CN100480629C - Capacitive micro machinery gyroscope - Google Patents
Capacitive micro machinery gyroscope Download PDFInfo
- Publication number
- CN100480629C CN100480629C CNB2005100962271A CN200510096227A CN100480629C CN 100480629 C CN100480629 C CN 100480629C CN B2005100962271 A CNB2005100962271 A CN B2005100962271A CN 200510096227 A CN200510096227 A CN 200510096227A CN 100480629 C CN100480629 C CN 100480629C
- Authority
- CN
- China
- Prior art keywords
- driving
- comb
- bent beam
- broach
- inertial mass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Abstract
The present invention discloses a kind of capacitive micro mechanical gyroscope for decoupling the driving mode and the detecting mode. The present invention features that two driving comb beams are connected separately with the inner driving bent beam fixed to the inner anchor point and the inner sensitive bent beam connected to inertial mass plate frame, and have driving combs extending to two sides separately to constitute variable area driving force capacitor pair together with the driving detection combs extending from the driving force applying electrode and to constitute variable area driving detection capacitor pair together with the driving detection combs extending from the driving detection electrode; and both the driving force applying electrode and the driving detection electrode are fixed via anchor point onto the base. Owing to the decoupling beam structure, the present invention can realize the decoupling between the driving mode and the detecting mode of gyroscope.
Description
Technical field
The present invention relates to a kind of capacitive micro mechinery gyroscope.
Background technology
Capacitive micro mechinery gyroscope adopts silicon-based semiconductor technology to make, and has characteristics such as volume is little, fiduciary level is high, can make in batches, can be used for the angular velocity measurement, attitude stabilization of moving objects such as aircraft, guided missile, automobile etc.Micromechanical gyro all is based on Ke Liaolili detection angular velocity, comprises two orthogonal operation modes: drive mode and responsive mode.
With reference to Fig. 2, document " Micromachined z-axis vibratory gyroscope; US Patent 5992233 " has been introduced a kind of z axle capacitive micro mechinery gyroscope of the William A.Clark of U.S. Berkeley University based on above-mentioned principle, in this gyro, inertial mass plate frame 22 is by two frame girders 24,26, driving comb beams 28 of two detection comb beams constitute jointly.Driving comb beam 28 has bigger rigidity in each degree of freedom, in the gyro course of work, do not deform, the broach shape semi-girder that it is rectangle that its both sides are stretched out one group of xsect respectively is a driving comb 30, the broach that drive electrode broach 34 overlappings that stretch out on the driving application of force electrode 32 in broach 30 and the framework constitute variable areas drives electric capacity to 36, and the spacing between the broach equates, is used to produce the vibration of keeping inertial mass plate frame 22 along the electrostatic force of driving direction.Two detection comb beams 26 have bigger rigidity equally and do not deform, its both sides are stretched out one group of broach respectively, the driving detection comb 38 that wherein is positioned at framework inside drives detection electric capacity to 44 with the broach that drives the drive electrode broach 42 overlapping formation variable areas that stretch out on the detecting electrode 40, is used to detect the motion state of inertial mass flat board 22; Be positioned at the detection comb 46 of framework outside and a left side become spacing broach 48.1 and right become spacing broach 48.1 constitute become spacings sensitization capacitance to 50, be used for the caused capacitance variations of responsive Ke Liaolili.Inertial mass plate frame 22 drives bent beam 52 by four groups, and responsive bent beam 54 and two nothing distortion tie-beam 56 together support form movable structure, and responsive bent beam 54 is fixed on the matrix by anchor point 60.
During this gyro work, driving application of force electric capacity will produce suitable electrostatic force to 36 and keep inertial mass plate frame 22 promptly to drive mode motion in x direction fixed ampllitude frequency stabilization vibration, and drive bent beam 52 and bend this moment, and other beam does not deform.When the z axle has angular velocity Ω input, be subjected in the Ke Liao power effect inertial mass plate frame 22 to produce displacement in the y direction, form the motion of responsive mode, this moment, responsive bent beam 54 occured bending and deformation, and cause sensitization capacitance that 50 capacitance is changed, can record input angular velocity Ω by responsive this capacitance variations.
But, this gyro at work, inertial mass plate frame 22 makes driving comb electric capacity to 36 with to drive the broach spacing of detection comb electric capacity in to 44 no longer equal in the motion of responsive mode, the driving force that causes driving mode to one-component is arranged, is disturbed the detection of gyro useful signal the detection side.Intercoupling of this driving mode and responsive mode also will cause other error term, be the problem that Gyroscope Design must solve.William Clark is that the both sides by inertial mass plate frame 22 on responsive mode direction are provided with four blocks 58 and limit the displacement of inertial mass plate frame 22 at sensitive direction, simultaneously also from the angle design of signal Processing corresponding error suppression circuit, but the method from eliminating the coupling that drives between mode and the responsive mode in essence, only is not to have weakened this cross-linked influence to a certain extent.Therefore,, then can avoid corresponding error suppression circuit design, reduce the cost and the volume of gyro if can on structural design, eliminate fully to the coupling between the mode.
Summary of the invention
Can not realize driving mode and the deficiency that detects the mode decoupling zero in the prior art for overcoming, the present invention proposes a kind of capacitive micro mechinery gyroscope, utilizes its special decoupling zero girder construction, can solve the coupled problem between prior art driving mode and the responsive mode.
The technical solution adopted for the present invention to solve the technical problems is: a kind of capacitive micro mechinery gyroscope, comprise inertial mass plate frame 22, detection comb 46, a left side becomes spacing broach 48.1, the right spacing broach 48.2 that becomes, drive bent beam 52, responsive bent beam 54 and do not have distortion tie-beam 56, inertial mass plate frame 22 drives bent beam 52 by four and is connected with two nothing distortion tie-beams 56 respectively, be fixed on matrix by four responsive bent beams 54 by anchor point 60 again, one group of detection comb 46 is stretched out in the outside of inertial mass plate frame 22 respectively, left side change spacing broach 48.1 and right spacing broach 48.2 equidistant detection comb 46 both sides that are positioned at that become constitute the sensitization capacitance of change spacing to 50, and be fixed on the matrix by anchor point, it is characterized in that: drive in two driving comb beams 28 are connected on the bent beam 72, the interior bent beam 72 that drives is fixed on the interior anchor point 96, the other end that is connected the interior responsive bent beam 74 on the driving comb beam 28 links to each other with inertial mass plate frame 22, and the length of interior driving bent beam 72 and interior responsive bent beam 74 is much larger than its width; The both sides of driving comb beam 28 are stretched out one group of driving comb 30 respectively, the driving application of force electric capacity that driving detection comb 34 overlappings that stretch out on driving comb 30 and the driving application of force electrode 32 constitute variable areas is to 36, and the driving of the driving detection comb 42 overlapping formation variable areas that stretch out on driving comb 30 and the driving detecting electrode 40 detects electric capacity to 44; Drive application of force electrode 32 and drive detecting electrode 40 and all be fixed on the matrix by anchor point.
Described inertial mass plate frame 22 is connected from beginning to end according to the order of Vierendeel girder 24, broach beam 26, Vierendeel girder 24, broach beam 26 by two frame girders 24, two detection comb beams 26 and constitutes.
The invention has the beneficial effects as follows:, can realize that gyro drives the decoupling zero between mode and the responsive mode owing to adopt the decoupling zero girder construction.
The present invention is further described below in conjunction with drawings and Examples.
Description of drawings
Fig. 1 is a structural representation of the present invention
Fig. 2 is the prior art constructions synoptic diagram
Among the figure, 22-inertial mass plate frame, 24-Vierendeel girder, 26-detection comb beam, 28-driving comb beam, 30-driving comb, 32-drives application of force electrode, 34-drive electrode broach, and 36-broach drive electrode is right, 38-drives detection comb, and 40-drives detecting electrode, 42-drive electrode broach, it is right that 44-drives detecting electrode, the 46-detection comb, and a 48.1-left side becomes the spacing broach, 48.2-the right spacing broach that becomes, 50-change spacing sensitization capacitance is right, and 52-drives bent beam, the responsive bent beam of 54-, 56-does not have the distortion tie-beam, the 58-block drives bent beam in the 60-anchor point, 72-, anchor point in the responsive bent beam in the 74-, 96-.
Embodiment
With reference to Fig. 1, inertial mass plate frame 22 of the present invention is connected by 24, two detection comb beams of two frame girders, 26 head and the tail and constitutes jointly.And in inertial mass plate frame 22 inside, drive on the bent beam 72 in two driving comb beams 28 are connected to, the interior bent beam 72 that drives is fixed on the interior anchor point 96, and the other end that is connected the interior responsive bent beam 74 on the driving comb beam 28 links to each other with inertial mass plate frame 22.Driving comb beam 28 has bigger width and rigidity, can think not deform in the gyro course of work.The interior length of bent beam 72 and interior responsive bent beam 74 that drives is much larger than its width, generally more than 10 times, be that the bending stiffness of beam in the x-y plane is much smaller than its axial deformation rigidity, in the gyro course of work, interior driving bent beam 72 and interior responsive bent beam 74 only occur bending and deformation in the x-y plane and do not change its axial length.The both sides of driving comb beam 28 are stretched out one group of driving comb 30 respectively, the driving application of force electric capacity that driving detection comb 34 overlappings that stretch out on driving comb 30 and the driving application of force electrode 32 constitute variable areas is to 36, and the driving of the driving detection comb 42 overlapping formation variable areas that stretch out on driving comb 30 and the driving detecting electrode 40 detects electric capacity to 44.Drive application of force electrode 32 and drive detecting electrode 40 and all be fixed on the matrix by anchor point; The detection comb 46 that stretches out laterally on two detection comb beams 26 and a left side become spacing broach 48.1 and right become spacing broach 48.2 constitute become spacings sensitization capacitance to 50, and be fixed on the matrix by anchor point, be used for responsive by the caused capacitance variations of Ke Liaolili.Inertial mass plate frame 22 drives by four and drives in the bent beam 72, four responsive bent beam 74 and two in the responsive bent beam of bent beams 52, four 54, four and do not have distortion tie-beam 56 together support and form movable structure.Responsive bent beam 54 is fixed on matrix by anchor point 60; the interior bent beam 72 that drives is fixed on matrix by interior anchor point 96; anchor point 96 also plays the block effect in inertial mass plate frame 22 inside simultaneously, is used for limiting structure in the displacement of sensitive direction, protection detection comb 46 structures.
The decoupling zero girder construction constitutes by driving bent beam 52, responsive bent beam 54, interior driving bent beam 72 and interior responsive bent beam 74, when gyro is worked, driving application of force electric capacity will produce suitable electrostatic force to 36 and keep inertial mass plate frame 22 to vibrate in the frequency stabilization of x direction fixed ampllitude, promptly drive mode motion, drive bent beam 52 this moment, interior driving bent beam 72 bends simultaneously, other beam does not deform, and drives the coupling of mode to responsive mode thereby eliminated.When angular velocity Ω input is arranged around the z axle, be subjected in the Ke Liao power effect inertial mass plate frame 22 to produce displacement in the y direction, form the motion of responsive mode, this moment responsive bent beam 54, interior responsive bent beam 74 occurs bending and deformation simultaneously, and interior driving bent beam 72 is because have infinitely-great relatively axial rigidity, so is zero with driving comb beam 28 in the limit movement of y direction, this will guarantee only to have sensitization capacitance that 50 capacitance is changed, can record input angular velocity Ω by detecting this capacitance variations, thereby successfully eliminate responsive mode driving the coupling of mode.
The sensitization capacitance that becomes spacing on the responsive mode adopts even putting to become the spacing sensitization capacitance to structure to 50, wherein decide tooth and be divided into two groups, promptly a left side becomes spacing broach 48.1 and the right spacing broach 48.2 that becomes, a left side becomes spacing broach 48.1 separates on electricity is connected with the right spacing broach 48.2 that becomes, and usually has opposite potential.The initial position of detection comb 46 and both sides constant pitch are from equating that sensitization capacitance forms differential output when moving tooth and hair is given birth to displacement.
Claims (2)
1, a kind of capacitive micro mechinery gyroscope, comprise inertial mass plate frame (22), detection comb (46), a left side becomes spacing broach (48.1), the right spacing broach (48.2) that becomes, drive bent beam (52), responsive bent beam (54) and do not have distortion tie-beam (56), inertial mass plate frame (22) drives bent beam (52) by four and is connected with two nothing distortion tie-beams (56) respectively, be fixed on matrix by four responsive bent beams (54) by anchor point (60) again, one group of detection comb (46) is stretched out in the outside of inertial mass plate frame (22) respectively, a left side becomes spacing broach (48.1) and right equidistant detection comb (46) the both sides formation that is positioned at of spacing broach (48.2) that becomes becomes the sensitization capacitance of spacing to (50), and be fixed on the matrix by anchor point, it is characterized in that: drive in two driving comb beams (28) are connected on the bent beam (72), the interior bent beam (72) that drives is fixed on the interior anchor point (96), the other end that is connected the interior responsive bent beam (74) on the driving comb beam (28) links to each other with inertial mass plate frame (22), and the length of interior driving bent beam (72) and interior responsive bent beam (74) is much larger than its width; The both sides of driving comb beam (28) are stretched out one group of driving comb (30) respectively, the driving application of force electric capacity that driving detection comb (34) overlapping that stretches out on driving comb (30) and the driving application of force electrode (32) constitutes variable area is to (36), and the driving of driving detection comb (42) the overlapping formation variable area that stretches out on driving comb (30) and the driving detecting electrode (40) detects electric capacity to (44); Drive application of force electrode (32) and drive detecting electrode (40) and all be fixed on the matrix by anchor point.
2, capacitive micro mechinery gyroscope according to claim 1 is characterized in that: described inertial mass plate frame (22) by two frame girders (24), two detection comb beams (26) according to the order of Vierendeel girder (24), broach beam (26), Vierendeel girder (24), broach beam (26) formation that is connected from beginning to end.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100962271A CN100480629C (en) | 2005-10-24 | 2005-10-24 | Capacitive micro machinery gyroscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100962271A CN100480629C (en) | 2005-10-24 | 2005-10-24 | Capacitive micro machinery gyroscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1749693A CN1749693A (en) | 2006-03-22 |
| CN100480629C true CN100480629C (en) | 2009-04-22 |
Family
ID=36605274
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005100962271A Expired - Fee Related CN100480629C (en) | 2005-10-24 | 2005-10-24 | Capacitive micro machinery gyroscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100480629C (en) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102006046772A1 (en) * | 2006-09-29 | 2008-04-03 | Siemens Ag | Rotating rate measuring arrangement, has capacitive units formed by fixed electrodes and by other electrodes that are connected with fixed connection, where exciting voltages are supplied to fixed electrodes of capacitive units |
| CN101298987B (en) * | 2008-06-13 | 2011-09-14 | 同济大学 | Robustness tuning fork vibrating type micromechanical gyroscope |
| CN102042829B (en) * | 2009-10-10 | 2012-06-20 | 北京理工大学 | All-forward capacitance type micro-machined gyroscope |
| CN101860338B (en) * | 2010-06-03 | 2012-05-23 | 西北工业大学 | Closed-loop driving circuit for micromechanical resonance structure |
| CN102221361B (en) * | 2011-05-20 | 2013-04-03 | 西北工业大学 | Capacitive micro machinery gyroscope |
| CN102288172B (en) * | 2011-07-07 | 2013-06-05 | 西北工业大学 | Capacitor type micro-machined gyroscope for amplifying movement speed of mass block |
| CN109029409B (en) * | 2018-06-15 | 2020-09-01 | 浙江大学 | Parameter amplification method and device in micromechanical gyroscope with tunable gate structure |
| CN109490576A (en) * | 2018-12-19 | 2019-03-19 | 成都力创云科技有限公司 | Based on a kind of fully differential capacitor MEMS acceleration by SOI |
| CN109945850B (en) * | 2019-04-02 | 2023-09-26 | 四川知微传感技术有限公司 | MEMS gyroscope |
| CN113138292B (en) * | 2020-01-17 | 2022-11-22 | 北京大学 | Capacitance type micromechanical accelerometer |
| CN113390402A (en) * | 2020-03-12 | 2021-09-14 | 北京微元时代科技有限公司 | Micromechanical tuning fork gyroscope |
-
2005
- 2005-10-24 CN CNB2005100962271A patent/CN100480629C/en not_active Expired - Fee Related
Non-Patent Citations (4)
| Title |
|---|
| 微机械陀螺的发展现状. 李新刚，袁建平.力学进展，第33卷第3期. 2003 |
| 微机械陀螺的发展现状. 李新刚，袁建平.力学进展，第33卷第3期. 2003 * |
| 梳状电容微加速度计的涉及和分析. 黄书琴，郝永平，张德智，王键.探测与控制学报，第26卷第4期. 2004 |
| 梳状电容微加速度计的涉及和分析. 黄书琴，郝永平，张德智，王键.探测与控制学报，第26卷第4期. 2004 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1749693A (en) | 2006-03-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100480629C (en) | Capacitive micro machinery gyroscope | |
| US10760909B2 (en) | Angular rate sensor with in-phase drive and sense motion suppression | |
| US8833162B2 (en) | Micromachined gyroscope including a guided mass system | |
| KR101443730B1 (en) | A microelectromechanical die, and a method for making a low-quadrature-error suspension | |
| CN109269488B (en) | Angular rate sensor with in-phase motion suppression structure | |
| JP2003194545A (en) | Mems gyroscope having vertical oscillating mass body | |
| JP2000028366A (en) | Angular velocity sensor | |
| JP2010145394A (en) | System and method for suspending inertial sensor for minimizing rotation of proof mass | |
| CN102252668B (en) | Silicon micro angular vibration output gyroscope | |
| CN107192384B (en) | MEMS triaxial gyroscope | |
| CN102288172A (en) | Capacitor type micro-machined gyroscope for amplifying movement speed of mass block | |
| CN110702088B (en) | Wheel type double-shaft micromechanical gyroscope | |
| CN106525017B (en) | Micromechanical gyroscope resistant to environmental vibrations | |
| CN218646328U (en) | Micro-electromechanical gyroscope | |
| WO2023226560A1 (en) | Apparatus, method and system for measuring angular velocity | |
| CN216309014U (en) | Multi-axis MEMS sensing fusion device on single chip | |
| CN114964193A (en) | Three-axis micromechanical gyroscope | |
| CN106342180B (en) | Full slide-film damping capacitive micro mechinery gyroscope | |
| CN109211216B (en) | Micro-electromechanical gyroscope with overload protection mechanism | |
| CN110779510B (en) | Three-axis MEMS gyroscope | |
| JP2001174265A (en) | Angular velocity sensor | |
| CN111174772B (en) | Triaxial MEMS gyroscope | |
| CN117490671B (en) | Microelectromechanical triaxial gyroscope and electronic device | |
| CN111024057B (en) | Three-axis MEMS gyroscope | |
| CN202216694U (en) | Twisting angular rate gyroscope |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090422 Termination date: 20131024 |