CN101477248B - Double-torsion bar resonance scanning reflection mirror - Google Patents
Double-torsion bar resonance scanning reflection mirror Download PDFInfo
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- CN101477248B CN101477248B CN2009100768227A CN200910076822A CN101477248B CN 101477248 B CN101477248 B CN 101477248B CN 2009100768227 A CN2009100768227 A CN 2009100768227A CN 200910076822 A CN200910076822 A CN 200910076822A CN 101477248 B CN101477248 B CN 101477248B
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- reflection mirror
- scanning reflection
- double
- torsion bar
- shank
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Abstract
The invention relates to a double-torsion bar resonance scanning reflector, which comprises a scanning reflector component, a support system, a driving system, a position feedback system and a closed ring controlling system. The scanning reflector component comprises two torsion bars and a reflector body, and can generate reciprocating vibration around two rod tie lines corresponding to the exciting force amplitude when receiving the period force excitation having the same frequency as the mechanical resonance of the scanning reflector; the support system consists of a substrate and a support arm and provides necessary support and restriction for the scanning reflector component; the driving system consists of a permanent magnet and a driving coil and is used for driving the scanning reflector component to vibrate without contact; the position feedback system consists of a position sensor and a feedback signal processing circuit and is used for acquiring position feedback signals which are proportionable to the vibration amplitude of the scanning reflector component with high sensitivity and noise inhibition; and the closed ring controlling system consists of a driving system, a position feedback system and a driving signal generating circuit and is used for controlling the scanning reflector component to vibrate stably. The double-torsion bar resonance scanning reflector can realize light beam scanning with large calibre and high frequency.
Description
Technical field
The present invention relates to a kind of resonance scanning device that beam flying is provided for optical system.
Background technology
Scanner (scanner) is by moving reflection or transmitting member the electromagnetic radiation wave beam to be carried out the element of shuttle-scanning along straight line, and it is the combination of sub-units such as optics, machinery, electricity often.Scanner has purposes widely, its application is all arranged to early warning system, tracker, satellite communication etc. from high-speed printer (HSP), optical storage apparatus, bar code reader, phototype machine, laser camera, laser scanning microscope, computing machine microfilm equipment, optical instrument on from the uphole equipment to the satellite all has its figure, and its range of application is in constantly enlarging.Existing scanner kind is a lot, is divided into continuous rotary scanning device and oscillatory type scanner according to mode of motion, and type of drive is divided, and dissimilar scanners such as galvanometer, acousto-optic formula, piezoelectric type, resonant mode are arranged, and they are applied in the different occasions.
Under some situation of carrying out high frequency modulated such as the high-velocity scanning imaging system and to light signal, need big clear aperture and high-frequency scanner, specifically extract in the application for weak infrared target, in order to weaken the 1/f noise in the infrared acquisition, and infrared target signal a little less than from the intense radiation background, proposing, need carry out high frequency modulated to echo signal, this all will use the scanner of big clear aperture and high sweep frequency.Rotary type scanner, galvanometer scanner are because moment of inertia own is difficult to be applied to the occasion of high frequency modulated more greatly, existing resonant mode scanner mostly adopts mechanism forms such as single pole, S shape spring leaf or straight sheet spring, also is difficult to take into account simultaneously high-frequency and heavy caliber.
Summary of the invention
The technical problem to be solved in the present invention is: overcome the prior art deficiency, the invention provides a kind of double-torsion bar resonance scanning reflection mirror, can solve the problem of big clear aperture high frequency sweep.
The technical solution adopted for the present invention to solve the technical problems is: the present invention proposes a kind of double-torsion bar resonance scanning reflection mirror, comprising:
The A sweep mirror assembly includes two torque rods and catoptron shank, produces the double vibrations around two bar lines corresponding with the exciting force amplitude under the cyclic force excitation identical with the scanning reflection mirror mechanical resonant frequency;
In the described scanning reflection mirror assembly, two torque rods are symmetrically distributed on catoptron shank both sides, and the line of two torque rods is by the symcenter of catoptron shank;
The B support system is made up of substrate and support arm, for the scanning reflection mirror assembly provides necessary support and constraint;
The C drive system is made of permanent magnet and drive coil, is used for driven sweep mirror assembly vibration;
The D position feedback system is made up of piezoelectricity position transducer and feedback signal processing circuit, is used for obtaining the proportional position feed back signal of amplitude with scanning reflection mirror assembly (1);
The F closed-loop control system is made up of drive system, position feedback system, drive signal generation circuit, is used for the stable oscillation of gated sweep mirror assembly;
In the described position feedback system, the position, angle that the characteristics that the piezoelectricity position transducer utilizes the piezoelectric property of piezoelectric crystal and resonant mechanical system accelerating curve and position curve to have same form are obtained scanning reflection mirror, two piezoelectricity position transducers are on the scanning reflection mirror shank, symmetria bilateralis at turning axle is installed, and it is right to form differential signal source.
The advantage that the present invention is compared with prior art had is: vibrating mass of the present invention adopts catoptron shank and two torsional vibration systems that can do the bar composition of elastic torsion, two torsion bar structures provide the high rigidity of structure and stability, light-weighted scanning reflection mirror shank has been cut down the moment of inertia of load, and this kind structure can produce high mechanical resonant frequency; Adopt moving magnetoelectricity magnetic drive form, accomplish that contactless driving reduces the face shape influence to mirror surface; Differential type piezoelectricity position transducer has improved detection sensitivity and squelch, and closed loop drives the stability that has guaranteed scan amplitude; Double-torsion bar resonance scanning reflection mirror of the present invention can be realized the beam flying of heavy caliber high-frequency.
Description of drawings
The structure skeleton view of an example of Fig. 1 double-torsion bar resonance scanning reflection mirror;
The explosive view of Fig. 2 Fig. 1;
Fig. 3 loop control theory figure;
Fig. 4 drive system magnetic direction;
The upward view of Fig. 5 scanning reflection mirror assembly;
The vertical view of Fig. 6 scanning reflection mirror assembly;
The side view of Fig. 7 scanning reflection mirror assembly;
The skew of mirror position in Fig. 8 resonance scanning reflection mirror vibration processes;
Fig. 9 drive coil parts;
Figure 10 piezoelectricity position transducer.
Embodiment
Introduce the present invention in detail below in conjunction with the drawings and the specific embodiments.
Fig. 1 and Fig. 2 have done whole description to the formation of the mechanical vibration part of double-torsion bar resonance scanning reflection mirror of the present invention, and Fig. 3～Figure 10 describes in detail sub-unit.The 5th, the installation base plate of entire mechanism, mirror assembly support arm 9A and 9B are fixed on the substrate 5 with screw by hole 6A and 6B, drive coil 2A and 2B are fixed on the substrate 5 with screw by mounting hole 7A and 7B, the 8th, fix the mounting hole that this double-torsion bar resonance scanning reflection mirror is used.Described support arm 9A and 9B and substrate 5 one processing or be connected by support arm part and substrate part and form support system.Scanning reflection mirror assembly 1 is the core of these mechanical vibration mechanism, its two square mounting blocks 12A and 12B are installed among the groove 10A and 10B of support arm 9, make scanning reflection mirror assembly 1 be fixed on the support arm 9 by pressing plate 4A and 4B from compressing mounting blocks 12A and 12B, form mechanical resonance system through fixing scanning reflection mirror assembly, the 40th, the catoptron shank, 11 is mirror mirror, is the reflecting surface that carries out beam flying. Permanent magnet 21A and 21B are fixedly mounted among the groove 27A and 27B at catoptron shank 40 back sides, the upper surface of the conducting magnetic column 17 of drive coil 2A and 2B keeps coaxial with permanent magnet 21A and 21B and keeps at a certain distance away, and drive coil 2A, 2B and permanent magnet 21A, 21B constitute the drive system one moving magnetoelectricity magnetic drive system of this double-torsion bar resonance scanning reflection mirror. Piezoelectricity position transducer 20A and 20B be fixed on the elastic torsion bar 13A at the back side of catoptron shank 40 and 13B line both sides, offer control circuit 23 after position feed back signal is handled through feedback signal processing circuit 24 and be used to form the closed-loop control signal. Piezoelectricity position transducer 20A, 20B and feedback signal processing circuit 24 constitute feedback system.
The mechanical resonance system of double-torsion bar resonance scanning reflection mirror of the present invention.
The mechanical vibration of double-torsion bar resonance scanning reflection mirror partly are scanning reflection mirror assemblies 1, include the spring-mass piece resonator system by elastic torsion bar 13A and 13B and mass loading (catoptron shank 40) formation.The two ends of elastic torsion bar 13A and 13B are fixed on the support arm 9 by mounting blocks 12A and 12B, in order to guarantee the stable of mechanical vibration, the degree of freedom of restriction mounting blocks 12A and 12B all directions, elastic torsion bar 13A and 13B line constitute the turning axle 35 of scanning reflection mirror vibration.Scanning reflection mirror is determined by the elastic modulus of length, area of section and the material of elastic torsion bar 13A and 13B and the factors such as moment of inertia of catoptron shank 40 around the resonance frequency of axle 35 vibrations, resonance frequency can change with the variation of environment temperature, selects for use temperature-resistant material can help to improve the temperature stability of resonance frequency.The long-pending big more length in heavy in section is short more more for the elastic modulus of elastic torsion bar 13A and 13B, and the moment of inertia of catoptron shank 40 is more little, and resonance frequency is just high more, otherwise low more.The high-frequency correspondence scanning reflection mirror assembly 1 high rigidity, the low frequency correspondence scanning reflection mirror assembly 1 low rigidity, so under identical reflective surface area and the excitation of identical driving force, the amplitude of high-frequency vibrating mechanism can be littler than the amplitude of low frequency vibration mechanism.Oscillation Amplitude for the raising scanning reflection mirror of trying one's best, must reduce its moment of inertia, thereby the loss of weight groove 26 of bottom and side plays and alleviates the effect that quality reduces moment of inertia, permanent magnet mounting hole 27A, 27B are the mounting hole of permanent magnet 21A, 21B, in order to reduce moment of inertia, permanent magnet mounting hole 27A, 27B go deep into catoptron shank 40 inside, and permanent magnet 21A, 21B embed catoptron shank 40 inside, select the strong and little permanent magnet of quality of magnetic as far as possible.Change the physical dimension of elastic torsion bar 13A and 13B length and cross-sectional area and catoptron shank 40, can produce several hertz of mechanical resonant frequencies to the hundreds of thousands hertz.Described scanning reflection mirror assembly 1 also includes mirror mirror 11, and described mirror mirror 11 obtains maybe the catoptron part that processes to be fixed on the catoptron shank 40 in polishing on the catoptron shank 40; Catoptron shank 40 and two torque rod 13A and 13B are that integral body processes or catoptron shank part and two torque rod parts are assembled; And two torque rod 13A and 13B be symmetrically distributed on catoptron shank 40 both sides, and the line of two torque rod 13A and 13B is by the symcenter of catoptron shank 40.
The drive system 41 of double-torsion bar resonance scanning reflection mirror of the present invention.
Drive system of the present invention is made of the permanent magnet 21A, the 21B that are installed on catoptron shank 40 backs and drive coil 2A and 2B, forms moving magnetoelectricity magnetic drive pattern.Drive coil 2 is made of conducting magnetic column 17, trim ring 16, coil rack 18, coil winding 19.Conducting magnetic column 17 is made by high magnetic permeability and the few material of remanent magnetism, and alternating magnetic field is focused in the conducting magnetic column, produces the effect of magnetic force between conducting magnetic column 17A, 17B and permanent magnet 21A, the 21B.In order to reduce the thermal losses of coil, adopt the thicker enameled wire in line footpath to make coil winding 19.Permanent magnet 21A and drive coil 2A constitute a moving magnetoelectricity magnetic driven device, permanent magnet 21B and drive coil 2B constitute a moving magnetoelectricity magnetic driven device, the drive signal that drive signal generation circuit 23 produces in drive coil 2A, 2B, produce no phase differential alternating magnetic field, be that turning axle is formed on elastic torsion bar 13A, 13B be that the pulling force another side is the couple of thrust on one side, for the vibration of keeping scanning reflection mirror provides power.In the described drive system 41, two permanent magnet 21A, 21B are fixed on the scanning reflection mirror shank 40, two drive coil 2A, 2B are fixed on the substrate, corresponding permanent magnet and drive coil are to constituting moving magnetoelectricity magnetic driven device, two drivers form couple, and interaction generation promotion scanning reflection mirror takes place for the alternating magnetic field that drive signal produces in drive coil and the magnetic field of permanent magnet does the alternating force of rocking vibration.The magnetic pole of described two permanent magnet 21A, 21B is identical or opposite, possesses the condition that forms couple as long as drive coil 2A, 2B are connected in series or are connected in parallel.
The position feedback system 42 of double-torsion bar resonance scanning reflection mirror of the present invention.
As shown in Figure 8, the 37th, mirror mirror 11 residing positions when drive system is not worked are decided to be the zero-bit of position, and 36 and 38 is minute surface 11 forward and reverse offset from zero bit positions.The effect of position feedback system is the position of mirror mirror 11 when obtaining 1 vibration of scanning reflection mirror assembly, and feedback system is made up of piezoelectricity position transducer 20A, 20B and feedback signal processing circuit.Position transducer 20A, 20B are symmetrical in the back side that turning axle 35 is installed in catoptron shank 40.20A, 20B produce frequency in the scanning reflection mirror vibration processes be the sinusoidal signal that the vibration frequency phase place differs from 180 degree mutually, the formation signal differential is right, two paths of signals is via input feedback signal treatment circuit 24, processing such as 24 pairs of differential signals of feedback signal processing circuit are done the amplitude adjustment, subtracted each other, phase shift, filtering, amplification obtain to be proportional to vibration amplitude with the synchronous sinusoidal position signal of drive signal, this position signalling is used to stablize the amplitude of this scanister as the negative feedback source of control circuit.Position transducer 20A and 20B include shell 29, trim ring 30, piezoelectric crystal 31, cementing agent 32, plate lead 33, cathode leg 34, piezoelectric crystal 31 1 utmost points are fixed on the shell 29 by cementing agent 32, another is free state very, piezoelectric crystal 31 deforms because of the effect that is subjected to acceleration in the scanning reflection mirror vibration processes, thereby at plate lead 33, produce correspondent voltage between the cathode leg 34, because the acceleration of sinusoidal motion has identical form with the position, plate lead 33, the voltage that produces between the cathode leg 34 has also just reacted the offset from zero bit position of scanning reflection mirror.In the described position feedback system 42, the position, angle that the characteristics that piezoelectricity position transducer (20A, 20B) utilizes the piezoelectric property of piezoelectric crystal and resonant mechanical system accelerating curve and position curve to have same form are obtained scanning reflection mirror, two piezoelectricity position transducers to (20A, 20B) on scanning reflection mirror shank (40), symmetria bilateralis at turning axle (35) is installed, and it is right to form differential signal source.
The closed-loop control system of double-torsion bar resonance scanning reflection mirror of the present invention.
Closed-loop control system is made up of drive system 41, position feedback system 42, drive signal generation circuit 23.Drive signal generation circuit 23 will be the sinusoidal signal of vibrational structure resonance frequency from the frequency of outside source with subtract each other from the position feed back signal of feedback signal processing circuit 24 after carry out power amplification and form drive signal, drive signal makes scanning reflection mirror 1 vibrate for drive system 41 provides power, the position signalling of position feedback system 42 acquisition scans mirror assemblies 1 vibration, position feed back signal is input to drive signal generation circuit 23 drive coils and is provided as drive signal, so circulation forms closed-loop control mechanism.
The use of double-torsion bar resonance scanning reflection mirror of the present invention.
The present invention is fixed in the light path that is employed as a kind of light-beam scanner by mounting hole 8, beam alignment mirror mirror 11 and the direction that makes light path advance are consistent with the direction of scanning of this scanning reflection mirror, and this mechanism can level, vertically and tilt to place.The frequency of signal source that offers driving circuit is identical with the mechanical resonant frequency of mechanism, and amplitude is decided on actual needs, can drive with two drive coils, also can be only with a drive coil driving.The present invention can obtain the resonance scanning reflection mirror of the different clear apertures of different resonance frequencies by the adjustment structure parameter, a concrete example, scanning reflection mirror material aluminium alloy, bore is the ellipse of 35mm * 50mm, thickness W=11mm, torque rod diameter D=8.8mm, length L=24mm, resonance frequency is 2050Hz, 4 ° of amplitudes (peak-to-peak value).
Claims (8)
1. double-torsion bar resonance scanning reflection mirror is characterized in that: comprise following ingredient:
A sweep mirror assembly (1), (13A 13B) with catoptron shank (40), produces the double vibrations around two bar lines corresponding with the exciting force amplitude under the cyclic force excitation identical with the scanning reflection mirror mechanical resonant frequency to include two torque rods;
In the described scanning reflection mirror assembly (1), two torque rods (13A 13B) is symmetrically distributed on catoptron shank (40) both sides, and two torque rods (13A, line 13B) is by the symcenter of catoptron shank (40);
The B support system, (9A 9B) forms, for scanning reflection mirror assembly (1) provides necessary support and constraint by substrate (5) and support arm;
C drive system (41), (2A 2B) constitutes, and is used for driven sweep mirror assembly (1) vibration by permanent magnet (21A, 21B) and drive coil;
D position feedback system (42) is made up of piezoelectricity position transducer (20A, 20B) and feedback signal processing circuit (24), is used for obtaining the proportional position feed back signal of amplitude with scanning reflection mirror assembly (1);
The F closed-loop control system is made up of drive system (41), position feedback system (42), drive signal generation circuit (23), is used for the stable oscillation of gated sweep mirror assembly (1);
In the described position feedback system (42), the position, angle that the characteristics that piezoelectricity position transducer (20A, 20B) utilizes the piezoelectric property of piezoelectric crystal and resonant mechanical system accelerating curve and position curve to have same form are obtained scanning reflection mirror, two piezoelectricity position transducers to (20A, 20B) on scanning reflection mirror shank (40), symmetria bilateralis at turning axle (35) is installed, and it is right to form differential signal source.
2. double-torsion bar resonance scanning reflection mirror according to claim 1, it is characterized in that: described scanning reflection mirror assembly (1) also includes scanning reflection mirror minute surface (11), and described scanning reflection mirror minute surface (11) is gone up polishing at catoptron shank (40) and obtained maybe the catoptron part that processes to be fixed on the catoptron shank (40).
3. double-torsion bar resonance scanning reflection mirror according to claim 1 is characterized in that: described catoptron shank (40) bottom and side have the loss of weight groove (26) that reduces moment of inertia.
4. double-torsion bar resonance scanning reflection mirror according to claim 1, it is characterized in that: (13A, 13B) integral body processes or catoptron shank part and two torque rod parts are assembled for catoptron shank (40) and two torque rods in the described scanning reflection mirror assembly (1).
5. double-torsion bar resonance scanning reflection mirror according to claim 1 is characterized in that: described support system, (9A 9B) is connected with substrate (5) one processing or by support arm part and substrate part and forms by support arm.
6. double-torsion bar resonance scanning reflection mirror according to claim 1, it is characterized in that: in the described drive system (41), two permanent magnet (21A, 21B) be fixed on the scanning reflection mirror shank (40), two drive coil (2A, 2B) be fixed on the substrate, corresponding permanent magnet and drive coil are to constituting moving magnetoelectricity magnetic driven device, two drivers form couple, and interaction generation promotion scanning reflection mirror takes place for the alternating magnetic field that drive signal produces in drive coil and the magnetic field of permanent magnet does the alternating force of rocking vibration.
7. double-torsion bar resonance scanning reflection mirror according to claim 1, it is characterized in that: in the described drive system (41), two permanent magnets (21A, magnetic pole 21B) is identical or opposite, (2A is as long as 2B) be connected in series or be connected in parallel and possess the condition that forms couple for drive coil.
8. double-torsion bar resonance scanning reflection mirror according to claim 1, it is characterized in that: piezoelectricity position transducer (20A, 20B) includes shell (29), trim ring (30), piezoelectric crystal (31), cementing agent (32), plate lead (33), cathode leg (34), wherein piezoelectric crystal (31) one utmost points are fixed on the shell (29) by cementing agent (32), and another utmost point becomes free state; Trim ring (30) is positioned at a side of piezoelectric crystal (31) free state; Cathode leg (34) and plate lead (33) are connected to the two poles of the earth of piezoelectric crystal (31).
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| CN2009100768227A CN101477248B (en) | 2009-01-22 | 2009-01-22 | Double-torsion bar resonance scanning reflection mirror |
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| CN2009100768227A CN101477248B (en) | 2009-01-22 | 2009-01-22 | Double-torsion bar resonance scanning reflection mirror |
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| CN101477248B true CN101477248B (en) | 2011-04-13 |
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Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102608759A (en) * | 2012-03-19 | 2012-07-25 | 中国科学院上海技术物理研究所 | Image space scanning device and control method for low-temperature optical system |
| CN107560562B (en) * | 2016-06-30 | 2019-10-25 | 上海微电子装备（集团）股份有限公司 | A kind of interference formula Topography Measuring System and method |
| CN107678042A (en) * | 2017-09-18 | 2018-02-09 | 彭雁齐 | A kind of optical scanner pendulum mirror and its control method, laser imaging radar |
| CN109119099B (en) * | 2018-07-06 | 2021-01-01 | 中国科学院上海光学精密机械研究所 | Image type parallel read-write optical information digital storage method |
| JP7225771B2 (en) * | 2018-12-19 | 2023-02-21 | 株式会社リコー | Mobile devices, distance measuring devices, image projection devices, vehicles, and pedestals |
| WO2021051454A1 (en) * | 2019-09-30 | 2021-03-25 | 深圳市速腾聚创科技有限公司 | Control method and control device for lidar galvanometer, and lidar |
| JP7456294B2 (en) | 2020-06-01 | 2024-03-27 | 株式会社リコー | Movable devices, deflection devices, distance measuring devices, image projection devices, and vehicles |
| CN112532009B (en) * | 2020-09-16 | 2024-03-15 | 常州富兴机电有限公司 | Novel micro-special motor |
| CN114252161B (en) * | 2021-11-29 | 2023-08-08 | 湖北久之洋信息科技有限公司 | Imaging method based on linear array infrared detector |
| CN116067504A (en) * | 2023-04-06 | 2023-05-05 | 中国科学院光电技术研究所 | Automatic modulation method for resonant frequency grading search of vibrating reflector |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5543956A (en) * | 1992-10-08 | 1996-08-06 | Fuji Electric Co., Ltd. | Torsional vibrators and light deflectors using the torsional vibrator |
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2009
- 2009-01-22 CN CN2009100768227A patent/CN101477248B/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5543956A (en) * | 1992-10-08 | 1996-08-06 | Fuji Electric Co., Ltd. | Torsional vibrators and light deflectors using the torsional vibrator |
Non-Patent Citations (1)
| Title |
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| JP特开平11-271661A 1999.10.08 |
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