CN103234468A - Surface plasma resonance (SPR) phase measuring device for measuring thickness of nanometer metal film - Google Patents
Surface plasma resonance (SPR) phase measuring device for measuring thickness of nanometer metal film Download PDFInfo
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- CN103234468A CN103234468A CN2013101378906A CN201310137890A CN103234468A CN 103234468 A CN103234468 A CN 103234468A CN 2013101378906 A CN2013101378906 A CN 2013101378906A CN 201310137890 A CN201310137890 A CN 201310137890A CN 103234468 A CN103234468 A CN 103234468A
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Abstract
The invention relates to a surface plasma resonance (SPR) phase measuring device for measuring the thickness of a nanometer metal film. The SPR phase measuring device comprises a laser, a collimation lens, a first polarizer, a prism-type SPR sensor, a plane reflector, an interference system, a second polarizer, a couple charged device (CCD) camera and a computer 10, wherein the laser, the collimation lens and the first polarizer stay on the same optical axis, and the second polarizer and the CCD camera are placed on the same optical axis; the laser emitted by the laser enters the prism-type SPR sensor after passing through the collimation lens and the first polarizer, after being reflected through the plane reflector to the interference system, the reflection light passes through the second polarizer, an interference image is received by the CCD camera, and then the obtained interference image is recorded by the computer. The SPR phase measuring device has the beneficial effects that the structure is simple, convenience in operation can be realized, the error caused by a light path is inhibited by adopting a laser interference-based SPR phase modulation method and adopting the same light path to measure a coating area and a non-coating area of the prism-type SPR sensor in the measuring process, and high measurement precision can be realized.
Description
Technical field
The present invention relates to a kind of measurement mechanism of thickness of metal film, particularly relate to a kind of for the SPR phase measurement device of measuring the nano level metal film thickness.
Background technology
The method of detection film thickness commonly used mainly contains at present: interferometry, high-accuracy microscope mensuration, elliptic polarization method, probe measurement method, electric capacity micrometry, X-ray diffraction method etc.The main method of measuring the nano level metal film thickness then mainly is high-accuracy microscope mensuration and probe measurement method etc.Wherein, high-accuracy microscope mensuration mainly is to utilize scanning tunnel microscope (STM) and atomic force microscope (AFM) by measuring film base station rank height or blocking film sample and measure the thickness that the method for transversal section is determined metallic film; The probe measurement rule is to utilize the step instrument that the metallic film sample surfaces is carried out contact scanning, thereby obtains the thickness of the definite metallic film of elevation information on film base station rank thus.But high-accuracy microscopic structure complexity, expensive, not easy to operate, the contact type measurement of step instrument can cause damage to film sample, has destroyed the integrality of sample.
Summary of the invention
Technical matters to be solved by this invention is, provide a kind of simple in structure, be convenient to operate and the device of the non-contact measurement nano level metal film thickness that measuring accuracy is higher.
The technical solution adopted in the present invention is: a kind of for the SPR phase measurement device of measuring the nano level metal film thickness, comprise the laser instrument, collimation lens and first polaroid that are positioned on the same optical axis, the prism-type spr sensor, plane mirror, interference system, be positioned over second polaroid and CCD camera lens on the same optical axis, computing machine 10; Incide described prism-type spr sensor behind the laser described collimation lens of process that described laser instrument sends and described first polaroid, reflected light is after described plane mirror reflexes to described interference system, receive interference image through described second polaroid by described CCD camera lens, again the interference image that is obtained by described computer recording.
In addition, described prism-type spr sensor is selected right angle prism for use, is provided with metal coating district and non-plated film district at described right angle prism hypotenuse face, forms film base station rank.
In addition, the material of described right angle prism is BK7 glass.
In addition, have on the corner platform of XYZ D translation guide rail bottom described prism-type spr sensor is arranged on.
In addition, described laser instrument employing output wavelength is the helium-neon laser of 632.8nm.
In addition, metallic film is gold, silver, aluminium or platinum.
The invention has the beneficial effects as follows: apparatus structure is simple, be convenient to operation, employing is based on the SPR phase modulating method of laser interference, and in measuring process, adopt same light path that coating film area and the non-coating film area of prism-type spr sensor are measured, suppress the error by the light path introducing, therefore possessed higher measuring accuracy.
Description of drawings
Fig. 1 is of the present invention for the SPR phase measurement device synoptic diagram of measuring the nano level metal film thickness,
Fig. 2 is that prism-type spr sensor of the present invention is placed on the synoptic diagram on the corner platform,
Fig. 3 is that corner platform of the present invention is fixed on the synoptic diagram on the XYZ D translation guide rail.
Embodiment
Below in conjunction with the drawings and specific embodiments the present invention is described in further detail:
(Surface Plasmon Resonance, SPR) effect is a kind of special physical optics phenomenon to surface plasma body resonant vibration.The evanescent wave that utilizes light wave when medium and metallic interface generation total reflection, to produce, can cause the collective oscillation of metal surface free electron, thereby form surface plasma wave (Surface Plasmon Wave, SPW), its magnetic vector direction is parallel to the interface of medium and metal, magnetic field intensity reaches maximal value at the interface place and present exponential decay trend in two media, when the incident light wave vector equals the surface plasma wave wave vector, can excite the SPR effect.At present, mainly concentrate on chemistry and life science aspect based on the prism-type of SPR technology foundation and the application of optical-fiber type spr sensor, topmost purposes is to measure the solution refractive index, can also further measure structure, characteristic and the interaction thereof etc. of some materials.In the application that utilizes prism-type spr sensor measurement solution refractive index, find, the thickness of spr sensor institute metal-coated films has a direct impact catoptrical reflectivity and phase place variation, inspired by this, the present invention is based on detection system and the device of SPR phase modulating method, in order to measure the thickness of metallic film, provide a kind of new approach as measuring the nano level metal film thickness.
As shown in Figure 1, the present invention is used for measuring the SPR phase measurement device of nano level metal film thickness, comprises laser instrument 1, collimation lens 2, first polaroid 3, XYZ D translation guide rail and corner platform 4, corner platform 4 is provided with clamper, and prism-type spr sensor 5 is clamped on the clamper of corner platform 4, plane mirror 6, interference system 7, the second polaroids 8, CCD camera lens 9 and computing machine 10.Laser instrument 1, collimation lens 2, the first polaroids 3 are positioned over successively on the same optical axis and form light source portion; Interference system 7 is by two polarization spectroscopes 701,704 and two plane mirrors 702,703 form, polarization spectroscope 701,704 and plane mirror 702, four reflecting surface centers of 703 lay respectively on four angles of a rectangle, four parallel placements of reflecting surface and and square boundary be 45 ° of angles, light incides in the interference system, be divided into TM polarized wave and TE polarized wave through polarization spectroscope 701, wherein the TM polarized wave goes out through polarization spectroscope 701 transmissions, the TE polarized wave through polarization spectroscope 701 with 90 ° of reflections, the two passes through plane mirror 702 more respectively, converge at polarization spectroscope 704 places 703 reflection backs, wherein the TM polarized wave goes out through polarization spectroscope 704 transmissions, with 90 ° of reflections, the linearly polarized wave of two quadratures pools Ray Of Light to the TE polarized wave again through polarization spectroscope 704; Second polaroid 8 and CCD camera lens 9 are positioned on the same optical axis, receive interference image by CCD camera lens 9, again the interference image that is obtained by computer system 10 records.
As shown in Figure 2, prism-type spr sensor 5 is formed by right-angle triangle prism 501 with at prism hypotenuse bottom surface institute metal-coated films 502, here 502 of metallic films are plated in half zone of hypotenuse face, and second half zone is non-plated film district 503, forms film base station rank thus.
As shown in Figure 3, prism-type spr sensor 5 usefulness clampers are fixed on the corner platform 4 of the XYZ D translation guide rail 401 that assembles, and can realize the movement of four degree of freedom.
The laser instrument that adopts among the present invention is that output wavelength is the helium-neon laser of 632.8nm, and the prism material is BK7 glass, and metallic film adopts golden film.
The metal types that the present invention measures comprises gold, silver, aluminium, platinum etc., and the thickness that can measure is no more than 100nm, is preferably 30-80nm, and measuring accuracy can reach 0.1nm.
Measuring process is as follows: the laser that is sent by laser instrument 1 incides the coating film area of the prism-type spr sensor 5 hypotenuse faces that are placed on XYZ D translation guide rail and the corner platform 4 after through collimation lens 2 and first polaroid 3, adjusting XYZ D translation guide rail and corner platform makes incident light incide on prism 501 and metallic film 502 interfaces with SPR effect resonance angle, reflected light is through plane mirror 6 orientations, incide in the interference system 7, polarization spectroscope 701 is divided into TM polarized wave and TE polarized wave with reflected light earlier, then respectively along the aplanatism propagated, through plane mirror 702, converge at polarization spectroscope 704 places 703 reflection backs, make TM polarized wave and TE polarized wave produce interference effect through second polaroid 8 then, receive interference image by CCD camera lens 9, again the interference image that is obtained by computer system 10 records.Behind the record coating film area image, adjust the Z traversing guide in XYZ D translation guide rail and the corner platform 4, make incident light incide the non-coating film area of prism-type spr sensor 5 hypotenuse faces, observe the skew of interference image striped, and by the new interference image of computer system 10 records.By contrasting the information in two width of cloth interference images, can calculate the amount of space of adjacent interference fringe in the side-play amount of interference fringe in two width of cloth interference images and the interference image, information can finally be tried to achieve the information of thickness of metal film thus.
It is worthy of note; protection scope of the present invention is not limited to above-mentioned instantiation mode, according to basic fundamental design of the present invention, as long as those of ordinary skills need not through creative work; the embodiment that can associate all belongs to protection scope of the present invention.
Claims (6)
1. SPR phase measurement device of be used for measuring the nano level metal film thickness, it is characterized in that: comprise the laser instrument (1), collimation lens (2) and first polaroid (3) that are positioned on the same optical axis, prism-type spr sensor (5), plane mirror (6), interference system (7), be positioned over second polaroid (8) and CCD camera lens (9) on the same optical axis, computing machine (10); Incide described prism-type spr sensor (5) behind the laser process described collimation lens (2) that described laser instrument (1) sends and described first polaroid (3), reflected light is after described plane mirror (6) reflexes to described interference system (7), receive interference image through described second polaroid (8) by described CCD camera lens (9), again the interference image that is obtained by described computing machine (10) record.
2. according to claim 1 for the SPR phase measurement device of measuring the nano level metal film thickness, it is characterized in that: described prism-type spr sensor (5) is selected right angle prism (501) for use, be provided with metal coating (502) and non-plated film district (503) at described right angle prism hypotenuse face, form film base station rank.
3. according to claim 2 for the SPR phase measurement device of measuring the nano level metal film thickness, it is characterized in that: the material of described right angle prism (501) is BK7 glass.
4. according to claim 1 and 2 for the SPR phase measurement device of measuring the nano level metal film thickness, it is characterized in that: described prism-type spr sensor (5) is arranged on the bottom and has on the corner platform (4) of XYZ D translation guide rail (401).
5. according to claim 1 for the SPR phase measurement device of measuring the nano level metal film thickness, it is characterized in that: it is the helium-neon laser of 632.8nm that described laser instrument (1) adopts output wavelength.
6. according to claim 1 for the SPR phase measurement device of measuring the nano level metal film thickness, it is characterized in that: metallic film is gold, silver, aluminium or platinum.
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104748691A (en) * | 2015-03-05 | 2015-07-01 | 江苏大学 | Measurement device and method for film thickness |
| CN105333838A (en) * | 2015-12-15 | 2016-02-17 | 宁波频泰光电科技有限公司 | Color three-dimensional (3D) measuring system |
| CN105705935A (en) * | 2013-10-30 | 2016-06-22 | 康宁股份有限公司 | Apparatus and methods for measuring mode spectra for ion-exchanged glasses having steep index region |
| CN106091953A (en) * | 2016-07-19 | 2016-11-09 | 天津大学 | A kind of SPR phase measuring method for measuring nanoscale double-layer metal film thickness |
| CN106338497A (en) * | 2016-09-13 | 2017-01-18 | 南京大学 | Surface plasma resonance microimaging device and method |
| CN107218896A (en) * | 2017-07-26 | 2017-09-29 | 大连理工大学 | The method for measuring vacuum ion plating and plasma spray coating plated film thickness and uniformity |
| CN108120381A (en) * | 2016-11-28 | 2018-06-05 | 天津大学 | For the differential type SPR phase detection device of nano level metal measured film thickness |
| CN108120382A (en) * | 2016-11-28 | 2018-06-05 | 天津大学 | For measuring the SPR differential phae measuring methods of nano level metal film thickness |
| CN108827166A (en) * | 2018-06-01 | 2018-11-16 | 天津大学 | SPR phase measures thickness of metal film and optical constant SAPSO method |
| CN108844474A (en) * | 2018-06-01 | 2018-11-20 | 天津大学 | The IAGA method of SPR phase measurement thickness of metal film and optical constant |
| US11384011B2 (en) | 2014-07-17 | 2022-07-12 | Corning Incorporated | Glass sheet and system and method for making glass sheet |
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Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105705935A (en) * | 2013-10-30 | 2016-06-22 | 康宁股份有限公司 | Apparatus and methods for measuring mode spectra for ion-exchanged glasses having steep index region |
| US11079280B2 (en) | 2013-10-30 | 2021-08-03 | Corning Incorporated | Apparatus and methods for measuring mode spectra for ion-exchanged glasses having steep index region |
| CN105705935B (en) * | 2013-10-30 | 2019-03-19 | 康宁股份有限公司 | Measure the device and method with precipitous refractive index area chemcor glass mode spectrum |
| US11384011B2 (en) | 2014-07-17 | 2022-07-12 | Corning Incorporated | Glass sheet and system and method for making glass sheet |
| CN104748691A (en) * | 2015-03-05 | 2015-07-01 | 江苏大学 | Measurement device and method for film thickness |
| CN104748691B (en) * | 2015-03-05 | 2017-09-05 | 江苏大学 | The measurement apparatus and method of film thickness |
| CN105333838A (en) * | 2015-12-15 | 2016-02-17 | 宁波频泰光电科技有限公司 | Color three-dimensional (3D) measuring system |
| CN105333838B (en) * | 2015-12-15 | 2018-07-17 | 宁波频泰光电科技有限公司 | A kind of colour 3D measuring systems |
| CN106091953B (en) * | 2016-07-19 | 2018-12-21 | 天津大学 | For measuring the SPR phase measurement method of nanoscale double-layer metal film thickness |
| CN106091953A (en) * | 2016-07-19 | 2016-11-09 | 天津大学 | A kind of SPR phase measuring method for measuring nanoscale double-layer metal film thickness |
| CN106338497A (en) * | 2016-09-13 | 2017-01-18 | 南京大学 | Surface plasma resonance microimaging device and method |
| CN108120382A (en) * | 2016-11-28 | 2018-06-05 | 天津大学 | For measuring the SPR differential phae measuring methods of nano level metal film thickness |
| CN108120382B (en) * | 2016-11-28 | 2020-07-31 | 天津大学 | SPR differential phase measurement method for measuring thickness of nano-scale metal film |
| CN108120381B (en) * | 2016-11-28 | 2021-05-21 | 天津大学 | Differential SPR phase detection device for measuring thickness of nano-scale metal film |
| CN108120381A (en) * | 2016-11-28 | 2018-06-05 | 天津大学 | For the differential type SPR phase detection device of nano level metal measured film thickness |
| CN107218896A (en) * | 2017-07-26 | 2017-09-29 | 大连理工大学 | The method for measuring vacuum ion plating and plasma spray coating plated film thickness and uniformity |
| CN108844474A (en) * | 2018-06-01 | 2018-11-20 | 天津大学 | The IAGA method of SPR phase measurement thickness of metal film and optical constant |
| CN108827166A (en) * | 2018-06-01 | 2018-11-16 | 天津大学 | SPR phase measures thickness of metal film and optical constant SAPSO method |
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Application publication date: 20130807 |