CA2033137A1 - Microwave component and method for fabricating substrate for use in microwave component - Google Patents
Microwave component and method for fabricating substrate for use in microwave componentInfo
- Publication number
- CA2033137A1 CA2033137A1 CA2033137A CA2033137A CA2033137A1 CA 2033137 A1 CA2033137 A1 CA 2033137A1 CA 2033137 A CA2033137 A CA 2033137A CA 2033137 A CA2033137 A CA 2033137A CA 2033137 A1 CA2033137 A1 CA 2033137A1
- Authority
- CA
- Canada
- Prior art keywords
- microwave component
- pair
- conductor layers
- dielectric layer
- fabricating substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/20—Permanent superconducting devices
- H10N60/203—Permanent superconducting devices comprising high-Tc ceramic materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0296—Processes for depositing or forming superconductor layers
- H10N60/0408—Processes for depositing or forming superconductor layers by sputtering
Abstract
A microwave component includes a single dielectric layer, and one pair of conductor layers formed on opposite surfaces of the dielectric layer, respectively, one of the pair of conductor layers forming a ground conductor, and the other of the pair of conductor layers being shaped in a predetermined pattern. The pair of conductor layers are respectively formed of oxide superconductor material layers which are deposited on the opposite surfaces of the dielectric layer, respectively, and which have little defect.
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP334032/1989 | 1989-12-22 | ||
JP1334032A JPH03194979A (en) | 1989-12-22 | 1989-12-22 | Microwave resonator |
JP2000876A JPH03205904A (en) | 1990-01-06 | 1990-01-06 | Microwave delay line |
JP876/1990 | 1990-01-06 | ||
JP2306733A JPH04178004A (en) | 1990-11-13 | 1990-11-13 | Manufacture of board for superconducting microwave component |
JP306733/1990 | 1990-11-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
CA2033137A1 true CA2033137A1 (en) | 1991-06-23 |
CA2033137C CA2033137C (en) | 1995-07-18 |
Family
ID=27274653
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA002033137A Expired - Fee Related CA2033137C (en) | 1989-12-22 | 1990-12-24 | Microwave component and method for fabricating substrate for use in microwave component |
Country Status (5)
Country | Link |
---|---|
US (1) | US6057271A (en) |
EP (1) | EP0435765B1 (en) |
AU (1) | AU625016B2 (en) |
CA (1) | CA2033137C (en) |
DE (1) | DE69030365T2 (en) |
Families Citing this family (50)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7231238B2 (en) * | 1989-01-13 | 2007-06-12 | Superconductor Technologies, Inc. | High temperature spiral snake superconducting resonator having wider runs with higher current density |
US6026311A (en) * | 1993-05-28 | 2000-02-15 | Superconductor Technologies, Inc. | High temperature superconducting structures and methods for high Q, reduced intermodulation resonators and filters |
CA2043545C (en) * | 1990-05-30 | 1997-03-04 | Saburo Tanaka | Process for preparing superconducting junction of oxide superconductor |
DE69131793T2 (en) * | 1990-08-08 | 2000-04-27 | Sumitomo Electric Industries | Substrate for superconducting devices |
JP2567517B2 (en) * | 1990-10-29 | 1996-12-25 | 住友電気工業株式会社 | Superconducting microwave components |
US5439877A (en) * | 1990-12-07 | 1995-08-08 | E. I. Du Pont De Nemours And Company | Process for depositing high temperature superconducting oxide thin films |
WO1992010857A1 (en) * | 1990-12-07 | 1992-06-25 | E.I. Du Pont De Nemours And Company | Process for depositing high temperature superconducting oxide thin films |
US5150088A (en) * | 1991-03-27 | 1992-09-22 | Hughes Aircraft Company | Stripline shielding techniques in low temperature co-fired ceramic |
JPH04342487A (en) * | 1991-05-20 | 1992-11-27 | Sumitomo Electric Ind Ltd | Production of substrate for superconducting microwave part |
EP0584410A1 (en) * | 1991-07-05 | 1994-03-02 | Conductus, Inc. | Superconducting electronic structures and methods of preparing same |
CA2073272C (en) * | 1991-07-08 | 1997-04-01 | Kenjiro Higaki | Microwave resonator of compound oxide superconductor material |
US6156707A (en) * | 1992-05-20 | 2000-12-05 | Sumitomo Electric Industries, Ltd. | Method of manufacturing superconducting microwave component substrate |
US6021337A (en) * | 1996-05-29 | 2000-02-01 | Illinois Superconductor Corporation | Stripline resonator using high-temperature superconductor components |
US7554829B2 (en) | 1999-07-30 | 2009-06-30 | Micron Technology, Inc. | Transmission lines for CMOS integrated circuits |
US8026161B2 (en) | 2001-08-30 | 2011-09-27 | Micron Technology, Inc. | Highly reliable amorphous high-K gate oxide ZrO2 |
US6844203B2 (en) * | 2001-08-30 | 2005-01-18 | Micron Technology, Inc. | Gate oxides, and methods of forming |
US6953730B2 (en) | 2001-12-20 | 2005-10-11 | Micron Technology, Inc. | Low-temperature grown high quality ultra-thin CoTiO3 gate dielectrics |
US6767795B2 (en) | 2002-01-17 | 2004-07-27 | Micron Technology, Inc. | Highly reliable amorphous high-k gate dielectric ZrOXNY |
US6893984B2 (en) * | 2002-02-20 | 2005-05-17 | Micron Technology Inc. | Evaporated LaA1O3 films for gate dielectrics |
US6812100B2 (en) * | 2002-03-13 | 2004-11-02 | Micron Technology, Inc. | Evaporation of Y-Si-O films for medium-k dielectrics |
US7045430B2 (en) | 2002-05-02 | 2006-05-16 | Micron Technology Inc. | Atomic layer-deposited LaAlO3 films for gate dielectrics |
US7160577B2 (en) | 2002-05-02 | 2007-01-09 | Micron Technology, Inc. | Methods for atomic-layer deposition of aluminum oxides in integrated circuits |
US20030222732A1 (en) * | 2002-05-29 | 2003-12-04 | Superconductor Technologies, Inc. | Narrow-band filters with zig-zag hairpin resonator |
US7135421B2 (en) | 2002-06-05 | 2006-11-14 | Micron Technology, Inc. | Atomic layer-deposited hafnium aluminum oxide |
US7205218B2 (en) * | 2002-06-05 | 2007-04-17 | Micron Technology, Inc. | Method including forming gate dielectrics having multiple lanthanide oxide layers |
US7193893B2 (en) * | 2002-06-21 | 2007-03-20 | Micron Technology, Inc. | Write once read only memory employing floating gates |
US6804136B2 (en) | 2002-06-21 | 2004-10-12 | Micron Technology, Inc. | Write once read only memory employing charge trapping in insulators |
US7221017B2 (en) | 2002-07-08 | 2007-05-22 | Micron Technology, Inc. | Memory utilizing oxide-conductor nanolaminates |
US7221586B2 (en) | 2002-07-08 | 2007-05-22 | Micron Technology, Inc. | Memory utilizing oxide nanolaminates |
US6921702B2 (en) | 2002-07-30 | 2005-07-26 | Micron Technology Inc. | Atomic layer deposited nanolaminates of HfO2/ZrO2 films as gate dielectrics |
US6790791B2 (en) * | 2002-08-15 | 2004-09-14 | Micron Technology, Inc. | Lanthanide doped TiOx dielectric films |
US6884739B2 (en) | 2002-08-15 | 2005-04-26 | Micron Technology Inc. | Lanthanide doped TiOx dielectric films by plasma oxidation |
US20040036129A1 (en) * | 2002-08-22 | 2004-02-26 | Micron Technology, Inc. | Atomic layer deposition of CMOS gates with variable work functions |
US6967154B2 (en) * | 2002-08-26 | 2005-11-22 | Micron Technology, Inc. | Enhanced atomic layer deposition |
US7199023B2 (en) | 2002-08-28 | 2007-04-03 | Micron Technology, Inc. | Atomic layer deposited HfSiON dielectric films wherein each precursor is independendently pulsed |
US7101813B2 (en) * | 2002-12-04 | 2006-09-05 | Micron Technology Inc. | Atomic layer deposited Zr-Sn-Ti-O films |
US6958302B2 (en) | 2002-12-04 | 2005-10-25 | Micron Technology, Inc. | Atomic layer deposited Zr-Sn-Ti-O films using TiI4 |
US7220665B2 (en) * | 2003-08-05 | 2007-05-22 | Micron Technology, Inc. | H2 plasma treatment |
US20050233477A1 (en) * | 2004-03-05 | 2005-10-20 | Tokyo Electron Limited | Substrate processing apparatus, substrate processing method, and program for implementing the method |
WO2005093123A1 (en) * | 2004-03-26 | 2005-10-06 | Tohoku Seiki Industries, Ltd. | Process for forming thin film and system for forming thin film |
US7558608B2 (en) * | 2004-09-29 | 2009-07-07 | Fujitsu Limited | Superconducting device, fabrication method thereof, and filter adjusting method |
US7687409B2 (en) | 2005-03-29 | 2010-03-30 | Micron Technology, Inc. | Atomic layer deposited titanium silicon oxide films |
US7662729B2 (en) | 2005-04-28 | 2010-02-16 | Micron Technology, Inc. | Atomic layer deposition of a ruthenium layer to a lanthanide oxide dielectric layer |
US7927948B2 (en) | 2005-07-20 | 2011-04-19 | Micron Technology, Inc. | Devices with nanocrystals and methods of formation |
US7709402B2 (en) | 2006-02-16 | 2010-05-04 | Micron Technology, Inc. | Conductive layers for hafnium silicon oxynitride films |
US7563730B2 (en) | 2006-08-31 | 2009-07-21 | Micron Technology, Inc. | Hafnium lanthanide oxynitride films |
US7759237B2 (en) * | 2007-06-28 | 2010-07-20 | Micron Technology, Inc. | Method of forming lutetium and lanthanum dielectric structures |
CN104157947A (en) * | 2014-08-06 | 2014-11-19 | 武汉中元通信股份有限公司 | Strip-shaped three-dimensional layout topology structure of V-waveband and high-power broadband 3dB quadrature coupler |
JP7122367B2 (en) * | 2017-08-03 | 2022-08-19 | エーエスエムエル ネザーランズ ビー.ブイ. | Simultaneous double-sided coating of multi-layer graphene pellicle by localized heat treatment |
CN113312783B (en) * | 2021-06-09 | 2022-07-01 | 广东电网有限责任公司 | Modeling method and system for superconducting direct current cable |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4962086A (en) * | 1988-06-08 | 1990-10-09 | International Business Machines Corporation | High Tc superconductor - gallate crystal structures |
US4962316A (en) * | 1989-07-31 | 1990-10-09 | Santa Barbara Research Center | Frequency domain integrating resonant superconducting transmission line detector |
-
1990
- 1990-12-24 EP EP90403754A patent/EP0435765B1/en not_active Expired - Lifetime
- 1990-12-24 DE DE69030365T patent/DE69030365T2/en not_active Expired - Fee Related
- 1990-12-24 AU AU68453/90A patent/AU625016B2/en not_active Ceased
- 1990-12-24 CA CA002033137A patent/CA2033137C/en not_active Expired - Fee Related
-
1995
- 1995-06-07 US US08/484,093 patent/US6057271A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE69030365T2 (en) | 1997-10-23 |
DE69030365D1 (en) | 1997-05-07 |
AU625016B2 (en) | 1992-06-25 |
AU6845390A (en) | 1991-06-27 |
EP0435765A3 (en) | 1991-09-18 |
US6057271A (en) | 2000-05-02 |
EP0435765A2 (en) | 1991-07-03 |
CA2033137C (en) | 1995-07-18 |
EP0435765B1 (en) | 1997-04-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CA2033137A1 (en) | Microwave component and method for fabricating substrate for use in microwave component | |
WO1995024730A3 (en) | Apparatus having inner layers supporting surface-mount components | |
EP0401688A3 (en) | Method of forming electrical contact between interconnection layers located at different layer levels | |
EP0797244A3 (en) | Thin ferroelectric film element and method for manufacturing the same | |
EP0836277A3 (en) | LC composite part | |
TW339473B (en) | Electronic package with multilevel connections | |
DE3478171D1 (en) | A method of producing a layered structure | |
GB9412551D0 (en) | A frequency selective surface | |
EP0615256A3 (en) | Method of manufacturing a pattern of an electrically conductive polymer on a substrate surface and method of metallizing such a pattern. | |
CA2056740A1 (en) | Via capacitors within multi-layer 3-dimensional structures/substrates | |
EP0398721A3 (en) | Thin copper foil for printed wiring board and method of manufacturing same | |
EP0307246A3 (en) | Method of manufacturing superconducting devices | |
CA2121110A1 (en) | Insulated Conductor Pairs and Method and Apparatus of Making Same | |
CA2084394A1 (en) | Superconducting Multilayer Interconnection Formed of Oxide Superconductor Material and Method for Manufacturing the Same | |
EP0101791A3 (en) | Multi-layer circuitry | |
EP0362161A3 (en) | Method of manufacturing a substrate for microwave integrated circuits | |
CA2345764A1 (en) | Capacitance-coupled high dielectric constant embedded capacitors | |
EP0184945A3 (en) | Spacecraft materials | |
CA2052508A1 (en) | Method for manufacturing superconducting device having a reduced thickness of oxide superconducting layer and superconducting device manufactured thereby | |
EP0178500A3 (en) | Method of forming a selectively patterned protective layer on a substrate and method of making planarized dielectric components for semiconductor structures | |
CA2047139A1 (en) | Method for manufacturing superconducting device composed of oxide superconductor material and superconducting device manufactured thereby | |
CA2122929A1 (en) | Broadband Rugate Filter | |
CA2027067A1 (en) | Method for forming a continuous oxide superconductor layer having different thickness portions for superconductor device | |
AU5860690A (en) | Substrate having a superconductor layer | |
MY133863A (en) | Passive component integrated circuit chip |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EEER | Examination request | ||
MKLA | Lapsed |