CA2112103A1 - Methods and Apparatus for Externally Treating a Container with Application of Internal Bias Gas - Google Patents

Methods and Apparatus for Externally Treating a Container with Application of Internal Bias Gas

Info

Publication number
CA2112103A1
CA2112103A1 CA2112103A CA2112103A CA2112103A1 CA 2112103 A1 CA2112103 A1 CA 2112103A1 CA 2112103 A CA2112103 A CA 2112103A CA 2112103 A CA2112103 A CA 2112103A CA 2112103 A1 CA2112103 A1 CA 2112103A1
Authority
CA
Canada
Prior art keywords
container
application
gas
internal bias
methods
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA2112103A
Other languages
French (fr)
Other versions
CA2112103C (en
Inventor
Robert J. Babacz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Polar Materials Inc
Original Assignee
Robert J. Babacz
Polar Materials, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert J. Babacz, Polar Materials, Inc. filed Critical Robert J. Babacz
Publication of CA2112103A1 publication Critical patent/CA2112103A1/en
Application granted granted Critical
Publication of CA2112103C publication Critical patent/CA2112103C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]
    • Y10T428/1352—Polymer or resin containing [i.e., natural or synthetic]
    • Y10T428/139—Open-ended, self-supporting conduit, cylinder, or tube-type article

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Vapour Deposition (AREA)
  • Details Of Rigid Or Semi-Rigid Containers (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

A method and apparatus for externally treating a container by application of internal bias gas. The exterior surface of a hollow container is treated under the influence of an electric field. The electric field is applied through an electrode and an electrically conductive gas inside the container. The electrically conductive gas conducts a potential from the electrode to the inside surface of the container. The apparatus contains a vacuum chamber, a tubular inlet, an oxidizing gas source and organosilicon gas source, and vacuum pump.
CA002112103A 1992-06-26 1993-06-17 Methods and apparatus for externally treating a container with application of internal bias gas Expired - Fee Related CA2112103C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/904,974 US5308649A (en) 1992-06-26 1992-06-26 Methods for externally treating a container with application of internal bias gas
US07/904,974 1992-06-26

Publications (2)

Publication Number Publication Date
CA2112103A1 true CA2112103A1 (en) 1994-01-06
CA2112103C CA2112103C (en) 1997-09-23

Family

ID=25420074

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002112103A Expired - Fee Related CA2112103C (en) 1992-06-26 1993-06-17 Methods and apparatus for externally treating a container with application of internal bias gas

Country Status (9)

Country Link
US (2) US5308649A (en)
EP (1) EP0605703A4 (en)
JP (1) JPH06510234A (en)
AU (1) AU658329B2 (en)
BR (1) BR9305550A (en)
CA (1) CA2112103C (en)
MX (1) MX9303859A (en)
PL (1) PL302288A1 (en)
WO (1) WO1994000247A1 (en)

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Also Published As

Publication number Publication date
EP0605703A1 (en) 1994-07-13
US5374314A (en) 1994-12-20
EP0605703A4 (en) 1996-09-25
US5308649A (en) 1994-05-03
JPH06510234A (en) 1994-11-17
BR9305550A (en) 1994-11-22
WO1994000247A1 (en) 1994-01-06
AU4640493A (en) 1994-01-24
AU658329B2 (en) 1995-04-06
MX9303859A (en) 1994-05-31
CA2112103C (en) 1997-09-23
PL302288A1 (en) 1994-07-11

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