model described in step 5.2, obtain information labels and variable data item label, form a data event.
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105491144A (en) * 2015-12-16 2016-04-13 新奥光伏能源有限公司 Solar battery production line and remote control method and system thereof
CN108469809A (en) * 2018-03-30 2018-08-31 南京理工大学 Plc data acquisition, processing and method for uploading based on embedded computer
CN110290194A (en) * 2019-06-20 2019-09-27 苏州工业园区恒越自动化科技有限公司 A kind of SECS communication means based on SEMI standard
CN113821005A (en) * 2021-09-26 2021-12-21 北京北方华创微电子装备有限公司 Data acquisition system and method for semiconductor process equipment

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6826439B1 (en) * 2000-05-23 2004-11-30 Advanced Micro Devices, Inc. Broadband distribution of SECS-II data
TW200521730A (en) * 2003-12-31 2005-07-01 Lumax Internat Corp Ltd Method and device for converting SECS-II data into XML data in semiconductor equipment
US20080154421A1 (en) * 2006-12-25 2008-06-26 Industrial Technology Research Institute Real-time fault detection and classification system in use with a semiconductor fabrication process
CN101552794A (en) * 2008-04-03 2009-10-07 沈阳中科博微自动化技术有限公司 SECS communicating method based on SEMI standard
US20120124066A1 (en) * 2010-11-16 2012-05-17 Industrial Technology Research Institute Secs communication device and secs communication method thereof

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6826439B1 (en) * 2000-05-23 2004-11-30 Advanced Micro Devices, Inc. Broadband distribution of SECS-II data
TW200521730A (en) * 2003-12-31 2005-07-01 Lumax Internat Corp Ltd Method and device for converting SECS-II data into XML data in semiconductor equipment
US20080154421A1 (en) * 2006-12-25 2008-06-26 Industrial Technology Research Institute Real-time fault detection and classification system in use with a semiconductor fabrication process
CN101552794A (en) * 2008-04-03 2009-10-07 沈阳中科博微自动化技术有限公司 SECS communicating method based on SEMI standard
US20120124066A1 (en) * 2010-11-16 2012-05-17 Industrial Technology Research Institute Secs communication device and secs communication method thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105491144A (en) * 2015-12-16 2016-04-13 新奥光伏能源有限公司 Solar battery production line and remote control method and system thereof
CN108469809A (en) * 2018-03-30 2018-08-31 南京理工大学 Plc data acquisition, processing and method for uploading based on embedded computer
CN110290194A (en) * 2019-06-20 2019-09-27 苏州工业园区恒越自动化科技有限公司 A kind of SECS communication means based on SEMI standard
CN113821005A (en) * 2021-09-26 2021-12-21 北京北方华创微电子装备有限公司 Data acquisition system and method for semiconductor process equipment

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