CA1212260A - Specific material detection and measuring device - Google Patents

Abstract

ABSTRACT
A device for sensing the presence of and measuring the concentration of a specific non-aqueous particle or gas material in an environment, the device comprising an interdigitated capacitor having at least a pair of selected covering layers thereupon, said pair of layers comprising a first passive electrically insulative layer and a second material layer having a spacial relationship to said first layer, said second layer selectively permeable to the specific material to be sensed and measured; said second coating, when juxtaposed said first coating, selectively permitting permeability of the particular material sought to be sensed and measured, and when spaced apart, permitting passage through of the specific material in order that the material may migrate to the proximity of the first coating and thereby be sensed and measured. The pre-sence of the specific material modifies the dielectric constant of the dielectric in the interdigitated capa-citor electric field and thus the capacitor's capaci-tance, whereupon the interdigitated capacitor's capacitance is compared with a proximate temperature sensing interdigitated capacitor in a capacitance sensing circuit and by the change of the capacitance, the presence and concentration of the specific material determined.

Description

Lo BACKGROUND OF THE INVENTION

This invention relates to devices employing inter-digitated capacitors for the detection and measurement of the concentration of selected non aqueous fluids, i.e., gases and liquids, or specific non-aqueous materials or particles, i.e., ions, molecules, or the like in the presence of fluids.
Capacitors of the type having interdigitated plates or fingers have been known and are commonly available in the prior art. These devices have been used in various embodiments to indicate moisture in the atmosphere. For e~amplel I L. Stevens, et at, in United States Patent No. 2,~19,497 describes an electrostatic type test electrode having inter-digitated finger-like electrodes covered by a layer of hydroscopic material adapted to absorb moisture prom the air in a known relation to the relative humidity of the air. Stevens discloses several capacitor constructions including straight-line interdigitation and concentric circles attached to opposite electrodes placed upon a substrate.
Further, Scintilla, in United States Patent No 4,164,~68, describes a capacitive type humidity trays-dicer having a pair of electrically conductive coatings spaced from each other with a dielectric film having water absorption characteristics covering port lions of the electrically conductive coatings.

I', I

Thereafter, an outer electrically conductive, water-permeable layer is carried by the dielectric film covering the electrically conductive coatings which comprise the capacitor plates.
In Scintilla the resultant change in capacitance measured between the plates of the capacitor as modified by the water absorption film is detected by incorporation of the capacitive humidity transducer into a suitable electrical circuit providing measure-mint of the capacitance and change in capacitance.
Examples of suitable electrical circuits to measure capacitance of capacitance type transducers are known in the field, for example, in Review of Scientific Instruments, Volume 44, No. 10, October 1973, authors Dean R. Harrison and John Dimeff illustrate a diode-quad type bridge circuit for use with capacitance transducers wherein a very accurate method of measuring capacitance of an unknown keeps-ion is provided by placing the unknown capacitor in the diode-quad bridge circuit in series with known capacitors and in parallel to a voltage frequency source. The output voltage of the diode-quad bridge circuit, with a stabilized input voltage frequency source, is a DC voltage which is a function of the difference between the capacitance sought to be measured and the capacitance of the known capacitor.

SUMMARY OF THE INVENTION

Jo The present invention comprises means by which the presence and concentration of certain specific non-aqueous chemicals, compounds, materials, gases, liquids or the like may be detected and measured in the environment in which the material sought to be detected resides.
Such detection and concentration measurement is taken while placing the device in the environment in which the material to be detected is believed to reside. To accomplish the above, Applicant's device provides means by which the particular material to be detected is permitted to collect around and in the electric field of the device, to the exclusion of other chemicals, gases, or the like which may be in the environment, and by the fact of collection and rate of collection, presence and concentration is determined. More specifically, selected membrane coatings on the interdigitated capacitors which absorb or permit the passage of the particular material or particle into the interior of or through the membrane are utilized. By such permeation of the selected fluid or particle into or through the membrane, the dielectric constant of the dielectric in the electric field between the plates of an interdigitated keeps-ion of which the membrane is a part is affected resulting in a change in capacitance of the inter-digitated capacitor, all due to the presence of the selected fluid or particle Such change in keeps-I

lance is then detected and measured.
In a basic embodiment of the device, electrically conductive strips of metal are placed upon an insular live substrate to form two capacitor plates, the plates having a configuration of interdigitated fingers, con-centric circles, intertwined spirals, or the like.
Electrical leads for connection to ancillary equip-mint attach in turn to each plate. Next, an electric gaily insulative coating of an appropriate material covers the electrically conductive capacitor plates and leads, this insulative covering being chosen to be completely passive, non-reactive, and non-absorptive to the specific material sought to be detected and to other chemicals and materials present in the surrounding environment.
Following the insulative passive covering of the electrical strips and leads is a second layer of a selected membrane or the like. This second layer membrane may be a coating immediately covering the first insulative passive layer or it may be spaced apart from the insulative passive layer, in which case, there may be an intermediate medium, sub Stan-tidally non-reactive, such as a gas or liquid, inter-posed between the first insulative layer covering and the second layer membrane. The second layer membrane has a known relationship with the specific material to be detected, whether it be selectively absorptive, selectively porous, or possess some other selective us physical property.
In the process of utilizing Applicant's device, the specific material to be detected enters or passes the second layer to the immediate proximity of the first layer and thereby shows its presence by affecting the dielectric constant of the material within the electric field between the plates of the interdigitated capacitor.
The device is then connected into an external electrical circuit which enables the resulting change in capacitance of the interdigitated capacitor to be detected and measured. In the preferred embodiment, the subject interdigitated capacitor detection device is placed into a diode-quad capacitance measuring electrical circuit, which circuit impresses a voltage of known frequency and magnitude across the plates of the interdigitated capacitive detection device, and of a similarly constructed, proximate interdigitated capacitive device which, however, has been completely passivated by a totally non-reactive second layer or does not react with the environment. This permits the second, or passivated interdigitated capacitor to sense temperature of the environment. The change in capacitance between the two interdigitated capacitors is detected while both are situated in the same environment. The magnitude of a do voltage output of the electrical circuit is indicative of the different trial change in the capacitance between the two inter-owe digitated capacitors Such differential change in capacitance and rate of change of capacitance is reflective of the amount of the specific material which has entered into, become collected, or passed the second membrane layer to enter into the electric field between the capacitor plates, change the constant of the dielectric of the interdigitated gape-Satyr, and thus the capacitor's capacitance.
For example for the detection of a halogenated hydrocarbon or nitrous oxide type anesthesia gas, the second layer comprises a specified type of a silicone rubber membrane layer immediately covering the first insulative layer, which silicone rubber layer select lively admits the particular anesthesia gas at a known rate relative to concentration into molecular size interstices in the silicone rubber.
When, however, the device is used as an ion detect lion and measuring system, the second layer comprises a membrane spaced from the first insulative layer, which second layer membrane permits the passage of the selected ion into the proximity of the interdigitated capacitor. For example, if it is desired to detect Potassium ions in a solution, the interdigitated gape-Satyr is first surrounded by deionized water which in turn is separated from the solution containing the Potassium ions by the second layer membrane acting as a barrier to all but the selected ion, including the deionized water. This membrane is permeated by the ~2~2æ~0 Potassium ions which inter the deionized water environment of the interdigitated capacitor to dip-ferentially change its capacitance The temperature sensing interdigitated capacitor with which the specific material sensing inter-digitated capacitor is compared is covered with a second layer material which matches or is reflective of the effect of temperature upon the sensing inter-digitated capacitor second layer material. This layer, of course, must be impervious or made impel virus to the environment, including the gas or par-tide desired to be sensed. In the preferred embodiment, the non-reactive material covered tempt erasure sensing interdigitated capacitor is adjacent to the active sensing interdigitated capacitor, easily made so by placing both interdigitated capacitors upon the same substrate.
It is obvious that other examples of specific materials for the sensing interdigitated capacitors' second layers may be devised for broad applications of Applicants' device.
It is an object of the subject device to provide a device by which specific non-aqueous chemicals, gases, ions, or the like, may be sensed in the environment in which they are expected to reside.
It is another object of the subject invention to provide a means by which the concentration of a specie lie non-aqueous material in an environment may be determined.
It is further an object of the subject invention to provide a detection means of an interdigitated capacitor covered by an insulative passive coating, and a second layer permeable to a particular gas, liquid, or other material It is still further another object of the subject invention to provide a specific substance detection and level measuring device wherein the device compare-sues in part, a material permitting the passage of detectable selected molecules into its interior.
Other objects of the invention will in part be obvious and will in part appear hereinafter The invention accordingly comprises the apparatus possessing the construction, combination of elements, and arrangement of parts which are exemplified in the following detailed disclosure and the scope of the Application of which will be indicated in the Claims.

BRIEF DESCRIPTION OF THE DRAWINGS

For further understanding of the nature and objects of the present invention, reference should be had to the following detailed description taken in connection with the accompanying drawings wherein:
Figure 1 is a top view of the apparatus for detecting and measuring concentration of a specific gas;

owe --if--Figures pa and 2b are cross sectional views taken along lines aye and 2b-2b of the apparatus shown in Figure l;
Figure 3 is a block schematic diagram of the electronics circuitry utilized in the preferred embo-dominate of the invention;
Figure 4 is a top view of an alternate embodiment of the subject device;
Figure 5 is a block schematic diagram of the electronic circuitry for utilizing multiple material detection apparatus;
Figure 6 is a block schematic diagram employing the invention in a typical anesthesia process system;
Figure 7 is a cross-sectional view of the invent lion in a specific ion-detection configuration;
Figure 8 is a cross-sectional view of the invent lion in an alternate specific ion detection configuration; and Figure 9 is a cross-sectional view of the invent lion with the temperature sensing interdigitated gape-Satyr modified.
In the various views, like index numbers refer to like elements.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

Referring now to Figure 1, a top view of the apparatus 1 for detecting and measuring concentration I

of a non-aqueous specific material is shown. Firstly, two interdigitated capacitors 11 and 31 are situated on an electrically insulating substrate 10. From left to right, the interdigitated capacitor 11 comprises two elongated connecting leads 13 and 15 terminating at a matrix of interdigitated fingers 14 and 16. The matrix formed by the interdigitated fingers may be selectively varied as desired with variables such as finger lengths, finger widths, spacing between adja-cent fingers, and the thickness which the finger rises above the substrate, i.e., out of the drawing perpendicular to the plane of the drying including additional geometries, i.e., two fingers tracing an inward spiraling pattern, or two fingers tracing a rectangular or square pattern, or the like.
In Figure 1, interdigitated capacitor 31 is semi-laxly constructed as interdigitated capacitor 11, having two elongated connecting leads 33 and 35 ton-minuting a a matrix of interdigitated fingers 34 and 36.
It is anticipated, though not required, that semi-far dimensions will be applied to different inter-digitated capacitors situated on a single substrate.
The leads connecting interdigitated capacitor 11 and 31 extend in the preferred embodiment a sub Stan-trial distance (relative to size) from the inter-digitated capacitors to a point where they may be electrically connected to other portions of the ~2~%2~

electrical circuitry hereinafter described The substrate lo utilized has thy characteristic of being a good electrical insulator as well as having structural integrity and in this respect, glass, sapphire, or other similar substance may be used. The interdigitated capacitor may be placed upon the substrate by many methods and in the preferred embody mint, the Applicants etched away unwanted portions of metal vapor previously deposited upon the substrate.
In this case, tungsten was the electrically conductive metal utilized for the interdigitated capacitor although it is anticipated that other types of electrically conductive materials could be used, such as aluminum or other like metals In embodiments which have been constructed by the Inventors, typical dimensions of the interdigitated capacitor were five miss (0.127 mm) width on the interconnecting leads 13 and 15, fingers 14 and 16 widths of l mix (0.0254 mm), 1 mix (0.0254 mm), spacing between adjacent fingers, and 100 to 160 miss (2.54 to 4.064 mm) separation between interconnecting leads 13 and 15. Thickness of the interdigitated fingers in a direction perpendicular to the plane of the substrate was 2500 angstroms, although this was varied in different embodiments from 2500 to 10,000 angstroms. The substrate chosen, made of sapphire, was l/2 inch (12.7 mm) wide, 1 inch (12.7 mm) long, and 0.018 inch (0.457 mm) thick.

~L2~2~D

The outline of the material coatings covering the interdigitated capacitors 11 and 31, are represented by concentric circles 18 and 20, and 38 and 40 respect lively. For purposes of presenting construction of the interdigitated capacitors, these coatings are represented as transparent, although this is not necessarily the case. The coatings are further detailed in the discussion of Figures pa and 2b below Referring now to Figures pa and 2b, cross sectional views are detailed taken along lines aye and 2b-2b of the interdigitated capacitors 11 and 31 shown in Figure 1. Forming a base is the substrate 10 having a relative thickness much greater than that of the interdigitated capacitors 11 and 31. Shown in interdigitated capacitors 11 and 31 respectively are the end views of each of the interdigitated fingers of each capacitor namely cross-setional view of fingers 14 and 16, and fingers 34 and 36 respectively. Each of the interdigitated capacitors has two serial coverings, the first coverings 18 and 38 on the respective capacitors being a substance which is electrically insulative, has good adherence kirk-teristics, and is passive to the environment that the interdigitated capacitor is expected to come in con tact with. Examples of such materials are silicon nitride and silicon oxide. In the preferred embody-mint, silicon nitride was utilized for these first coatings 18 and 38 of the interdigitated capacitors.

I

It is obvious that there are a large variety of come pounds which may be utilized for the first coating in addition to silicon nitride, such as silicon oxide and aluminum oxide, or other materials and compounds having the requisite properties. The silicon nitride coatings 18 and 38 in the preferred embodiment were placed upon the interdigitated capacitor and substrate by low pressure chemical vapor deposition.
In the event that a layer of silicon oxide is chow son as the first coating insulative layer, such layer may be applied to the interdigitated capacitor upon the substrate by chemical vapor deposition, by sputa toning, by evaporation, or by spinning on of an organ-to silicon compound which is then oxidized, all known common methods.
Still other organic silicon compounds such as sullenness may be utilized for the first coating. These are placed on the interdigitated capacitor, spun in a centrifuge to produce a sufficiently thin coat, and then placed in an oven for curing. It has been deter-mined that it is important to fix the thickness of the first insulative coating above the interdigitated capacitor 11 and 31, and that the thickness of the coating be approximately the same on both inter digitated capacitors.
Following the insulating layer is the second covering coatings or layers 20 and 40 on inter-digitated capacitors 11 and 31 respectively. These coatings, in the preferred embodiment are of a dip-fervent material than the first layer and may be dip-fervent from each other, depending on what the particular function of the respective interdigitated capacitor is to be. Since the function of inter-digitated capacitor 31 is to provide a temperature compensating and comparison capacitance to inter-digitated capacitor 11 as later discussed, it is important that the two interdigitated capacitors have similar thermal characteristics.
In one embodiment, the invention is adapted for sensing the presence and concentration of a specific gas, such as one of the halogenated hydrocarbon gases commonly used in anesthesia. In the case of a halogen noted hydrocarbon such as halothane, layer 20 of interdigitated capacitor 11 comprises a compound such as a silicone rubber, a specific example of which is Dow Corning Silicone Rubber DSR 517. The silicone rubber coating forms a membrane which in the presence of particular halogenated hydrocarbon gases swells or expands. The swelling of silicone rubber in the pro-since of certain gases is a well recognized phenomenon Silicone rubber is highly permeable by many gases, but not all of these cause swelling. Permeability is the product of diffusivity and volubility. It is assumed that the volubility aspect of the halogenated hydra-carbon gases in silicone rubber results in the swelling phenomenon. Thus the membrane exhibits ~æ~%2~0 characteristics of exclusivity The material chosen for the second coating must be tailored to the specie lie gas to be detected.
The use of the term permeable throughout this application means more than to penetrate. It can in some cases include volubility of the selected material into the membrane, as well as penetration into the membrane or passage through the membrane. It is believed that the operative mechanism is purely physic eel - that it is due to the permeation of the matrix of the membrane by the chemical or material to be detected, and that the mechanism is reversible when the specific material's presence is removed Through the choice of the silicone rubber membrane utilized, a specific halogenated hydrocarbon molecule passes unto the silicone rubber, entering between the molecules of the silicone rubber to become interspersed under the top surface. This causes the silicone rubber coating on the interdigitated keeps-ion to expand. The absorption relationship between the silicone rubber and the halogenated hydrocarbon builds up until an equilibrium is reached with the surrounding gas of which the halogenated hydrocarbon is a constituent. At that time, as many molecules of the halogenated hydrocarbon are leaving the silicone rubber layer as are entering, and the number of gas molecules which have entered the silicone rubber coy pound are directly proportional to the concentration Lo of the halogenated hydrocarbon in the surrounding environment.
Since the second coating, along with the pass-vatPd first coating, constitutes the dielectric within the electric field of the interdigitated capacitor, change in the second coating results in changes in the capacitor capacitance. By the introduction of the gas molecules into the second coating, the dielectric of the material in the electric field of the inter-digitated capacitor is changed resulting in a change in capacitance which is detected and measured as hereinafter explained.
Many elastomers and lipid substances, such as bottle rubber polyurethane rubber, and fatty acid esters, have the characteristics permitting the entrance of halogenated hydrocarbons into these compounds and may be substituted for the silicone rubber.
It is also noted that there are other compounds such as certain polymers and cellulose acetate which may by used as the second coating 20 and which act as permeability membranes to fluids, both gases and liquids, permitting constituents of the fluid to selectively burrow or penetrate into the membrane and changing the dielectric constant of the membrane coating Selectively, as used through this application, means that the membranes, or layer which is selective, discriminates between the material to be detected and some other materials which are present in the environment.

Considering now interdigitated capacitor 31 of Figure 2.b., the second coating 40 comprises a coating which will exhibit an effect upon interdigitated gape-Satyr 31 to match the effect of temperature upon interdigitated capacitor 11. eye most obvious coating then would be the same as the coaxing 20 on inter-digitated capacitor 11, providing of course, that the coating 40 be modified such that it is non-responsive to the environment other than to reflect change in temperature. Such modification is accomplished by placing a non-reactive barrier between the environment and second coating 40, the barrier being substantially out of the electric field of the interdigitated gape-Satyr. A thin sheet of glass 42 was selected, the glass so sized that it extended well beyond the finger interdigitations such that the fringe of second coating 40 exposed to the environment below glass plate 42 is well beyond any measurable part of the electric field.
As a consequence, this interdigitated capacitor is only sensitive to changes in temperature and thus pro-vises a temperature reference for comparison with the first interdigitated capacitor 11.
The silicone rubber second coating 20 and 40 of the interdigitated capacitor 11 and 31 in the pro-furred embodiment is placed upon the first coating 18 and 38 by an eye-dropper, by brushing on, painting on, gluing, or other appropriate means. Layer 20 is ~L2:~2~

allowed to dry, cure, or set in accordance with its normal application procedure. Glass plate 42 is placed upon second coating 40 permitting its adherence thereto and the coating 40 then is also permitted to dry, cure, or set in accordance with normal prove-dunes. As with the first layers, the thickness of the second layers are important because of their effect on the capacitance of the interdigitated capacitor.
Thicknesses of all layers are thus monitored by applying each layer in known amounts of material.
Referring now to Figure 3, a block schematic diagram of the electronic circuitry utilized to sense changes in capacitance of the in~erdigitated keeps-ions is shown. As indicated in Figure 3, a signal oscillator 51 generates the carrier signal which is directed to the balanced diode-quad bridge 53 of which the interdigitatPd capacitor if occupies one leg and interdigitated capacitor 31 occupies another leg.
Tests have indicated that the frequency of the carrier is not critical as satisfactory results have been obtained for frequencies in the range of 50 KHz to 12 MHz. The output of the oscillator 51 is fed back into an amplitude stabilizer 55 which regulates the oscilla-ion to insure that the carrier signal amplitude is constant. The output of the balanced diode-quad bridge 53 is directed into the low-pass filter 57 which blocks the carrier signal and outputs to the DC
amplifier 59 a slowly varying DC signal, the voltage amplitude of the DC signal being indicative of the difference between the capacitance of interdigitated capacitor 11 and interdigitated capacitor 31. The output of the DC amplifier 59 is then directed to digital voltage indicator 61 which, in the preferred embodiment, gives a visual presentation of the amplified DC signal, indicative of the change dip-furriness in capacitance.
Substantially, the electronic circuitry repro-sensed by the schematic block diagram in Figure 3 is shown in a paper by Dean R. Harrison and John Dimeff in an article entitled, "A Diode Quad Bridge Circuit For Use With Capacitance Transducers", Ames Research Center, NASA, Moffett Field, California 94035, Rev.
Sat. In strum., Vol. 44, No. 10, October 1973. Circuit design and modifications for specific purposes were made by the Applicants from the circuits shown in the above article and are within the present state of the art. As is obvious, any electronic circuit in which changes in capacitance varies an output may be utile iced, such as well known ARC timing circuits or ire-quencly dependent tuning circuits.
As indicated above, when the subject device is inserted into an environment consisting of the specie lie gas to be detected and concentration measured, the passage of the specific gas into the second coating 20 on interdigitated capacitor 11 affects the dielectric constant and thereby the capacitance of the inter-I

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digitated capacitor. The capacitance of inter-digitated capacitor 31 is only affected by change in temperature of the environment and serves as a reference capacitor and correction factor for change due to temperature effect upon the gas sensing inter-digitated capacitor if. Thus as the temperature of both capacitors move along a parallel path relative to temperature, the difference voltage sensed, amplified, and displayed on a digital indicator 61 will be reflective of only the change in capacitance of interdigitated capacitor if due to changes caused by the specific gas permeation into the outer coating 20.
Tests were conducted of the device of the pro-furred embodiment wherein the interdigitated keeps-ions if and 31 had the dimensions which have been previously indicated, the first material coating on each comprising silicon nitride of a thickness of approximately 3500 Angstroms, and the second coating on each interdigitated capacitor comprising a thin coating of Dow Corning brand Silas tic Medical Adhesive Type A. silicone rubber, Catalog No. 891, applied by firs mixing with Tulane, 50~ each by weight.
"Silas tic" is a registered trademark of the Dow Corning Corporation, Midland, Michigan. One drop of the thinned silicone rubber was dropped on each inter-digitated capacitor and then the mixture was wiped across and off the substrate. The substrate was then shaken to remove any excess silicone rubber. Over interdigitated capacitator 31 which was to be used for temperature compensation was placed a piece of microscope cover plate glass (0.006 inches (07152 mm) thick) with the glass plate extending substantially beyond the fingers of the interdigitated-capacitor.
The substrate with the two interdigitated capacitors thereon was placed into a bell jar and a vacuum pulled for one-half hour to assist in outguessing air and Tulane from the silicone rubber. Thereafter, the silicone rubber was allowed to set for three hours in a box filled with dry nitrogen. The size of the glass plate was such that the fringe of the silicone rubber immediately below the glass plate exposed to the environment was sufficiently far removed from the interdigitated capacitor 31 that any environment which may be absorbed by the silicone rubber was not close enough to thy field of interdigitated capacitor 31 as to affect its capacitance.
The tests were conducted by placing the subject device in the electrical circuit shown by the block schematic diagram of Figure 3 with the subject device in a stream of air and a halogenated hydrocarbon (Halothane) added by means of an anesthesia vaporizer.
Prior to the start of the tests, the voltage output of the preferred embodiment was placed to near zero on the digital indicator 61 by means of a voltage add-live circuit opposing the output of do amplifier 59.

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~24-This set a reference for the device being in the pro-since of dry air. The carrier frequency was set at lMHæ.

TEST 1. Temperature 4 C TEST 2. Temperature 34 C

Gas Output Gas Outwit Air 0.06 my Air 0.06 my 3% Halothane 9.62 my I Halothane 9.62 my Air 0.06 my Air 0.06 my TEST 3. Temperature 34 C

Gas Output Air 0.06 my 1% Halothane 3.21 my Air 0.06 my I ~alothane 4.81 my Air 0.06 my 3% Kalothane ~.62 my Air 0.06 my In all tests, rise time between the 10 to 90~
points was approximately one half second. There was full settling in lo seconds. Fall time between the 10 to 90% points was approximately Ox seconds, with I ID

I

full settling in 1.5 seconds.
In addition, embodiments of the device utilizing an epoxy, such as DUO LACTATE EPOXY, covering the silicon nitride first layer on the temperature sensing interdigitated capacitor 31 was also performed.
"EPOXY" is a registered trademark of the Lactate Corporation, Cleveland, Ohio. In these embodiments, a different silicone rubber was utilized, namely General Electric Rubber Type REV AYE, which was placed as a second layer on interdigitated capacitor 11 in a thickness of approximately 0.003 inch (0.076 mm).
Here tests were conducted by placing the subject device in a stream of air and different halogenated hydrocarbons added by means of an anesthesia vaporizer. Prior to the start of the tests, the device of the preferred embodiment was zeroed on the digital indicator so that no capacitance difference showed between the two interdigitated capacitors. A
selected percent of the halogenated hydrocarbons was added by the operator into the air stream and in separate tests, 15 seconds (Test 1) and 30 seconds (Test 2) were allowed for the subject devices to settle in. In Test 1 after each reading was taken for one concentration, the vaporizer placing the halogen noted hydrocarbon into the air stream was adjusted to no input of halogenated hydrocarbons into the air stream, at which time, and after 15 seconds had elapsed, the reading was again taken. In Test 2, a digital voltmeter was placed upon the output of the low frequency filter prior to the DC amplifier and the readings taken The amplifier amplifies the voltage input by a constant 26.59 to indicate a voltage reading and the reading for zero percentage halogen noted hydrocarbon is adjusted to zero on the output of the amplifier. Tests were run in Test 2 on two dip-fervent devices simultaneously.

TEST 1.

Digital Percent Indicator ~alothaneReading 0 0.~0 1 -0.60 0 0.00

2 -1.15 0 0.00

3 -1.64 0 0.00 0 0.00 2 -1.07 0 0.00 1 -0.52 0 0.00 2 -1.03 O -O .01 3 -1.63 0 0.00 3 -1.63 0 0.00 2 -1.10 0 -0.02 1 -0.58 0 -0.02 TEST 2.

Normalized Normalized Detector Digital Detector Digital Percent No. 1 Indicator No. 2 Indicator Halothane (MV)Reading~MV)Reading _ 0 11.2 0 8.2 0 1 48.8 1.00 4~.1 1.06 2 86.4 2.00 88.1 2.12 3 124.1 3.00 128.1 3.19 2 86.5 2.00 88.1 2.12 1 48.9 1.00 48.1 1.06 2 86.5 2.00 I 2.12 3 1~4.1 3.00 128.1 3.19 86.5 I 8~.1 2012 1 48.9 1~00 4801 1.06 0 11.2 0 8.1 -0.27 3 12~.0 3~00 1~8.1 3.1~
0 11.2 0 8.1 -0.27 3 124.0 3.00 128.7 3.10 0 1~.2 0 8.2 0 In addition, tests were performed for different halothane concentrations at different flow rates. In these tests, the digital indicator reading was calibrated at 3.00 for halothane in a known con-cent ration of 3%. Here, each reading was taken 15 seconds after stabilization.
In addition, other gases then halogenated hydra-carbons were also permitted to flow past the sensor and the digital indicator reading taken. In these cases, there was no movement of the digital indicator reading other than what is indicated and time was not necessary for stabilization. These results appear in Tests 4, 5 and 6, as follows:

TEST 3.

Digital Percent Flow Indicator Halothane Rate Reading I

0 5 loin 0.00 1.00 2 2.00 3 3.01 0.01 0 0.01 1.01 0 0.01 3 3.00 0 0.00 5.01 0 5 loin 0.00 0 2 loin 0.00 3 3.01 0 0.00 3 2.99 0 2 loin 0.00 0 10 loin 0.00 3 2.99 O -O . 0 1 3 2.99 o -O .01 1.00 2 2.01 3 3.01 0 10 loin 0.01 I

~30-TEST 4.

Percent Digital Nitrous Flow Indicator Oxide Rate Reading 5 loin 0.00 16.7 6 Mooney one 28.0 7 loin 0.00 37.5 8 Mooney 0.00 0 5 Mooney 0.00 TEST 5.

Percent Digital Carbon Flow Indicator Dioxide Rate Reading 0 5 Mooney 0.00 16.7 6 loin 0.00 28~0 7 loin 0.00 37.5 8 loin 0.01 0 5 Mooney 0.01 TEST 6.

Dig i tat Percent Flow Indicator Helium Rate Reading I

0 5 l/min-0.01 16.7 6 l/min-0.01 28.0 7 l/min-0.01 37.5 8 l/min0.01 0 5 l/min-0.01 Further tests were conducted with the same constants as were used in Test 1., only ethrane was substituted for halothane. Results of this test are shown below:

TEST 7.

Digital Percent Indicator Ethrane Reading 00.00 1-0.47 00.00 2-0.83 00.00 3-1.03 00.00 3-0.97 00.00 2-0.78 00.00 ~2~2~

1 -0.~5 0 0.00 2 -~.80 0 0.02 3 -1.00 0 -0.03 3 -0.99 0 -0.04 2 -~.79 0 -0.04 1 -0.46 0 -0~06 It is noted that during the tests conducted by the Applicants, the results observed on the digital volt-meters did advance to the proximity of the readings which are recorded almost instantaneously after the halogenated hydrocarbons reached the interdigitated capacitors. A similar effect is shown in the results of the authors of an article appearing in the June, 1981 issue of the IEEE Transactions on Biomedical Engineering Vol. EME-28, No. 6 at Page 459 entitled Piezoelectric Sorption Anesthetic Sensor, wherein a piezoelectric crystal was coated with different types of silicone rubber and frequency change in the crystal was observed for the reaction of halogenated hydrocar-buns in silicone rubber. The coated crystal was placed in the flow path of halogenated hydrocarbons in ox-I

gent Stops changes in gas concentrations were reflected in almost instantaneous change in the crystal frequency change. Rise time in the order of sloth second was observed for the observed crystal frequency shift to reach I of its final value. The authors reported that the curve was exponential. The observed frequency shift had reached 90% of its final value within 0.2 seconds.
Referring now to Figure 4, a top view of an alter-Nate embodiment of the subject device is illustrated.
Here, four interdigitated capacitors are detailed;
interdigi~ated capacitors 11 and 31 repeated along with added interdigitated capacitors 71 and 81, all located on the one substrate 10. While all inter-digitated capacitors might be of similar construction as concerns the interdigitated fingers and the first coatings of silicon nitride there may be some air-cumstances where different construction may be desired in order to bring the capacitances to near balance.
In the embodiment shown in Figure 4, in~erdigitated capacitor 11 utilizes an outer coating 20 comprising a compound preferentially sensitive to one constituent gas present in the mixture of gases under con-side ration, such as to gases commonly used in anesthesia procedures, for example, a halogenated hydrocarbon such as halothane. For such a halogenated hydrocar-bony a compound to be utilized for this outer coating 20 of interdigitated capacitor 11 would be General ~22~

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Electric Silicone Rubber REV AYE.
Next, second coating 40 on interdigitated keeps-ion 31 is selected to be the same as coating 20 of interdigitated capacitor 11 or other material which exhibits similar thermal properties relative to change of capacitance as does the second layer coatings of the plurality of interdigitated capacitors on substrate 10. The coating 40 is followed by glass plate 42. As earlier discussed, this interdigitated capacitor will be indicative of the change in the capacitance due to temperature changes only.
Next, outside layer 70 of interdigitated capacitor 71 is chosen to be preferentially reactive to one of the other constituents of the gas mixture environ-mint, such as in the example of gases useful in anesthesia procedures, nitrous oxide. In such case, outer layer 70 then comprises a material such as Dow Silicone Rubber DSR 319 or General Electric type GE
4524 U-lOOo These materials were selected because they exhibit the same or similar processes as do the compounds used for sensing halothane, which is believed to be the absorption of the specific gas causing a resultant swelling.
Lastly, outer coating 80 of interdigitated keeps-ion 81 comprises a material sensitive to one of the other constituents of the gas mixture desired to be sensed and measured, for example, water vapor which might be present In such a case, coating 80 compare-~2~26~

sues a material such as Dow Silicone Rubber DSR 515 B, also selected because it exhibits the same prefer en-tidally absorptive or permeability characteristics above, but for water.
As indicated in Figure 4, all interdigitated gape-Satyrs have a set of leads running to the opposite end of substrate 10 for electrical attachment to the appropriate electronics to indicate the presence of and relative level of the gases in the gas mixture Now there may be situations when, for example, two of the constituent gases in the environment are dip-fervent but closely related. This might happen in the anesthesia system suggested where two different types of halogenated hydrocarbons are employed, although this is not the usual situation. In this situation, the preferable embodiment is to utilize different highly selective permeable membrane materials as the second covering or coating on different interdigitated capacitors. These selectively permeable membranes would be permeable only by that specific gas desired to be detected and quantitated in the environment.
However, the most usual situation existing in select lively permeable membranes is that membranes permit entrance to more than one related environment gas, but each in a different, but known manner. One of the selective permeable membranes will absorb two gases in different proportions than will a second permeable membrane. Similarly, the second permeable membrane will absorb the second gas preferentially over the first gas, but the first gas will also be absorbed.
Since the permeability of one gas over another through each of the selected permeable membranes is known or can be determined easily through tests, such may be compensated as will be understood by one knowledgeable in the art, such as by a microprocessor with a look-up table. This permits extrapolation and cancellation of the minor gas effect for each material and thus per-mitt a display reading each major reaction. The microprocessor, in utilizing a look-up table refers to the table for a value which then is correlated to the true value of the major gas.
Since different silicone rubbers are permeated by different anesthesia gases in different known manners, it is readily apparent that by comparison of the out-puts of two different interdigitated capacitors, the type of gas detected can be determined. Similarly, it the operator is expecting to detect and measure one gas and another is indicated, such information is readily made apparent to the operator who may then correct the error and place the proper gas into the system.
Further, it may also be desirable to detect and measure the concentration of a third anesthesia gas in the anesthesia system, such as nitrous oxide.
Material coatings sensitive to nitrous oxide are also sensitive to halogenated hydrocarbons, although the I

relative effects of each gas are known. The process of minor gas effect cancellation is easily accomplished through known techniques in the pro-cussing of the signals in the electronic circuits such as shown in Figures 3 or I For instance, there are techniques for handling it in signal processing. One possible technique is as described above employing look-up tables. In addition, it would be possible to use polynomial approximations, or process of can-celling or differencing, or of simultaneously solving mathematical expressions setting out the known rota-tionship of the major and minor gas effect.
Referring now to Figure 5, a schematic block diagram of the proposed electrical circuitry for Utah living different interdigitated capacitor pair sets in a system such as an anesthesia system to detect and determine the concentration of four constituent gases is detailed.
First, similarly to the system shown in Figure 3 is readily seen in that the same or similar electrical and mechanical elements are used as in Figure 3. The electrical signal from oscillator 51 is fed back to amplitude stabilizer 55 and is also directed to the first of a series of the same or similarly constructed balanced diode-quad detectors Audi, the output of each being directed to a pair of interdigitated gape-Satyrs as shown Reference to each of these inter-digitated capacitors immediately follows a brief description of the remaining elements.
The output of each of the balanced diode-quad bridge detectors Audi is directed to each of a series of low pass filters aye do and then on to DC amply-liens Audi as was the case in Figure 3. From there, the signal from each DC amplifier Audi is directed to multiplexer 71 which receives the varying do signals indicative of capacitance change in each inter-digitated capacitor pair sensed. The multiplexer 71 timing is controlled by the microprocessor program so that each do signal is processed by the analog to digital converter 72 sequentially one at a time. The analog to digital converter 72 changes the relative do voltage from a specifically interrogated inter-digitated capacitor pair into a digital word represent native of the interrogated voltage Microprocessor 73 has previously been programmed with the proper matte-matinal procedures determined by known techniques from available response curves of each of the material coatings to the particular gas or gases it is prim manly selectively responsive to. The nature of the microprocessor program is to sample each inter-digitated pair and then compensate the appropriate data sets for zero offset, nonlinearities or other specific artifacts such as baking out humidity effects on the sensors used for the specific detection of the anesthesia gases.
From the microprocessor, the signals are directed 2261~

to digital indicators Audi, which may be the same or similar digital indicators as utilized in Figure 3.
Each of digital indicators Audi will indicate a value representative of the presence and concentration of a particular constituent gas of the gas mixture in which the interdigitated capacitor pair set resides.
Still referring to Figure 5, the interdigitated capacitors which are connected to each of the balanced diode-quad bridges Audi, the first set of inter-digitated capacitors 82 and I are constructed semi-laxly to those interdigitated capacitors described in Figures 1 and 2 except as follows. If it is desired that the first set of interdigitated capacitors 82 and 83 shall sense one halogenated hydrocarbon gas, then as defined in the description of Figures 1 and 2, the second coating of interdigitated capacitor 82 shall be that covering or layer selectively permeable to the first halogenated hydrocarbon gas. Interdigitated capacitor 83 then will be sensitive to temperature, and the second layer covering the first passivative layer shall be the same or similar membrane covered by a glass plate rendering the interdigitated capacitor unresponsive or passive to all gases in the environ-mint, and only responsive to change in temperature.
Similarly and continuing, the interdigitated gape-Satyrs 84 and 85 of the second balanced diode-quad bridge detector will be characterized by the second coating layer of interdigitated capacitor 84 being primarily permeable by the second halogenated hydra-carbon gas and possibly monorail permeable to the first halogenated hydrocarbon gas. This of course may be also the case of the second layer coating on inter digitated capacitor I Similarly, interdigitated capacitor 85 shall have the same or similar second coating layer followed by a shielding glass plate thereby providing a balance for interdigitated keeps-ion 84 in use with the balanced diode-quad bridge detector 53, reflecting a change only due to change in temperature. Similarly, interdigitated capacitor pair 86 and 87 are characterized by the separate response of interdigitated capacitor 86 to the presence of nitrous oxide permeating its second layer coating.
Interdigitated capacitor 87 then as similarly described above for interdigitated capacitors 83 and 85, has the same or similar second covering layer followed by a glass plate providing a balance for its respective balanced diode-quad bridge 53.
Finally interdigitated capacitor pair 88 and 89 connected to their respective balanced diode-quad bridge 53 are characterized in that interdigitated capacitor 88 responds only to water vapor by means of a second layer selectively permeable coating affected only by water vapor; and interdigitated capacitor 89, like interdigitated capacitors 83, 85, and 87, having the same or similar second covering layer followed by glass plate for balancing interdigitated capacitor 88, Lo changes only to reflect change in temperature.
Obviously, then, digital indicators Audi will each indicate the presence and level of the four constituent gases sensed for example, the first halo-jointed hydrocarbon gas, the second halogenated hydra carbon gas, nitrous oxide, and water vapor respectively.
It is realized of course that if all inter digitated capacitors are located in proximity to each other, and there is good reason for believing this may be done for compactness of the detection system, the same results above could be achieved through the use of five interdigitated capacitors, one each for the four constituent gases to be sensed and one for the temperature compensation for all other interdigitated capacitors, providing of course that the effect of temperature upon the second layer covering material is the same or substantially the same as the other second layer membranes over the expected temperature range.
In such cases, to avoid an excess amount of electronic circuitry to substitute a changing value of keeps-lance for the temperature sensing interdigitated gape-sweetness in each of the balanced diode-quad bridges, it is necessary to place a fixed capacitor in each of the balanced diode-quad bridge detectors 53 for comparison with their respective interdigitated capacitor. Then the resulting output of the balanced diode-quad bridge detectors temperature may be compensated at the I

multiplexer 71 or microprocessor 73 by detecting the change in the electrical signal received from the interdigitated capacitor sensing change in temperature only.
Referring now to Figure 6, a block schematic diagram is shown employing the subject device in a typical circle anesthesia delivery system where the inspiratory anesthetic concentration directed to the patient for breathing is monitored, and the expiatory anesthetic concentration breathed out by the patient is also monitored.
With the elements shown in Figure 6, the anesthe-list initiates the process by making preliminary adjustments on the anesthetic vaporizer 91 to inject the different constituents of gas into the system.
The anesthetic gases enter the system circle, first moving to the left and passing one-way valve 95 and then to enter the patient's respiratory system. The expiatory gases exhausted by the patient then pass the second one-way valve 94 located in the return side of the circle to the point where the gas path is intersected by pop-off valve 96 and reservoir bag 93.
From there, the expiatory exhaust continues to C2 absorber 97 to complete the cycle and mix with newly incoming anesthesia gases. Note that the circle system allows rebreathing of gases by the patient, but the placement of one-way valves ensures that recur-quilted gases must pass through the C02 absorber before reaching the patient. Note also, that the system input and output are the gas deliver system and the pop-off valve respectively The pop-off valve 96 prevents high pressure build-ups and is itself con-netted to an exhaust or scavenging system (not shown).
The reservoir bag 93 allows for high flow during inspiration and expiration as well as providing an indicator of spontaneous breathing and allowing assistance by the anesthetist by squeezing the bag.
If a high flow is delivered by the gas delivery system, then pop-off valve I will be open much of the time and the rebreathed gas will make only a small contribution to the concentration of anesthetic deli vexed to the patient. However, if a low flow is deli-vexed to the patient, pop-off valve 96 will be close much of the time, and the rebreathed gas will have a significant effect on the concentration of anesthetic delivered to the patient. There are two major Apple cations of the subject device in anesthesia gas monk-toning.
When the device 1 is placed in location "A", it provides an indication of anesthetic gas concentration delivered by the gas delivery system. This use of anesthetic gas sensor device 1 provides a necessary safety check for proper function of the gas delivery system.
When the device 1 is placed in location 'IT'', it provides an indicator of anesthetic gas concentrations inhaled and exhaled by the patient. Since water vapor is present at this location, the device 1 will be pro Tided for such sensing. Anesthetic gas concentration measurements of inhaled and exhaled gases are useful for several reasons. As mentioned previously, when low flow rates are used, the rebreathed gases contra-byte to the inhaled anesthetic concentration.
Therefore, it is desirable to know the difference bet-wren concentrations at "A" and "B" for optimum anesthetic management. The concentration at the end of the expiration cycle is related to the arterial blood concentration and hence to the depth of anesthe-Sian Thus, measurements of inspiratory and expiatory anesthetic concentrations can provide the clinician with valuable information regarding the patient uptake of anesthetics. In addition, this data provides basis for calculation of end tidal respiratory volume and cardiac output. It should be noted that there are many other clinical and research applications for anesthetic gas concentration monitors.
In other experiments it has been found possible to utilize the basic construction shown in Figures 1, pa, and 2b, with the second coating upon the sensing interdigitated capacitor 11 a membrane which will pass into its interior selected ions. An example ox such is a membrane of Valinomycin. For testing purposes, both interdigitated capacitors on the substrate were utilized to sense the particular particle. In this Al case, a Valinomycin layer for placement upon the Swahili cone nitride layers 18 and I of both interdigitated capacitors 11 and 31 was prepared by mixing 10 my of Valinomycin with ml of I PVC (in Tetrahydrofuran) and 0.24 ml Dioctylphthalote DUPE). The ~alinomycin solution, in an amount of 2 micro liters, was dropped upon each silicon nitride layer with a micro syringe.
Thereafter, the substrate was placed in a dry nitrogen filled box for 24 hours.
As Valinomycin is selectively permeable to Potassium ions, and does prefer Potassium over sodium by about two to one, a test of the sensor was per-formed by placing it into various concentrations of Nail and Clue made by diluting known standards. Six ml of separate Nail and Clue solutions were placed in mini-beakers and the substrate inserted. Results were recorded starting with the most dilute solution first.
The temperature of all solutions was made equal and kept constant in all tests. By careful monitoring of the solution temperatures, it was possible to replace the usual temperature sensing interdigitated keeps-ions with external variable capacitors in the balanced diode-quad circuits. This was done for both inter-digitated capacitors on the substrate. The texts were then repeated under the same conditions utilizing a second pair of interdigitated capacitors prepared the same way and the same test solution used. These results are labeled as Test II.

~2~2~

TEST I TEST II

Interdigitated Interdigi~ated Standard Capacitor Capacitor Solutions 11 31 11 31 100 my Nail +1.3159+1.4130+1~4281 +1.4288 10 my Nikolai -0.8985-1.4098-1.4171 I my Nail -OWE 253 5 my Nikolai -1.2600-1.4248-1.4288 3~3 my Nail -1.4141-1.3515-1.4288 -1.4321 1.67 my Nail -1.4202-1.39431.4337 -1~4355 1 my Nikolai -1.4044-1.4340-1.4355 100 my CLUE 11.4377~1.4549~1.4546 10 my CLUE - .7350-1.3958-1.4061 6.6 my CLUE - .9721-1.4145-1.4214 5 my CLUE -1.1590-1.4219-1.4272 3.3 my CLUE -1.3012 1.69 my CLUE -1.4175-1.3883-1.4321 -1.4343 1 my RCL-1.4218 -1.4009-1.4337-1.4354 DO HO -1.4245 -1.4115-1.4358-1.4372 Within approximately two seconds after the inter-digitated capacitors had been immersed in each respect live solution, the values recorded were reached. The results above are relatively linear from the very weak solutions to the solution strength of 10 my of Nail I

and CLUE, going from the greatest negative towards a zero value. Between 10 my solution strength to 100 my of Nail and CLUE, the results cross the zero voltage value to a positive value.
It is also obvious that there are many variations of Applicants' device which reside in the basic invent lion wherein the presence and concentration of gases, particles, molecules, compounds, or the like, in other fluid environments which may be detected and con-cent ration measured.
For example, referring now to Figure 7, apparatus is shown for detection and measurement of con-cent ration of various ions in sample solutions. More specifically, apparatus 100 shown in cross-sectional view in Figure 7 details container 102 constructed having two wells to contain the various constituents of the apparatus on one side of the container is a well of known volume filled with a fluid 104, such as deionized water, adapted to resolve the ion to be detected, the fluid surrounding the interdigitated capacitors 106 and 108. These interdigitated keeps-ions represented as squares have the same preliminary base construction as disclosed earlier, i.e., the substrate, the electrically conductive metallic strips upon the substrate which form the plates ox the gape-Satyr, and the first passivated insulation layer covering the metal conductive capacitor plates upon the substrate. The substrate is so positioned that Jo the electrical leads 110 and 112 connecting with the interdigitated capacitors emerge from the well for connection to the electronic capacitance measuring instruments as described in Figure 3. The usual second covering is not placed upon the interdigitated capacitor 106 first covering, but instead at a distance as detailed below. Interdigitated capacitor 108 was however covered with a second coating material impervious to the fluid, for example, an Proxy.
Separating the two wells of liquid is the second layer of interdigitated capacitor 106, an ion select live membrane 114 which is not permeable to the deionized water, but is permeable to one or more selected ions. The membrane is placed in a liquid-tight relationship with the sides of the container 102 to prevent fluid leakage between the wells. In come monkeyshine with membrane 114, but opposite the deionized water is the sample solution 116 which con-twins, or is believed to contain, the ion or ions which are desired to be detected and concentration measured.
Lastly, a pair of electrodes 118 and 122 are con-netted to a voltage source, electrode 11~ connected to the positive pole of battery 120 and electrode 122 to the negative pole of battery 120. As shown, electrode 118 is in electrical communication with the sample solution 116 and electrode 122 the deionized water 104. The purpose of the electrodes 118 and 122 con-~2~L2~

nective with their battery 120 is to place an electric eel potential across the two fluid solutions, 116 and 104, in order to electrically attract ions of the proper polarity where positive) through the ion select live membrane 114, providing of course, the ions are of the type passed by membrane 114. Obviously, this is a means to accelerate specific ions from the sample solution 116 into the deionized water 104. Natural migration would also occur in absence of an electric field, however, this can take an extremely long time Upon the movement of the specific ions from soul-lion 116 into solution 104, the dielectric constant of the liquid surrounding the interdigitated capacitor 106 will be changed from a fluid free of ions into a fluid with specific ions in solution Such a change in the capacitance of interdigitated capacitor 106 due to the change of the dielectric constant of the fluid immediately surrounding interdigitated capacitor ln6 is detected by the electronic apparatus attached to leads 110 and 112 and detailed in schematic block diagram of Figure 3. The epoxy coating on inter-digitated capacitor 108 serves to keep the deionized water with the ions in solution sufficiently far away that the ions do not affect the electric field in the capacitor dielectric, and thus any changes in its capacitance will be due to changes in temperature.
Tests have been conducted utilizing the above embodiments for sensing the presence of and measuring ED

the concentration of Sodium and Potassium ions using solutions of Sodium Chloride and Potassium Chloride for solution 116 as follows. Since no second material layer was placed over the silicon nitride of inter-digitated capacitor 106, the membrane 114 acted as the necessary particle selective mechanism for permitting the particular sought ions to come into proximity of the interdigitated capacitor 106 electric field.
Membrane 114 was prepared to pass Potassium ions by permitting a solution containing Valinomycin to dry upon a cellulose acetate sheet sealed in liquid-tight fashion to the sides of the container 102 with an appropriate non-reactive, passive adhesive. The Valinomycin membrane was prepared by mixing together 10 my Valinomycin with 4 ml 5% polyvinyl chloride (in tetrahydrofuran) and 0.24 ml Dioctylphthalate (DROP).
The solution was placed on the cellulose acetate and allowed to dry for 24 hours.
The interdigitated capacitor 108 which has the silicon nitride covering followed by the epoxy covering reflects only change in capacitance due to changes in the temperature of the environment solution 104 and is used as a correction factor for the change of capacitance of interdigitated capacitor 106 due to temperature effects while it senses the added charged ions in the surrounding dielectric material.
Silver wire electrodes 118 and 122 were coated with Silver Chloride Equal volume solutions of Nail and Clue were each prepared to a concentration of 10-2 molar. The solutions were then mixed.
The conditions of the test were that the well on each side of membrane 114 contained three millimeters of solution. The solution surrounding the inter-digitated capacitor 106 was deionized water. The driving potential was 0~5 volts and the solution 104 was continually stirred.
The solution of Nail and Clue was placed in the well shown containing liquid 116. The output reading went negative at a slope of approximately 00018 volt per hour reaching a maximum negative value in 11 hours. Thereafter, the digital voltmeter moved post-live at a slope approximating 0.020 volt per hour for approximately 20 hours.
After the tests were completed, solution on both sides of the membrane 114 were tested with a flame photometer indicating that there still remained No and K ions in the well in which they were originally added, and that there was a predominance of ions over No ions in the well containing the interdigitated capacitor sensor.
The tests which were conducted upon the inter-digitated capacitors utilizing ionized solutions used solutions of rather weak concentrations. It has been determined that the invention will detect and measure the concentration of ions in highly concentrated ionized solution. However, it has been found necessary in such cases to compensate for the resultant increased capacitance, primarily because the balanced diode-quad bridge tends to saturate due to the vast difference in the capacitance of the sensing interdigitated capacitor in the presence of a large concentration of ions and the epoxy coated or other-wise modified temperature sensing interdigitated gape-Satyr. For example, it has been determined that the capacitance of the basic interdigitated capacitor, normally in the range of 15~20 pi, may increase to as much as 200 to 300 pi in the presence of highly con-cent rated ions In order therefore to utilize the temperature come sensating interdigitated capacitor in the electronic circuit which has been employed, it is necessary to modify the circuit configuration. To accomplish this, two balanced diode-quad bridges may be employed. One bridge circuit is used to monitor the temperature sensing interdigitated capacitor; the corresponding reference capacitor is a fixed capacitor of approxima-tell the same value as the temperature sensing inter-digitated capacitor. The DO voltage output is then proportional to the temperature of the fluid.
A second diode-quad bridge is used in like manner with the interdigitated capacitor which measures the ionic concentration of the fluid. A standard variable capacitor, used with or without a plurality of fixed capacitors, is axed as a reference capacitor for the ~2Z~

second diode-quad bridge. The reference capacitor can be changed to approximate the value ox sensing inter-digitated capacitor. DO voltage from the second circuit would be proportional to the concentration in the solution for a narrow concentration range.
The DO voltage from the two circuits can then be electronically combined so that the resultant voltage is compensated for temperature charges.
It would also be possible to utilize other types of electronic measuring circuits to electronically accommodate the large changes in capacitance.
A second method devised by the Inventors is to utilize the temperature sensing interdigitated keeps-ion as a fixed ion concentration reference To that end, the temperature sensing interdigitated capacitor was surrounded with a liquid holding pod containing a fluid, either gas or liquid, having a known con-cent ration of ions. Naturally/ for this construction, the epoxy second layer on the temperature sensing interdigitated capacitor would not be present and the temperature sensing interdigitated capacitor would have a fixed value of capacitance for any one them-portray. Then, this capacitance can be utilized as a reference in the balanced diode-quad circuit as a them-portray sensing reference to the ion sensing inter digitated capacitor.
To that end, referring now to Figure 9, a cross-sectional view is shown of the now modified them-I

-54~

portray sensing interdigitated capacitor 310. Here construction of the basis interdigitated capacitor is the same as had been previously described, namely the substrate 10, the interdigitated fingers 34 and 36 formed upon the substrate, and the first insulative and passivating layer 38, nominally of silicon nitride 3B. Following that, pod 420, made of any non-porous material such as a plastic, surrounds and totally encapsulates the interdigitated capacitor and its first layer coating 38, pod 420 adapted to reside in an encircling groove 410 and adhering to substrate 10 by means of an adhesive first placed in groove 410.
It is intended that pod 420 completely seal the inter-digitated capacitor shown therein from the surrounding environment. Now interiorly to pod 420 is a standard or reference fluid, either liquid or gas, containing ions in solution. As such, interdigitated capacitor 310 now serves as a temperature sensing reference to the ion sensing interdigitated capacitor, it being anticipated that the interdigitated capacitor shown in Figure 9 would be placed in the same environment as the ion sensing interdigitated capacitor, and in the same or similar construction as earlier defined, e.g., side by side on the substrate or proximate to the ion sensing interdigitated capacitor.
It is obvious that pod 420 covering material, while being non-porous, should have a relatively high thermal conductivity in order that heat may be ~2~L2~

transmitted across the pod efficiently so that fluid 400 interiorly will reflect the temperature of the surrounding environment.
It is noted that the construction of the them-portray sensing interdigitated capacitor 310 of Figure 9 need not be confined to ion sensing applique-lions, buy in fact could be utilized in its same manner in a specific substance detection and sensing system such as in the anesthesia sensing system In such case, all that would need be done would be the addition of the same or similar second layer coating 40 of silicone rubber or similar substance, as shown by the dotted line in Figure 9, and fluid 400 interiorly then to temperature sensing in~erdigitated capacitor 310 being a gas or liquid with a known con-cent ration of that particular substance or material.
In all cases, adjustments Jo accommodate the modified temperature sensing interdigitated capacitor new capacitance is done in the electronics portion of the system.
For example, it has been determined that when Utah-living the system with the interdigitated capacitors shown in Figures pa and 2b, the ion, or other material, sensing interdigitated capacitor 11 will increase its capacitance over the temperature sensing interdigitated capacitor 31 with the increase of the presence of the ion or particular material. The reading then upon the digital indicator 61 may be positive, both the interdigitated capacitors 11 and 31 being approximately equal in capacitance and thereby indicating a substantially zero voltage output dip-furriness. However, if the temperature sensing inter-digitated capacitor 310 has been reloaded with a fluid 400 containing irons or the particular substance to be sensed, initially the ion sensing interdigitated capacitor will have, in most instances, a smaller capacitance than the temperature sensing inter-digitated capacitor and the output reading of digital indicator 61 would be negative. However, as the pro-since of ions, or specific material is increased around the sensing interdigitated capacitor its gape-sweetness will increase, making the output of the digit tat indicator 61 less negative and eventually, once the environment takes on the same concentration of ions or other material as fluid 400 in the pod 4~0 of interdigitated capacitor 310, then a zero point will be reached at which time the environment exactly matches the concentration of fluid 400.
Quite aside from using a well of deionized water to quantitate an ion, it is possible to use a fluid with a known concentration of an ion surrounding the interdigitated capacitor to quantitate a complement such as a counter-ion in the sample solution on the opposite side of the membrane. For example, the fluid with the known concentration of Potassium Chloride surrounds the interdigitated capacitor and the rate at which the Potassium ion escapes by permeating the membrane can be measured. The counter-ion on the opposite side of the membrane may be an iodine, fluorine, or bromide ion. It would be evident to one skilled in the art that the counter ion should effect lively compete; that it, if the ion surrounding the interdigitated capacitor is in the form of a compound with a counter-ion that is different from the counter-ion to be quantitated, the reaction kinetics of the two counter-ions with regard to the ion should be appropriately balanced.
Further, it is obvious from the above that pod 420 of Figure 9 previously described may also be used to quantitate a counter-ion in a surrounding solution by using an ion permeable membrane for the pod 4200 The pod would be however, placed over the ion sensing and concentration measuring interdigitated capacitor, rather than the temperature sensing interdigitated capacitor. It is also obvious that this embodiment prior to test should be stored in a container with the same fluid as is in the pod to prevent escape of the ion from the pod.
Referring now to Figure 8, a cross-sectional view of the ion detection and concentration measuring device of Figure 7 is shown in a slightly modified embodiment to show a device which may be suspended into a container filled with a solution which is to be tested for a specific ion. In Figure 8, starting at Sue the top, circular disk 130 is shown in cross-section having firstly a its outer periphery, electrically conductive annular ring 132~ Outside of annular ring 132 is ion selective membrane 134 which in its embody-mint takes substantially the shape of an open-mouthed bag, an open container, a cup or the like. The pun pose is to provide a holding means for a known volume of fluid 138 r such as deionized water interiorly to the bag together with the interdigitated capacitors, the membrane bag being sealed then at its mouth against any surrounding solution. This membrane nest-dyes on the outer periphery of inner annular ring 132, which then is encompassed at the area of annular ring 132 by an electrically conductive outer annular ring 136. The relationship between the inner peripheral surface of outer annular ring foe, the sides of the membrane bag 14, and the outer peripheral surface of annular ring 132 is such as to place the connection in a water-tight configuration holding the deionized water interiorly to membrane bag 134.
Continuing, interiorly to membrane bag 134 is deionized water 138 which fills the bag completely.
Attached to the underside of circular disk 130 is the interdigitated capacitor substrate 140 which has in this example two interdigitated capacitors 142 and 144 located thereon. Again the construction of the inter-digitated capacitors 142 and 144 follows the construe-lion used in Figure 7, namely that the interdigitated 2~q~

I

capacitor 142 is first covered by a first thin pass-voting layer of silicon nitride so that it is still receptive to any free-floating ions which may infuse into the deionized water 138~ while the other inter-digitated capacitor 144 is covered with a second epoxy coating completely impervious to the resulting soul-lion surrounding it. This epoxy layer covers the silicon nitride layer immediately below it and as a result interdigitated capacitor 144 senses only gape-sweetness changes due to temperature.
Penetrating through the circular disk 130 are the leads to each of the interdiyitated capacitors 142 and 144 as well as the electrical leads connecting annular ring 132 and annular ring 136 to the electrical bat tory 146 pinwheel Again here an electrical potent trial is placed across the membrane, which of course must be electrically non-conductive, in order to acre-legate correct polarity ions through the membrane from the surrounding solution and into deionized water 138.
It is realized that the ion selective membrane 134 must be impervious to water and to solution surrounding the bag since to be otherwise would permit the deionized water 138 stored interiorly to leak out at all times, both during storage of the apparatus and during the test times.
Clearly, although the invention has been demonstrated for tensing certain materials in two fluids, the invention may be utilized with other types ~%~

of membranes such as lipid Baylor and the like to sense a variety of substances in a variety of fluids as would be obvious to one skilled in the art.
It is realized of course that the capacitors which have been shown and described in the embodiments have been interdigitated type capacitors situated upon a flat insulative substrate. However, it is obvious that interdigitated type capacitors of the type described above are not the only capacitors which may be utilized since the embodiment of the invention is the change in capacitance between the electrodes of the capacitor by the influx of the specific material into the dielectric material of the capacitor. In addition, it is also obvious that the capacitors which may be utilized in the invention need not have two electrodes creating the electric field but may have two or more electrodes cretins the electric field as is well known in the art.
While a preferred Embodiment of the device, together with alternate embodiments, have been shown and described, it will be understood that there is no intent to limit the invention by such disclosure, but rather it is intended to cover all modifications and alternate constructions falling within the spirit and the scope of the invention as defined in the appended claims.

Claims (20)

WE CLAIM:

1. A capacitive detection device for sensing the presence of and measuring the concentration of a spe-cific non-aqueous material in a fluid, the device comprising:
a capacitor having a plurality of spaced apart electrically conductive electrodes, said electrodes adapted to create a capacitive electric field therebetween;
a first material layer covering said electrically conductive electrodes; and a second material layer covering said first material layer, said second material layer being per-meable to the specific material whereby the specific material may be sensed and its concentration measured as a consequence of its entering the electric field between said electrodes and thereby changing the capa-citance between said electrodes.

2. The capacitive detection device defined in Claim 1 wherein said first material layer defines an electrically insulative material passive to the fluid.

3. The capacitive detection device as defined in Claim 2 wherein said second material layer is selec-tively permeable to the specific non-aqueous material to be sensed and concentration measured.

4. The capacitive detection device as defined in Claim 3 wherein said second material layer is a sili-cone rubber selectively permeable to anesthesia gases.

The capacitive detection device as defined in Claim 3 wherein said second material layer is Valinomycin selectively permeable to Potassium ions.

6. The capacitive detection device as defined in Claim 3 wherein said capacitor defines an inter-digitated capacitor having a pair of electrodes situate upon a flat substrate, said substrate being passive, and being impermeable to the fluid and to the specific non-aqueous material.

7. The capacitive detection device as defined in claim 3 further comprising:
a second capacitor adapted to be compared with said irst capacitor, said second capacitor having a plurality of spaced apart electrically conductive electrodes, said electrodes adapted to create a capa-citive electric field therebetween;
a first electrically insulative material layer passive to the fluid and covering said second capaci-tor electrically conductive electrodes; and a second material layer covering said first material layer upon said second capacitor, said first material layer and said second material layer having thermal properties similar to said first and said second layer of said first capacitor respectively whereby said second capacitor is compared with said first capacitor to eliminate effects of temperature upon said first capacitor.

8. The capacitive detection device as defined in claim 7 wherein said second capacitor second material layer is passive and impermeable to the fluid, and impermeable to the specific non-aqueous material to be sensed and measured.

9. The capacitive detection device as defined in claim 7 wherein said second capacitor first material layer and second material layer are identical to said first capacitor first material layer and second material layer respectively, and further comprising:
an impermeable barrier covering said second capa-citor second material layer whereby said second capa-citor second material layer may not be permeated by the specific material sought to be sensed and measured.

10. The capacitive detection device as defined in claim 9 wherein said first capacitor and said second capacitor define interdigitated capacitors, each said interdigitated capacitor having a pair of electrodes situated upon an insulative substrate, said substrate passive and impermeable to the fluid.

11. The capacitive detection device as defined in claim 7 wherein said second capacitor first material layer and second material layer are identical to said first capacitor first material layer and second material layer respectively, and further comprising:
a covering pod adapted to enclose said second capacitor first and second material layers, said covering pod adapted to contain a fluid having a known concentration of the specific material whose presence is to be sensed and concentration measured whereby said second capacitor provides a reference for a spe-cific concentration of the specific non-aqueous material for comparison with said first capacitor.

12. The capacitive detection device as defined in claim 3 further comprising:
a second capacitor adapted to be compared with said first capacitor, said second capacitor having a plurality of spaced apart electrically conductive electrodes adapted to create a capacitive electric field therebetween;
a first electrically insulative material layer passive to the fluid covering said second capacitor electrically conductive electrodes; and a covering pod adapted to enclose said second capacitor first material layer, said covering pod adapted to contain a fluid having a known con-centration of the specific material whose presence is to be sensed and concentration measured whereby said second capacitor provides a reference for specific concentration of the specific material for comparison with said first capacitor.

13. A capacitive detection device for sensing the presence of and measuring the concentration of a spe-cific non-aqueous material or a complement of the spe-cific non-aqueous material in a fluid, the device comprising:
a capacitor having a plurality of spaced apart electrically conductive electrodes, said electrodes adapted to create a capacitive electric field therebetween;
a first material layer covering said electrically conductive electrodes; and a second material layer spatially located from said first material layer, said second layer com-municating with the fluid and permeable to the speci-fic non-aqueous material whereby the specific material may be sensed and concentration measured as a con-sequence of its entering or leaving the electric field between said electrodes and thereby changing its capa-citance between said electrodes.

14. The capacitive detection device as defined in Claim 13 further comprising a second fluid surrounding said capacitor first material layer, said second fluid in communication with said second material layer to permit the passage of the specific non-aqueous material from the permeable second material layer to the proximity of the first material layer and thereby to enter the electric field between said electrodes.

15. The capacitive detection device as defined in Claim 14 wherein said first material layer defines an electrically insulative material passive to said second fluid.

16. The capacitive detection device as defined in Claim 15 wherein said second material layer is selec-tively permeable to the specific non-aqueous material which is to be detected and concentration measured, said second material layer additionally impervious to said second fluid and thereby holds said second fluid in retention.

17. The capacitive detection device as defined in Claim 16 further comprising:
a second capacitor also surrounded by said second fluid and adapted to be compared with said first capa-citor, said second capacitor having a pair of spaced apart electrically conductive electrodes, said electrodes adapted to create a capacitive electric field therebetween;
a first electrically insulative material layer covering said electrically conductive electrodes; and a second material layer covering said first material layer upon said second capacitor, said second layer passive to said second fluid and impermeable to the specific material to be sensed and measured whereby said second capacitor may be compared with said first capacitor to detect and measure change in said first capacitor capacitance due to the presence of the specific non-aqueous material in the second fluid.

18. The capacitive detection device as defined in Claim 17 wherein said first capacitor and said second capacitor defines interdigitated capacitors, each said interdigitated capacitor having two electrodes situate upon a flat electrically insulative substrate, said substrate passive to the fluid, and impermeable to the fluid and the specific non-aqueous material to be sensed and concentration measured.

19. The capacitive detection device as defined in Claim 16 further comprising:
a second capacitor also surrounded by said second fluid and adapted to be compared with said first capa-citor, said second capacitor having a pair of spaced apart electrically conductive electrodes, said electrodes adapted to create a capacitive electric field therebetween;

a first electrically insulative material layer covering said electrically conductive electrodes, said first material layer passive to said surrounding second fluid; and a covering pod adapted to enclose said second capacitor first material layer, said covering pod adapted to contain a portion of said second fluid having a known concentration of the specific material whose presence is to be sensed and concentration measured whereby said second capacitor provides a reference for a known concentration of the specific material for comparison with said first capacitor.

20. The capacitive detection device as defined in Claim 16 wherein said second fluid contains the speci-fic non-aqueous material which is to be detected and concentration measured, said second material layer adapted to permit the permeation of the specific non-aqueous material from said second fluid to the first fluid whereby a complement of the specific material in the first fluid may be detected and concentration measured by measuring the change of capacitance due to the loss of the specific non-aqueous material in said second fluid.