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Publication numberCN102339078 A
Publication typeApplication
Application numberCN 201110196172
Publication date1 Feb 2012
Filing date28 Feb 2007
Priority date1 Mar 2006
Also published asEP1991347A2, EP1991347A4, US7494265, US7946751, US20070206436, US20090116334, US20110194373, WO2007103184A2, WO2007103184A3
Publication number201110196172.7, CN 102339078 A, CN 102339078A, CN 201110196172, CN-A-102339078, CN102339078 A, CN102339078A, CN201110196172, CN201110196172.7
InventorsJE斯密斯, JK尼尔梅耶尔, RF迈克罗格林
Applicant恩特格里公司
Export CitationBiBTeX, EndNote, RefMan
External Links: SIPO, Espacenet
System and method for controlled mixing of fluids and multiplexing setpoints
CN 102339078 A
Abstract
The invention relates to a system and a method for controlling mixing of fluids and multipexing setpoints. Embodiments of the present invention provide a system and method for continuous flow production of mixed fluids. The mixed fluids can comprise a mixture of different fluids or a mixture of the same fluid having different input properties such as temperature. Additionally, embodiments of the present invention provide a system and method for multiplexing analog setpoints.
Claims(23)  translated from Chinese
1. 一种对模拟设定点进行复用的方法,包括:向多个目标装置传送模拟信号,其中,所述模拟信号表示多个设定点; 传送与所述模拟信号分离的第一设定点指示器以向第一目标装置指示所述第一目标装置的第一设定点正由所述模拟信号表示;响应于所述第一设定点指示器在所述第一目标装置处保存由所述模拟信号断定的第一设定点值。 Transmitting a first set of said analog signal separated; transmit analog signals to a plurality of target devices, wherein, said analog signal representing a plurality of set points: 1. An analog set point multiplexing, comprising pointing to a first set point indicator means indicates that the first target to the first target device being represented by the analog signal; a first set point in response to the indicator at the first target device save the first set point value from the analog signal assertive.
2.如权利要求1所述的方法,还包括:接下来向第二目标装置传送第二设定点指示器以向所述第二目标装置指示第二设定点正由所述模拟信号表示;以及响应于所述第二设定点指示器在所述第二目标装置处保存由所述模拟信号断定的第二设定点值。 2. The method of claim 1, further comprising: transmitting to a next second target means to the second set point to the second target indicator means indicates that the second set point is represented by the analog signal ; and in response to the second set point indicator is stored in said second target means at a second set point value determined by the said analog signal.
3.如权利要求1所述的方法,其中,所述第一设定点表示温度设定点。 3. The method of claim 1, wherein the first set-point is a temperature set point.
4.如权利要求3所述的方法,其中,所述第二设定点表示目标流速。 4. The method of claim 3, wherein said second set point represents the target velocity.
5.如权利要求1所述的方法,还包括在数字信号总线上传送所述设定点指示器。 5. The method of claim 1, further comprising transmitting the set point indicator on the digital signal bus.
6.如权利要求1所述的方法,其中,所述模拟信号和设定点指示器由同一控制器进行传送。 6. The method according to claim, wherein said analog signal and the set point indicator is transmitted by the same controller.
7. 一种对模拟设定点进行复用的系统,包括: 主控制器;连接到所述主控制器的多个从控制器;模拟通信链路,用于将所述多个从控制器与所述主控制器进行连接;以及一个或多个数字通信链路,用于将所述多个从控制器与所述主控制器进行连接; 其中,所述主控制器可操作以:在所述模拟通信链路上传送表示多个模拟设定点的模拟信号,其中,所述多个设定点在时间上复用到所述模拟信号中;在第一时间段内,在所述数字通信链路中的至少一个上向第一从控制器传送第一设定点指示器;以及在第二时间段内,在所述数字通信链路中的至少一个上向第二从控制器传送第二设定点指不器;其中,在所述第一时间段内,所述模拟信号表示第一设定点,在所述第二时间段内,所述模拟信号表示第二设定点。 An analog set point multiplexing system, comprising: a main controller; a plurality of connection to the main controller from the controller; analog communications links, for said plurality of slave controllers be connected to the main controller; and one or more digital communication links, for said plurality of connecting from the controller to the main controller; wherein said main controller is operable to: in said plurality of analog set point transfer represents an analog signal, wherein said plurality of set point in time multiplexed to the analog signal on the analog communication links; in the first period of time, in the at least one of the first slave controller transmits a first set point indicator on a digital communication link; and a second time period, said digital communication link to at least one of the second slave controller transmitting the second set point means not; wherein, in the first period of time, said analog signal representing a first set point, in the second period of time, said analog signal representing the second set points.
8.如权利要求7所述的系统,其中,所述第一从控制器是第一流量控制器,并且所述第一设定点表示温度设定点。 8. The system of claim 7, wherein, the first slave controller is a first flow controller, and the first set point indicates the temperature set point.
9.如权利要求8所述的系统,其中,所述第二从控制器是第二流量控制器,并且所述第二设定点表示目标流速。 9. The system of claim 8, wherein said second controller is from the second flow controller, and the second set point represents the target velocity.
10.如权利要求7所述的系统,其中,传送所述第一设定点指示器包括改变在所述一个或多个数字通信链路中的至少第一个上的状态,并且其中,传送所述第二设定点指示器包括改变在所述一个或多个通信链路中的至少第二个上的状态。 10. The system of claim 7, wherein transmitting the first set-point indicator comprises changing at least one of said first state on or more digital communications link, and wherein the transmission the second set point indicator comprises changing the state of at least a second one of said one or more communications links.
11. 一种对模拟设定点进行复用的方法,该方法包括:在与多个目标装置中的每一个耦合的模拟通信链路上向多个目标装置传送模拟信号,其中,该模拟信号表示多个设定点,多个设定点中的每一个用于多个目标装置之一;在数字信号总线上传送与模拟通信链路上的模拟信号分离的第一设定点指示器,以向第一目标装置指示该第一目标装置的温度设定点正由该模拟信号在第一时间表示;响应于该第一设定点指示器在该第一目标装置处保存由该模拟信号断定的第一设定;^^ {自:,接下来在数字信号总线上向第二目标装置传送与模拟通信链路上的模拟信号分离的目标流速设定点指示器,以向所述第二目标装置指示第二设定点正由所述模拟信号在第二时间表示;以及响应于所述第二设定点指示器在所述第二目标装置处保存由所述模拟信号断定的第二设定点值。 11. An analog set point multiplexing method, the method comprising: on a plurality of target devices and analog communication links each coupled to transmit an analog signal to a plurality of target devices, wherein the analog signal represents a plurality of set points, one of a plurality of target devices a plurality of set points for each; first set point indicator on the digital signal and the analog bus an analog signal transmitted on a separate communication link, means for indicating to the first target temperature set point for the first target device is the first time is represented by the analog signal; maintained by the analog signal in response to the first target device is in the first set-point indicator determine a first setting; ^^ {self: next separated in the analog signal to a digital signal bus means for transmitting the second target analog communication links on the target flow rate set point indicator to the first to Two target means indicating the second set at a second time point is represented by the analog signal; and stored by said first analog signal to determine the second target means in response to the second at a set point indicator two set point values.
12.如权利要求11所述的方法,所述设定点指示器包括一个或多个比特。 12. The method of claim 11, wherein the set point indicator comprises one or more bits.
13.如权利要求11所述的方法,其中,所述模拟信号和设定点指示器由同一控制器进行传送。 13. The method of claim 11, wherein said analog signal and the set point indicator is transmitted by the same controller.
14.如权利要求11所述的方法,其中,在所述模拟信号断定所述设定点值的时间段内, 所述设定点指示器传送到所述第一目标装置。 14. A method as recited in claim 11, wherein, in said analog signal to determine the period of time set point value, the set point indicator to said first target means.
15. 一种对模拟设定点进行复用的系统,包括:主控制器;连接到所述主控制器的多个从控制器;模拟通信链路,用于将所述多个从控制器与所述主控制器进行连接;以及与所述模拟通信链路分离的一个或多个数字通信链路,用于将所述多个从控制器与所述主控制器进行连接;其中,所述主控制器可操作以:在所述模拟通信链路上传送表示多个模拟设定点的模拟信号,其中,所述多个设定点在时间上复用到所述模拟信号中,并且多个模拟设定点中的每一个用于多个从控制器之在第一时间段内,在所述数字通信链路中的至少一个上向第一从控制器传送第一设定点指示器,以向第一从控制器指示第一从控制器的模拟温度设定点正在由模拟信号在第一时间段内表示;以及在第二时间段内,在所述数字通信链路中的至少一个上向第二从控制器传送第二设定点指示器,以向第二从控制器指示第二从控制器的模拟流速设定点正在由模拟信号在第二时间段内表示;其中,在所述第一时间段内,所述模拟信号表示模拟温度设定点,在所述第二时间段内,所述模拟信号表示模拟流速设定点。 15. An analog set point multiplexing system, comprising: a main controller; a plurality of connection to the main controller from the controller; analog communications links, for said plurality of slave controllers be connected with the main controller; and with one or more of the digital communication link separate analog communications links, for said plurality of connecting from the controller to the main controller; wherein the said main controller is operable to: transmit the analog communication links on a plurality of analog set point indicates an analog signal, wherein said plurality of set point in time multiplexed into the analog signal, and a plurality of analog set point for each of a plurality of slave controller first period of time, in the digital communication link to at least one of a first transmission from a first set point controller indicator to a first temperature setpoint from an analog controller by analog signals being represented in a first time period to the first indication from the controller; and a second time period, said digital communication link at least one of a second set point to the second transmission indicator from the controller to the second controller instructs the second slave from the analog flow rate set point controller is represented by an analog signal to a second time period; wherein, in the first period of time, said analog signal representing an analog temperature set point, in the second period of time, said analog signal representing the analog flow rate set point.
16.如权利要求15所述的系统,其中,所述第一和第二设定点具有不同的值。 16. The system of claim 15, wherein said first and second set-point has a different value.
17.如权利要求15所述的系统,其中,所述第一从控制器是第一流量控制器。 17. The system of claim 15, wherein, the first slave controller is a first flow controller.
18.如权利要求17所述的系统,其中,所述第二从控制器是第二流量控制器。 18. The system of claim 17, wherein said second controller is from the second flow controller.
19.如权利要求15所述的系统,其中,传送所述第一设定点指示器包括改变在所述一个或多个数字通信链路中的至少第一个上的状态,并且其中,传送所述第二设定点指示器包括改变在所述一个或多个通信链路中的至少第二个上的状态。 19. The system of claim 15, wherein transmitting the first set-point change in the indicator comprises one or at least one of the state of the first plurality of digital communication link, and wherein the transmission the second set point indicator comprises changing the state of at least a second one of said one or more communications links.
20.如权利要求15所述的系统,其中,所述第一从装置被配置成响应于所述第一设定点指示器保存来自所述模拟信号的第一设定点值。 20. The system of claim 15, wherein said first slave device is configured to respond to the first set point indicator stored first set-point value of the analog signal from the.
21.如权利要求20所述的系统,其中,所述第二从装置被配置成响应于所述第二设定点指示器保存来自所述模拟信号的第二设定点值。 21. The system of claim 20, wherein said second slave device is configured to respond to save the second set-point value from the analog signal in the second set point indicator.
22.如权利要求15所述的系统,其中,所述第一设定点指示器包括一个或多个比特。 22. The system of claim 15, wherein the first set-point indicator comprises one or more bits.
23.如权利要求15所述的系统,其中,所述第二设定点指示器包括一个或多个比特。 23. The system of claim 15, wherein the second set point indicator comprises one or more bits.
Description  translated from Chinese

控制流体混合以及复用设定点的系统和方法 Fluid mixing and control system and method for multiplexing the setpoint

[0001] 本申请是申请日为2007年2月观日,申请号为10078001M68. 6的发明专利申请“控制流体混合以及复用设定点的系统和方法”的分案申请。 [0001] This application is a filing date for February 2007 Sunrise Application No. 10078001M68. 6 of the patent application "control fluid mixing and multiplexing system and method set point" of the divisional application.

[0002] 本申请要求由McLoughlin于2006年3月1日提交的题目为“SYSTEM AND METHOD FOR MULTPLEXING SETPOINTS” 的第11/365,395 号美国专利申请和由Niermeyer 等人于2006年3 月22 日提交的题目为“SYSTEM AND METHOD FOR CONTROLLED MIXING OF FLUIDS” 的第11/386,427号美国专利申请的优先权,这两个美国专利申请全部纳入于此,以资参考。 [0002] This application claims the title on March 1, 2006 filed by McLoughlin as "SYSTEM AND METHOD FOR MULTPLEXING SETPOINTS" No. 11 / 365,395 and US patent application by Niermeyer et al. March 22, 2006 topic submitted for priority "SYSTEM AND METHOD FOR CONTROLLED MIXING OF FLUIDS" No. 11 / 386,427 US patent application, which included two US patent applications all this, by reference.

技术领域 FIELD

[0003] 本发明的实施例涉及化学输送系统。 EXAMPLES [0003] The present invention relates to chemical delivery systems. 更具体地讲,本发明的实施例涉及控制流体混合的系统和方法。 More particularly, embodiments of the present invention relates to a system and method for controlling fluid mixing. 本发明的实施例还涉及用于断定设定点的系统和方法。 Embodiments of the present invention also relates to a system and method for determine the set point. 更具体地讲, 本发明的实施例涉及用于断定模拟设定点的系统和方法。 More particularly, embodiments of the present invention relates to a system and method for simulation to determine the set point. 更加具体地讲,本发明的实施例涉及在模拟通信链路上复用多个模拟设定点的系统和方法。 More specifically, embodiments of the present invention relates to a system and method for a communication link to the analog multiplexing a plurality of analog set point.

背景技术 BACKGROUND

[0004] 受控的组合物流体存在于许多广泛使用的流体中,这些广泛使用的流体包括城市供水、饮料、汽油、静脉注射(“IV”)流体和其它有用流体。 [0004] The controlled composition flow is present in many body fluids widely used in the widespread use of these fluids include city water, beverages, gasoline, intravenous ("IV") fluids and other useful fluid. 在一些情况下,受控的组合物流体不是加工过程的最终产品,而是用于其它产品的制造过程中。 In some cases, the final product is not a controlled process in fluid compositions, but for the other product in the manufacturing process. 例如,在对半导体晶片进行清洁和蚀刻时,半导体制造过程普遍地使用受控的组合物流体。 For example, when the semiconductor wafer cleaning and etching, the semiconductor manufacturing process generally using controlled composition flow body. 用于形成受控的组合物流体的系统通常根据取缔的比率组合换言之根据配方将多种组成流体混合。 For the formation of a controlled system is usually a combination of words in fluid formulations according to the variety of the composition according to the banning of fluid mixing ratio combining. 在一些情况下,流体组分的化学计量比率并不重要,重要的是流体混合物的一些性质,诸如PH、粘度、离子强度、导电率或其它性质。 In some cases, the stoichiometric ratio of the fluid component is not critical, it is important that some properties of a fluid mixture, such as PH, viscosity, ionic strength, electrical conductivity or other properties. 然而,除了对优选性质进行控制以外,一般来讲将流体组分共混成对应于实际目标性质的目标浓度是更加容易的。 However, in addition to the preferred control nature, generally speaking the fluid component blended to correspond to the nature of the actual target target concentration is easier. 通常,按照批处理模式生产特定浓度的流体。 Typically, in accordance with a particular concentration in batch mode of production fluids. 在批处理中,利用组分流体的重量比率或体积比率确定应该将多少的每种流体加到混合容器中进行共混。 In a batch, the use of component fluid weight ratio or volume ratio determines how much should be added to each fluid mixing vessel and blended. 尽管利用批处理能够非常容易地控制浓度,但是它会对将混和流体加工成特定规模批量进行限制。 Although the use of a batch can be very easily controlled concentration, but it will be mixed into a specific scale batch processing fluid restrictions. 为了提供额外的共混流体,必须产生出更多批次的流体。 To provide additional fluid blend, the batch must produce more fluid. 另外,当前批处理系统的占地较大、资本费用相对较高、复杂度较高。 In addition, the current batch system covers large capital costs are relatively high, high complexity. 批处理系统的例子包括由Addison,Illinois batch system公司提供的按照体积将重力给料的组分进行混和的ChemFlow Systems 以及由BOC Edwards 公司提供的MassFusion™system。 Examples include batch processing system provided by Addison, Illinois batch system company by volume gravity feed ingredients were blended ChemFlow Systems and MassFusion ™ system supplied by BOC Edwards company.

[0005] 除了批处理以外,还能够利用连续流动系统产生受控的组合物流体,其中,随着流体流到处理室,该连续流动系统将流体混合。 [0005] In addition to the batch, it also possible to use a continuous flow system to produce a controlled composition flow, wherein, as the fluid flow to the processing chamber, the continuous flow system will be mixed fluid. 这些系统能够连续地产生流体。 These systems can be continuously produced fluid. 当前的连续流动系统不能够进行充足控制以补偿不准确度或者改变诸如浓度或温度的组分流体性质。 Current continuous flow system can be controlled not sufficient to compensate for inaccuracies or modifying the composition of the fluid properties such as concentration or temperature.

[0006] 许多控制装置依赖模拟设定点以指示应该将系统控制到的期望状态。 [0006] Many rely on analog setpoint control device to indicate that the system should be controlled to the desired state. 模拟设定点通常是施用到控制器的电压或电流,用于表示测量参数的期望值。 Analog set point is usually applied to the controller of the voltage or current, is used to represent the expected value of the measured parameter. 该电压/电流可以表示温度、电机速度、压力、压差、温差或其它参数的期望值。 The voltage / current can be expressed expectations temperature, motor speed, pressure, differential pressure, temperature, or other parameters. 模拟设定点通常由控制器进行数字化,并且转换成参数的设定点值。 Analog set point typically digitized by the controller, and converted into setpoint values of the parameters. 为了进行控制,可以将设定点值与参数的测量值进行比较。 For control, the setpoint value and the measured value of the parameter is compared. 例如,温度控制器能够接收2. 2伏特的模拟信号,将该信号进行数字化并且将该值转换成20摄氏度。 For example, the temperature controller is capable of receiving an analog signal 2.2 volts, the signal is digitized and converted to the value at 20 degrees Celsius. 然后,控制器能够比较系统中的测量温度值以确定温度是否需要上升或下降到20摄氏度。 Then, the system controller is able to compare the measured temperature values to determine whether the desired temperature up or down to 20 degrees Celsius. 已知包括比例控制方案、比例积分方案、比例积分导数方案和模糊逻辑控制方案的各种控制方案能够用于基于设定点控制过程参数。 Known to include proportional control scheme, proportional integral program, a variety of control schemes proportional-integral-derivative schemes and fuzzy logic control scheme can be used to control the process parameters based on set point.

[0007] 许多现有的控制器仅仅具有一个模拟端口或者具有有限数目的端口,通过这些端口发送或接收设定点信号。 [0007] Many existing analog controller has only one port or having a limited number of ports, through the port to send or receive these setpoint signal. 对于向其它控制器断定模拟设定点的控制器来讲,这会限制它能够控制的装置的数目。 For other controllers to determine the controller analog set point of view, this will limit the number of its ability to control the device. 换言之,特定主控制器能够断定设定点的从控制器的数目限于主控制器上的模拟端口的数目。 In other words, the number is limited to the number of controllers from the analog port of the master controller setpoint controller can determine a specific host. 另外,对于向其断定设定点的每个控制器来讲,需要独立的模拟通信链路。 In addition, for each controller in terms of its determined set point, requires a separate analog communications links.

发明内容 SUMMARY

[0008] 本发明的实施例提供了一种连续混合流体的系统和方法,这种系统和方法能够消除或至少基本减少现有技术流体混合系统和方法的缺陷。 EXAMPLES [0008] The present invention provides a system and method for continuous mixing of the fluid, such systems and methods can be eliminated or at least substantially reduce the disadvantages of the prior art systems and methods of mixing fluids. 更具体地讲,本发明的实施例提供了这样一种系统和方法,这种系统和方法能够迅速进行调整以改变过程参数从而提供期望流速和温度的混合流体。 More particularly, embodiments of the present invention provides such a system and method, which system and method capable of quickly adjusted to vary process parameters so as to provide a desired flow rate and temperature of the mixed fluid.

[0009] 本发明的一个实施例包括一种流体混合系统,该流体混合系统包括:第一流量控制器(例如,冷流体流量控制器),用于控制第一流体的流量;第二流量控制器(例如,热流体流量控制器),用于控制第二流体的流量;第一混合器(例如,静态混合器),在该第一流量控制器和该第二流量控制器的下游并且与它们进行流体连通从而将该第一流体和该第二流体混合以产生第一混合流体;和温度传感器,位于该第一混合器的下游,用于测量该第一混合流体的温度。 [0009] An embodiment of the present invention comprises a fluid mixing system, the fluid mixing system comprising: a first flow controller (e.g., the cold fluid flow controller), for controlling a flow of the first fluid; a second flow control (e.g., thermal fluid flow controller) for controlling the flow of a second fluid; and a first mixer (e.g., static mixer), downstream of the first flow rate controller and the second flow controller, and with so that they are in fluid communication with the mixing of the first fluid and the second fluid to produce a first mixed fluid; and a temperature sensor, located downstream of the first mixer, for measuring the temperature of the first mixed fluid. 该第一流量控制器构造为利用第一流体的期望流速调整该第一流体的流量;而该第二流量控制器构造为基于温度设定点和该第一混合流体的温度调整该第二流体的流量。 The first flow controller is configured to use the first fluid desired flow rate to adjust the flow rate of the first fluid; and the second flow controller is configured based on the temperature set point and the temperature adjustment of the first fluid and the second fluid mixing traffic.

[0010] 本发明的另一个实施例包括一种流体混合方法,该流体混合方法包括:向第一混合器提供第一流体和第二流体;在该第一混合器将该第一流体与该第二流体混合以形成第一混合流体;测量该第一混合流体的温度;基于第一流体目标流速调整进入该混合器的第一流体的流量;以及基于该第一混合流体的温度和温度设定点调整进入该混合器的第二流体的流量。 Another [0010] embodiment of the present invention comprises a method for mixing a fluid, the fluid mixing method comprising: a first mixer providing a first and second fluids; in the first fluid and the first mixer of the a second fluid mixing to form a first mixed fluid; measuring the temperature of the first mixed fluid; a first fluid flow rate adjustment based on the target flow rate of the first fluid entering the mixer; and based on the temperature of the first fluid and the mixing temperature is set Adjust the flow point of the mixer into the second fluid.

[0011] 本发明的另一个实施例包括一种流体混合系统,该流体混合系统包括:热流体流量控制器,用于控制热流体的流量;冷流体流量控制器,用于控制冷流体的流量;第一静态混合器,位于该第一热流体流量控制器和冷流体流量控制器的下游,用于接收该热流体,接收该冷流体并且将该热流体与该冷流体混合以形成混合流体;混合流体温度传感器,用于确定该混合流体的温度;化学品流量控制器,用于控制化学品的流量;第二静态混合器,位于该化学品流量控制器和该第一静态混合器的下游,用于接收该混合流体,接收该化学品并且将该混合流体与该化学品混合以形成稀释化学品;以及化学品温度传感器,用于测量该稀释化学品的温度。 Another [0011] The present invention includes a fluid mixing system embodiment, the fluid mixing system comprising: a hot fluid flow controller, the flow control for the hot fluid; cold fluid flow controller for controlling the flow of cooling fluid ; first static mixer, located fluid flow controller and the first heat cold fluid flow controller downstream for receiving the hot fluid, and receives the cooling fluid is mixed with the heated fluid to the cooling fluid to form a mixed fluid ; mixed fluid temperature sensor for determining the temperature of the mixed fluid; chemicals flow controller for controlling the flow of chemicals; second static mixer, located in the chemical flow controller and the first static mixer Downstream, for receiving the mixed fluid, receiving the chemical and the mixing fluid is mixed with the chemicals to form a dilute chemical; chemicals and temperature sensor for measuring the temperature of the diluted chemical. 根据一个实施例,该冷流体流量控制器基于冷流体目标流速控制该冷流体的流量并且向该热流体流量控制器传送温度设定点。 According to one embodiment, the cooling fluid flow controller based on the target flow rate of cooling fluid to control the flow of the cooling fluid and the fluid flow to the heat transferred to the controller temperature set point. 该热流体流量控制器基于该温度设定点和该混合流体的温度调整该热流体的流速。 The hot fluid flow controller to adjust the flow rate of the hot fluid and the temperature set point based on the temperature of the mixed fluid. 能够基于稀释化学品的温度连续更新该温度设定点。 Diluted chemicals can be based on temperature continuous updating the temperature set point. 该化学品流量控制器基于目标化学品流速控制该化学品的流量。 The chemical flow controller based on the target chemicals flow velocity of the chemical control.

6[0012] 通过提供在运行中调整温度、化学性和流速从而提高生产量和处理灵活性的能力,本发明要优于对流体混合的现有技术系统和方法。 6 [0012] In operation to adjust the temperature provided by, the chemical resistance and flow rate to increase the production capacity and the flexibility of the processing capacity, the present invention is superior to prior art systems and methods of mixing fluids.

[0013] 另外,通过提供迅速补偿诸如浓度、温度和其它过程参数的组分流体性质的变化的能力,本发明要优于对流体混合的现有技术系统。 [0013] Further, by providing a rapid compensation capacity changes the nature of the fluid component of the temperature and other process parameters, such as concentration, the present invention is superior to the prior art system of fluid mixing.

[0014] 另外,通过利用基于温度的流量控制器控制热流体从而减小基于压力的流量控制器中的更高温度导致的误差,本发明要优于现有技术系统。 [0014] Further, by using the control based on the temperature of the hot fluid flow controller so as to reduce the error in the pressure-based flow controller caused by the higher temperatures, the present invention is superior to prior art systems.

[0015] 本发明的实施例还提供了一种提供模拟设定点的系统和方法,这种系统和方法能够消除或基本上减少现有技术模拟设定点系统和方法的缺陷。 EXAMPLES [0015] The present invention also provides a system and method for providing an analog set point, such a system and method capable of eliminating or substantially reducing the drawbacks of the prior art analog set-point system and method. 本发明的一个实施例包括一种对模拟设定点(analog setpoint)进行复用(multiplex)的方法,该方法包括:向多个目标装置传送模拟信号,其中,该模拟信号表示多个设定点;传送与该模拟信号分离的第一设定点指示器以向第一目标装置指示该第一目标装置的第一设定点正由该模拟信号表示;响应于该第一设定点指示器在该第一目标装置处保存由该模拟信号断定的第一设定点值。 One embodiment of the present invention comprises a analog setpoint (analog setpoint) multiplexed (multiplex) method, the method comprising: transmitting an analog signal to a plurality of target devices, wherein the analog signal representing a plurality of set points; a first set point indicator and transmits the analog signal to a first separation of the target device to indicate a first set point of the first target device being represented by the analog signal; a first set point in response to the indication saves a first set point value determined by the analog signal in place of the first target device.

[0016] 本发明的另一个实施例包括一种对模拟设定点进行复用的系统,该系统包括:主控制器;连接到该主控制器的多个从控制器;模拟通信链路,将该多个从控制器与该主控制器进行连接;以及一个或多个数字通信链路,用于将该多个从控制器与该主控制器进行连接。 The master controller connected to a plurality of slave controller;; analog communications links, the main controller: [0016] Examples include a set point for the analog multiplexing system, the system comprising another embodiment of the present invention The plurality of connection from the controller to the host controller; and one or more digital communication link for the plurality of slave controller is connected to the main controller. 该主控制器可操作以在该模拟通信链路上传送表示多个模拟设定点的模拟信号,其中,该多个设定点在时间上复用到该模拟信号中;在第一时间段内,在该数字通信链路的至少一个上向该第一从控制器传送第一设定点指示器;以及在第二时间段内,在该数字通信链路的至少一个上向该第二从控制器传送第二设定点指示器。 The main controller is operable to transmit over the analog communication links represent a plurality of analog set point analog signal, wherein the plurality of set points in time multiplexed into the analog signal; a first time period within, the at least one digital communication link from the controller to the first transmission on a first set point indicator; and a second time period, the digital communications link to at least one second The second set point indicator transmitted from the controller. 根据一个实施例,在该第一时间段内,该模拟信号表示第一设定点,在该第二时间段内,该模拟信号表示第二设定点。 According to one embodiment, the first period of time, the analog signal representing a first set point, in the second period of time, the analog signal representing the second set point.

[0017] 本发明的另一个实施例包括一种计算机程序产品,该计算机程序产品包括一组计算机指令,这组计算机指令存储在计算机可读介质上。 Another [0017] embodiment of the present invention comprises a computer program product, the computer program product comprising a set of computer instructions, which set of computer instructions stored on a computer readable medium. 这组计算机指令还包括可由处理器执行的指令,处理器执行这些指令从而在第一通信链路上传送设定点信号,其中,该设定点信号将多个设定点进行复用;向第一目标装置传送第一设定点指示器以向该第一目标装置指示在第一时间段内该设定点信号表示该第一目标装置的设定点;以及向第二目标装置传送第二设定点指示器以向该第二目标装置指示在第二时间段内该设定点信号表示该第二目标装置的设定点。 This set of computer instructions further comprise instructions executable by the processor, the processor executes the instructions in order to transmit set point signal on the first communication link, wherein the set point signal multiplexing a plurality of set points; to means for transmitting a first target to a first set point indicator means for indicating to the first target in a first time period the set point signal representing the set point of the first target device; and means for transmitting the first to the second target Second set point indicator means to indicate to the second target a second time period the set point signal representing the set point of the second target device.

[0018] 通过能够在公共模拟通信链路上断定多个模拟设定点,本发明的实施例要优于断定模拟设定点的现有技术系统和方法。 [0018] The plurality of analog set point can be determined on a common analog communications links, embodiments of the present invention is superior to prior art systems and methods to determine the analog set point.

[0019] 通过利用一个或有限数目的模拟端口连接一个控制器以向多个其它控制器断定模拟设定点,本发明的实施例要优于现有技术系统。 [0019] connected to a controller by using one or a limited number of analog ports to a plurality of other controllers to determine the analog set point, embodiments of the present invention is superior to prior art systems.

[0020] 另外,通过减少具有多个控制器的系统中所需的模拟布线量,本发明的实施例提供了另一个优点。 [0020] Further, by reducing the amount of analog cabling system having a plurality of controllers required, embodiments of the present invention provide another advantage.

附图说明 Brief Description

[0021] 通过结合附图参照下文描述,可以更加全面地理解本发明并且可以获得本发明的优点,其中,相同的附图标记指示相同特征并且其中: [0021] with reference to the following description in conjunction with the accompanying drawings, may be more fully understood the present invention can be obtained advantages of the present invention, in which like reference numerals indicate like features and wherein:

[0022] 图1是用于混合流体的系统的一个实施例的图解表示; [0022] FIG. 1 is a diagram illustrating a system for mixing a fluid of one embodiment of representation;

[0023] 图2A和2B提供了流程图,示出了控制流体的流量以形成混合流体的方法的一个实施例; [0023] Figures 2A and 2B provide a flow chart illustrating a method of controlling the flow of fluid to form a mixed fluid of one embodiment;

[0024] 图3是用于混合流体的系统的另一个实施例的图解表示; Illustrates another [0024] FIG. 3 is a system for mixing fluids represented embodiment;

[0025] 图4A到图4C提供了流程图,示出了控制流体的流量以形成混合化学品的另一个方法的一个实施例; [0025] Figures 4A to 4C provide a flow chart showing a control flow of fluid to form another method for mixing chemicals in one embodiment;

[0026] 图5是用于混合流体的系统的另一个实施例的图解表示; [0026] FIG. 5 is another system for mixing a fluid of a diagrammatic embodiment of the representation;

[0027] 图6A到图6C提供了流程图,示出了控制流体的流量以形成混合化学品的另一个方法的另一个实施例; [0027] FIGS. 6A-6C provides a flowchart illustrating another flow of fluid to form another control method for mixing chemicals embodiment;

[0028] 图7A到图7F提供了静态混合器组件700及其部件的一个实施例的图解表示; [0028] Figures 7A-7F is provided illustrating one embodiment of a static mixer assembly 700 and its components are indicated;

[0029] 图8A到图8C提供了混合器组件的另一个实施例的图解表示; Graphic [0029] Figures 8A-8C provides a mixer assembly of another embodiment of the representation;

[0030] 图9是对模拟设定点进行复用的系统的一个实施例的图解表示; [0030] FIG. 9 is a diagram of an analog set point multiplexing system according to an embodiment of the representation;

[0031] 图10是模拟设定点信号和对应的设定点指示器信号的图解表示; [0031] FIG. 10 is a diagram illustrating an analog set point signal and the corresponding set point indicator signal representation;

[0032] 图11是用于将模拟设定点进行复用的系统的一个实施例的图解表示; [0032] Figure 11 is an analog set point a multiplexing system illustrated embodiment of the representation;

[0033] 图12是模拟设定点信号和用于断定设定点指示器的对应信号的图解表示;以及 [0033] FIG. 12 is a diagram illustrating an analog set point signal to determine the set point indicator and a corresponding representation of the signal; and

[0034] 图13是流程图,示出了将模拟设定点进行复用的一个实施例。 [0034] FIG. 13 is a flowchart illustrating an embodiment of an analog multiplexing of the set point.

具体实施方式 DETAILED DESCRIPTION

[0035] 在附图中示出了本发明的优选实施例,相同附图标记用于指示各个附图中的相同和对应部分。 [0035] In the drawings illustrate preferred embodiments of the present invention, the same reference numerals are used to indicate the various drawings the same and corresponding portions.

[0036] 本发明的实施例提供了一种连续流动产生混合流体的系统和方法。 EXAMPLES [0036] The present invention provides a system and method for generating a continuous flow of mixed fluid. 该混合流体可以包括不同流体的混合物或者具有诸如温度的不同输入性质的相同流体的混合物。 The mixed fluid may comprise a mixture of different fluids or a mixture of the same, such as the temperature of the fluid nature of the different inputs. 通常, 不同温度的两个流体流供给入混合器。 Typically, the two different temperatures of the fluid flow supplied into the mixer. 可以调整每个输入流体的流速以产生期望流速和温度的混合流体。 Each input can be adjusted to produce a fluid flow rate of the mixed fluid desired flow rate and temperature. 作为一个例子,质量流控制器能够调整去离子水(DI H2O或者DIW)的热流和冷流的流速以产生期望流速和温度的DI H2O流。 As an example, a mass flow controller can adjust the flow rate of deionized water (DI H2O or DIW) of the hot and cold streams to produce a desired flow rate and temperature of the DI H2O stream.

[0037] 质量流控制器的控制算法能够依赖特定输入流的质量流速的仅仅一种组合将产生期望温度和流速的混合流体的事实。 [0037] The control algorithm is dependent on the mass flow controller can be mass flow rate of a particular input stream to produce only a combination of the desired fluid flow rate of the temperature and mixing facts. 因此,用作主控制器的质量流控制器之一能够基于输入流的温度、输入流的比热和密度、混合流体的目标流速和混合流体的目标温度计算流过它的流体的期望流速。 Accordingly, in one of a mass flow controller can be a master controller based on the temperature of the input stream, the input stream of the specific heat and density, the flow rate of the target fluid and the mixing of the mixed fluid flowing through it the target temperature calculating a desired fluid flow rate. 然后,主控制器能够将目标温度传递给从质量流控制器。 Then, the main controller can be transmitted to the target temperature from the mass flow controller. 从质量流控制器基于目标温度和由温度传感器确定的混合流体的温度调整流过它的流体的流速。 From the mass flow controller based on the temperature and the target temperature determined by the temperature sensor to adjust the fluid mixture flowing through it at a flow rate of the fluid.

[0038] 通过利用温度传感器对从质量流控制器形成反馈环,从质量流控制器能够调整流体流速以快速将混合流体带到期望温度。 [0038] By using a temperature sensor to form a feedback loop from the mass flow controller, the mass flow controller is able to quickly adjust the fluid flow rate to the desired temperature of the mixed fluid. 当混合流体的温度接近期望温度时,流过从质量流控制器的流体的流速受到调整从而使得混合流体的流速接近期望流速。 When the temperature of the mixed fluid is close to the desired temperature, the flow rate of the current flowing from the fluid mass flow controller so that by adjusting the flow rate of the fluid mixing close to the desired flow rate. 因此,混合流体将到达期望温度和流速。 Thus, the mixed fluid will reach the desired temperature and flow rate.

[0039] 本发明的实施例提供了一种复用模拟设定点的系统和方法。 EXAMPLE [0039] The present invention provides a system and method for multiplexed analog set point. 根据本发明的一个实施例,模拟信号源(例如,主控制器)能够向公共模拟通信链路上的多个目标装置(例如, 从控制器)断定模拟信号。 Able to a plurality of target devices on a common analog communication links (e.g., from the controller) to determine the analog signal in accordance with one embodiment, the present invention is an analog signal source (e.g., the main controller). 模拟信号能够表示多个设定点。 Analog signals can represent multiple set points. 根据一个实施例,能够向数字通信链路上的目标装置断定设定点指示器。 According to one embodiment, the target device can be a digital communications link to determine the set point indicator. 当特定目标装置接收设定点指示器时,目标装置能够保存模拟设定点信号的值用作设定点。 When a particular target device receives the set point indicator, the target device can save analog set point signal value as the setpoint. 应该注意:尽管就用于流体混合系统中的控制器而言讨论本发明的实施例,但是本发明的实施例还可以用于需要断定多个模拟设定点的任何系统。 It should be noted: despite the fact that for a fluid mixing system of the controller discussed in terms of an embodiment of the invention, but the embodiment of the present invention may also be used to determine any system requires a plurality of analog set point. [0040] 图1是用于混合流体的系统100的一个实施例的图解表示。 [0040] FIG. 1 is a system for mixing a fluid system 100 illustrated embodiment of FIG. 系统100包括两个流量控制器102和104,这两个流量控制器102和104与混合器106进行流体连通。 The system 100 includes two flow controllers 102 and 104, the two flow controllers 102 and 104 in fluid communication with the mixer 106. 系统100 还包括温度传感器108、温度传感器110和温度传感器112,其中,温度传感器108位于流量控制器102的上游,温度传感器110位于流量控制器104的上游,温度传感器112位于混合器106的下游。 The system 100 also includes a temperature sensor 108, temperature sensor 110 and temperature sensor 112, wherein the temperature sensor 108 is located upstream of the flow controller, the temperature sensor 102 is located at 110 upstream of the flow controller 104, temperature sensor 112 is located downstream of the mixer 106. 温度传感器108和温度传感器110连接到至少一个流量控制器,在这个例子中,连接到流量控制器104(即,能够传送表示温度的信号)。 Temperature sensor 108 and temperature sensor 110 is connected to the at least one flow controller, in this example, connected to the flow controller 104 (i.e., capable of transmitting a signal indicative of the temperature). 温度传感器112也连接到至少一个流量控制器。 Temperature sensor 112 is also connected to the at least one flow controller. 在这个例子中,温度传感器112连接到流量控制器102。 In this example, the temperature sensor 112 is connected to the flow controller 102.

[0041] 根据一个实施例,尽管可以利用其它合适的流量控制器,但是流量控制器102和流量控制器104均是由Billerica,MA的Mykrolis公司(现在是Chaska,MN的Entegris 公司的一部分)产生的OptiChem P1200 LFC流量控制器。 [0041] According to one embodiment, although the use of other suitable flow control, but the flow controller 102 and flow controller 104 are generated by Billerica, MA the Mykrolis Corporation (now part of Chaska, MN of Entegris, Inc.) The OptiChem P1200 LFC flow controller. 混合器106可以包括任何合适的动态或静态混合器以对流体流进行混合。 Mixer 106 may include any suitable dynamic or static mixers to mix the fluid stream. 结合图7A到图7F描述静态混合器的一个实施例。 Figures 7A-7F conjunction described one embodiment of a static mixer. 温度传感器108、110和112能够包括任何合适的温度传感器。 Temperature sensors 108, 110 and 112 can include any suitable temperature sensor.

[0042] 比目标温度要热的流体(例如,热流体114)供给入流量控制器102,而比目标温度要冷的流体(例如,冷流体116)供给入流量控制器104。 [0042] than the target temperature for a hot fluid (e.g., hot fluid 114) is supplied into the flow controller 102, and the target temperature colder than the fluid (e.g., cooling fluid 116) is supplied into the flow controller 104. 流量控制器102调整进入混合器106的热流体114的流量,而流量控制器104调整进入混合器106的冷流体116的流量。 Flow controller 102 to adjust the flow rate of thermal fluid 106 enters the mixer 114, and the flow controller 104 to adjust the mixer 106 into the cooling fluid flow rate of 116. 这些流体在混合器106中进行共混以产生期望温度和流速的混和流体118。 These fluids were blended in a mixer 106 to produce a desired mixture temperature and flow rate of the fluid 118.

[0043] 能够基于目标温度(例如,混合流体118的目标温度)、热流体和冷流体的温度、 热流体和冷流体的流体性质以及混合流体118的测量温度控制供给入混合器106的热流体114和冷流体116的流速。 [0043] can be based on the target temperature (e.g., the target temperature of the mixed fluid 118), the temperature of the hot and cold fluids, the fluid nature of the hot and cold fluids and the temperature of the mixed fluid measurement 118 is supplied into the mixer to control the thermal fluid 106 114 and 116 of the cold fluid flow. 更具体地讲,处理工具、控制计算机或其它系统能够提供流量控制器104混合流体118的目标温度(tT1)和流速(Qn)。 More specifically, the process tool, the control computer or other system capable of providing mixed fluid flow controller 104 target temperature (tT1) 118 and a flow rate (Qn). 另外,温度传感器108提供热流体114的温度(tH)而温度传感器110提供冷流体116的温度(tc)。 Further, the temperature sensor 108 provides temperature thermal fluid 114 (tH) and cooling fluid temperature sensor 110 provides temperature (tc) 116 of. 同样,能够向流量控制器102和流量控制器104提供用于系统100中的热和/或冷流体的类型或者预先向流量控制器102和流量控制器104规划热和/或冷流体的类型。 Similarly, it is possible to provide a flow controller 102 and flow controller 104 for the system 100 the thermal and / or the type of cold fluid or to advance planning 102 and the flow controller 104 heat and / or the type of cold fluid flow controller.

[0044] 基于热流体114和冷流体116的流体类型和温度,流量控制器102能够计算热流体14和冷流体116的密度(PH、P c)和比热(CpH、Cpc)。 [0044] Based on 114 hot fluid and cold fluid 116 fluid type and temperature, flow controller 102 is able to calculate the thermal fluid density (PH, P c) and over 14 hot and cold fluid 116 (CpH, Cpc). 流量控制器104能够相似地确定目标温度(tT)的混合流体118的密度(Pt)和比热(CpT)。 Similarly, the flow controller 104 can determine the target temperature (tT) of the mixed fluid 118 density (Pt) and specific heat (CpT). 例如,如果热流体114和冷流体116均是DI H2O,则能够基于多项式利用下面系数计算密度和比热。 For example, if the hot fluid and cold fluid 116 114 are DI H2O, you can use the following polynomial coefficient calculation based on the density and specific heat.

[0045] 表1 [0045] Table 1

[0046] [0046]

Figure CN102339078AD00091
Figure CN102339078AD00101

[0047] 作为例子提供表1而非进行限制。 [0047] Table 1 are provided as examples and not to be limiting. 能够利用其它方程、查询表或其它合适机制确定热流体114、冷流体116和混合流体118的比热和密度。 Able to use other equations, look-up table or other suitable mechanism to determine the thermal fluid 114, fluid 116 and cold 118 mixed fluid specific heat and density. 另外,应该明白,热流体114和冷流体116可以是不同的流体。 Further, it should be understood, the hot fluid 114 and cold fluid 116 may be different fluids.

[0048] 根据一个实施例,控制器104基于例如下面方程利用目标流速(Qn)、目标温度(tT1)、热流体温度(tH)、冷流体温度(tc)、热流体、冷流体和混合流体的比热(CpH、Cpc, CpT) 以及热流体和冷流体的密度(PH、P。)能够计算进入混合器106的冷流体116的目标流速 [0048], for example, the controller 104 based on the following equation and the target flow rate (Qn), the target temperature (tT1), hot fluid temperature (tH), the cold fluid temperature (tc), hot fluid and cold fluid and the mixed fluid of an embodiment according to density specific heat (CpH, Cpc, CpT) and the hot fluid and cold fluid (PH, P.) into the mixer 106 is able to calculate the target flow rate of cooling fluid 116

(Qc)0 [0049] Qc =QtX (1000/60) X ( P c/ P χ) χ (tH X CpH-tTCpT) / (tH X CpH-tc X Cpc)[方程1][0050] Qt =目标流速 (Ipm)[0051] tT =目标温度 (V )[0052] tH =热流体温度 CC )[0053] tc =冷流体温度 CC )[0054] Pc ,=冷流体密度 (g/cm3)[0055] Pt ,=热流体密度 (g/cm3)[0056] Cpc ;=冷流体比热 (cal/g C )[0057] Cpt 热流体比热 (cal/g C )[0058] Cp1 .=在tT混合流体比热 (cal/g C )[0059] 继续上述例子,Qt = Qti以及 tT = tT1,并且流量控制器104能够根据现有技才 (Qc) 0 [0049] Qc = QtX (1000/60) X (P c / P χ) χ (tH X CpH-tTCpT) / (tH X CpH-tc X Cpc) [Equation 1] [0050] Qt = target flow rate (Ipm) [0051] tT = target temperature (V) [0052] tH = thermal fluid temperature CC) [0053] tc = cooling fluid temperature CC) [0054] Pc, = cold fluid density (g / cm3) [ 0055] Pt, = thermal fluid density (g / cm3) [0056] Cpc; = cold fluid specific heat (cal / g C) [0057] Cpt thermal fluid specific heat (cal / g C) [0058] Cp1. = tT mixed fluid in the specific heat (cal / g C) [0059] Continuing with the above example, Qt = Qti and tT = tT1, and the flow controller 104 according to the prior art can only

已知或开发的任何机制确定恰当的Qc。 Any known or developed mechanism to determine the appropriate Qc. 流量控制器104能够利用基于压差的流控、基于热损耗的流控或者其它流控方案调整冷流体116的量,从而调整流速% (流量控制器104的容许量内)。 Flow controller 104 can take advantage of the pressure-based flow control, flow control based on heat loss or other cold fluid flow control scheme to adjust the amount of 116 to adjust the flow rate% (within the allowable amount of flow controller 104).

[0060] 流量控制器104还能够将设定点的温度tSP传递到控制器102。 [0060] Flow controller 104 is also able to set temperature point tSP communicated to controller 102. 在这种情况下,温度设定点能够指示混合流体118的期望温度。 In this case, the temperature set point desired temperature capable of indicating the mixed fluid 118. 例如,tSP可以等于tT。 For example, tSP can equal tT. 控制器102将混合流体的温度(tM1)与tSP进行比较。 The controller 102 of the mixed fluid temperature (tM1) is compared with tSP. 如果tM1大于tSP,则控制器104能够减小热流体114的流量;如果tM1小于tSP,则控制器104能够增大热流体114的流量。 If tM1 greater than tSP, the controller 104 can reduce the thermal fluid flow 114; if tM1 less than tSP, the controller 104 can increase the thermal fluid flow 114. 通过调整热流体的流量, tM1将接近tSP。 By adjusting the flow of hot fluid, tM1 will close tSP. 当tM1近似等于tSP时(即,在可接受偏差内(例如,5%)),这指示混合流体118已经达到目标流速和目标温度。 When tM1 tSP approximately equal (i.e., within an acceptable deviation (e.g., 5%)), this indicates that the mixed fluid 118 has reached the target velocity and the target temperature. 在另一个实施例中,流量控制器104从温度传感器112 接收tM1并且将tM1和tSP传递给流量控制器102。 Embodiment, the flow controller 104 receives tM1 from the temperature sensor 112 and the tM1 and tSP transmitted to the flow controller 102 in another embodiment.

[0061] 当输入流体温度、期望混合流体流速或其它参数改变时,控制器104能够连续重新计算%和tSP (例如,根据一个实施例,近似IHz或以上)。 [0061] When the input temperature of the fluid, the desired flow rate or other parameters of the mixed fluid changes, the controller 104 can continuously recalculate% and tSP (e.g., in accordance with one embodiment, approximately IHz or higher). 因此,本发明能够迅速地调整为变化的处理参数。 Accordingly, the present invention can be quickly adjusted to changes in processing parameters.

[0062] 如上所述,控制器104和控制器102按照主从方式进行工作,其中,控制器104向控制器102提供tSP。 [0062] As described above, the controller 104 and the controller 102 operates in accordance with the master-slave mode, in which the controller 104 to the controller 102 to provide tSP. 这些控制器的主从动态能够进行颠倒,其中,处理输入的控制器102向控制器104提供tSP。 These master controller can be reversed from dynamic, in which the process controller 102 provides the input to the controller 104 tSP. 另外,能够向这些控制器之一设置目标温度和流速,并且能够从外部计算机系统或工具向另一个控制器设置tSP。 Further, it is possible to set the target temperature and flow rate of the controller, and can be provided tSP from an external computer system or tool to another controller. 在这种情况下,控制器102和控制器104相对于另一个控制器均不用作主或从。 In this case, the controller 102 and the controller 104 relative to the other controllers without a master or slave.

[0063] 应该注意,较高温度流体能够在基于压力的控制器中产生误差。 [0063] It should be noted, the higher temperature of the fluid pressure can be generated based on an error in the controller. 如果基于压力的流量控制器用于控制热DIW,则由于公共使用的压力传感器通常对温度变化敏感,所以可能会遭遇大量的误差。 If the pressure-based flow controller for controlling the hot DIW, since the pressure sensor is usually used in common sensitive to temperature change, it may experience a lot of errors. 如果热流体流量控制器基于压力控制流量,则能够利用温度补偿电路。 If the hot fluid flow controller based on a pressure control flow, it is possible to use a temperature compensation circuit. 或者,与上述实施例相同,热流体流量控制器能够采用基于温度的控制方案。 Alternatively, the above-described embodiment, and a hot fluid flow controller can control scheme based on the temperature.

[0064] 图2A和2B提供了流程图,示出了控制流体的流量以形成混合流体的方法的一个实施例。 [0064] Figures 2A and 2B provide a flow chart illustrating a method of controlling the flow of fluid to form a mixed fluid of an embodiment. 图2A和2B的方法能够实现为由处理器执行存储在计算机可读介质上的计算机指令。 The method of Figure 2A and 2B can be realized by a processor executing instructions stored a computer readable medium in a computer. 例如,能够通过对一个或多个OptiChem P1200 LFC流量控制器进行编程实现本发明的实施例。 For example, through one or more OptiChem P1200 LFC flow controller is programmed to achieve embodiments of the present invention.

[0065] 图2A的流程图对应在冷流体流量控制器(例如,图1的流量控制器104)上实现的控制方法,而图2B对应在热流体流量控制器(例如,图1的流量控制器10上实现的方法。 Flowchart [0065] FIG. 2A corresponds to the control method in the cold fluid flow controller (e.g., flow controller 104 in FIG. 1) to implement, and Fig. 2B corresponding thermal fluid flow controller (e.g., flow control of Figure 1 methods is 10 implemented.

[0066] 冷流体流量控制器接收包括目标混合流体温度(tT1)、目标混合流体流速(Qn)、冷流体温度(te)和热流体温度(tH)的输入(步骤20幻。利用这些输入和诸如冷流体、热流体和混合流体(目标温度)的比热和密度的性质,冷流体流量控制器根据方程1计算冷流体流速(Qc),其中,A = Qn并且tT = tT1 (步骤204)。冷流体流量控制器对热流体流量控制器设置温度设定点、p(步骤206)。例如,tSP可以计算或设置为tT1。 [0066] cooling fluid flow controller receives the mixed fluid comprising the target temperature (tT1), the target mixed fluid flow (Qn), cooling fluid temperature (te) and the hot fluid temperature (tH) of the input (step 20 magic. Using these inputs, and such as the nature of the cold fluid, the hot fluid and the mixed fluid (target temperature) of the specific heat and density, the cold fluid flow controller according to Equation 1 calculates the cooling fluid flow rate (Qc), where, A = Qn and tT = tT1 (step 204) cold fluid flow controller for a hot fluid flow controller set temperature set point, p (step 206). For example, tSP may be calculated or set tT1.

[0067] 当接收到触发信号时(步骤208),冷流体流量控制器能够开始利用%作为流速设定点调整流体流量并且命令热流体流量控制器调整热流体的流量(步骤210)。 [0067] When the trigger signal is received (step 208), the cold fluid flow controller can start using% as the flow rate of fluid flow set point adjustment and ordered hot fluid flow controller to adjust the flow of hot fluid (step 210). 冷流体流量控制器能够根据现有技术中已知的流体流量控制方案调整冷流体的流量,其中,这些现有技术中已知的流体流量控制方案包括但不限于差分控制方案、积分控制方案、比例积分控制方案、模糊逻辑或比例积分差分控制方案。 Cold fluid flow controller can adjust the flow rate of the cooling fluid according to the prior art known in fluid flow control scheme in which these prior art known in fluid flow control scheme include, but are not limited to, differential control scheme, the integral control scheme, proportional-integral control scheme, a proportional integral differential or fuzzy logic control scheme. 如果冷水的流体流量大于流体流量设定点,则冷流体流量控制器能够减小流速(步骤212),如果冷水的流体流量小于流体流量设定点, 则冷流体流量控制器能够增大流速,并且如果冷流体流速等于设定点(在可接受的系统容许量内)(步骤214),则冷流体流量控制器能够保持流速(步骤216)。 If the fluid flow of cold water is greater than the fluid flow set point, the cooling fluid flow controller capable of reducing the flow rate (step 212), if the fluid flow of cold water is less than the fluid flow set point, the cooling fluid flow controller can increase the flow rate, and if the cooling fluid flow rate is equal to the set point (in the system within acceptable tolerances) (step 214), the cold fluid flow controller to maintain the flow rate (step 216). 因此,冷流体流量控制器能够基于目标冷流体流速设定点A调整冷流体的流速。 Therefore, the cold fluid flow controller can be based on the goal of cold fluid flow rate set point adjustment A cold fluid flow rate.

[0068] 对照图2B,另一方面,热流体流量控制器能够基于混合流体的温度(tM1)和混合流体设定点(tSP)调整热流体的流速。 [0068] control to Figure 2B, on the other hand, the hot fluid flow controller can be adjusted based on the flow rate of the thermal fluid mixed fluid temperature (tM1) and mixed fluid set point (tSP). 能够直接从温度传感器或者从冷流体流量控制器接收混合流体的温度。 Can be directly received from the temperature sensor or a cooling fluid from the mixing temperature of the fluid flow controller. 如果tM1大于tSP,则热流体流量控制器减小流体的流速(步骤218),如果tM1小于tSP,则热流体流量控制器增大热流体的流速(步骤220),并且如果tM1等于tSP (在可接受的系统容许量内),则热流体流量控制器保持热流体的流速(步骤222)。 If tM1 than tSP, the hot fluid flow controller to reduce the velocity of the fluid (step 218), if tM1 less than tSP, the thermal fluid flow controller increases the flow rate of a hot fluid (step 220), and if tM1 equal tSP (in system within an acceptable tolerance), the thermal fluid flow controller to maintain the flow rate of a hot fluid (step 222).

[0069] 能够按照需要或期望重复图2A和图2B的步骤。 [0069] Step 2A and 2B capable of repeated as needed or desired in FIG. 另外,能够按照各种顺序执行各个步骤,并且能够并行地执行由每个流量控制器执行的各个步骤。 In addition, various steps can be performed in accordance with various orders, can be performed in parallel and the individual steps executed by each flow controller.

[0070] 尽管在图2A和图2B的实施例中,冷水流量控制器负责为热水流量控制器确定设定点tSP,但是在其它实施例中,热水流量控制器能够为它自身确定tSP或者向冷水流量控制器提供tSP从而使得冷水流量控制器能够基于tM调整流量。 [0070] Although the embodiment in FIG. 2A and FIG. 2B, the cold water flow controller responsible for the hot water flow rate controller determines the setpoint tSP, but in other embodiments, the hot water flow controller capable of determining for itself tSP or provide tSP to cold flow controller so that the cold water flow controller can be adjusted based on the tM flow. 换言之,热水和冷水流量控制器的角色能够颠倒,并且图2的步骤能够以其它形式布置在这些控制器之间。 In other words, the role of hot and cold water flow controller can be reversed, and the step of FIG. 2 can be arranged in other forms between these controllers.

[0071] 因此,本发明的一个实施例能够包括第一流量控制器(例如,流量控制器104)、第二流量控制器(例如,流量控制器10、以及位于第一流量控制器和第二流量控制器的下游的混合器。第一流量控制器能够基于第一流体的目标流速(例如,)调整第一流体的流量,并且第二流量控制器能够基于温度设定点和由混合器形成的混合流体的温度调整第二流体的流量。 [0071] Accordingly, one embodiment of the present invention can include a first flow controller (e.g., flow controller 104), a second flow controller (e.g., flow controllers 10, and located between the first and second flow controller Downstream of the mixer flow controller. The first flow controller capable of adjusting the flow rate of the first fluid based on the first target flow rate of fluid (e.g., ), and the second flow controller can be based on temperature set point and the mixer the temperature of the mixed fluid formed in the second fluid flow rate adjustment.

[0072] 图1的系统能够实现为将混合流体与诸如其它化学品的额外流体进行组合的更大混合系统的子系统。 System [0072] Figure 1 can be implemented as a fluid mixed with additional fluid other chemicals such as a hybrid system combining larger subsystems. 图3示出了包括图1的子系统的溶液混合系统300。 Figure 3 shows a solution mixing system including subsystems 300 of FIG. 1. 在图3的例子中,溶液混合系统300提供一种浓缩NaCl溶液混合系统,在这种NaCl溶液混合系统中,混合DIW118与NaCl进行组合以产生稀释NaCl 302。 In the example of Figure 3, the system 300 provides a mixed solution of NaCl solution was mixed systems concentrated NaCl solution were mixed in such a system, mixed with NaCl DIW118 be combined to produce a dilute NaCl 302. 除了结合图1讨论的组分以外,溶液混合系统300包括一个或多个浓缩NaCl源(这里示出为1800百万分率(ppm)NaCl源304、 2000ppm源306和2200ppm源308)。 In addition to the discussion of FIG. 1 binding component, solution mixing system 300 includes one or more sources concentrated NaCl (shown here as 1800 parts per million (ppm) NaCl source 304, 2000ppm 2200ppm source 306 and source 308). 化学品流量控制器310控制进入第二混合器312的浓缩NaCl的流量,其中,在该第二混合器312中,浓缩化学品与混合DIW 118进行混合。 Chemicals into the flow controller 310 controls the flow of concentrated NaCl second mixer 312, wherein, in the second mixer 312, and concentrated chemical is mixed with the mixed DIW 118. 根据本发明的一个实施例,混合器312能够是静态混合器。 According to one embodiment of the present invention, the mixer 312 can be a static mixer.

[0073] 作为例子,冷流体流量控制器104能够用作热流体流量控制器102和化学品流量控制器310的主控制器。 [0073] As an example, the cold fluid flow controller 104 can be used as heat transfer fluid flow controller master controller 102 and flow controller 310 chemicals. 冷流体流量控制器104接收稀释NaCl 302的目标混合化学品流速(QT2)、稀释NaCl的目标混合化学品比率、稀释NaCl 302的目标混合化学品温度(、2)、、和、。 Cold fluid flow controller 104 receives a diluted mixture of NaCl 302 target chemicals velocity (QT2), NaCl dilution ratio target mix of chemicals, dilute NaCl 302 goals mixing chemicals temperature (2) ,, and. 基于目标混合化学品流速Qt2和目标混合化学品比率,冷流体控制器104能够确定DIW 的目标流速(Qn)和浓缩NaCl的流速OUJ。 Mixed chemicals flow rate based on the target and the target mix chemicals Qt2 ratio, cold fluid controller 104 is able to determine target velocity DIW (Qn) and concentrated NaCl velocity OUJ. 假定浓缩化学品的温度对稀释NaCl 302的温度影响较小,混合DIW 118的目标温度能够设置为等于tT2(即,tT1 = tT2)。 Assume that the temperature of the concentrated chemicals NaCl 302 dilution temperature less influence, mixed DIW target temperature can be set equal to 118 tT2 (i.e., tT1 = tT2). 利用tT2、Qn 以及热和冷DIW的输入温度,冷流体流量控制器104还能够确定目标冷DIW流速(Q。)和热流体流量控制器104的温度设定点tSP。 Use tT2, Qn, and hot and cold DIW input temperature of the cold fluid flow controller 104 is also able to determine the temperature set point target cold DIW flow rate (Q.) and the hot fluid flow controller 104 tSP. 冷流体流量控制器104向热流体流量控制器102提供tSP以及向化学品流量控制器310提供Q。 Cold fluid flow controller 104 provides tSP and chemicals flow controller 310 to provide the hot fluid flow controller 102 Q. h„。然后,每个流量控制器能够控制它各自流体的流量。 h ". Then, each of the flow controller is able to control its respective fluid flow.

[0074] 图4A到图4C是流程图,示出了控制流体的流量以形成混合流体的方法的一个实施例。 [0074] Figures 4A to 4C is a flowchart illustrating a control flow of fluid to form a mixed fluid of the embodiment of a method. 图4A到图4C的方法能够实现为可由处理器执行存储在计算机可读介质上的计算机指令。 4A to 4C, the method can be implemented as computer instructions executed by a processor stored on a computer readable medium. 例如,能够通过对一个或多个OptiChem P1200 LFC流量控制器进行编程实现本发明的实施例。 For example, through one or more OptiChem P1200 LFC flow controller is programmed to achieve embodiments of the present invention.

[0075] 图4A对应在冷流体流量控制器(例如,图3的流量控制器104)上实现的控制方法,图4B对应在热流体流量控制器(例如,图3的流量控制器10上实现的控制方法,图4C对应在化学品流量控制器310上实现的控制方法。 [0075] FIG. 4A corresponding control method in a cold fluid flow controller (e.g., flow controller 104 of FIG. 3) on the implement, and Figure 4B corresponds to the hot fluid flow controller (e.g., flow controller 10 3 of FIG implemented on control method, the control method in FIG. 4C corresponding to the chemical flow controller 310 achieved.

[0076] 冷流体流量控制器接收包括目标混合化学品混合比、目标混合化学品流速0ίΤ2)、 冷流体温度(tc)、热流体温度(tH)、目标混合化学品温度(tT2)的输入(步骤402)。 [0076] cold fluid flow controller receiving a target mix of chemicals mixing ratio, mixing chemicals target velocity 0ίΤ2), cold fluid temperature (tc), thermal fluid temperature (tH), mixing chemicals target temperature (tT2) input ( Step 402). 利用目标混合化学品混合比和目标混合化学品流速Qt2,冷流体流量控制器能够确定目标DIW流速Qti和浓缩化学品或其它流体(例如,图3的例子中的NaCl)的流速OUJ (步骤406)。 Target mixed use of chemicals and the mixing ratio of the target mixed chemicals flow rate Qt2, the cold fluid flow controller is able to determine target velocity Qti DIW and concentrated chemicals or other fluids (e.g., in the example of FIG. 3 NaCl) at a flow rate OUJ (step 406 ). 假定NaCl的流量对混合化学品的整体温度具有较小影响,冷流体流量控制器能够设置目标混合DIW温度(tT1)使它等于目标混合化学品温度(tT2)并且根据方程1确定%,其中,Qt = Qti (步骤408)。 Assume that the flow of NaCl has a smaller impact on the overall temperature of the mixture of chemicals, cold fluid flow controller can set the target temperature mixed DIW (tT1) mixing chemicals to make it equal to the target temperature (tT2) and determined according to equation 1%, which, Qt = Qti (step 408). 此外,冷流体流量控制器能够设置tSP = tT1 = tT2 (另外步骤409所示)。 In addition, the cold fluid flow controller can be set tSP = tT1 = tT2 (Also shown in step 409).

[0077] 当接收到触发信号时(步骤410),冷流体流量控制器能够开始利用%作为流速设定点调整流体流量,向热流体流量控制器发送命令以调整热流体的流量,并且向化学品流量控制器发送命令以控制第三流体的流量。 [0077] When the trigger signal is received (step 410), the cold fluid flow controller can be started using the flow rate set point adjustment as a% of fluid flow, to send commands to a hot fluid flow controller to adjust the flow rate of the hot fluid, and to the chemical product flow controller sends a command to control the flow rate of the third fluid. 冷流体流量控制器能够根据现有技术中已知的流体流量控制方案调整冷流体的流量,其中,这些现有技术中已知的流体流量控制方案包括但不限于差分控制方案、积分控制方案、比例积分控制方案、模糊逻辑或比例积分差分控制方案。 Cold fluid flow controller can adjust the flow rate of the cooling fluid according to the prior art known in fluid flow control scheme in which these prior art known in fluid flow control scheme include, but are not limited to, differential control scheme, the integral control scheme, proportional-integral control scheme, a proportional integral differential or fuzzy logic control scheme. 如果冷水的流体流量大于流体流量设定点,则冷流体流量控制器能够减小流速(步骤41,如果冷水的流体流量少于流体流量设定点(步骤414),则冷流体流量控制器能够增大流速,并且如果冷流体流速等于设定点(在可接受的系统容许量内),则冷流体流量控制器能够保持流速(步骤416)。因此,冷流体流量控制器能够基于冷流体流速设定点% 调整冷流体的流速。 If the fluid flow of cold water is greater than the fluid flow set point, the cooling fluid flow controller capable of reducing the flow rate (step 41, if the fluid flow of cold water is less than the fluid flow rate set point (step 414), the cooling fluid can flow controller increase the flow rate, and if the flow rate of cooling fluid equal to the set point (in the system within an acceptable tolerance), the cold fluid flow controller to maintain the flow rate (step 416). Thus, the cold fluid flow controller capable of cooling fluid flow rate based on adjusting the flow rate set point% cold fluid.

[0078] 如图4B所示,热流体流量控制器能够基于混合流体的温度(tM1)和混合流体设定点(tSP)调整热流体的流速。 [0078] shown in Figure 4B, the hot fluid flow controller can adjust the flow rate of the thermal fluid temperature of the fluid based on mixed (tM1) and mixed fluid setpoint (tSP). 能够直接从温度传感器或冷流体流量控制器接收混合流体的温度。 Temperature of the mixed fluid can be received directly from the temperature sensor or the cooling fluid flow controller. 如果tM1大于tSP,则热流体流量控制器减小流体的流速(步骤418),如果tM1小于tSP, 则热流体流量控制器增大热流体的流速(步骤420)并且如果tM1等于tSP (在可接受的系统容许量内),则热流体流量控制器保持热流体的流速(步骤422)。 If tM1 than tSP, the hot fluid flow controller to reduce the velocity of the fluid (step 418), if tM1 less than tSP, the thermal fluid flow controller increases the flow rate of a hot fluid (step 420) and if tM1 equal tSP (Available acceptable tolerance within the system), the hot fluid flow controller to maintain the flow rate of the thermal fluid (step 422).

[0079] 如图4C所示,化学品流量控制器能够基于Qctol相似地调整额外流体(例如,浓缩NaCl)的流量。 [0079] 4C, the chemicals flow controller can be adjusted based on Qctol similar additional fluid (e.g., concentrated NaCl) traffic. 如果浓缩化学品(或者其它流体)的流体流量大于Q。 If the concentrated chemicals (or other fluids) of fluid flow is greater than Q. hem,则化学品流量控制器能够减小流速(步骤428),如果浓缩化学品的流体流量小于Qehem(步骤430),则冷流体流量控制器能够增大流速,如果浓度化学品流速等于设定点(在可接受的系统容许量内)则化学品流量控制器能够保持流速(步骤434)。 hem, the chemicals flow controller capable of reducing the flow rate (step 428), if fluid flow is concentrated chemicals is less than Qehem (step 430), the cold fluid flow controller can increase the flow rate, if the concentration of the chemical flow rate equal to the set point (at an acceptable tolerance within the system) then the chemical flow controller can maintain the flow rate (step 434). 因此,化学品流量控制器能够基于冷流体流速设定点Qctem调整浓缩化学品的流速。 Therefore, the chemical flow controller can be based on the flow rate of the cooling fluid flow rate set point Qctem adjustment concentrated chemicals.

[0080] 图4A到图4C的流程图表示本发明的一个示例实施例。 [0080] a flowchart of FIG. 4A to FIG. 4C shows an example of the present embodiment of the invention. 然而,应该明白,能够按照需要或期望重复执行图4A到图4C的步骤,并且能够按照不同顺序重复执行图4A到图4C 的步骤。 However, it should be understood that, in accordance with required or desired repeat FIG. 4A to 4C steps, and the steps can be repeatedly executed Figures 4A to 4C is in a different order. 此外,能够并行执行在每个流量控制器上执行的步骤。 Moreover, steps can be performed in parallel on each flow controller. 尽管在图4A到图4C中冷水流量控制器负责计算各个参数并且向热水流量控制器和化学品流量控制器断定设定点, 但是图4A到图4C的步骤能够以其它方式分布到这些流量控制器。 Although the cold water flow controller responsible for calculating the respective parameters in Figure 4A to 4C, and the hot water flow controller and the flow controller to determine the chemical setpoint, but FIG. 4A to 4C steps can otherwise be distributed to the flow controller. 另外,热水和冷水流量控制器的角色能够进行颠倒,从而使得热水流量控制器基于流速设定点控制流量并且冷水流量控制器基于温度设定点控制流量。 In addition, hot and cold water flow controller roles can be reversed, so that the water flow controller based traffic flow set point and cold flow controller based on the temperature setpoint control traffic.

[0081] 在图3和图4A-4C的实施例中,假定加在第二混合器312的额外流体的温度不会显著地影响tT2。 [0081] In the embodiment of FIGS. 3 and 4A-4C, it is assumed the temperature of the additional fluid is applied to a second mixer 312 does not significantly affect tT2. 因此,假定在混合器312的出口处流体的温度(tj近似为tM1(即,近似混合DIW的温度)。根据本发明的另一个实施例,能够利用额外温度传感器测量tM2从而使得这个温度能够用于流量控制中。 Thus, assuming the fluid temperature at the outlet of the mixer 312 (tj approximately tM1 (i.e., approximately the temperature of the mixed DIW). According to another embodiment of the present invention, to take advantage of the additional temperature sensor measures tM2 so that this temperature may be used in flow control.

[0082] 图5是溶液混合系统500的一个实施例的图解表示,其中,该溶液混合系统500与图3的溶液混合系统相似并且在第二混合器312的下游加入电导计502和额外温度传感器504。 [0082] FIG. 5 is an illustration of an embodiment 500 of a solution of a hybrid system, where the system 500 solution was mixed with a solution of a hybrid system in Figure 3 is similar to and downstream of the mixer 312 is added to the second conductivity meter 502 and additional temperature sensor 504. 由于流体的电导率通常与流体的浓度有关,所以能够利用来自电导率传感器502的反馈调整在静态混合器312加入的浓缩化学品的浓度以实现期望电导率。 Since the conductivity of the fluid and the concentration of a fluid is usually related, it is possible to use the feedback from the conductivity sensor 502 to adjust the concentration of the chemical in the concentrate static mixer 312 is added to achieve the desired conductivity. 另外,能够利用由温度传感器504读取的温度调整热和冷DIW的流速。 Further, it is possible using the temperature read by the temperature sensor 504 to adjust the flow rate of hot and cold DIW.

[0083] 作为例子,冷流体流量控制器104能够用作热流体流量控制器102和化学品流量控制器310的主控制器。 [0083] As an example, the cold fluid flow controller 104 can be used as heat transfer fluid flow controller master controller 102 and flow controller 310 chemicals. 初始,冷流体流量控制器104接收目标混合化学品流速(Qt2)、目标混合化学品比率、目标混合化学品温度(、2)、、和、。 Initially, the cold fluid flow controller 104 receives the target mixed chemicals flow rate (Qt2), the target ratio of mixing chemicals, mixing chemicals target temperature (2) ,, and. 基于目标混合化学品流速Qt2和目标混合化学品比率,冷流体控制器104能够确定DIW的目标流速(Qn)和浓缩NaCl的流速(Qcheffl)。 Mixing chemicals mixing ratio based on the target and the target chemicals Qt2 velocity, cold fluid controller 104 is able to determine target velocity DIW (Qn) and concentrated NaCl flow rate (Qcheffl). 初始,tT1能够设置等于tT2。 Initial, tT1 can be set equal tT2. 利用QT1、tT2、以及热和冷DIW的输入温度,冷流体流量控制器104还能够确定目标冷DIW流速(Q。)和热流体流量控制器104的温度设定点tSP。 Use QT1, tT2, as well as hot and cold DIW input temperature, the cold fluid flow controller 104 is also able to determine the target cold DIW flow rate (Q.) and the temperature of the hot fluid flow controller setpoint 104 tSP. tSP能够初始设置等于tT2。 tSP initial setup can be equal tT2. 冷流体流量控制器104向热流体流量控制器102提供tSP以及向化学品流量控制器310提供Q。 Cold fluid flow controller 104 provides tSP and chemicals flow controller 310 to provide the hot fluid flow controller 102 Q. h„。然后,每个流量控制器能够控制它各自流体的流量。[0084] 根据一个实施例,控制器104能够利用稀释化学品的温度(tM2)调整热和冷DIW的流速。尽管能够立即开始利用tM2的控制,但是根据其它实施例,在开始利用tM2的控制之前冷流体流量控制器104能够等待预定的时间段。例如,完成这项工作以设置稀释化学品的流量和温度。 h ". Then, each of the flow controller is able to control its respective fluid flow rate. [0084] According to one embodiment, the controller 104 can use temperature, diluted chemicals (tM2) adjusting the flow rate of hot and cold DIW Although able to immediately Start using the control tM2, but according to other embodiments, before starting the use of the cold fluid flow control tM2 controller 104 can wait a predetermined period of time. For example, to set the job done diluted chemicals flow and temperature.

[0085] 根据一个实施例,冷流体流量控制器104能够基于混合化学品的测量温度(tj调整Qc和tSP。例如,给定来自温度传感器504的tK,冷流体流量控制器104能够将新tSP设置等于: [0085] According to one embodiment, the cooling fluid flow controller 104 can be based on the measured temperature mixing chemicals (tj adjustment Qc and tSP. For example, a given tK from the temperature sensor 504, the cold fluid flow controller 104 can be a new tSP set equal to:

[0086] tSP(n) = tSP(n_1) + (tT2-tM2)[方程2] [0086] tSP (n) = tSP (n_1) + (tT2-tM2) [Equation 2]

[0087] 因此,如果tK大于tT2,则tSP降低,从而导致DIW的温度下降;如果tK小于tT2,则tSP升高,从而导致DIW的温度上升。 [0087] Thus, if tK than tT2, the tSP reduced, resulting in a temperature drop DIW; if tK less than tT2, the tSP increased, resulting in a temperature rise DIW. 针对方程1的、利用在方程2中计算的tSP,冷流体流量控制器104还能够确定冷DIW的新目标流速(即,新%)。 For equation 1, the use of 2 in the equation calculated tSP, the cold fluid flow controller 104 can also determine the cold DIW new target flow rate (i.e., new%). 如上所述,冷流体流量控制器104能够根据%调整流量,并且热流体流量控制器102能够根据tSP和tM1调整流量。 As mentioned above, the cold fluid flow controller 104 can be adjusted according to% traffic, and the hot fluid flow controller 102 is able to adjust the flow according to tSP and tM1.

[0088] 图6A到图6C是流程图,示出了控制流体的流量以形成混合流体的方法的一个实施例。 [0088] FIG 6A to FIG 6C is a flowchart showing a flow of control fluid to form a mixed fluid of a method of an embodiment. 图6A到图6C的方法能够实现为可由处理器执行并且存储在计算机可读介质上的计算机指令。 6A-6C, a method can be implemented as executable by the processor and a computer-readable instructions stored on a computer medium. 例如,能够通过对一个或多个OptiChem P1200 LFC流量控制器进行编程实现本发明的实施例。 For example, through one or more OptiChem P1200 LFC flow controller is programmed to achieve embodiments of the present invention.

[0089] 图6A对应在冷流体流量控制器(例如,图5的流量控制器104)上实现的控制方法,图6B对应在热流体流量控制器(例如,图5的流量控制器10上实现的控制方法,图6C对应在化学品流量控制器310上实现的控制方法。 [0089] Figure 6A corresponds to a control method in the cold fluid flow controller (e.g., flow controller 104 in FIG. 5) on the implement, and Fig. 6B corresponding to the thermal fluid flow controller (e.g., flow controller 10 5 of FIG implemented on control method, the control method in FIG. 6C corresponding to the chemical flow controller 310 achieved.

[0090] 冷流体流量控制器接收包括目标混合化学品混合比、目标混合化学品流速ΟίΤ2)、 冷流体温度(tc)、热流体温度(tH)、目标混合化学品温度(tT2)的输入(步骤602)。 [0090] cold fluid flow controller receiving a target mix of chemicals mixing ratio, mixing chemicals target velocity ΟίΤ2), cold fluid temperature (tc), thermal fluid temperature (tH), mixing chemicals target temperature (tT2) input ( Step 602). 利用目标混合化学品混合比和目标混合化学品流速Qt2,冷流体流量控制器能够确定目标DIW流速Qti和浓缩化学品或其它流体(例如,图5的例子中的NaCl)的流速OUJ (步骤606)。 Target mixed use of chemicals and the mixing ratio of the target mixed chemicals flow rate Qt2, the cold fluid flow controller is able to determine target velocity Qti DIW and concentrated chemicals or other fluids (e.g., in the example of FIG. 5 NaCl) at a flow rate OUJ (step 606 ). 流量控制器102能够初始进行工作,就好像NaCl的流量对温度tT2具有较小影响。 Initial flow controller 102 can work, if the flow rate tT2 NaCl having little influence on the temperature. 因此,冷流体流量控制器能够设置tT = tT2并且根据方程1确定Q。 Therefore, the cold fluid flow controller can be set tT = tT2 and determined according to equation 1 Q. ,其中,Qt = Qn并且tT = tT2(步骤608)。 Wherein, Qt = Qn and tT = tT2 (step 608). 另外,冷流体流量控制器能够设置tSP = tT(另外在步骤609所示)。 In addition, the cold fluid flow controller can be provided tSP = tT (Also shown in step 609).

[0091] 当接收到触发信号时(步骤610),冷流体流量控制器能够开始利用%作为流速设定点调整流体流量,向热流体流量控制器发送命令以调整热流体的流量,并且向化学品流量控制器发送命令以控制第三流体的流量。 [0091] When the trigger signal is received (step 610), the cold fluid flow controller can be started using the flow rate set point adjustment as a% of fluid flow, to send commands to a hot fluid flow controller to adjust the flow rate of the hot fluid, and to the chemical product flow controller sends a command to control the flow rate of the third fluid. 冷流体流量控制器能够根据现有技术中已知的流体流量控制方案调整冷流体的流量,其中,这些现有技术中已知的流体流量控制方案包括但不限于差分控制方案、积分控制方案、比例积分控制方案、比例积分差分或模糊逻辑控制方案。 Cold fluid flow controller can adjust the flow rate of the cooling fluid according to the prior art known in fluid flow control scheme in which these prior art known in fluid flow control scheme include, but are not limited to, differential control scheme, the integral control scheme, proportional integral control scheme, proportional integral differential or fuzzy logic control program. 如果冷水的流体流量大于流体流量设定点,则冷流体流量控制器能够减小流速(步骤616),如果冷水的流体流量小于流体流量设定点(步骤618),则冷流体流量控制器能够增大流速,并且如果冷流体流速等于设定点(在可接受的系统容许量内),则冷流体流量控制器能够保持流速(步骤620)。 If the fluid flow of cold water is greater than the fluid flow set point, the cooling fluid flow controller capable of reducing the flow rate (step 616), if the fluid flow of cold water is smaller than the fluid flow rate set point (step 618), the cooling fluid can flow controller increase the flow rate, and if the flow rate of cooling fluid equal to the set point (in the system within an acceptable tolerance), the cold fluid flow controller to maintain the flow rate (step 620). 因此,冷流体流量控制器能够基于冷流体流速设定点& 调整冷流体的流速。 Therefore, the cold fluid flow controller can be based on the cold fluid flow rate set point adjustment & cold fluid flow rate.

[0092] 冷流体流量控制器还能够从第二混合器的下游的温度传感器接收混合化学品的温度(例如,能够从图5的温度传感器504接收tK)(步骤622)。 [0092] cooling fluid flow controller is further capable of receiving a temperature of the mixed chemicals from the second temperature sensor downstream of the mixer (e.g., able to receive tK 504 from the temperature sensor in Fig. 5) (step 622). 例如,如结合图5所述,利用tM2,冷流体流量控制器能够计算新%和tM2 (步骤638)。 For example, as described in conjunction with Figure 5, the use of tM2, cooling fluid flow controller is able to calculate the new% and tM2 (step 638). 然后,冷流体流量控制器能够利用新%执行步骤618-620,并且向热流体流量控制器传递新tSP。 Then, the cold fluid flow controller to take advantage of new steps 618-620%, and passes to the hot new tSP fluid flow controller. 根据一个实施例,随着tM2 变化,%和tSP能够连续更新。 According to one embodiment, as tM2 change,% and tSP can be continuously updated.

[0093] 如图6B所示,热流体流量控制器能够基于混合流体的温度(tM1)和混合流体设定点(tSP)调整热流体的流速。 [0093] shown in Figure 6B, the hot fluid flow controllers can be based on the temperature of the mixed fluid (tM1) and mixed fluid setpoint (tSP) adjusting the flow rate of the hot fluid. 能够直接从温度传感器或者从冷流体流量控制器接收混合流体的温度。 Can be directly received from the temperature sensor or a cooling fluid from the mixing temperature of the fluid flow controller. 热水流量控制器104接收初始温度设定点(步骤62。如果tM1大于tSP,则热流体流量控制器减小流体的流速(步骤624),如果tM1小于tSP,则热流体流量控制器增大热流体的流速(步骤626),并且如果tM1等于tSP (在可接受的系统容许量内),则热流体流量控制器保持热流体的流速(步骤628)。热流体流量控制器在步骤6中能够接收新温度设定点并且相应地执行步骤624-628。 Water flow controller 104 receives the initial temperature set point (step 62. If tM1 more than tSP, then reduce the heat transfer fluid flow rate of the fluid flow controller (step 624), if less than tM1 tSP, the hot fluid flow controller increases the flow rate of a hot fluid (step 626), and if tM1 equal tSP (acceptable tolerance in the system), the thermal fluid flow controller to maintain the flow rate of a hot fluid (step 628). In a hot fluid flow controller in step 6 able to receive a new temperature set point and accordingly executes steps 624-628.

[0094] 化学品流量控制器能够基于Qcta相似地调整额外流体(例如,浓缩NaCl)的流量。 [0094] chemicals flow controller can be adjusted based on Qcta similar additional fluid (e.g., concentrated NaCl) traffic. 如果浓缩化学品(或其它流体)的流体流量大于Q。 If the concentrated chemicals (or other fluids) of fluid flow is greater than Q. tem,则化学品流量控制器能够减小流速(步骤630),如果浓缩化学品的流体流量小于Qctem (步骤632),则冷流体流量控制器能够增大流速,并且如果浓缩化学品流速等于设定点(在可接受的系统容许量内),则化学品流量控制器能够保持流速(步骤634)。 tem, the chemicals flow controller flow rate can be reduced (step 630), if fluid flow is concentrated chemicals is less than Qctem (step 632), the cold fluid flow controller can increase the flow rate, and if the flow rate is equal to concentrated chemicals provided point (at an acceptable tolerance within the system), the chemical flow controller can maintain the flow rate (step 634). 因此,化学品流量控制器能够基于冷流体流速设定点Qctem 调整浓缩化学品的流速。 Therefore, the chemical flow controller can be based on the flow rate of the cooling fluid flow rate set point Qctem adjustment concentrated chemicals.

[0095] 另外,化学品流量控制器能够接收混合化学品的电导率的测量(步骤640)。 [0095] In addition, the chemical flow controller can receive mixed chemicals conductivity measurement (step 640). 禾Ij用电导率,流量控制器能够调整在第二混合器处加入的化学品的浓度。 Wo Ij with conductivity, flow controller can adjust the concentration of the second mixer by adding chemicals. 如果电导率指示混合化学品太浓,则流量控制器能够减小浓缩化学品的浓度(步骤64幻。如果电导率传感器指示混合化学品太稀,则流量控制器能够增大加DIW的浓缩化学品的浓度。否则,浓度不会改变(步骤646)。 If the conductivity is too strong indication mixing chemicals, traffic controllers can reduce the concentration of the chemical concentrate (step 64 magic. If the conductivity sensor indicates mixing of chemicals is too thin, it is possible to increase the flow controller of concentrated chemical processing DIW concentration of goods. Otherwise, the concentration does not change (step 646).

[0096] 图6A到图6C的流程图表示本发明的一个示例实施例。 [0096] FIG 6A to FIG. 6C shows a flowchart of an exemplary embodiment of the present invention. 然而,应该明白,能够按照需要或者期望重复图6A到图6C的步骤,并且能够按照不同的顺序执行图6A到图6C的步骤。 However, it should be understood that, in accordance with required or desired repeat 6A-6C steps, and can perform the steps in Fig. 6A to Fig. 6C in a different order. 此外,能够并行执行在每个流量控制器上实现的步骤。 Moreover, steps can be performed in parallel on each of the flow controllers. 尽管在图6A到图6C中冷水流量控制器负责计算各个参数并且向热水流量控制器和化学品流量控制器断定设定点,但是图6A到图6C的步骤能够以其它方式分布到这些流量控制器。 Although in Figs. 6A to 6C, the cold water flow controller responsible for calculating the various parameters and to the hot water flow controller and the flow controller to determine the chemical setpoint, but the step of FIG. 6A to FIG. 6C can otherwise be distributed to these flow controller. 此外,热水和冷水流量控制器的角色能够进行颠倒,从而使得热水流量控制器基于流速设定点控制流量而冷水流量控制器基于温度设定点控制流量。 In addition, hot and cold water flow controller roles can be reversed, so that the water flow controller based traffic flow set point and cold flow controller based on the temperature setpoint control traffic.

[0097] 如上所述,各种流量控制器能够控制进入混合器的流体的流量,其中,这些混合器(例如,混合器106和混合器31能够可任选地是静态混合器。图7A到图7F提供了静态混合器组件700及其部件的一个实施例的图解表示。对照图7A,静态混合器组件700包括混合器壳702、入口组件704和出口组件706。入口组件704包括两个入口即入口708和入口710。这些入口能够耦合到与上游流量控制器进行连接的流体供线。例如,入口708能够从热DIW流量控制器102接收热DIW,而入口710能够从冷DIW流量控制器104接收冷DIff0在图7A所示的例子中,入口组件704具有阳螺纹部分712和714,其中,这些阳螺纹部分712和714连接到入口供线。相似地,出口组件706具有阳螺纹部分716,其中,该阳螺纹部分716连接到出口线。 [0097] As described above, a variety of flow controller can control the flow of fluid entering the mixer, wherein the mixer (e.g., mixer 106 and mixer 31 can optionally be a static mixer. Figure 7A to Figure 7F provides static mixer assembly 700 and its components diagrammatic representation of one embodiment. with reference to Figure 7A, a static mixer assembly 700 includes a mixer housing 702, an inlet assembly 704 and outlet assembly 706. The inlet assembly 704 includes two inlets i.e. an inlet and an inlet 710. The inlet 708 can be coupled to the flow controller connected to the upstream fluid supply line. For example, the inlet 708 can flow from the hot DIW controller 102 receives hot DIW, and the inlet 710 from the cold DIW can flow controller 104 receives cold DIff0 In the example shown in Figure 7A, the inlet assembly 704 having a male threaded portion 712 and 714, wherein the male threaded portions 712 and 714 connected to the inlet supply line. Similarly, the outlet assembly 706 having a male threaded portion 716 , wherein the male threaded portion 716 is connected to the outlet line.

[0098] 图7B是混合器组件700的局部剖视图并且示出了从入口组件704到出口组件706 由混合器壳702进行限定的流动通道718。 [0098] FIG. 7B is a partial cross-sectional view of the mixer assembly 700 and shows the components from the inlet 704 to the outlet assembly 706 defining a flow passage 718 by the mixer housing 702. 因此,进入入口组件704的入口708和入口710 的流体从公共出口流出。 Thus, the inlet 704 into the inlet assembly 708 and the inlet 710 of the fluid outflow from the common outlet. 图7B还示出:入口组件704能够包括阳螺纹部分719并且出口组件706能够包括阳螺纹部分720,其中,该阳螺纹部分719和720与具有对应的阴螺纹部分的混合器壳702进行耦合。 Figure 7B also shows: an inlet assembly 704 can include a male threaded portion 719 and the outlet assembly 706 can include a male threaded portion 720, wherein the male threaded portion 719 and 720 and the mixer housing 702 has a corresponding female threaded portion of the coupling.

[0099] 图7C示出了混合器组件700的另一个局部剖视图。 [0099] Figure 7C shows another partial sectional view of the mixer assembly 700. 如图7C所示,根据本发明的一个实施例的混合器组件700包括用作静态混合器的混合器盘722。 7C, the mixer assembly in accordance with one embodiment of the present invention is used as a static mixer 700 comprises a disk 722 mixer. 在图7C的实施例中, 混合器盘722位于混合器壳702中入口组件704的出口侧。 In the embodiment of FIG. 7C, the mixer 722 located on the outlet side of the disc 702 in the mixer housing inlet assembly 704. 混合器盘722能够包括固定凸缘(seating flange) 7,其中,固定凸缘7位于壳组件702的对应环孔中。 Mixer plate 722 can include a fastening flange (seating flange) 7, wherein the shell component is located in the fixed flange 7 corresponding annular ring 702. 与该环孔配合用作轨或槽装配,固定凸缘7M能够确保恰当地将混合器盘722座落于混合器壳702中。 The ring hole or slot rail assembly is used with fixed flange 7M to ensure proper mixer plate 722 is located in the mixer housing 702. 此外,在混合器盘722的上游侧可以包括环孔726,其中,该环孔7接收入口组件704的出口侧上的凸缘。 In addition, on the upstream side of the mixer disc 722 may include a ring hole 726, wherein the annular ring 7 receiving flange 704 of the outlet side of the inlet assembly on. 这也有助于恰当地密封混合器盘722。 This also helps to seal properly mixer plate 722.

[0100] 作为例子,而并非进行限制,入口组件704和出口组件706被构造为连接到具有0.25英寸孔的3/8英寸OD管,并且流动通道718具有0.21英寸直径。 [0100] By way of example, and not to be limiting, the inlet assembly 704 and outlet assembly 706 is configured to connect to 3/8 inch OD tube having a bore of 0.25 inches, and the flow passage 718 having a diameter of 0.21 inches. 此外,根据一个实施例,混合器组件700的各个部件能够由特氟纶或变型特氟纶进行机加工或模铸。 Furthermore, in accordance with one embodiment, each member of the mixer assembly 700 can be machined or molded from Teflon or Teflon variations.

[0101] 图7D是示出上游侧的一个实施例的混合器盘722的一个实施例的图解表示。 [0101] FIG 7D is a diagram showing the upstream side of the one plate embodiment of the mixer 722 illustrates an embodiment of FIG. 根据本发明的一个实施例,混合器盘722包括外部分728,其中,该外部分7由外圆周上的外表面7和内圆周731上的内表面730进行限定。 Embodiment, the mixer plate in accordance with one embodiment of the present invention 722 includes an outer portion 728, wherein the outer portion 7 by the outer surface and the outer circumference of the inner surface of the inner circumference 7 731 730 limitation. 此外,外部分7能够包括环孔726,如上所述,环孔7接收入口组件704的出口侧上的凸缘以有助于进行密封。 Furthermore, the outer ring portion 7 hole 726 can include, as described above, the ring hole 7 receiving flange on the outlet side of the inlet assembly 704 to aid sealing.

[0102] 在图7D的实施例中,内凸缘732从内表面730向内进行突起,其中,内凸缘表面733限定流动通道。 [0102] In the embodiment of Figure 7D, the inner flange 732 carried projecting inwardly from the inner surface 730, wherein the inner flange surface 733 define a flow passage. 另外,两个径向相对混合突片(tab)(突片736和738)向内彼此朝向进行突起。 In addition, two diametrically opposed mixing tabs (tab) (tabs 736 and 738) projecting inwardly toward each other. 根据优选实施例,混合突片736和738不会接触,但是在它们之间具有小的间隙从而使得流动通道的中心不受到阻塞。 According to a preferred embodiment, the mixing tabs 736 and 738 do not contact, but with a small gap between them so that the center of the flow channel not being blocked. 混合突片736和混合突片738的下游表面近似垂直于内凸缘表面733进行延伸并且上游表面是倾斜的,从而使得在流动通道的中心处这些混合突片较薄并且在内凸缘732附近较宽。 The downstream surface of the mixture and mixing tabs 736 tabs 738 are approximately perpendicular to the inner surface of the flange 733 and extends upstream surface is inclined, so that at the center of the flow channel of the mixing tabs is thin and close to the inner flange 732 wider. 根据一个实施例,混合突片736和738的上游表面近似倾斜15度。 According to one embodiment, the upstream surface of the mixture and 738 of the tab 736 is inclined approximately 15 degrees.

[0103] 混合器盘722还能够包括定位凹痕740,其中,该定位凹痕740用于将混合器盘722定位在混合器组件壳702中。 [0103] Mixer 722 also includes a positioning plate dent 740, wherein the dent 740 for positioning the disc mixer mixer assembly 722 positioned in the housing 702. 定位凹痕740能够与混合器组件壳702中的对应凸起紧密配合从而将混合器盘722进行定位以具有特定导向。 Positioning dent mixer assembly 740 is capable of housing 702 so as to correspond closely with the projection plate 722 is positioned to the mixer having a particular orientation. 例如,能够将混合器盘722进行定位从而使得混合突片定向在特定方向。 For example, the mixer can be positioned so that the disc 722 mixing tabs oriented in a particular direction.

[0104] 图7E是从上游进行观察的混合器盘722的图解表示。 [0104] Figure 7E is observed from the upstream mixer 722 of the disc graphical representation. 作为例子,而并非进行限制, 外部分728的外径可以是0. 55英寸而内径是0. 21英寸。 By way of example, and not to be limiting, the outer diameter of the outer portion 728 may be 0.55 inches and an inner diameter of 0.21 inches. 另外,内凸缘732的内径可以是0. 166英寸。 Further, the inner diameter of the inner flange 732 may be 0.166 inches. 混合突片736和738均能够从内凸缘732向内延伸0. 074,其中,在这两个混合突片之间保留0. 018英寸的间隙。 Mixing tabs 736 and 738 are capable of extending from the inner flange 732 0.074 inwardly, wherein, between the two retention tabs mixing 0.018 inches clearance. 接着,作为例子,环槽726的外径可以是0. 45英寸并且厚度是0. 029英寸。 Next, as an example, the outer diameter of the annular groove 726 may be 0.45 inches and a thickness of 0.029 inches. 应该注意,仅仅作为例子提供这些尺寸而并非进行限制并且能够利用更大或更小的混合盘。 It should be noted that these dimensions are provided as examples only and not to be limiting and can utilize a larger or smaller hybrid disc. 此外,各个半径或其它示例尺寸彼此能够成不同的比例。 Moreover, various other example dimensions each radius or can be a different scale.

[0105] 图7F是沿着图7E的线AA剖开的一个实施例混合器盘722的截面图。 [0105] Figure 7F is along the line AA of Figure 7E Example mixer plate taken sectional diagram 722 according to one embodiment. 除了结合图7D讨论的特征以外,图7F示出了固定凸缘724。 Apart discussed in conjunction with FIG characterized 7D, FIG. 7F showing a mounting flange 724. 在这个实施例中,固定凸缘7是从混合器盘722的下游侧突起的环孔。 In this embodiment, the fixed flange 7 is ring hole 722 from the downstream side of the mixer disc protrusions. 从图7F还能够注意到,突片736和738可以是楔形,其中,当每个突片的上游表面靠近混合器盘722的中心时它们向内成15度角。 Also can be noted from FIG 7F, tabs 736 and 738 may be wedge-shaped, wherein, when the upstream surface of each tab 722 near the center of the disc mixer 15 degrees are inwardly. 另一方面,下游表面保持与流动通道垂直。 On the other hand, maintain the downstream surface perpendicular to the flow channel. 这些突片可以具有其它形状并且可以具有两个以上的突片或者具有一个突片。 These tabs may have other shapes and may have two or more tabs or having a tab. 此外,作为例子提供图7F所示的尺寸和角度而非进行限制。 Furthermore, dimensions and angles are provided as examples shown in Fig. 7F and not limiting. [0106] 图8A到图8C提供了混合器组件的另一个实施例的图解表示。 Graphic [0106] Figures 8A-8C provides a mixer assembly of another embodiment of FIG. 对照图8A,静态混合器组件800包括混合器壳802、三个入口组件804、806和808以及出口组件810。 Reference to Figure 8A, the static mixer assembly 800 includes a mixer housing 802, three inlet assemblies 804, 806 and 808 and an outlet assembly 810. 这些入口组件中的每个可以包括由供线进行连接以提供流体的入口。 The inlet assembly may include each connected by a supply line to provide an inlet fluid. 利用图3的混合系统的例子,入口组件804包括一个入口,通过该入口,能够提供混合流体(例如,混合DIW),而入口组件806和808包括入口,通过这些入口,能够由化学品流量控制器(例如,图3的化学品流量控制器310)提供浓缩化学品。 Examples of the use of a hybrid system 3 of FIG inlet assembly 804 includes an inlet, through the inlet, mixed fluid can be provided (e.g., mixed DIW), and the inlet assembly 806 and 808 includes an inlet through which the inlet, the flow rate can be controlled by chemicals (e.g., FIG. 3 chemicals flow controller 310) to provide concentrated chemicals. 在图8A所示的例子中,入口组件804、806和808分别具有阳螺纹部分812、814和816,从而连接到入口供线。 In the example shown in Figure 8A, the inlet assembly 804, 806 and 808, respectively, having a male threaded portion 812, 814 and 816 to connect to the inlet supply line. 相似地,出口组件810具有阳螺纹部分818以连接到出口线。 Similarly, the outlet assembly 810 having a male threaded portion 818 to connect to the outlet line.

[0107] 图8B是混合器组件800的局部剖视图并且示出了从入口组件804到出口组件810 由混合器壳802进行限定的流动通道820。 [0107] Figure 8B is a partial mixer assembly 800 and shows a cross-sectional view of the components from the inlet 804 to the outlet assembly 810 defines a flow path 820 by the mixer housing 802. 此外,图8B示出了分别贯通入口组件806和808 的流体流动通道822和824,其中,流体流动通道822和拟4与流动通道820进行接合。 In addition, FIG 8B shows the assembly 806, respectively, through the inlet 808 and the fluid flow channels 822 and 824, wherein the fluid flow path 822 and flow path 820 and intended to 4 are joined. 因此,进入入口组件804、入口组件806和入口组件808的流体从公共出口流出。 Thus, entering the inlet assembly 804, the inlet assembly 806 and a fluid inlet assembly 808 flows out from the common outlet. 图7B还示出:入口组件804可以包括阳螺纹部分824,入口组件806可以包括阳螺纹部分826,入口组件808包括阳螺纹部分828并且出口组件810可以包括阳螺纹部分830,从而能够与具有对应的阴螺纹部分的混合器壳802进行耦合。 Figure 7B also shows: the inlet assembly 804 may include a male threaded portion 824, an inlet assembly 806 may include a male threaded portion 826, an inlet assembly 808 includes a male threaded portion 828 and the outlet assembly 810 may include a male threaded portion 830, thereby having a corresponding mixer housing 802 of the female threaded portion coupled.

[0108] 图8C示出了混合器组件800的一个实施例的截面图。 [0108] Figure 8C shows a mixer assembly 800 is a cross-sectional view of an embodiment. 如图8C所示,根据本发明的一个实施例,混合器组件800包括用作静态混合器的混合器盘832。 8C, the embodiment, the mixer assembly 800 comprises a static mixer is used as mixer disc 832 in accordance with one embodiment of the invention. 在图8C的实施例中, 混合器盘832位于混合器壳802内的入口组件804的出口侧。 In the embodiment of FIG. 8C, the mixer 832 located on the outlet side of the inlet disc assembly 802 of the mixer housing 804. 混合器盘832可以包括固定凸缘834,其中,固定凸缘834位于壳组件802的对应环孔中。 Mixer 832 may include a fixed flange plate 834, wherein the fixed flange 834 is located in the corresponding annular ring housing assembly 802. 与该环孔配合用作轨或槽装配,固定凸缘834能够确保恰当地将混合器盘832座落于混合器壳802中。 The ring hole or slot rail assembly is used with a fixed flange 834 to ensure proper mixer plate 832 is located in the mixer housing 802. 此外,在混合器盘832可以包括环孔836,其中,在入口组件804的出口侧上该环孔836接收凸缘。 Furthermore, in the mixer 832 may comprise a ring aperture plate 836, which, on the outlet side of the inlet assembly 804. The ring aperture 836 receiving the flange. 这也有助于恰当地固定混合器盘832。 This also contributes to the disc mixer 832 appropriately secured.

[0109] 图8C还示出:流动通道822和拟4与混合器盘832的下游的流动通道820进行交叉。 [0109] Also shown in Figure 8C: a flow channel 822 and the proposed four downstream of the flow channel plate 832 820 mixer cross. 因此,在如图3所示的混合系统中,浓缩化学品引入到混合盘822的下游。 Thus, in the hybrid system shown in FIG. 3, and concentrated chemicals introduced into the downstream of the mixing disc 822.

[0110] 作为例子,而非进行限制,入口组件804、入口组件806、入口组件808和出口组件810构造为连接到具有0.25英寸孔的3/8英寸OD管。 [0110] By way of example, and not to be limiting, the inlet assembly 804, an inlet assembly 806, an inlet assembly 808 and outlet assembly 810 is configured to connect to a 3/8 inch OD tube having a bore of 0.25 inches. 作为例子,而非进行限制,流动通道218具有0. 21英寸直径。 By way of example, and not to be limiting, the flow passage 218 has a diameter of 0.21 inches. 根据一个实施例,混合器组件800的各个部件能够由特氟纶或变型特氟纶进行机加工或模铸。 According to one embodiment, various components of the mixer assembly 800 can be machined or molded from Teflon or Teflon variations. 混合器盘822与图7D到图7F的混合器盘722相似或者相同。 Mixer plate 822 and Figure 7D 722 similar or identical to the figure of the mixer plate 7F. 能够对混合盘822进行定位(例如,利用定位凹痕)从而使得混合盘822的突片在流动通道822和流动通道拟4上进行定位。 On the hybrid disc 822 can be positioned (e.g., the use of positioning dimples) hybrid disc 822 so that the tabs in the flow path 822 and the flow channel 4 is positioned on proposed.

[0111] 如上所述,本发明的实施例能够提供一种流体混合系统,这种流体混合系统利用各种流量控制器(例如,热DIW控制器102、冷DIW控制器104和化学品流量控制器310)。 [0111] As described above, embodiments of the present invention can provide a fluid mixing system, such fluid mixing systems utilizing a variety of flow controller (e.g., controller 102 DIW heat, cold DIW controller 104 and flow control chemicals 310). 根据各种实施例,这些流量控制器之一能够用作向其它流量控制器发送设定点的主控制器。 According to various embodiments, one of these flow controller set point can be used as the primary controller sends to other flow controller. 因此,主流量控制器优选能够断定多个设定点。 Therefore, the main flow controller preferably can be judged that a plurality of set points.

[0112] 许多现有的流量控制器接收作为模拟电压/电流的设定点。 [0112] Many existing flow controller receives as analog voltage / current set point. 通常,这需要利用多个模拟源向不同的流量控制器提供设定点。 Typically, this requires the use of a plurality of analog sources to provide different flow controller set point. 然而,特定流量控制器可以仅仅具有一个可用模拟端口或者具有有限数目的可用模拟端口。 However, the specific flow controller may have only one available analog port or having a limited number of available analog port. 这限制了特定主流量控制器能够向其断定设定点的从流量控制器的数目。 This limits the number of the specific master controller is able to flow from the flow controller to its determined set point. 通过在特定模拟通信链路上对模拟设定点进行复用,本发明的实施例减小或消除了与具有有限数目的模拟端口关联的缺陷。 By analog communication links on a particular multiplex of analog set point, embodiments of the present invention reduces or eliminates the associated analog port having a limited number of defects. [0113] 图9是对模拟设定点进行复用的系统900的一个实施例的图解表示。 [0113] FIG. 9 is a simulation of a set point 900 illustrated embodiment of the multiplexing system representation. 系统900包括模拟信号源902,其中,模拟信号源902经由模拟通信链路906和一个或多个并行数字通信链路908连接到多个从装置90到904d。 The system 900 includes an analog signal source 902, wherein the analog signal source 902 is connected to a plurality of slave devices 90 to 904d via analog communications link 906 and one or more parallel digital communications link 908. 模拟信号源902可以是例如由Billerica,MA 的Mykrolis公司(现在是Chaska,Minnesota的Entegris公司的一部分)产生的OptiChem P1200的流量控制器。 An analog signal source 902 may be for example Billerica, MA's Mykrolis Corporation (now part of Chaska, Minnesota of Entegris, Inc.) generated OptiChem P1200 flow controller. 相似地,装置90到904d也可以是OptiChem P1200流量控制器。 Similarly, means may also be OptiChem P1200 flow controller 90 to 904d. 换言之,用作模拟信号源902的一个流量控制器可以用作其它流量控制器的主装置。 In other words, an analog signal source is used as a flow controller 902 may be used as the primary means of other flow controller. 然而, 应该注意到,模拟信号源902可以是能够断定模拟设定点的任何装置并且装置90到904d 可以是能够接收模拟设定点的任何装置。 However, it should be noted that the analog signal source 902 may be any device that can be judged that the analog set point and means 90 to 904d may be any device capable of receiving an analog set point.

[0114] 模拟信号源902在模拟通信链路906上输出包括多个从装置的设定点的模拟信号。 [0114] analog signal source 902 to the analog communication link 906 comprises a plurality of output means of the set point from an analog signal. 数字通信链路908a到908d能够给从装置90到904d的每个携带(carry)设定点指示器信号。 Digital communications link 908a to 908d can give each carry (carry) set point indicator signal from the device to the 904d's 90. 应该注意,这些数字通信链路可以是独立总线或仲裁向特定从装置904发送数字信号的同一总线。 It should be noted that these digital communication link or may be separate bus arbitration unit 904 to a particular transmission from the same digital signal bus. 特定从装置的设定点指示器信号指示:模拟信号指示那个从装置的设定点。 Specific set point indicator signal indicating device: Analog signal indicates that the set-point device. 当特定从装置904接收到模拟信号指定该装置的设定点的指示时,特定从装置904 能够从模拟信号读取它的设定点。 When a particular receiving device 904 to the analog signal from the specified set point indicative of the device, it is able to read a specific setpoint from an analog signal from the apparatus 904. 利用设定点指示器信号指示何时在模拟线上断定特定装置的设定点,能够在一个模拟总线906上复用多个模拟设定点。 Use the set point indicator signal indicates when the line judge in the analog setpoint particular device can on an analog bus 906 is multiplexed with analog setpoint.

[0115] 在图9中,模拟设定点信号和设定点指示器信号示出为来自同一主装置。 [0115] In Figure 9, the analog set point signal and the set point indicator signal is shown as coming from the same host device. 然而, 在本发明的其它实施例中,能够在多个分布装置上产生模拟设定点信号和设定点指示器信号。 However, in other embodiments of the present invention, it is possible to produce an analog set point signal and the set point indicator signal on a plurality of distribution devices.

[0116] 图10示出了由模拟信号源902断定的模拟设定点信号1000、从装置90的设定点指示器信号1002、从装置904b的设定点指示器信号1004、从装置9(Mc的设定点指示器信号1006和从装置904d的设定点指示器信号1008。根据图10所示的实施例,模拟设定点信号1000的电压/电流可以在满标值的0%与100%之间,而设定点指示器信号或者是高或者是低(例如,在+/-3. 3伏特或其它电压值或指示设定点的其它值之间进行循环)。 [0116] Figure 10 shows an analog set point signal determined by the analog signal source 902 of 1000, an indicator signal from the set point means 90 1002, an indicator signal from a set point device 904b of 1004, from the device 9 ( Mc set point indicator signal 1006 and an indicator signal from the set point means 904d of 1008. According to the embodiment shown in Figure 10, the analog set point signal 1000 voltage / current can be 0% of full scale value and between 100%, while the set point indicator signal either high or low (e.g., between +/- 3.3 volts or other voltage values or other values indicating the setpoint is circulated).

[0117] 在图10的例子中,四个模拟设定点复用到模拟信号1000。 [0117] In the example of FIG. 10, four analogue setpoint multiplexed to the analog signal 1000. 对于时间段tl,设定点是满标的45% ;对于时间段t2,设定点是满标的62% ;对于时间段t3,设定点是满标的30% ;对于时间段t4,设定点是满标的78%。 For the time period tl, the set point is 45% of full scale; for time period t2, the set point is 62% of full scale; for time period t3, the set point is 30% of full scale; for the time period t4, the set point is 78% of full scale.

[0118] 对于各种从装置,模拟设定点值可以具有不同的意义。 [0118] For each device, an analog value from the set point can have different meanings. 例如,在从装置90模拟设定点可以对应压力,而在从装置904b模拟设定点可以对应泵电机速度。 For example, in the device 90 analog set point can correspond to the pressure from the device 904b in analog setpoint can correspond pump motor speed. 因此,为了各种目的,模拟设定点信号可以复用模拟设定点。 Therefore, for all purposes, analog setpoint signal can be multiplexed analog setpoint.

[0119] 在时间段tl的至少一部分内,设定点指示器信号1002的状态从高变为低(1010 所示)从而指示从装置90应该利用满标值的45%作为它的设定点。 At least a portion [0119] In the period tl, the set point indicator signal state from high to low 1002 (shown in 1010) to indicate the apparatus 90 should use 45% of full scale value of the set point as its . 从装置90能够继续利用这个设定点值直到设定点指示器信号指示它应该从模拟设定点信号1000读取新的设定点。 Can continue to take advantage of this set-point value from the device until 90 set point indicator signal indicating that it should be from the analog set point signal 1000 to read the new set point. 因此,即使模拟信号的值改变,从装置90仍能够继续利用满标设定点的45%。 Therefore, even if the analog value changes signal from the device 90 still able to continue to use 45% of full scale set point.

[0120] 相似地,设定点指示器信号1004指示从装置904b应该利用满标的62%作为它的设定点(1012所示),设定点指示器信号1006指示从装置9(Mc应该利用满标的30%作为它的设定点(1014所示),并且设定点指示器信号1008指示从装置904d应该利用满标的78%作为它的设定点(1016所示)。 [0120] Similarly, the set point indicator signal 904b 1004 instructions from the device should use 62% of full scale as its set point (shown in 1012), the set point indicator signal 1006 instructions from the device 9 (Mc should use 30% of full scale as its set point (1014 shown), and the 1008 instruction set point indicator signal from the device 904d should use 78% of full scale as its set point (shown in 1016).

[0121] 作为例子提供在图10中提供的信号定时,并且能够利用向从装置指示何时模拟信号携带该装置的设定点的任何合适方案。 [0121] Examples of the timing signal supplied provided in Figure 10, and can take advantage of the analog signal from the device to indicate when carrying any suitable program set point of the apparatus. 例如,当从装置应该开始从模拟设定点信号读取它的设定点时,设定点指示器信号能够改变状态(例如,从低到高,从高到低,或者经历其它状态改变),并且当从装置应该停止从模拟设定点信号读取它的设定点时,再次改变状态。 For example, when it should start reading the set-point signal from the analog set point from the apparatus, the set point indicator signal can change state (e.g., from low to high, high to low, or subjected to other state change) and when it should stop reading it from the device set point signal from an analog set point again to change state. 此外,设定点指示器能够按照包括作为数据流的一部分的各种方式、中断方式或者另一种方式发送到从装置。 In addition, the set point indicator in accordance with a variety of ways including as part of the data stream, the interrupt mode or in another way to the slave device.

[0122] 根据本发明的另一个实施例,能够在多个数字线上断定设定点指示器信号。 [0122] According to another embodiment of the present invention, it is possible to determine the set point indicator signal in a plurality of digital lines. 图11 是对模拟设定点进行复用的系统1100的一个实施例的图解表示。 Figure 11 is an analog set point 1100 illustrates one embodiment of the multiplexing system representation. 系统1100包括模拟信号源1102,其中,模拟信号源1102经由模拟通信链路1106和数字总线1107连接到多个从装置1104a到104d。 System 1100 includes an analog signal source 1102, wherein the analog signal source 1102 is connected to the plurality of slave devices 1104a to 104d via analog communications links 1106 and 1107 digital bus. 在1108a到1108d处,数字总线1107分别连接到从装置1104a到1104d。 1108a to 1108d in place, are connected to the digital bus 1107 from device 1104a to 1104d. 数字总线1107能够包括用于向从装置110到1104d携带信号的任何数目的线。 Digital Bus 1107 can be used to include any number of signal carrying means 110 to 1104d from the line. 在图11 的例子中,数字总线具有三个信号线。 In the example of Figure 11, the digital bus having three signal lines. 模拟信号源1102可以是例如由Billerica,MA的Mykrolis 公司(现在是Chaska,Minnesota 的Entegris 公司的一部分)产生的OptiChem P1200的流量控制器。 Analog signal source 1102 may be, for example by Billerica, MA of Mykrolis (now Chaska, Minnesota portion of Entegris, Inc.) produced OptiChem P1200 traffic controllers. 相似地,装置110到1104d也可以是OptiChem P1200流量控制器。 Similarly, means may also be OptiChem P1200 flow controller 110 to 1104d. 换言之,用作模拟信号源1102的一个流量控制器能够用作其它流量控制器的主装置。 In other words, an analog signal source is used as a flow controller 1102 can be used as the primary means of other flow controller. 然而,应该注意,那个模拟信号源1102可以是能够断定模拟设定点的任何装置,并且装置1104a到1104d可以是能够接收模拟设定点的任何装置。 However, it should be noted, that the analog signal source 1102 may be any device can be judged that the analog set point, and means 1104a to 1104d may be any device capable of receiving an analog point setting.

[0123] 模拟信号源1102在模拟通信链路1106上输出包括多个从装置的设定点的模拟信号。 [0123] analog signal source 1102 to the analog communication link 1106 comprises a plurality of output means of the set point from an analog signal. 数字总线1107能够向从装置1104a到1104d中的每个携带设定点指示器信号。 1107 digital bus is capable of carrying the set point indicator signal to each slave device 1104a to 1104d in. 特定从装置的设定点指示器信号指示:模拟信号指示那个从装置的设定点。 Specific set point indicator signal indicating device: Analog signal indicates that the set-point device. 特定从装置1104 的设定点指示器信号能够被断定为总线1107上的多个比特。 Specific set point indicator signal devices can be concluded from 1104 to 1107 on more than one bit bus. 例如,从装置1104d的设定点指示器可以是在总线1107的第二信号线和第三上断定的比特(例如,011)。 For example, the set point indicator means 1104d may be in the second signal line and the third on the bus 1107 to determine the bit (e.g., 011). 当特定从装置1104接收到模拟信号指定该装置的设定点的指示时,特定从装置1104能够从模拟信号读取它的设定点。 When a particular receiving device 1104 to the analog signal from the specified set point indicative of the apparatus, able to read its specific setpoint from an analog signal from the device 1104. 为每个数字选择线实施二进制加权系统会扩展主装置的能力而不需要增大数字设定点指示器线的数目。 Implementation capacity of binary-weighted system will extend the main unit for each digit select line without the need to increase the number of digital set point indicator lines.

[0124] 在图11中,模拟设定点信号和设定点指示器信号示出为来自同一主装置。 [0124] In Figure 11, the analog set point signal and the set point indicator is shown as the same signal from the host device. 然而, 在本发明的其它实施例中,能够在多个分布装置上产生模拟设定点信号和设定点指示器信号。 However, in other embodiments of the present invention, it is possible to produce an analog set point signal and the set point indicator signal on a plurality of distribution devices.

[0125] 图12示出了由模拟信号源1102提供的模拟设定点信号1200和提供设定点指示器的数字信号的一个实施例。 [0125] Figure 12 illustrates an embodiment of an analog set point signal supplied from the analog signal source 1200 and 1102 set point indicator providing a digital signal. 根据图12所示的实施例,模拟设定点信号1200的电压/电流可以在满标值的0%与100%之间,而设定点指示器信号或者为高或者为低(例如,在+/-3. 3伏特或其它电压值或指示设定点的其它值之间进行循环)。 According to the embodiment shown in FIG. 12, the analog set point signal voltage / current may be between 0% and 100% of full scale value, and the set point indicator signal 1200 or a high or low (e.g., in cycle between +/- 3.3 volts or other voltage values or other values indicate setpoint).

[0126] 在图12的例子中,四个模拟设定点复用到模拟信号1300。 [0126] In the example of FIG. 12, four analogue setpoint multiplexed to the analog signal 1300. 对于时间段tl,设定点是满标的45% ;对于时间段t2,设定点是满标的62% ;对于时间段t3,设定点是满标的30% ;对于时间段t4,设定点是满标的78%。 For the time period tl, the set point is 45% of full scale; for time period t2, the set point is 62% of full scale; for time period t3, the set point is 30% of full scale; for the time period t4, the set point is 78% of full scale.

[0127] 对于各种从装置,模拟设定点值可以具有不同的意义。 [0127] For each device, an analog value from the set point can have different meanings. 例如,在从装置110模拟设定点可以对应压力,但是在从装置1104b模拟设定点对应泵电机速度。 For example, in the device 110 analog set point can correspond to the pressure, but the device 1104b analog setpoint corresponding pump motor speed. 因此,为了各种目的,模拟设定点信号可以复用模拟设定点。 Therefore, for all purposes, analog setpoint signal can be multiplexed analog setpoint.

[0128] 在时间段tl的至少一部分内,设定点信号1202的状态从高变为低(1210所示) 从而指示从装置110应该利用满标值的45%作为它的设定点。 [0128] at least part of the time period tl, the set point signal state from high to low 1202 (shown in 1210) indicating that the device 110 should use 45% of full scale as its set point. 从装置110能够继续利用这个设定点值直到设定点指示器信号指示它应该从模拟设定点信号1200读取新的设定点。 Can continue to take advantage of this set-point value from the device 110 until set point indicator signal indicating that it should read 1200 new setpoint signal from an analog setpoint. 因此,即使模拟信号的值改变,从装置110仍然能够继续利用满标的45%作为它的设 Therefore, even if the value of the analog signal changes, from the apparatus 110 still be able to take advantage of the full scale of 45%, as it is provided

点ο Point ο

[0129] 相似地,信号1204指示从装置1104b应该利用满标的62%作为它的设定点(1212 所示),信号1206指示从装置110应该利用满标的30%作为它的设定点(1314所示)。 [0129] Similarly, the signal from the device indicating 1104b 1204 should use 62% of full scale as its set point (1212 shown), indicating a signal from the device 110 1206 should use 30% of full scale as its set point (1314 shown). 在时间t4内,信号1204和1206断定一个比特(1216和1218所示),从而指示从装置1104d 应该利用满标的78%作为它的设定点(即,利用多个数字线向从装置1104d发送设定点指示器)。 Within the time t4, the signal 1204 and 1206 to determine a bit (as shown in 1216 and 1218), indicating that the apparatus 1104d should use 78% of the full scale as its set point (i.e., using a plurality of digit lines to the transmission from the apparatus 1104d setpoint indicator). 因此,利用三个设定点指示器线向四个从装置指示设定点。 Therefore, the use of three set points to four lines from the device indicator indicates the set point. 利用二进制方案,最多能够支持7个从装置On-I,其中,η是设定点指示器线的数目),其中,对于对装置没有断定设定点的情况,一个信号状态反转。 The use of a binary scheme, can support up to seven devices from the number of On-I, where, η is the set point indicator line), wherein, in the case of the apparatus is not determined set point, a signal inverted state.

[0130] 作为例子提供在图12中提供的信号定时,并且能够利用用于向从装置指示何时模拟信号携带该装置的设定点的任何合适方案。 [0130] Examples of the timing signal supplied provided in Figure 12, and can be used to take advantage of the analog signal from the means for indicating when carrying any suitable program set point of the apparatus. 例如,当从装置应该开始从模拟设定点信号读取它的设定点时设定点指示器信号能够改变状态(例如,从低到高,从高到低或者经历其它状态改变),并且当从装置应该停止从模拟设定点信号读取它的设定点时再次改变状态。 For example, when it should start reading the set point signal from an analog set point set point indicator signal from the device to change state (for example, from low to high and high to low, or through other state changes), and When reading its set point signal from an analog set point from the device should be stopped again to change state. 此外,设定点指示器能够按照包括作为数据流的一部分的各种方式、中断方式或者另一种方式发送到从装置。 In addition, the set point indicator in accordance with a variety of ways including as part of the data stream, the interrupt mode or in another way to the slave device.

[0131] 图13是流程图,示出了对模拟设定点进行复用的方法的一个实施例。 [0131] FIG. 13 is a flowchart illustrating an embodiment of an analog set point multiplexing method. 该流程图针对主装置和从装置划分成两个部分。 The flow chart for the master device and the slave device is divided into two portions. 例如,能够通过在主装置、从装置或其它装置上执行计算机指令实现图13的方法论。 For example, it is possible by the master device, computer instructions executed implement the methodology of FIG. 13 from the apparatus or other devices.

[0132] 根据一个实施例,模拟信号源产生表示多个设定点的模拟信号(步骤130。换言之,多个模拟设定点被复用到模拟信号中。主装置向从装置发送模拟信号。当经由模拟信号传送特定从装置的设定点时,主装置能够向那个从装置发送设定点指示器(步骤1304)。例如,主装置能够利用数字总线上的信号(例如,通过改变总线上的一个线或多个线的状态) 向特定从装置指示正在模拟线上断定它的设定点。该程序能够继续进行,直到预定事件发生以结束该程序。 [0132] According to cases, one embodiment of an analog signal source produces a plurality of set point represents the analog signal (step 130. In other words, a plurality of analog setpoints are multiplexed into an analog signal. Master device transmits to the apparatus from an analog signal. When the analog signal is transmitted via a particular device from the set point, the master device is able to that example, the host device can use the digital signal transmitted on the bus from the device set point indicator (step 1304). (e.g., by changing the bus state of one line or more lines) to a particular slave device indicates that it is an analog line determined set point. The procedure can be continued until a predetermined event occurs to end the program.

[0133] 从装置能够接收模拟设定点信号(步骤1306)。 [0133] from the device is capable of receiving analog setpoint signal (step 1306). 当从装置接收到指示模拟设定点正在断定那个从装置的设定点的设定点指示器时(例如,如步骤1308确定),从装置能够保存模拟设定点信号的值并且将该信号作为它的设定点存储(步骤1310)。 When the device receives the indication from the analog set point is determined from the set point means that the set point indicator (e.g., as determined in step 1308), the device can store an analog set point signal value and the signal as its set-point memory (step 1310). 该程序能够继续进行,直到预定事件发生以结束该程序。 This procedure can be continued until a predetermined event occurs to end the program. 此外,能够按照需要或期望重复图13的步骤。 In addition, as needed or desired can be repeated in step 13 in FIG.

[0134] 尽管已经对照特定实施例描述了本发明,但是应该明白,这些实施例是示意性的并且本发明的范围不限于这些实施例。 [0134] Although specific embodiments have been described with the control of the present invention, it is to be understood that these embodiments are illustrative and the scope of the present invention is not limited to these embodiments. 可以对上述实施例进行许多变动、变型、添加和改进。 The above described embodiments many changes, modifications, additions and improvements. 应该可以想到,这些变动、变型、添加和改进落入权利要求定义的本发明的范围内。 Should be thought of, these changes, modifications, additions and improvements fall within the scope defined in claims of the present invention.

Classifications
International ClassificationG05D27/02
Cooperative ClassificationG05D11/135, G05D23/1393, Y10T137/0329, G05D11/16, B01F2215/0096, B01F15/0416, H01L21/67075
European ClassificationB01F15/04G2, G05D11/16
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1 Feb 2012C06Publication
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